JP2008098278A - Sheet pasting device and pasting method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sheet pasting device capable of forming notched parts through the use of a sheet which has a simple layer structure, where notched parts are intermittently formed in the sheet and only an adhesive layer is arranged on one surface, and pasting a protection sheet formed inside the notched parts to an attachment body, and to provide a pasting method. <P>SOLUTION: The sheet pasting device forms the intermittent notched parts C along a substantially loop shape locus in the middle of feeding the belt shape sheet S with the adhesive layer A arranged on one surface, and adopts an inner region enclosed with the notched parts C as the pasting sheet S1, and pastes the sheet to the attachment body such as a wafer W. The pasting sheet S1 is pasted from one end side of the wafer W to the other end side with the use of a pressure roller 30. An unnecessary part S2 at the outer side is separated and simultaneously collected by a collecting means. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a sheet sticking apparatus and a sticking method, wherein intermittent cuts are formed in a sheet provided with an adhesive layer on one side, and the inside surrounded by the cuts is stuck to an adherend as an adhesive sheet. The present invention relates to a sheet sticking apparatus and a sticking method suitable for the above.

  A plate-like member such as a semiconductor wafer (hereinafter simply referred to as “wafer”) is mounted on a ring frame via a dicing tape, or a protective sheet or the like is affixed to the wafer circuit surface in the processing step. Has been done.

  As a method for applying the dicing tape, the separator (release sheet) to which the dicing tape is temporarily attached is peeled off while the strip-shaped dicing tape is fed out, and the dicing tape is attached to the ring frame and the wafer. A configuration is known in which cutting is performed in a closed loop shape within the surface of the ring frame, and an unnecessary tape portion on the outer peripheral side is wound and collected (see, for example, Patent Document 1). In addition, when the strip-shaped tape base material temporarily attached to the strip-shaped base sheet (release sheet) is fed out, a closed loop-shaped cut is formed in the tape base material to form a dicing tape having a predetermined shape, and the dicing tape is peeled off. A method of peeling from a base sheet at the tip of a plate and attaching it to a ring frame and a wafer is known (see Patent Document 2).

JP 2003-257898 A JP 2006-073920 A

However, in the sheet sticking method of Patent Document 1, since the cutter blade is moved on the ring frame to cut the dicing tape into a substantially circular shape, the cutter blade may damage the ring frame, and the cutter blade. There is an inherent problem of shortening its own service life. In this regard, the method described in Patent Document 2 forms a closed loop-shaped cut substantially corresponding to the outer shape of the ring frame using a die cut roller, and affixes the sheet region surrounded by the cut as a dicing tape. Therefore, the problem peculiar to the method of Patent Document 1 can be solved.
However, in the sheet sticking method described in Patent Document 2, a strip-shaped original fabric in which a base sheet is temporarily attached to an adhesive layer provided on one side of the sheet is used, and the layer structure of the original fabric is used. However, there is an inconvenience that a base sheet is essential and wasteful. This is because the incision formed in the tape base material has a continuous closed loop shape, and the inner dicing tape surrounded by the incision must be temporarily attached onto the base sheet. In addition, since the base sheet is essential, the roll diameter when the roll-shaped raw fabric is used is not too large. In addition, when a raw roll with a small roll diameter is used, the consumption cycle of the raw fabric Is shortened, and the work of attaching the original fabric to the support means becomes frequent, resulting in inconvenience that the work efficiency is lowered.

[Object of invention]
The present invention has been devised by paying attention to such inconveniences, and its purpose is to intermittently form notches formed in the belt-like sheet along the locus of the closed loop, and to adhere to one side of the sheet. Sheet sticking device and sticking method capable of forming a cut using a belt-like sheet having a simple layer structure simply provided with an agent layer and sticking an adhesive sheet formed inside the cut to an adherend Is to provide.

