JP2008502498A5 - - Google Patents

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Publication number
JP2008502498A5
JP2008502498A5 JP2007527725A JP2007527725A JP2008502498A5 JP 2008502498 A5 JP2008502498 A5 JP 2008502498A5 JP 2007527725 A JP2007527725 A JP 2007527725A JP 2007527725 A JP2007527725 A JP 2007527725A JP 2008502498 A5 JP2008502498 A5 JP 2008502498A5
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JP
Japan
Prior art keywords
arm
section
drive
upper arm
scalar
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JP2007527725A
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English (en)
Japanese (ja)
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JP2008502498A (ja
JP5264171B2 (ja
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Priority claimed from PCT/US2005/020304 external-priority patent/WO2005123565A2/en
Publication of JP2008502498A publication Critical patent/JP2008502498A/ja
Publication of JP2008502498A5 publication Critical patent/JP2008502498A5/ja
Application granted granted Critical
Publication of JP5264171B2 publication Critical patent/JP5264171B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2007527725A 2004-06-09 2005-06-09 基板搬送装置 Expired - Lifetime JP5264171B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US57857104P 2004-06-09 2004-06-09
US60/578,571 2004-06-09
PCT/US2005/020304 WO2005123565A2 (en) 2004-06-09 2005-06-09 Dual sacra arm

Publications (3)

Publication Number Publication Date
JP2008502498A JP2008502498A (ja) 2008-01-31
JP2008502498A5 true JP2008502498A5 (enExample) 2012-05-31
JP5264171B2 JP5264171B2 (ja) 2013-08-14

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ID=35510311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007527725A Expired - Lifetime JP5264171B2 (ja) 2004-06-09 2005-06-09 基板搬送装置

Country Status (4)

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US (5) US8376685B2 (enExample)
JP (1) JP5264171B2 (enExample)
KR (1) KR101398665B1 (enExample)
WO (1) WO2005123565A2 (enExample)

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