JP2008502498A5 - - Google Patents

Download PDF

Info

Publication number
JP2008502498A5
JP2008502498A5 JP2007527725A JP2007527725A JP2008502498A5 JP 2008502498 A5 JP2008502498 A5 JP 2008502498A5 JP 2007527725 A JP2007527725 A JP 2007527725A JP 2007527725 A JP2007527725 A JP 2007527725A JP 2008502498 A5 JP2008502498 A5 JP 2008502498A5
Authority
JP
Japan
Prior art keywords
arm
section
drive
upper arm
scalar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007527725A
Other languages
English (en)
Japanese (ja)
Other versions
JP5264171B2 (ja
JP2008502498A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2005/020304 external-priority patent/WO2005123565A2/en
Publication of JP2008502498A publication Critical patent/JP2008502498A/ja
Publication of JP2008502498A5 publication Critical patent/JP2008502498A5/ja
Application granted granted Critical
Publication of JP5264171B2 publication Critical patent/JP5264171B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2007527725A 2004-06-09 2005-06-09 基板搬送装置 Expired - Fee Related JP5264171B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US57857104P 2004-06-09 2004-06-09
US60/578,571 2004-06-09
PCT/US2005/020304 WO2005123565A2 (en) 2004-06-09 2005-06-09 Dual sacra arm

Publications (3)

Publication Number Publication Date
JP2008502498A JP2008502498A (ja) 2008-01-31
JP2008502498A5 true JP2008502498A5 (enExample) 2012-05-31
JP5264171B2 JP5264171B2 (ja) 2013-08-14

Family

ID=35510311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007527725A Expired - Fee Related JP5264171B2 (ja) 2004-06-09 2005-06-09 基板搬送装置

Country Status (4)

Country Link
US (5) US8376685B2 (enExample)
JP (1) JP5264171B2 (enExample)
KR (1) KR101398665B1 (enExample)
WO (1) WO2005123565A2 (enExample)

