JP2008502498A5 - - Google Patents

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Publication number
JP2008502498A5
JP2008502498A5 JP2007527725A JP2007527725A JP2008502498A5 JP 2008502498 A5 JP2008502498 A5 JP 2008502498A5 JP 2007527725 A JP2007527725 A JP 2007527725A JP 2007527725 A JP2007527725 A JP 2007527725A JP 2008502498 A5 JP2008502498 A5 JP 2008502498A5
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JP
Japan
Prior art keywords
arm
section
drive
upper arm
scalar
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Application number
JP2007527725A
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English (en)
Japanese (ja)
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JP5264171B2 (ja
JP2008502498A (ja
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Priority claimed from PCT/US2005/020304 external-priority patent/WO2005123565A2/en
Publication of JP2008502498A publication Critical patent/JP2008502498A/ja
Publication of JP2008502498A5 publication Critical patent/JP2008502498A5/ja
Application granted granted Critical
Publication of JP5264171B2 publication Critical patent/JP5264171B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2007527725A 2004-06-09 2005-06-09 基板搬送装置 Expired - Fee Related JP5264171B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US57857104P 2004-06-09 2004-06-09
US60/578,571 2004-06-09
PCT/US2005/020304 WO2005123565A2 (en) 2004-06-09 2005-06-09 Dual sacra arm

Publications (3)

Publication Number Publication Date
JP2008502498A JP2008502498A (ja) 2008-01-31
JP2008502498A5 true JP2008502498A5 (https=) 2012-05-31
JP5264171B2 JP5264171B2 (ja) 2013-08-14

Family

ID=35510311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007527725A Expired - Fee Related JP5264171B2 (ja) 2004-06-09 2005-06-09 基板搬送装置

Country Status (4)

Country Link
US (5) US8376685B2 (https=)
JP (1) JP5264171B2 (https=)
KR (1) KR101398665B1 (https=)
WO (1) WO2005123565A2 (https=)