  In order to achieve the above object, the present invention provides sheet support means for supporting a belt-like sheet provided with an adhesive layer on one side so that the belt-like sheet can be fed out, and intermittent cuts along the substantially closed-loop locus on the belt-like sheet. A notch forming means to be formed, and an attaching / separating means for attaching an inner region surrounded by the notch to an adherend as an adhesive sheet and separating an unnecessary sheet portion outside the adhesive sheet from the adhesive sheet. It has the structure of preparing.

  In the present invention, the attaching / separating means is an operation of attaching the adhesive sheet while pressing the adhesive sheet from one end side to the other end side of the adherend, and an operation of separating the unnecessary sheet portion from the adhesive sheet. Are performed simultaneously.

  Further, the incision forming means has a cutter blade, the cutter blade is provided with a blade absence location at a plurality of locations along the locus of the closed loop, and the blade absence location includes the adhesive sheet and the unnecessary sheet portion. The separation resistance is set to a length that reduces the separation resistance.

  Furthermore, it is preferable to form a breakage preventing blade for the adhesive sheet on the inside and / or outside of the portion where the blade is absent.

  Moreover, the said fracture | rupture prevention blade is set longer than the length of the said blade absence location.

  Furthermore, the cutter blade can be provided detachably with respect to the notch forming means.

  The sticking / separating means includes a pressing means that moves while pressing the belt-like sheet along the belt-like sheet in which the cut is formed, and a collecting means that collects the unnecessary sheet portion. The adhesive sheet is attached to the adherend by moving and driving the recovery means, and the unnecessary sheet portion is separated from the adhesive sheet, and at the same time, the unnecessary sheet portion is recovered by the recovery means. it can.

  Furthermore, the sticking / separating means may include a pressing roller, and a convex surface portion substantially corresponding to the size of the adhesive sheet may be provided on the outer peripheral side of the pressing roller.

Further, the present invention forms an intermittent cut along a substantially closed loop-shaped trajectory in a belt-like sheet provided with an adhesive layer on one side, and an inner region surrounded by the cut is used as an adhesive sheet on the adherend. A method of attaching a sheet,
When applying the pressing force to the adhesive sheet and attaching the adhesive sheet from one end side to the other end side of the adherend, the unnecessary sheet portion outside the adhesive sheet is simultaneously separated from the adhesive sheet. Thus, a method is adopted in which the adhesive sheet is extracted from the belt-like sheet and attached to the adherend.

  In the method of the present invention, a breakage prevention cut longer than the length of the non-cut portion is provided inside and / or outside the non-cut portion between the cuts by the intermittent cut, and the unnecessary sheet portion is bonded. When separating from the sheet, it is preferable to take a method in which the breaking prevention cuts a break in a direction away from the locus of the closed loop.

  In the method, the pressing force can be applied to the region of the adhesive sheet.

  According to the present invention, the belt-like sheet is provided with intermittent notches along a closed loop trajectory to form an adhesive sheet, and the adhesive sheet is separated from an unnecessary sheet portion outside the adhesive sheet and the adhesive sheet is attached to a predetermined covering. Since it is configured to collect the unnecessary sheet part while sticking to the body, it is possible to use a raw fabric that does not have a release sheet, avoid unnecessary use of the release sheet, and in a roll shape It becomes possible to prolong the consumption cycle of the original fabric when the wound original fabric is applied to the sheet supporting means as compared with an original fabric roll with a release sheet of the same diameter, which can improve work efficiency. it can.

  In addition, since the attaching / separating means is configured to perform the attaching operation of the adhesive sheet and the separating operation of the unnecessary sheet portion at the same time, the working efficiency is higher than that of a known sheet attaching apparatus in which the separating and attaching are performed over time. It becomes possible to dramatically improve.

  Further, the blade absence portion provided on the cutter blade has a length that reduces the separation resistance between the adhesive sheet and the unnecessary sheet portion. The parts can be easily connected to each other, and the inconvenience of the adhesive sheet breaking in an unintended direction can be avoided.

  Further, when the break prevention blade is formed on the inside and / or outside of the blade non-existing portion, it is assumed that the end portions of the cut are not connected on the locus of the closed loop, and are broken inside or outside. Even in such a case, the breakage can be kept to a minimum.

