JP2008256519A - 多点水晶温度測定装置 - Google Patents

多点水晶温度測定装置 Download PDF

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Publication number
JP2008256519A
JP2008256519A JP2007098707A JP2007098707A JP2008256519A JP 2008256519 A JP2008256519 A JP 2008256519A JP 2007098707 A JP2007098707 A JP 2007098707A JP 2007098707 A JP2007098707 A JP 2007098707A JP 2008256519 A JP2008256519 A JP 2008256519A
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Japan
Prior art keywords
crystal
temperature
frequency
measuring device
temperature measuring
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JP2007098707A
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Japanese (ja)
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JP2008256519A5 (https=
Inventor
Yasushi Saito
靖 斉藤
Yasushi Nakada
泰 中田
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Tokyo Denpa Co Ltd
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Tokyo Denpa Co Ltd
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Priority to JP2007098707A priority Critical patent/JP2008256519A/ja
Publication of JP2008256519A publication Critical patent/JP2008256519A/ja
Publication of JP2008256519A5 publication Critical patent/JP2008256519A5/ja
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JP2007098707A 2007-04-04 2007-04-04 多点水晶温度測定装置 Pending JP2008256519A (ja)

Priority Applications (1)

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JP2007098707A JP2008256519A (ja) 2007-04-04 2007-04-04 多点水晶温度測定装置

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JP2007098707A JP2008256519A (ja) 2007-04-04 2007-04-04 多点水晶温度測定装置

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JP2008256519A true JP2008256519A (ja) 2008-10-23
JP2008256519A5 JP2008256519A5 (https=) 2010-05-06

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JP2007098707A Pending JP2008256519A (ja) 2007-04-04 2007-04-04 多点水晶温度測定装置

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011137738A (ja) * 2009-12-28 2011-07-14 Fukuda Crystal Laboratory 多点温度測定装置
JP2012032194A (ja) * 2010-07-29 2012-02-16 Masato Tanabe 水晶温度計測用プローブおよび水晶温度計測装置
JP2012189336A (ja) * 2011-03-08 2012-10-04 Furuya Kinzoku:Kk 温度測定装置
CN114910714A (zh) * 2022-05-12 2022-08-16 东南大学 一种基于奇异点的高灵敏度电荷传感器及其使用方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5540966A (en) * 1978-09-18 1980-03-22 Toshiba Corp Multiplex temperature measuring method and its unit
JPS6098323A (ja) * 1983-11-02 1985-06-01 Toyo Commun Equip Co Ltd 生体内温度測定用プロ−ブ
JP2004140167A (ja) * 2002-10-17 2004-05-13 Dainippon Screen Mfg Co Ltd 基板の温度測定方法、基板熱処理装置における設定温度の補正方法および基板熱処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5540966A (en) * 1978-09-18 1980-03-22 Toshiba Corp Multiplex temperature measuring method and its unit
JPS6098323A (ja) * 1983-11-02 1985-06-01 Toyo Commun Equip Co Ltd 生体内温度測定用プロ−ブ
JP2004140167A (ja) * 2002-10-17 2004-05-13 Dainippon Screen Mfg Co Ltd 基板の温度測定方法、基板熱処理装置における設定温度の補正方法および基板熱処理装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011137738A (ja) * 2009-12-28 2011-07-14 Fukuda Crystal Laboratory 多点温度測定装置
JP2012032194A (ja) * 2010-07-29 2012-02-16 Masato Tanabe 水晶温度計測用プローブおよび水晶温度計測装置
JP2012189336A (ja) * 2011-03-08 2012-10-04 Furuya Kinzoku:Kk 温度測定装置
CN114910714A (zh) * 2022-05-12 2022-08-16 东南大学 一种基于奇异点的高灵敏度电荷传感器及其使用方法
CN114910714B (zh) * 2022-05-12 2024-02-02 东南大学 一种基于奇异点的高灵敏度电荷传感器及其使用方法

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