Families Citing this family (66)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7458763B2 (en) 2003-11-10 2008-12-02 Blueshift Technologies, Inc. Mid-entry load lock for semiconductor handling system
US10086511B2 (en) 2003-11-10 2018-10-02 Brooks Automation, Inc. Semiconductor manufacturing systems
US20070269297A1 (en) 2003-11-10 2007-11-22 Meulen Peter V D Semiconductor wafer handling and transport
KR101398665B1 (ko) 2004-06-09 2014-05-26 브룩스 오토메이션 인코퍼레이티드 이중 스카라 아암
US7374525B2 (en) * 2006-01-25 2008-05-20 Protedyne Corporation SCARA-type robotic system
US9117859B2 (en) * 2006-08-31 2015-08-25 Brooks Automation, Inc. Compact processing apparatus
US8950998B2 (en) * 2007-02-27 2015-02-10 Brooks Automation, Inc. Batch substrate handling
KR101366651B1 (ko) * 2007-05-31 2014-02-25 어플라이드 머티어리얼스, 인코포레이티드 이중 스카라 로봇 링키지의 리치를 연장하기 위한 방법 및 장치
US8283813B2 (en) 2007-06-27 2012-10-09 Brooks Automation, Inc. Robot drive with magnetic spindle bearings
US7834618B2 (en) 2007-06-27 2010-11-16 Brooks Automation, Inc. Position sensor system
WO2009003186A1 (en) 2007-06-27 2008-12-31 Brooks Automation, Inc. Multiple dimension position sensor
CN101855811B (zh) 2007-06-27 2013-11-20 布鲁克斯自动化公司 具有提升能力和减少的齿槽特性的电机定子
US9752615B2 (en) 2007-06-27 2017-09-05 Brooks Automation, Inc. Reduced-complexity self-bearing brushless DC motor
KR20180014247A (ko) * 2007-07-17 2018-02-07 브룩스 오토메이션 인코퍼레이티드 챔버 벽들에 일체화된 모터들을 갖는 기판 처리 장치
US8784033B2 (en) * 2009-01-11 2014-07-22 Applied Materials, Inc. Robot systems, apparatus and methods for transporting substrates
JP5480562B2 (ja) * 2009-08-26 2014-04-23 日本電産サンキョー株式会社 産業用ロボット
US8079459B2 (en) * 2009-11-19 2011-12-20 The Unites States Of America As Represented By The Secretary Of The Army Transport apparatus
WO2012048346A1 (en) 2010-10-08 2012-04-12 Brooks Automation, Inc. Coaxial drive vacuum robot
WO2012064949A1 (en) * 2010-11-10 2012-05-18 Brooks Automation, Inc. Dual arm robot
US8918203B2 (en) 2011-03-11 2014-12-23 Brooks Automation, Inc. Substrate processing apparatus
US9267585B2 (en) * 2011-06-02 2016-02-23 Empire Technology Development Llc Actuator with joints
CN102709221A (zh) * 2011-06-28 2012-10-03 清华大学 一种平面三自由度晶圆传输装置
US9076829B2 (en) * 2011-08-08 2015-07-07 Applied Materials, Inc. Robot systems, apparatus, and methods adapted to transport substrates in electronic device manufacturing
WO2013040401A1 (en) * 2011-09-16 2013-03-21 Persimmon Technologies, Corp. Low variability robot
US9202733B2 (en) 2011-11-07 2015-12-01 Persimmon Technologies Corporation Robot system with independent arms
US9401296B2 (en) 2011-11-29 2016-07-26 Persimmon Technologies Corporation Vacuum robot adapted to grip and transport a substrate and method thereof with passive bias
US8961099B2 (en) * 2012-01-13 2015-02-24 Novellus Systems, Inc. Dual arm vacuum robot with common drive pulley
TWI725303B (zh) * 2012-02-10 2021-04-21 美商布魯克斯自動機械公司 基材處理設備
JP2015514019A (ja) * 2012-04-12 2015-05-18 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 独立して回転可能なウェストを有するロボットシステム、装置、および方法
US10679883B2 (en) * 2012-04-19 2020-06-09 Intevac, Inc. Wafer plate and mask arrangement for substrate fabrication
KR102153608B1 (ko) * 2012-07-05 2020-09-08 어플라이드 머티어리얼스, 인코포레이티드 전자 디바이스 제조 시스템들에서 기판들을 운송하기 위한 붐 구동 장치, 멀티-아암 로봇 장치, 전자 디바이스 프로세싱 시스템들, 및 방법들
CN103802104B (zh) * 2012-11-08 2016-05-18 沈阳新松机器人自动化股份有限公司 一种驱动装置
US9190306B2 (en) * 2012-11-30 2015-11-17 Lam Research Corporation Dual arm vacuum robot
KR102068082B1 (ko) * 2012-12-04 2020-01-20 고쿠리츠켄큐카이하츠호진 상교기쥬츠 소고켄큐쇼 링크식 반송 로봇
WO2014113364A1 (en) * 2013-01-18 2014-07-24 Persimmon Technologies, Corp. Robot having arm with unequal link lengths
CN105164799B (zh) * 2013-03-15 2020-04-07 应用材料公司 基板沉积系统、机械手移送设备及用于电子装置制造的方法
US11353084B2 (en) * 2013-03-15 2022-06-07 Clearmotion Acquisition I Llc Rotary actuator driven vibration isolation
KR102308221B1 (ko) * 2013-06-05 2021-10-01 퍼시몬 테크놀로지스 코포레이션 로봇 및 적응형 배치 시스템 및 방법
US10134621B2 (en) * 2013-12-17 2018-11-20 Brooks Automation, Inc. Substrate transport apparatus
US11587813B2 (en) 2013-12-17 2023-02-21 Brooks Automation Us, Llc Substrate transport apparatus
TWI657524B (zh) * 2013-12-17 2019-04-21 美商布魯克斯自動機械公司 基板搬運設備
JP6550391B2 (ja) 2014-01-05 2019-07-24 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 電子デバイス製造において基板を搬送するためのロボット装置、駆動アセンブリ、及び方法
CN106463438B (zh) * 2014-01-28 2019-09-10 布鲁克斯自动化公司 基板运输设备
US10269606B2 (en) * 2014-05-05 2019-04-23 Persimmon Technologies Corporation Two-link arm trajectory
WO2016103302A1 (ja) * 2014-12-26 2016-06-30 川崎重工業株式会社 双腕ロボット
JP1534869S (enExample) * 2015-01-30 2015-10-13
WO2016189740A1 (ja) * 2015-05-28 2016-12-01 株式会社安川電機 ロボットシステム、教示治具及び教示方法
TWI724971B (zh) * 2016-06-28 2021-04-11 美商應用材料股份有限公司 包括間隔上臂與交錯腕部的雙機器人以及包括該者之系統及方法
JP6747136B2 (ja) * 2016-07-22 2020-08-26 東京エレクトロン株式会社 基板処理装置
GB201701246D0 (en) * 2017-01-25 2017-03-08 Fives Landis Ltd Machine tools and methods of operation thereof
US10651067B2 (en) * 2017-01-26 2020-05-12 Brooks Automation, Inc. Method and apparatus for substrate transport apparatus position compensation
CN110505945B (zh) * 2017-02-15 2024-01-19 柿子技术公司 具有多个末端执行器的物料操纵机器人
US10421196B2 (en) * 2017-07-26 2019-09-24 Daihen Corporation Transfer apparatus
CN109994358B (zh) * 2017-12-29 2021-04-27 中微半导体设备(上海)股份有限公司 一种等离子处理系统和等离子处理系统的运行方法
JP7183635B2 (ja) * 2018-08-31 2022-12-06 東京エレクトロン株式会社 基板搬送機構、基板処理装置及び基板搬送方法
KR101931290B1 (ko) 2018-09-12 2018-12-20 주식회사 싸이맥스 7축 이송로봇
EP3672040A1 (en) * 2018-12-17 2020-06-24 Nexperia B.V. Device for enabling a rotating and translating movement by means of a single motor; apparatus and system comprising such a device
JP1650339S (enExample) * 2019-03-27 2020-01-20
JP1644506S (enExample) * 2019-03-27 2019-10-28
JP1644507S (enExample) * 2019-03-27 2019-10-28
JP1644505S (enExample) * 2019-03-27 2019-10-28
US11850742B2 (en) 2019-06-07 2023-12-26 Applied Materials, Inc. Dual robot including splayed end effectors and systems and methods including same
JP6880519B2 (ja) * 2019-11-11 2021-06-02 株式会社安川電機 ロボットシステム、ロボットの制御方法、半導体製造システム
US11937890B2 (en) * 2019-11-14 2024-03-26 Intuitive Surgical Operations, Inc. Direct drive for mechanical arm assembly
KR102705682B1 (ko) * 2021-10-04 2024-09-12 니덱 인스트루먼츠 가부시키가이샤 산업용 로봇
USD997223S1 (en) * 2023-06-07 2023-08-29 Primate Robot Hong Kong Co., Limited Robot