  Furthermore, when the cutter blade is configured to be detachable with respect to the notch forming means, it can cope with the change in the shape of the adherend without difficulty, and versatility is provided by preparing various cutter blades. Is possible.

  In addition, in the configuration in which the convex portion is provided on the outer peripheral side of the pressing roller constituting the pressing means, the adhesive sheet and the unnecessary sheet portion can be reliably separated along the locus of the closed loop, and the adhesive force of the adhesive sheet Even if it is weak, reliable adhesion can be performed without the adhesive sheet being rolled up by the collecting force of the collecting means.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[First Embodiment]
FIG. 1 shows a schematic configuration of a sheet sticking apparatus according to the first embodiment, and FIG. 2 shows a schematic perspective view of a main part at the time of sticking operation of the apparatus. In these drawings, the sheet sticking apparatus 10 is configured as an apparatus for integrating (mounting) a wafer W and a ring frame RF constituting an adherend. The sheet sticking apparatus 10 includes a support roller 11 as a sheet support unit that supports a belt-like sheet S wound in a roll shape so that the sheet S can be fed, and intermittent cuts C along the locus of the sheet S in a substantially closed loop shape. The notch forming means 12 for forming (see FIG. 2) and the sticking / separating means 13 for separating the inner region surrounded by the notch C from the outer unnecessary sheet portion S2 as the adhesive sheet S1 and sticking it to the wafer W and the ring frame RF. And a table 14 that supports the wafer W and the ring frame RF.

  As shown in the partially enlarged view of FIG. 1, the sheet S is formed by laminating an adhesive layer A on one side (right side in the figure), and a release sheet is provided on the adhesive layer A side. A type that is not provided is used. Accordingly, the surface side of the sheet S is employed that has a surface performance that prevents the adhesive from being transferred when it is wound into a roll shape, or that has been treated.

  A guide roller 15, a feeding roller 16 and a pinch roller 17 are disposed between the support roller 11 and the notch forming means 12. The feeding roller 16 is connected to a motor M1 to feed out the sheet S.

  The notch forming means 12 includes a die cut roller 20 located on the adhesive layer A side and an anvil roller 21 disposed at a position where the sheet S is sandwiched between the die cut roller 20. The die-cut roller 20 includes a roller main body 23 whose axis is directed in the width direction of the sheet S, and a cutter blade 24 provided on the outer peripheral side of the roller main body 23. As shown in the developed view of FIG. 3, the cutter blade 24 includes a first blade 24A provided intermittently along a substantially circular locus forming the closed loop, and end portions of the first blade 24A. The second blade 24 </ b> B is provided inside the plurality of blade-existing portions P that are in between and serves as a breakage preventing blade.

  As shown in FIG. 2, the first blade 24A forms an intermittent cut C in the sheet S along a substantially circular locus, and the second blade 24B is formed between the ends of the cuts C. It is located inside the non-cutting portion 25 to be formed, and a dotted break prevention cut C1 is formed.

  The first blade 24A is set to have a relatively long dimension compared to the second blade 24B, while the blade non-existing portion P reduces the separation resistance between the adhesive sheet S1 and the unnecessary sheet portion S2. When separating the length, that is, the adhesive sheet S1 from the unnecessary sheet portion S2, the ends of the cuts C formed by the first blades 24A are connected, for example, as a cut along the perforation. The length is set such that the non-cut portion 25 can be cut. Further, as shown in FIG. 2A, when the adhesive sheet S1 is separated from the unnecessary sheet portion S2, the second blade 24B is directed from the end of the notch C toward the inside of the adhesive sheet S1. Even if the rupture may occur, the rupture prevention notch C1 that acts to dam the rupture deeply into the inner region of the adhesive sheet S1 is formed. Therefore, the length of the second blade 24B is set to be slightly longer than the length of the blade-existing portion P, that is, the length between the end portions of the first blade 24A. The cutter blade 24 is integrally provided with first and second blades 24A and 24B on the surface of a single metal plate 26 as shown in FIG. 3, for example, an etching blade, a Thomson blade, etc. The metal plate 26 is detachably provided on the outer peripheral surface of the roller body 23, so that the cutter blades having different blade shapes can be easily replaced. In addition, regarding attachment / detachment, for example, an adhesive, a double-sided pressure-sensitive adhesive tape, a magnet and the like can be mentioned, but there is no particular limitation.

