JP2008166708A - 半導体素子及びその製造方法 - Google Patents
半導体素子及びその製造方法 Download PDFInfo
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- JP2008166708A JP2008166708A JP2007266976A JP2007266976A JP2008166708A JP 2008166708 A JP2008166708 A JP 2008166708A JP 2007266976 A JP2007266976 A JP 2007266976A JP 2007266976 A JP2007266976 A JP 2007266976A JP 2008166708 A JP2008166708 A JP 2008166708A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 44
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 238000000034 method Methods 0.000 claims description 11
- 239000012535 impurity Substances 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 34
- 210000000746 body region Anatomy 0.000 description 6
- 239000011229 interlayer Substances 0.000 description 5
- 238000005530 etching Methods 0.000 description 3
- 230000005669 field effect Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
- H01L29/0696—Surface layout of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42372—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out
- H01L29/4238—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out characterised by the surface lay-out
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66674—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/66712—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/66734—Vertical DMOS transistors, i.e. VDMOS transistors with a step of recessing the gate electrode, e.g. to form a trench gate electrode
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
【解決手段】半導体素子は、第1導電型の半導体基板(n型基板50)と、前記半導体基板(50)に形成された第2導電型のベース領域(p型ベース領域54)と、前記ベース領域(54)内に形成され、前記基板(50)の反対面に形成された高濃度第1導電型のソース領域(n型ソース領域56)と、前記ソース領域(56)とベース領域(54)を貫通して形成され、相違する幅と形状に形成される第1トレンチT1、第2トレンチT2と、を含む。
【選択図】図2
Description
Claims (17)
- 第1導電型の半導体基板と、
前記半導体基板に形成された第2導電型のベース領域と、
前記ベース領域内に形成され、前記基板の反対面に形成された高濃度第1導電型のソース領域と、
前記ソース領域とベース領域を貫通して形成され、相違する幅と形状に形成される第1、第2トレンチと、を含むことを特徴とする半導体素子。 - 前記第1トレンチは、前記第2トレンチより大きい直径の円筒状に形成されることを特徴とする請求項1に記載の半導体素子。
- 前記第2トレンチは、前記第1トレンチの直径より小さい長さの四角柱状に形成されることを特徴とする請求項1に記載の半導体素子。
- 前記第1トレンチと第2トレンチは、交互に配列されることを特徴とする請求項1に記載の半導体素子。
- 第1導電型の半導体基板内に、第2導電型の不純物を選択的に注入して、前記基板内に所定深さを有する第2導電型のベース領域を形成するステップと、
前記基板の反対面の前記ベース領域表面に、高濃度第1導電型のソース領域を形成するステップと、
前記ソース領域とベース領域を貫通して形成し、相違する幅と形状の第1トレンチ及び第2トレンチを形成するステップと、を含むことを特徴とする半導体素子の製造方法。 - 前記第1トレンチは、前記第2トレンチより大きい直径の円筒状に形成されることを特徴とする請求項5に記載の半導体素子の製造方法。
- 前記第2トレンチは、前記第1トレンチの直径より小さい長さの四角柱状に形成されることを特徴とする請求項5に記載の半導体素子の製造方法。
- 前記第1トレンチと第2トレンチは、交互に配列されることを特徴とする請求項5に記載の半導体素子の製造方法。
- 基板、エピタキシャル層、トレンチ構造のゲート及びソース領域を含む半導体素子において、前記トレンチは、各々相違する幅を有する複数のトレンチが交互に配列されることを特徴とする半導体素子。
- 前記トレンチは、相違する形状を有することを特徴とする請求項9に記載の半導体素子。
- 前記トレンチは、円柱状と四角柱状のうち何れか一つが各々選択されることを特徴とする請求項9に記載の半導体素子。
- 前記トレンチは、円柱状の第1トレンチと、四角柱状の第2トレンチのうち何れか一つが各々選択され、第1トレンチの幅は第2トレンチの幅より大きいことを特徴とする請求項9に記載の半導体素子。
- 前記トレンチは、各々相違する幅を有する複数のトレンチが連続して配列されることを特徴とする請求項9に記載の半導体素子。
- 前記トレンチは、各々相違する幅を有する複数のトレンチが隣接して配列されることを特徴とする請求項9に記載の半導体素子。
- 前記トレンチは、相違する幅を有する二つのトレンチが一つずつ交互に配列されることを特徴とする請求項9に記載の半導体素子。
- 前記基板は、平面から見たとき、横方向と縦方向の両方に対して、相違する幅を有する複数のトレンチが配列される構造を有することを特徴とする請求項9に記載の半導体素子。
- 各々相違する幅を有する前記複数のトレンチは、互いに連結されることを特徴とする請求項9に記載の半導体素子。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2006-0134452 | 2006-12-27 | ||
KR1020060134452A KR100832718B1 (ko) | 2006-12-27 | 2006-12-27 | 트랜치 게이트 모스 소자 및 그 제조 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008166708A true JP2008166708A (ja) | 2008-07-17 |
JP5091614B2 JP5091614B2 (ja) | 2012-12-05 |
Family
ID=39465902
