JP2008256519A5 - - Google Patents
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- Publication number
- JP2008256519A5 JP2008256519A5 JP2007098707A JP2007098707A JP2008256519A5 JP 2008256519 A5 JP2008256519 A5 JP 2008256519A5 JP 2007098707 A JP2007098707 A JP 2007098707A JP 2007098707 A JP2007098707 A JP 2007098707A JP 2008256519 A5 JP2008256519 A5 JP 2008256519A5
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- temperature measuring
- measuring device
- frequency
- constituted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims 13
- 238000001514 detection method Methods 0.000 claims 2
- 239000000523 sample Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007098707A JP2008256519A (ja) | 2007-04-04 | 2007-04-04 | 多点水晶温度測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007098707A JP2008256519A (ja) | 2007-04-04 | 2007-04-04 | 多点水晶温度測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008256519A JP2008256519A (ja) | 2008-10-23 |
| JP2008256519A5 true JP2008256519A5 (https=) | 2010-05-06 |
Family
ID=39980227
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007098707A Pending JP2008256519A (ja) | 2007-04-04 | 2007-04-04 | 多点水晶温度測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2008256519A (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5341746B2 (ja) * | 2009-12-28 | 2013-11-13 | 株式会社福田結晶技術研究所 | 多点温度測定装置 |
| JP4678892B1 (ja) * | 2010-07-29 | 2011-04-27 | 眞人 田邉 | 水晶温度計測用プローブおよび水晶温度計測装置 |
| JP2012189336A (ja) * | 2011-03-08 | 2012-10-04 | Furuya Kinzoku:Kk | 温度測定装置 |
| CN114910714B (zh) * | 2022-05-12 | 2024-02-02 | 东南大学 | 一种基于奇异点的高灵敏度电荷传感器及其使用方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5540966A (en) * | 1978-09-18 | 1980-03-22 | Toshiba Corp | Multiplex temperature measuring method and its unit |
| JPS6098323A (ja) * | 1983-11-02 | 1985-06-01 | Toyo Commun Equip Co Ltd | 生体内温度測定用プロ−ブ |
| JP3833162B2 (ja) * | 2002-10-17 | 2006-10-11 | 大日本スクリーン製造株式会社 | 基板の温度測定方法、基板熱処理装置における設定温度の補正方法および基板熱処理装置 |
-
2007
- 2007-04-04 JP JP2007098707A patent/JP2008256519A/ja active Pending
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