  The attaching / separating means 13 separates the unnecessary sheet portion S2 from the adhesive sheet S1 and the operation of attaching the adhesive sheet S1 from one end side in the radial direction of the ring frame RF and the wafer W to the other end side. It is comprised so that operation | movement may be performed simultaneously. More specifically, the sticking / separating means 13 includes a pressing roller 30 as a pressing means provided so as to be movable in a substantially horizontal direction while rolling on the upper surface side of the adhesive sheet S1, and the pressing roller 30. A single-axis robot 31 that is movably supported, a winding roller 32 that winds and collects the unnecessary sheet portion S2, and a winding roller 32 that is disposed between the winding roller 32 and the pressing roller 30 and is disposed on the unnecessary sheet portion S2. A driving roller 34 that applies a winding force and a pinch roller 36 that sandwiches the unnecessary sheet portion S2 between the driving roller 34 and the driving roller 34 are included. The winding roller 32 and the driving roller 34 are rotatably provided via motors M2 and M3, respectively. The motor M2 winds up the unnecessary sheet portion S2 with a predetermined tension, while the motor M3 is the motor M1. And the tension of the sheet S during that time is controlled to be constant. In the present embodiment, the take-up roller 32, the drive roller 34, and the pinch roller 36 constitute a collecting means 33.

  The table 14 includes a lift table 37 having an upper surface structure capable of sucking and holding the ring frame RF and the wafer W, and a base table 38 positioned on the lower surface side of the lift table 37. A single-axis robot 39 is provided in the center of the base table 38, and guides 40 are provided in the vicinity of each corner. The lift table 37 moves the seat S by the advancement and retraction of the rod 41 of the single-axis robot 39. It can be moved up and down at a position where it is attached and a position where it is avoided.

  Next, a method for applying the adhesive sheet S1 in the first embodiment will be described.

  As shown in FIG. 1, the ring frame RF and the wafer W are placed at predetermined positions on the upper surface of the lifting table 37 via a transfer arm or the like (not shown), and the ring frame RF and wafer W are placed on the upper surface of the lifting table 37. Is adsorbed and retained. On the other hand, the sheet S is wound around the winding roller 32 from the support roller 1 through a predetermined path and is set in a state where it can be fed out. At this time, the pressing roller 30 is kept in a standby state at a position indicated by a two-dot chain line in FIG.

  Then, in a state where the driving roller 34 is stopped, the feeding roller 16, the die cut roller 20, and the anvil roller 21 rotate to start feeding the sheet S. In synchronization with the feeding of the sheet S, the pressing roller 30 is Move to the left in FIG. By this operation, the sheet S is formed with a cut C and a break prevention cut C1 from the adhesive layer A side. When the feeding is further performed, the inner bonding sheet S1 surrounded by the notch C is detected by a sensor (not shown), is fed to a predetermined position above the ring frame RF and the wafer W, and stops. And the raising / lowering table 37 raises and it will be in a sheet sticking posture.

  Next, while the feeding roller 16 is stopped, the unnecessary sheet portion S2 is wound up by the drive roller 34 and the winding roller 32, and the pressing roller 30 moves rightward in FIG. 1 in synchronization with the winding. Then, the sheet S is pressed and stuck to the ring frame RF and the wafer W. At this time, the pressing roller 30 is controlled by the single-axis robot 31 so that a predetermined tension is applied to the sheet S between the feeding roller 16 and the driving roller 34.

  Here, the unnecessary sheet portion S2 is affixed to the upper surface of the ring frame RF and the lifting table 37 for a moment by the pressing roller 30, but at the same time, the unnecessary sheet portion S2 is peeled off from them by the winding force of the driving roller 34. The adhesive sheet S1 is separated from the unnecessary sheet portion S2 along the cut C, and the adhesive sheet S1 is attached to the wafer W and the ring frame RF.

