JP2008144276A - 有機物/無機物複合薄膜の蒸着方法及び蒸着装置 - Google Patents
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- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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Abstract
【解決手段】本発明に係る時間分割型有機物/無機物複合薄膜の蒸着方法および蒸着装置は、有機物/無機物材料が含有されているソースタンクと、これを活性化させる熱開始剤が含有されている触媒ソースタンクとを各々装着することによって、大面積の基板上に有機物/無機物複合薄膜を蒸着する時、厚さを正確に調節することができ、蒸着を均一に行うことができる。また、1つ以上の有機物/無機物複合薄膜を蒸着する場合にも、厚さ及び組成を精密に調節することができる。
【選択図】図2
Description
本発明は情報通信部及び情報通信研究振興院のIT戰略技術開發事業として行った研究から導出された。[課題固有番号:2005-S-070-02、課題名:フレキシブルディスプレイ]
図2は、本発明の一実施例に係る有機物/無機物複合薄膜の蒸着装置を概略的に示す図である。図2を参照すれば、本発明の実施例に係る有機物/無機物複合薄膜の蒸着装置は、反応チャンバー110と、真空ポンプ120と、蒸着ソースタンク130と、活性化剤ソースタンク140と、加熱部161、162、163と、移送ガス供給源150及び希釈ガス供給源170と、流量調節計25a、25bとを含む。以下では、前記構成要素をさらに詳細に説明する。
120 真空ポンプ
130 蒸着ソースタンク
140 活性化剤ソースタンク
150 移送ガス供給源
170 希釈ガス供給源
161、162、163 加熱部
Claims (10)
- (i)有機物及び無機物材料が含まれているソースタンクを加熱して、有機物及び無機物のうち少なくとも一方の蒸着気相を発生させる段階と、
(ii)前記発生した有機物及び無機物蒸着気相の凝縮が生じないように一定の温度を維持する移送路を介して前記有機物及び無機物蒸着気相の一方を反応チャンバーに移送する段階と、
(iii)前記反応チャンバーに移送された前記有機物及び無機物蒸着気相の一方を、前記反応チャンバーの内部に配置される基板上に分配し、前記有機物及び無機物材料の一方を前記基板上に吸着する段階と、
(iv)前記有機物及び無機物材料の一方が前記基板上に吸着された後、希釈ガス及び移送ガスを用いて前記反応チャンバーをパージする段階と、
(v)前記蒸着された有機物及び無機物蒸着気相の一方のモノマーを活性化することができる活性化熱開始剤を含んでいる活性化剤ソースタンクを加熱して、熱開始剤気相を発生させる段階と、
(vi)前記熱開始剤気相の凝縮が生じないように一定の温度を維持する移送路を介して前記熱開始剤気相を前記反応チャンバーに移送する段階と、
(vii)前記反応チャンバーに移送された前記熱開始剤気相を、前記熱開始剤気相がシャワーヘッドで凝縮されないように一定の温度に維持された前記反応チャンバーを介して前記基板に蒸着されている有機物または無機物モノマー上に分配し、有機物/無機物複合薄膜を形成する段階と、
(viii)前記基板に前記有機物/無機物複合薄膜が蒸着された後、残留する前記熱開始剤気相を前記反応チャンバーの外部に排出し、前記希釈ガス及び移送ガスを用いて前記反応チャンバーをパージする段階と、を備えることを特徴とする時間分割型有機物/無機物複合薄膜の蒸着方法。 - 前記有機物/無機物複合薄膜が形成された前記基板上に有機物/無機物複合薄膜をさらに形成したり、多成分系の薄膜を形成する場合には、前記(iii)段階、(iv)段階、(vii)段階及び(viii)段階を繰り返すことを特徴とする請求項1に記載の時間分割型有機物/無機物複合薄膜の蒸着方法。
- 前記反応チャンバーの蒸着圧力は、0.001乃至100トールであることを特徴とする請求項1に記載の時間分割型有機物/無機物複合薄膜の蒸着方法。
- 前記反応チャンバーに設けられたシャワーヘッドは、低圧で前記移送ガスにより移送される前記有機物/無機物材料、前記熱開始剤、及び前記希釈ガスを均一に供給することを特徴とする請求項1に記載の時間分割型有機物/無機物複合薄膜の蒸着方法。
- 前記有機物/無機物を蒸着するために利用される前記希釈ガス及び前記移送ガスは、不活性ガスであることを特徴とする請求項1に記載の時間分割型有機物/無機物複合薄膜の蒸着方法。
- 反応チャンバーと、
