JP2008227264A - 基板処理装置 - Google Patents

基板処理装置 Download PDF

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Publication number
JP2008227264A
JP2008227264A JP2007065074A JP2007065074A JP2008227264A JP 2008227264 A JP2008227264 A JP 2008227264A JP 2007065074 A JP2007065074 A JP 2007065074A JP 2007065074 A JP2007065074 A JP 2007065074A JP 2008227264 A JP2008227264 A JP 2008227264A
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Japan
Prior art keywords
chamber
substrate
load lock
lock chamber
inert gas
Prior art date
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Pending
Application number
JP2007065074A
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English (en)
Japanese (ja)
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JP2008227264A5 (enrdf_load_stackoverflow
Inventor
Masataka Fujishiro
雅隆 藤城
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc filed Critical Hitachi Kokusai Electric Inc
Priority to JP2007065074A priority Critical patent/JP2008227264A/ja
Publication of JP2008227264A publication Critical patent/JP2008227264A/ja
Publication of JP2008227264A5 publication Critical patent/JP2008227264A5/ja
Pending legal-status Critical Current

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JP2007065074A 2007-03-14 2007-03-14 基板処理装置 Pending JP2008227264A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007065074A JP2008227264A (ja) 2007-03-14 2007-03-14 基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007065074A JP2008227264A (ja) 2007-03-14 2007-03-14 基板処理装置

Publications (2)

Publication Number Publication Date
JP2008227264A true JP2008227264A (ja) 2008-09-25
JP2008227264A5 JP2008227264A5 (enrdf_load_stackoverflow) 2010-04-30

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ID=39845511

Family Applications (1)

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JP2007065074A Pending JP2008227264A (ja) 2007-03-14 2007-03-14 基板処理装置

Country Status (1)

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JP (1) JP2008227264A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010231572A (ja) * 2009-03-27 2010-10-14 Sumitomo Heavy Ind Ltd チャンバ圧力調整装置
US8607752B2 (en) 2008-09-11 2013-12-17 Denso Corporation Valve timing control apparatus
CN115206835A (zh) * 2021-04-01 2022-10-18 细美事有限公司 支承单元及基板处理设备

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06260487A (ja) * 1993-03-03 1994-09-16 Tokyo Electron Tohoku Ltd 熱処理装置
JPH1022292A (ja) * 1996-07-08 1998-01-23 Sony Corp 熱処理装置およびこれを用いた熱処理方法
JPH11204447A (ja) * 1998-01-12 1999-07-30 Tokyo Electron Ltd 枚葉式の熱処理装置
JP2001068425A (ja) * 1999-08-31 2001-03-16 Hitachi Kokusai Electric Inc 半導体熱処理装置及び方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06260487A (ja) * 1993-03-03 1994-09-16 Tokyo Electron Tohoku Ltd 熱処理装置
JPH1022292A (ja) * 1996-07-08 1998-01-23 Sony Corp 熱処理装置およびこれを用いた熱処理方法
JPH11204447A (ja) * 1998-01-12 1999-07-30 Tokyo Electron Ltd 枚葉式の熱処理装置
JP2001068425A (ja) * 1999-08-31 2001-03-16 Hitachi Kokusai Electric Inc 半導体熱処理装置及び方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8607752B2 (en) 2008-09-11 2013-12-17 Denso Corporation Valve timing control apparatus
US9085997B2 (en) 2008-09-11 2015-07-21 Denso Corporation Valve timing control apparatus
US9759101B2 (en) 2008-09-11 2017-09-12 Denso Corporation Valve timing control apparatus
JP2010231572A (ja) * 2009-03-27 2010-10-14 Sumitomo Heavy Ind Ltd チャンバ圧力調整装置
CN115206835A (zh) * 2021-04-01 2022-10-18 细美事有限公司 支承单元及基板处理设备

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