  In the present embodiment, the non-cut portion 25 between the end portions of the cut C has a slight length that prevents the adhesive sheet S1 from being accidentally dropped from the sheet S when the sheet S is fed. After the sheet S is pasted, the non-cut portion 25 between the cuts C can be broken by winding up the unnecessary sheet portion S2, but depending on the material of the sheet S, it is difficult to break and adheres along the moving direction of the pressure roller 30. Even in such a case, the breakage is blocked by the breakage prevention cut C1 and extends deep inside the adhesive sheet S1. There is no significant influence on the sticking mode of the adhesive sheet S1.

  Therefore, according to the first embodiment, the notch C is intermittent, and the sticking of the adhesive sheet S1 by the pressing roller 30, the separating operation of the unnecessary sheet portion S2, and the recovery by the recovery means 33 are simultaneously performed. By being configured to perform, the sheet sticking apparatus 10 can be attached to the wafer W or the like while forming the adhesive sheet S1 from the sheet S having no release sheet, and the sheet sticking apparatus 10 is excellent in economy and sticking efficiency. be able to.

[Second Embodiment]
Next, a second embodiment of the present invention will be described with reference to FIGS. In the description of the second embodiment, the same reference numerals are used for the same or equivalent components as in the first embodiment, and the description will be omitted or simplified.

As shown in FIGS. 4 and 5, in the second embodiment, a case where the wafer W is configured as an adherend and configured as a sheet pasting apparatus 10 that protects the circuit surface side of the wafer W will be illustrated and described. Therefore, a convex surface 50 corresponding to the shape of the adhesive sheet S <b> 1 is provided on the outer peripheral surface of the pressing roller 51. In this case, as the pressing roller 51, a roller with a built-in motor that can rotate and control its rotational position is used. Moreover, as the convex part 50, what was formed with the material which has appropriate elasticity, such as a rubber plate, can be used suitably. The pressing roller 51 with the convex surface portion 50 can be used in place of the pressing roller 30 of the first embodiment, and is used as it is by adding control for positioning the convex surface portion 50 and the adhesive sheet S1. It can be done.
Other configurations are the same as those in the first embodiment.

  Therefore, according to such 2nd Embodiment, without sticking unnecessary sheet | seat part S2 to a to-be-adhered body widely, sticking of adhesive sheet S1, separation operation | movement and collection | recovery of unnecessary sheet | seat part S2 can be performed. Therefore, even if the sheet S is a material that is easy to cut, the unnecessary sheet portion S2 can be reliably collected, and the sticking failure of the adhesive sheet S1 can be reliably prevented. Even when the adhesive force of the adhesive sheet S1 is weak, the adhesive sheet S1 can be reliably stuck without being lifted by the recovery force of the recovery means 33.

As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
In other words, the present invention has been illustrated and described mainly with respect to specific embodiments, but without departing from the scope of the technical idea and object of the present invention, the shape, position, or With respect to the arrangement and the like, those skilled in the art can make various changes as necessary.

For example, the ring frame RF and the semiconductor wafer W are targeted as adherends, but the present invention is not limited to this, and other plate-like members and the like can also be targeted. Therefore, the notch is not limited to being along a substantially circular locus, but may be along a polygonal or elliptical locus.
Further, the number of cuts C and the number of portions where cuts are not formed are not particularly limited. Therefore, the length of the cut C may be made longer than that in the illustrated example to reduce the places where the cut is not formed.
Furthermore, in the above-described embodiment, the case where the second blade 24B is arranged on the inner side between the end portions of the first blade 24A so as to form the notch C1 for fracture prevention inside the notch C has been described. However, the second blade 24B may have a configuration in which a part or all of the second blade 24B is disposed outside the first blade 24A, and the second blade 24B is disposed both inside and outside. It doesn't prevent it.
Further, in FIG. 2 and FIG. 4, the next adhesive sheet S1 is formed after the adhesive sheet S1 to be affixed, but this is for the purpose of explaining the cut C, the fracture prevention cut C1, and the like. In view of downsizing of the apparatus and ease of control, the next bonding sheet S1 is not formed between the table 14 and the notch forming means 12 by bringing the table 14 and the notch forming means 12 closer to each other. It is better to do so.
Further, the sticking / separating means 13 is not limited to the configuration example shown in the figure, and instead of the pressing roller 30 as the pressing means, for example, a plate-like member such as a peel plate is used, and the tip of the plate-like member is A structure that slides against the adhesive sheet S1 can also be employed. Moreover, the collection | recovery means 33 is good also as a structure which discards with the unnecessary adhesive sheet S2 peeled.