前記反応チャンバー内に設けられ、且つ基板を支持する基板支持部と、
前記基板支持部に設けられ、且つ前記基板の温度を調節する温度調節部と、
有機物/無機物複合薄膜の蒸着に参加する蒸着ソース気相と活性化剤ソース気相とを交互に前記基板上に供給するシャワーヘッドと、を含む蒸着部と;
前記シャワーヘッドに前記蒸着ソース気相を提供するための蒸着ソースが収容される1つ以上の蒸着ソースタンクと、
前記シャワーヘッドに前記活性化剤ソース気相を提供するための活性化剤ソースが収容される1つ以上の活性化剤ソースタンクと、
前記蒸着ソース気相を前記反応チャンバーに移送するための移送ガスを提供する移送ガス供給源と、
前記反応チャンバーに希釈ガスを提供するための希釈ガス供給源と、
前記蒸着ソースタンクで前記蒸着ソース気相が発生し、前記活性化剤ソースタンクで前記活性化剤気相が発生するように、前記蒸着ソースタンク及び前記活性化剤ソースタンクを加熱する加熱部と、
前記蒸着ソース気相及び前記活性化剤ソース気相が時間分割によって選択的に前記シャワーヘッドに移送されるように許容し、前記加熱部により加熱される複数の移送路と、を含むソース部と;
前記有機物/無機物蒸着ソース気相、前記活性化剤ソース気相、前記移送ガス及び希釈ガスを前記反応チャンバーに流入し、前記有機物または無機物材料気相、前記活性化剤ソース気相、前記移送ガス及び希釈ガスの量と速度を調節する流量調節部と;
前記反応チャンバーに流入される前記有機物または無機物蒸着気相、前記活性化剤ソース気相、前記移送ガス及び希釈ガスを時間分割できるように、前記各々の移送路に形成される複数のバルブと;
前記反応チャンバーの真空を一定に維持する真空ポンプと;を備えることを特徴とする時間分割型有機物/無機物複合薄膜の蒸着装置。 - 前記シャワーヘッドは、複数の板で構成され、0.01乃至50mmの直径で形成された少なくとも1つの孔を含むことを特徴とする請求項6に記載の時間分割型有機物/無機物複合薄膜の蒸着装置。
- 前記シャワーヘッドは、高温で変形しないステンレスまたは石英で形成されることを特徴とする請求項7に記載の時間分割型有機物/無機物複合薄膜の蒸着装置。
- 前記シャワーヘッドには、前記シャワーヘッドの半径方向に沿って着脱自在なシャワーカーテンが設けられることを特徴とする請求項7に記載の時間分割型有機物/無機物複合薄膜の蒸着装置。
- 多成分系の有機物/無機物複合薄膜を形成するために複数の前記蒸着ソースタンクと前記活性化剤ソースタンクを利用することを特徴とする請求項6に記載の時間分割型有機物/無機物複合薄膜の蒸着装置。
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Cited By (4)
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JP2012525505A (ja) * | 2009-05-01 | 2012-10-22 | カティーヴァ、インク. | 有機蒸発材料印刷の方法および装置 |
US10266941B2 (en) | 2012-12-06 | 2019-04-23 | Samsung Display Co., Ltd. | Monomer vaporizing device and method of controlling the same |
KR20160148560A (ko) * | 2014-05-05 | 2016-12-26 | 각코호진 오키나와가가쿠기쥬츠다이가쿠인 다이가쿠가쿠엔 | 태양 전지 응용을 위한 페로브스카이트 필름을 제조하기 위한 시스템 및 방법 |
KR101864522B1 (ko) | 2014-05-05 | 2018-06-04 | 각코호진 오키나와가가쿠기쥬츠다이가쿠인 다이가쿠가쿠엔 | 태양 전지 응용을 위한 페로브스카이트 필름을 제조하기 위한 시스템 및 방법 |
Also Published As
Publication number | Publication date |
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US7799377B2 (en) | 2010-09-21 |
US20080138517A1 (en) | 2008-06-12 |
JP5036516B2 (ja) | 2012-09-26 |
US20100300360A1 (en) | 2010-12-02 |
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