JP2008273729A - 浮上ユニット - Google Patents

浮上ユニット Download PDF

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Publication number
JP2008273729A
JP2008273729A JP2007122678A JP2007122678A JP2008273729A JP 2008273729 A JP2008273729 A JP 2008273729A JP 2007122678 A JP2007122678 A JP 2007122678A JP 2007122678 A JP2007122678 A JP 2007122678A JP 2008273729 A JP2008273729 A JP 2008273729A
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JP
Japan
Prior art keywords
chamber
fluid
suction
pressurized fluid
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007122678A
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English (en)
Japanese (ja)
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JP2008273729A5 (enExample
Inventor
Yoji Ise
養治 伊勢
Toshio Nakamori
俊雄 中森
Minoru Sato
穣 佐藤
Kazunari Suzuki
一成 鈴木
Kosuke Yamaguchi
浩右 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Convum Ltd
Original Assignee
Myotoku Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Myotoku Ltd filed Critical Myotoku Ltd
Priority to JP2007122678A priority Critical patent/JP2008273729A/ja
Publication of JP2008273729A publication Critical patent/JP2008273729A/ja
Publication of JP2008273729A5 publication Critical patent/JP2008273729A5/ja
Pending legal-status Critical Current

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2007122678A 2007-05-07 2007-05-07 浮上ユニット Pending JP2008273729A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007122678A JP2008273729A (ja) 2007-05-07 2007-05-07 浮上ユニット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007122678A JP2008273729A (ja) 2007-05-07 2007-05-07 浮上ユニット

Publications (2)

Publication Number Publication Date
JP2008273729A true JP2008273729A (ja) 2008-11-13
JP2008273729A5 JP2008273729A5 (enExample) 2010-06-24

Family

ID=40052221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007122678A Pending JP2008273729A (ja) 2007-05-07 2007-05-07 浮上ユニット

Country Status (1)

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JP (1) JP2008273729A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104176497A (zh) * 2013-05-23 2014-12-03 先进科技新加坡有限公司 使用气体流动固定物体的传送设备
KR101820544B1 (ko) 2010-02-01 2018-01-19 에이에스엠 인터내셔널 엔.브이. 동적 유체 밸브를 구비하는 기판 처리 장치 및 방법
TWI893262B (zh) * 2021-01-07 2025-08-11 日商迪思科股份有限公司 加工裝置及被加工物之搬出方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57186484A (en) * 1981-04-25 1982-11-16 Hauni Werke Koerber & Co Kg Conveyor for article of tobacco industry
JP2001358206A (ja) * 2000-06-12 2001-12-26 Toray Eng Co Ltd 基板の冷却方法およびその装置
JP2004331265A (ja) * 2003-05-01 2004-11-25 Olympus Corp 浮上ユニット及び基板検査装置
JP2006143580A (ja) * 2004-11-22 2006-06-08 Ngk Insulators Ltd 接合体及びその製造方法
JP2006306611A (ja) * 2005-05-02 2006-11-09 Sumitomo Heavy Ind Ltd 搬送物浮上ユニット、搬送物浮上装置、及びステージ装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57186484A (en) * 1981-04-25 1982-11-16 Hauni Werke Koerber & Co Kg Conveyor for article of tobacco industry
JP2001358206A (ja) * 2000-06-12 2001-12-26 Toray Eng Co Ltd 基板の冷却方法およびその装置
JP2004331265A (ja) * 2003-05-01 2004-11-25 Olympus Corp 浮上ユニット及び基板検査装置
JP2006143580A (ja) * 2004-11-22 2006-06-08 Ngk Insulators Ltd 接合体及びその製造方法
JP2006306611A (ja) * 2005-05-02 2006-11-09 Sumitomo Heavy Ind Ltd 搬送物浮上ユニット、搬送物浮上装置、及びステージ装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101820544B1 (ko) 2010-02-01 2018-01-19 에이에스엠 인터내셔널 엔.브이. 동적 유체 밸브를 구비하는 기판 처리 장치 및 방법
CN104176497A (zh) * 2013-05-23 2014-12-03 先进科技新加坡有限公司 使用气体流动固定物体的传送设备
TWI893262B (zh) * 2021-01-07 2025-08-11 日商迪思科股份有限公司 加工裝置及被加工物之搬出方法

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