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US669434A (en) 1900-08-21 1901-03-05 William D Adams Machine for splitting ears of corn.
US3411644A (en) 1966-07-07 1968-11-19 Duchess Corp Boat loader and carrier
GB1202279A (en) * 1966-11-18 1970-08-12 Massey Ferguson Services Nv Improvements in material handling devices which include a pivotable boom
US3550800A (en) 1968-12-16 1970-12-29 W E Robinson Boat carrier and launcher for pickup trucks
US3734321A (en) 1970-01-13 1973-05-22 D Long Truck load bed boat loader and carrier
US3648866A (en) 1970-05-18 1972-03-14 Harold M Slown Hoist and frame for boat and trailer
US3732998A (en) 1971-09-28 1973-05-15 Raymond Lee Organization Inc Boat rack
US3843002A (en) 1972-07-11 1974-10-22 C Pihlgren Boat and trailer loading device
US3840133A (en) 1973-05-31 1974-10-08 A Berg Boat trailer loading and supporting device
US3877594A (en) 1973-11-21 1975-04-15 Donald L Coakley Car top boat carrier with loader and unloader
US3871540A (en) 1973-12-12 1975-03-18 Smittys Easy Tow Device for loading and carrying boats on pickup trucks
US3972433A (en) 1974-08-07 1976-08-03 Reed Henry W Self loading and carrying apparatus
US4212580A (en) 1978-06-27 1980-07-15 Fluck Ronald O Boat launcher for truck bed
US4239438A (en) 1978-12-04 1980-12-16 Everson Clifford R Device for lifting and carrying loads on top of pickup trucks
US4274788A (en) 1980-01-17 1981-06-23 Sutton Luther M Vehicle mounted carriage and elevating apparatus
US4420165A (en) 1980-11-12 1983-12-13 Goodin William K Multi-trailer assembly
JPH0825151B2 (ja) * 1988-09-16 1996-03-13 東京応化工業株式会社 ハンドリングユニット
US4983206A (en) * 1990-03-16 1991-01-08 Frazier-Simplex, Inc. Batch charger for glass furnace
US5069595A (en) 1990-08-06 1991-12-03 Smith Douglas J Loader and carrier apparatus for boat and trailer
US5108248A (en) 1991-01-09 1992-04-28 Murrill Robert E Apparatus for loading boat trailers on truck beds
US5123799A (en) 1991-07-01 1992-06-23 Breazeale Lloyd E Trailer loading apparatus
US5513946A (en) * 1991-08-27 1996-05-07 Canon Kabushiki Kaisha Clean robot
US5447408A (en) 1992-03-05 1995-09-05 Smith; Hank Boat trailer overhead carrying device
US5511928A (en) 1994-11-04 1996-04-30 Ellis; Robert S. Boat loading device
US5609462A (en) 1995-06-07 1997-03-11 Reimer; Arnald E. Boat loader and carrier
US5765444A (en) 1995-07-10 1998-06-16 Kensington Laboratories, Inc. Dual end effector, multiple link robot arm system with corner reacharound and extended reach capabilities
JPH10163296A (ja) 1996-11-27 1998-06-19 Rootsue Kk 基板搬送装置
JPH10329069A (ja) * 1997-03-31 1998-12-15 Daihen Corp 搬送システムの制御方法
US6034000A (en) * 1997-07-28 2000-03-07 Applied Materials, Inc. Multiple loadlock system
US6155768A (en) * 1998-01-30 2000-12-05 Kensington Laboratories, Inc. Multiple link robot arm system implemented with offset end effectors to provide extended reach and enhanced throughput
JPH11284049A (ja) 1998-03-31 1999-10-15 Mecs Corp 薄型基板搬送ロボット
JPH11300663A (ja) * 1998-04-24 1999-11-02 Mecs Corp 薄型基板搬送装置
US6056504A (en) * 1998-06-05 2000-05-02 Applied Materials, Inc. Adjustable frog-leg robot
US5921741A (en) 1998-08-26 1999-07-13 Heimgartner; Ernie Trailer and loading device
US6485250B2 (en) * 1998-12-30 2002-11-26 Brooks Automation Inc. Substrate transport apparatus with multiple arms on a common axis of rotation
JP2002158272A (ja) * 2000-11-17 2002-05-31 Tatsumo Kk ダブルアーム基板搬送装置
US20020098072A1 (en) * 2001-01-19 2002-07-25 Applied Materials, Inc. Dual bladed robot apparatus and associated method
US20030086778A1 (en) 2001-11-07 2003-05-08 Smith Robert L Apparatus for loading cargo into vehicles
KR101398665B1 (ko) 2004-06-09 2014-05-26 브룩스 오토메이션 인코퍼레이티드 이중 스카라 아암