Families Citing this family (66)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070269297A1 (en) 2003-11-10 2007-11-22 Meulen Peter V D Semiconductor wafer handling and transport
US7458763B2 (en) 2003-11-10 2008-12-02 Blueshift Technologies, Inc. Mid-entry load lock for semiconductor handling system
US10086511B2 (en) 2003-11-10 2018-10-02 Brooks Automation, Inc. Semiconductor manufacturing systems
US8376685B2 (en) 2004-06-09 2013-02-19 Brooks Automation, Inc. Dual scara arm
US7374525B2 (en) * 2006-01-25 2008-05-20 Protedyne Corporation SCARA-type robotic system
US9117859B2 (en) * 2006-08-31 2015-08-25 Brooks Automation, Inc. Compact processing apparatus
US8950998B2 (en) * 2007-02-27 2015-02-10 Brooks Automation, Inc. Batch substrate handling
CN103862463B (zh) * 2007-05-31 2017-08-15 应用材料公司 延伸双scara机械手连接装置的伸出距离的方法及设备
JP5416104B2 (ja) 2007-06-27 2014-02-12 ブルックス オートメーション インコーポレイテッド セルフベアリングモータ用位置フィードバック
KR101659931B1 (ko) 2007-06-27 2016-09-26 브룩스 오토메이션 인코퍼레이티드 다차원 위치 센서
CN101855811B (zh) 2007-06-27 2013-11-20 布鲁克斯自动化公司 具有提升能力和减少的齿槽特性的电机定子
US9752615B2 (en) 2007-06-27 2017-09-05 Brooks Automation, Inc. Reduced-complexity self-bearing brushless DC motor
US8283813B2 (en) 2007-06-27 2012-10-09 Brooks Automation, Inc. Robot drive with magnetic spindle bearings
WO2009012396A2 (en) * 2007-07-17 2009-01-22 Brooks Automation, Inc. Substrate processing apparatus with motors integral to chamber walls
KR101778519B1 (ko) * 2009-01-11 2017-09-15 어플라이드 머티어리얼스, 인코포레이티드 전자 디바이스 제조시에 기판을 이송하기 위한 로봇 시스템, 장치 및 방법
JP5480562B2 (ja) * 2009-08-26 2014-04-23 日本電産サンキョー株式会社 産業用ロボット
US8079459B2 (en) * 2009-11-19 2011-12-20 The Unites States Of America As Represented By The Secretary Of The Army Transport apparatus
CN103237634B (zh) * 2010-10-08 2016-12-14 布鲁克斯自动化公司 同轴驱动的真空机器人
US9623555B2 (en) 2010-11-10 2017-04-18 Brooks Automation, Inc. Dual arm robot
US8918203B2 (en) 2011-03-11 2014-12-23 Brooks Automation, Inc. Substrate processing apparatus
WO2012166136A1 (en) * 2011-06-02 2012-12-06 Empire Technology Development Llc Actuator with joints
CN102709221A (zh) * 2011-06-28 2012-10-03 清华大学 一种平面三自由度晶圆传输装置
US9076829B2 (en) * 2011-08-08 2015-07-07 Applied Materials, Inc. Robot systems, apparatus, and methods adapted to transport substrates in electronic device manufacturing
US10569430B2 (en) * 2011-09-16 2020-02-25 Persimmon Technologies Corporation Low variability robot
US9202733B2 (en) 2011-11-07 2015-12-01 Persimmon Technologies Corporation Robot system with independent arms
US9401296B2 (en) 2011-11-29 2016-07-26 Persimmon Technologies Corporation Vacuum robot adapted to grip and transport a substrate and method thereof with passive bias
CN103208447A (zh) * 2012-01-13 2013-07-17 诺发系统公司 双臂真空机械手
TWI725303B (zh) * 2012-02-10 2021-04-21 美商布魯克斯自動機械公司 基材處理設備
US9117865B2 (en) * 2012-04-12 2015-08-25 Applied Materials, Inc. Robot systems, apparatus, and methods having independently rotatable waists
US10679883B2 (en) * 2012-04-19 2020-06-09 Intevac, Inc. Wafer plate and mask arrangement for substrate fabrication
WO2014008009A1 (en) * 2012-07-05 2014-01-09 Applied Materials, Inc Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems
