JP2008175399A - 静圧気体軸受 - Google Patents
静圧気体軸受 Download PDFInfo
- Publication number
- JP2008175399A JP2008175399A JP2008099512A JP2008099512A JP2008175399A JP 2008175399 A JP2008175399 A JP 2008175399A JP 2008099512 A JP2008099512 A JP 2008099512A JP 2008099512 A JP2008099512 A JP 2008099512A JP 2008175399 A JP2008175399 A JP 2008175399A
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- JP
- Japan
- Prior art keywords
- surface plate
- exhaust
- gas bearing
- static pressure
- bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2300/00—Application independent of particular apparatuses
- F16C2300/40—Application independent of particular apparatuses related to environment, i.e. operating conditions
- F16C2300/62—Application independent of particular apparatuses related to environment, i.e. operating conditions low pressure, e.g. elements operating under vacuum conditions
Abstract
【解決手段】 軸受が設置される定盤上に給気穴及び排気穴を設け、該給気穴、排気穴を通じて気体の給排気を行うことで、軸受に直接配管を接続する必要を無くす。
【選択図】 図3
Description
軸受が設置される定盤に排気穴を設け、該排気穴を通じて気体の排気を行うことで、軸受に直接排気用配管を接続する必要を無くし、真空チャンバー内に設置される各種装置の配置の自由度を高めることができる。
1a…底板
1b…側板
1c…上板
2 …固定体
3 …定盤
4 …排気穴
5 …気体回収溝
6 …給気穴
7 …給気溝
8 …給気用内部配管
9 …エアパッド
10…排気用配管
11…給気用配管
12…排気用内部配管
Claims (4)
- 定盤表面上に設置され、移動体と固定体とから成り、エアパッド周囲に強制排気機構を有し、真空中で使用可能な静圧気体軸受において、前記強制排気機構が前記移動体に設けられ、かつ、前記強制排気機構が定盤表面に設けられた排気穴を介して定盤に接続された排気用配管により、前記排気穴を通じて気体の排気が行われることを特徴とする静圧気体軸受。
- 前記定盤表面に設けられた前記排気穴が、真空チャンバー外部又は内部に設置された真空ポンプと接続されていることを特徴とする請求項1記載の静圧気体軸受。
- 前記定盤表面に設けられた前記排気穴が、真空チャンバー外部及び内部に設置された真空ポンプと接続されていることを特徴とする請求項1記載の静圧気体軸受。
- 静圧気体軸受への気体の供給が、前記定盤に設けられた給気穴を通じて行われることを特徴とする請求項1乃至請求項3のいずれか1項に記載の静圧気体軸受。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008099512A JP4807671B2 (ja) | 2008-04-07 | 2008-04-07 | 静圧気体軸受 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008099512A JP4807671B2 (ja) | 2008-04-07 | 2008-04-07 | 静圧気体軸受 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006124279A Division JP4134193B2 (ja) | 2006-04-27 | 2006-04-27 | 静圧気体軸受 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008175399A true JP2008175399A (ja) | 2008-07-31 |
JP4807671B2 JP4807671B2 (ja) | 2011-11-02 |
Family
ID=39702549
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008099512A Expired - Fee Related JP4807671B2 (ja) | 2008-04-07 | 2008-04-07 | 静圧気体軸受 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4807671B2 (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62180114A (ja) * | 1986-01-31 | 1987-08-07 | Kyocera Corp | 静圧気体直線案内装置 |
JPH03265713A (ja) * | 1990-03-12 | 1991-11-26 | Sodick Co Ltd | 静圧摺動装置 |
JPH07103235A (ja) * | 1993-10-07 | 1995-04-18 | Nippon Seiko Kk | 静圧直動気体軸受 |
-
2008
- 2008-04-07 JP JP2008099512A patent/JP4807671B2/ja not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62180114A (ja) * | 1986-01-31 | 1987-08-07 | Kyocera Corp | 静圧気体直線案内装置 |
JPH03265713A (ja) * | 1990-03-12 | 1991-11-26 | Sodick Co Ltd | 静圧摺動装置 |
JPH07103235A (ja) * | 1993-10-07 | 1995-04-18 | Nippon Seiko Kk | 静圧直動気体軸受 |
Also Published As
Publication number | Publication date |
---|---|
JP4807671B2 (ja) | 2011-11-02 |
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