Similar Documents

Publication Publication Date Title
EP1757433B1 (en) Compact fiber placement apparatus
CN110505945A (zh) 具有多个末端执行器的物料操纵机器人
JP2012176489A (ja) 関節ロボット手首
JP2005507679A5 (enExample)
US20100206120A1 (en) Parallel robot provided with wrist section having three degrees of freedom
US20120280527A1 (en) Reconfigurable end-effector attachable to a robotic arm
GB2464147A (en) Three Degree-of-Freedom Parallel Spherical Mechanism for Payload Orienting Applications
US20140356049A1 (en) Reconfigurable robot end-effector assembly
KR20020079469A (ko) 로보트 암기구
CN112043390B (zh) 手术器械、从操作设备及手术机器人
JP2001508158A (ja) ２個の要素を相対運動させる装置
JP4278180B2 (ja) 工作物保持台のための急速据付および解放作動装置
JP3203245U (ja) 関節ロボット手首
JP6549845B2 (ja) パラレルリンクロボット
JP2000288971A (ja) ロボットハンド
JP3804780B2 (ja) ロボットアーム及びロボット
CN213641171U (zh) 手术器械、从操作设备及手术机器人
JP2012176488A (ja) 関節ロボット手首
CN116138887A (zh) 锁定组件、后端驱动座及用于腹腔镜手术的机械臂
JP4852101B2 (ja) 対象物を旋回させるための装置
JP4682378B2 (ja) ダブルアームおよびそれを備えたロボット
US10272562B2 (en) Parallel kinematics robot with rotational degrees of freedom
CN111469121A (zh) 混联型五自由度机械臂
JP2009095940A5 (enExample)
JP4132257B2 (ja) 物品の方向変換整列装置