CN103802104B (zh) * 2012-11-08 2016-05-18 沈阳新松机器人自动化股份有限公司 一种驱动装置
US9190306B2 (en) * 2012-11-30 2015-11-17 Lam Research Corporation Dual arm vacuum robot
WO2014087879A1 (ja) * 2012-12-04 2014-06-12 タツモ株式会社 リンク式搬送ロボット
KR102465277B1 (ko) * 2013-01-18 2022-11-09 퍼시몬 테크놀로지스 코포레이션 로봇, 전자 장치 처리 시스템, 기판 이송 방법
US11353084B2 (en) * 2013-03-15 2022-06-07 Clearmotion Acquisition I Llc Rotary actuator driven vibration isolation
CN111489987A (zh) * 2013-03-15 2020-08-04 应用材料公司 基板沉积系统、机械手移送设备及用于电子装置制造的方法
US9548231B2 (en) * 2013-06-05 2017-01-17 Persimmon Technologies, Corp. Robot and adaptive placement system and method
US10134621B2 (en) * 2013-12-17 2018-11-20 Brooks Automation, Inc. Substrate transport apparatus
US11587813B2 (en) 2013-12-17 2023-02-21 Brooks Automation Us, Llc Substrate transport apparatus
TWI657524B (zh) * 2013-12-17 2019-04-21 美商布魯克斯自動機械公司 基板搬運設備
US9724834B2 (en) 2014-01-05 2017-08-08 Applied Materials, Inc. Robot apparatus, drive assemblies, and methods for transporting substrates in electronic device manufacturing
KR102402324B1 (ko) * 2014-01-28 2022-05-26 브룩스 오토메이션 인코퍼레이티드 기판 이송 장치
US10269606B2 (en) * 2014-05-05 2019-04-23 Persimmon Technologies Corporation Two-link arm trajectory
EP3238885B1 (en) * 2014-12-26 2022-05-04 Kawasaki Jukogyo Kabushiki Kaisha Dual-arm robot
JP1534869S (https=) * 2015-01-30 2015-10-13
WO2016189740A1 (ja) * 2015-05-28 2016-12-01 株式会社安川電機 ロボットシステム、教示治具及び教示方法
TWI724971B (zh) 2016-06-28 2021-04-11 美商應用材料股份有限公司 包括間隔上臂與交錯腕部的雙機器人以及包括該者之系統及方法
JP6747136B2 (ja) * 2016-07-22 2020-08-26 東京エレクトロン株式会社 基板処理装置
GB201701246D0 (en) * 2017-01-25 2017-03-08 Fives Landis Ltd Machine tools and methods of operation thereof
US10651067B2 (en) * 2017-01-26 2020-05-12 Brooks Automation, Inc. Method and apparatus for substrate transport apparatus position compensation
JP7196101B2 (ja) * 2017-02-15 2022-12-26 パーシモン テクノロジーズ コーポレイション 複数のエンドエフェクタを備えた材料取り扱いロボット
US10421196B2 (en) * 2017-07-26 2019-09-24 Daihen Corporation Transfer apparatus
CN109994358B (zh) * 2017-12-29 2021-04-27 中微半导体设备(上海)股份有限公司 一种等离子处理系统和等离子处理系统的运行方法
JP7183635B2 (ja) * 2018-08-31 2022-12-06 東京エレクトロン株式会社 基板搬送機構、基板処理装置及び基板搬送方法
KR101931290B1 (ko) 2018-09-12 2018-12-20 주식회사 싸이맥스 7축 이송로봇
EP3672040A1 (en) * 2018-12-17 2020-06-24 Nexperia B.V. Device for enabling a rotating and translating movement by means of a single motor; apparatus and system comprising such a device
JP1644506S (https=) * 2019-03-27 2019-10-28
JP1650339S (https=) * 2019-03-27 2020-01-20
JP1644505S (https=) * 2019-03-27 2019-10-28
JP1644507S (https=) * 2019-03-27 2019-10-28
US11850742B2 (en) 2019-06-07 2023-12-26 Applied Materials, Inc. Dual robot including splayed end effectors and systems and methods including same
JP6880519B2 (ja) * 2019-11-11 2021-06-02 株式会社安川電機 ロボットシステム、ロボットの制御方法、半導体製造システム
US11937890B2 (en) * 2019-11-14 2024-03-26 Intuitive Surgical Operations, Inc. Direct drive for mechanical arm assembly
KR102705682B1 (ko) * 2021-10-04 2024-09-12 니덱 인스트루먼츠 가부시키가이샤 산업용 로봇
USD997223S1 (en) * 2023-06-07 2023-08-29 Primate Robot Hong Kong Co., Limited Robot