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007266976A Expired - Fee Related JP5091614B2 (ja) | 2006-12-27 | 2007-10-12 | 半導体素子 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7683425B2 (ja) |
JP (1) | JP5091614B2 (ja) |
KR (1) | KR100832718B1 (ja) |
CN (1) | CN101211918B (ja) |
DE (1) | DE102007048982A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7859026B2 (en) * | 2006-03-16 | 2010-12-28 | Spansion Llc | Vertical semiconductor device |
US7948094B2 (en) * | 2007-10-22 | 2011-05-24 | Rohm Co., Ltd. | Semiconductor device |
US20100090270A1 (en) * | 2008-10-10 | 2010-04-15 | Force Mos Technology Co. Ltd. | Trench mosfet with short channel formed by pn double epitaxial layers |
US10199465B2 (en) | 2014-06-24 | 2019-02-05 | General Electric Company | Cellular layout for semiconductor devices |
US10192958B2 (en) | 2014-06-24 | 2019-01-29 | General Electric Company | Cellular layout for semiconductor devices |
DE102022205957A1 (de) | 2022-06-13 | 2023-12-14 | Robert Bosch Gesellschaft mit beschränkter Haftung | Power-FinFET mit variabler Grabenbreite |
CN117650181A (zh) * | 2024-01-30 | 2024-03-05 | 深圳市冠禹半导体有限公司 | 一种提高沟槽mosfet元胞密度的工艺及沟槽mosfet |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09260650A (ja) * | 1996-03-22 | 1997-10-03 | Fuji Electric Co Ltd | 炭化ケイ素トレンチfetおよびその製造方法 |
JP2002083963A (ja) * | 2000-06-30 | 2002-03-22 | Toshiba Corp | 半導体素子 |
JP2004006598A (ja) * | 2002-04-26 | 2004-01-08 | Toshiba Corp | 絶縁ゲート型半導体装置 |
JP2005150246A (ja) * | 2003-11-12 | 2005-06-09 | Toyota Central Res & Dev Lab Inc | 半導体装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100331844B1 (ko) * | 1998-02-12 | 2002-05-10 | 박종섭 | 씨모스소자 |
JP2001024193A (ja) | 1999-07-13 | 2001-01-26 | Hitachi Ltd | トレンチゲート型半導体装置およびその製造方法 |
JP2001284584A (ja) | 2000-03-30 | 2001-10-12 | Toshiba Corp | 半導体装置及びその製造方法 |
US6376315B1 (en) * | 2000-03-31 | 2002-04-23 | General Semiconductor, Inc. | Method of forming a trench DMOS having reduced threshold voltage |
WO2001088997A2 (en) * | 2000-05-13 | 2001-11-22 | Koninklijke Philips Electronics N.V. | Trench-gate semiconductor device and method of making the same |
JP4398185B2 (ja) | 2003-06-24 | 2010-01-13 | セイコーインスツル株式会社 | 縦形mosトランジスタ |
JP4449428B2 (ja) | 2003-11-17 | 2010-04-14 | 富士電機システムズ株式会社 | 半導体装置の製造方法および半導体装置の試験方法 |
DE102005041108B3 (de) * | 2005-08-30 | 2007-05-31 | Infineon Technologies Ag | Verfahren zur Herstellung eines Trench-Transistors und Trench-Transistor |
-
2006
- 2006-12-27 KR KR1020060134452A patent/KR100832718B1/ko not_active IP Right Cessation
-
2007
- 2007-10-12 DE DE102007048982A patent/DE102007048982A1/de not_active Withdrawn
- 2007-10-12 JP JP2007266976A patent/JP5091614B2/ja not_active Expired - Fee Related
- 2007-10-29 CN CN2007101815993A patent/CN101211918B/zh not_active Expired - Fee Related
- 2007-10-31 US US11/930,383 patent/US7683425B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09260650A (ja) * | 1996-03-22 | 1997-10-03 | Fuji Electric Co Ltd | 炭化ケイ素トレンチfetおよびその製造方法 |
JP2002083963A (ja) * | 2000-06-30 | 2002-03-22 | Toshiba Corp | 半導体素子 |
JP2004006598A (ja) * | 2002-04-26 | 2004-01-08 | Toshiba Corp | 絶縁ゲート型半導体装置 |
JP2005150246A (ja) * | 2003-11-12 | 2005-06-09 | Toyota Central Res & Dev Lab Inc | 半導体装置 |
Also Published As
Publication number | Publication date |
---|---|
KR100832718B1 (ko) | 2008-05-28 |
CN101211918B (zh) | 2010-06-09 |
JP5091614B2 (ja) | 2012-12-05 |
US7683425B2 (en) | 2010-03-23 |
DE102007048982A1 (de) | 2008-07-03 |
CN101211918A (zh) | 2008-07-02 |
US20080157192A1 (en) | 2008-07-03 |
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