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US669434A (en) 1900-08-21 1901-03-05 William D Adams Machine for splitting ears of corn.
US3411644A (en) 1966-07-07 1968-11-19 Duchess Corp Boat loader and carrier
GB1202279A (en) * 1966-11-18 1970-08-12 Massey Ferguson Services Nv Improvements in material handling devices which include a pivotable boom
US3550800A (en) 1968-12-16 1970-12-29 W E Robinson Boat carrier and launcher for pickup trucks
US3734321A (en) 1970-01-13 1973-05-22 D Long Truck load bed boat loader and carrier
US3648866A (en) 1970-05-18 1972-03-14 Harold M Slown Hoist and frame for boat and trailer
US3732998A (en) 1971-09-28 1973-05-15 Raymond Lee Organization Inc Boat rack
US3843002A (en) 1972-07-11 1974-10-22 C Pihlgren Boat and trailer loading device
US3840133A (en) 1973-05-31 1974-10-08 A Berg Boat trailer loading and supporting device
US3877594A (en) 1973-11-21 1975-04-15 Donald L Coakley Car top boat carrier with loader and unloader
US3871540A (en) 1973-12-12 1975-03-18 Smittys Easy Tow Device for loading and carrying boats on pickup trucks
US3972433A (en) 1974-08-07 1976-08-03 Reed Henry W Self loading and carrying apparatus
US4212580A (en) 1978-06-27 1980-07-15 Fluck Ronald O Boat launcher for truck bed
US4239438A (en) 1978-12-04 1980-12-16 Everson Clifford R Device for lifting and carrying loads on top of pickup trucks
US4274788A (en) 1980-01-17 1981-06-23 Sutton Luther M Vehicle mounted carriage and elevating apparatus
US4420165A (en) 1980-11-12 1983-12-13 Goodin William K Multi-trailer assembly
JPH0825151B2 (ja) * 1988-09-16 1996-03-13 東京応化工業株式会社 ハンドリングユニット
US4983206A (en) * 1990-03-16 1991-01-08 Frazier-Simplex, Inc. Batch charger for glass furnace
US5069595A (en) 1990-08-06 1991-12-03 Smith Douglas J Loader and carrier apparatus for boat and trailer
US5108248A (en) 1991-01-09 1992-04-28 Murrill Robert E Apparatus for loading boat trailers on truck beds
US5123799A (en) 1991-07-01 1992-06-23 Breazeale Lloyd E Trailer loading apparatus
US5513946A (en) * 1991-08-27 1996-05-07 Canon Kabushiki Kaisha Clean robot
US5447408A (en) 1992-03-05 1995-09-05 Smith; Hank Boat trailer overhead carrying device
US5511928A (en) 1994-11-04 1996-04-30 Ellis; Robert S. Boat loading device
US5609462A (en) 1995-06-07 1997-03-11 Reimer; Arnald E. Boat loader and carrier
US5765444A (en) 1995-07-10 1998-06-16 Kensington Laboratories, Inc. Dual end effector, multiple link robot arm system with corner reacharound and extended reach capabilities
JPH10163296A (ja) 1996-11-27 1998-06-19 Rootsue Kk 基板搬送装置
JPH10329069A (ja) * 1997-03-31 1998-12-15 Daihen Corp 搬送システムの制御方法
US6034000A (en) * 1997-07-28 2000-03-07 Applied Materials, Inc. Multiple loadlock system
US6155768A (en) * 1998-01-30 2000-12-05 Kensington Laboratories, Inc. Multiple link robot arm system implemented with offset end effectors to provide extended reach and enhanced throughput
JPH11284049A (ja) 1998-03-31 1999-10-15 Mecs Corp 薄型基板搬送ロボット
JPH11300663A (ja) * 1998-04-24 1999-11-02 Mecs Corp 薄型基板搬送装置
US6056504A (en) * 1998-06-05 2000-05-02 Applied Materials, Inc. Adjustable frog-leg robot
US5921741A (en) 1998-08-26 1999-07-13 Heimgartner; Ernie Trailer and loading device
US6485250B2 (en) * 1998-12-30 2002-11-26 Brooks Automation Inc. Substrate transport apparatus with multiple arms on a common axis of rotation
JP2002158272A (ja) * 2000-11-17 2002-05-31 Tatsumo Kk ダブルアーム基板搬送装置
US20020098072A1 (en) * 2001-01-19 2002-07-25 Applied Materials, Inc. Dual bladed robot apparatus and associated method
US20030086778A1 (en) 2001-11-07 2003-05-08 Smith Robert L Apparatus for loading cargo into vehicles
US8376685B2 (en) * 2004-06-09 2013-02-19 Brooks Automation, Inc. Dual scara arm

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