The schematic block diagram of the sheet sticking apparatus which concerns on 1st Embodiment. The principal part expansion perspective view of the middle stage of sheet sticking. The developed view of the cutter blade. The principal part expansion perspective view similar to FIG. 2 which concerns on 2nd Embodiment. The partial expanded sectional view of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Sheet sticking apparatus 11 Support roller (sheet support means)
12 Incision Forming Means 13 Adhesion Separating Means 20 Die-cut Roller 23 Roller Body 24 Cutter Blade 25 Non-Incision P P No Blade Location 24B Second Blade (Fracture Prevention Blade)
30 Pressing roller (pressing means)
33 Collecting means 50 Convex part A Adhesive layer S Strip sheet S1 Adhesive sheet S2 Unnecessary sheet part RF Ring frame (adhered body)
W Semiconductor wafer (adherence)

Claims (11)

Surrounded by the incision, a sheet support means for supporting the belt-like sheet provided with an adhesive layer on one side so as to be able to be fed, an incision forming means for forming an intermittent incision along the locus of a substantially closed loop in the belt-like sheet. A sheet sticking apparatus comprising sticking and separating means for sticking an inner region to be adhered to an adherend as an adhesive sheet and separating an unnecessary sheet portion outside the adhesive sheet from the adhesive sheet. The attaching / separating means simultaneously performs an operation of attaching the adhesive sheet while pressing the adhesive sheet from one end side to the other end side of the adherend and an operation of separating the unnecessary sheet portion from the adhesive sheet. The sheet sticking device according to claim 1, which is configured as described above. The incision forming means has a cutter blade, and the cutter blade is provided with a blade absence portion at a plurality of locations along the locus of the closed loop, and the blade absence portion is separated from the adhesive sheet and the unnecessary sheet portion. 3. The sheet sticking device according to claim 1, wherein the sheet sticking device is set to a length for reducing the resistance. The sheet sticking device according to claim 3, wherein a breakage preventing blade for the adhesive sheet is formed inside and / or outside the blade absence portion. The sheet sticking device according to claim 4, wherein the breakage preventing blade is set longer than a length of the blade absence portion. The sheet sticking device according to claim 3, 4 or 5, wherein the cutter blade is provided so as to be detachable with respect to the notch forming means. The sticking / separating means includes a pressing means that moves while pressing the belt-like sheet along the belt-like sheet in which the cut is formed, and a collecting means that collects the unnecessary sheet portion, and the movement of the pressing means 2. The adhesive sheet is attached to an adherend by driving the recovery means, and an unnecessary sheet portion is separated from the adhesive sheet, and at the same time, the unnecessary sheet portion is recovered by the recovery means. Thru | or 6 the sheet sticking apparatus in any one of. The sheet sticking apparatus according to claim 7, wherein the sticking / separating means includes a pressing roller, and a convex surface portion substantially corresponding to a size of the adhesive sheet is provided on an outer peripheral side of the pressing roller. A sheet sticking method in which intermittent cuts are formed along a substantially closed loop trajectory in a belt-like sheet provided with an adhesive layer on one side, and an inner region surrounded by the cuts is stuck to an adherend as an adhesive sheet. There,
When applying the pressing force to the adhesive sheet and attaching the adhesive sheet from one end side to the other end side of the adherend, the unnecessary sheet portion outside the adhesive sheet is simultaneously separated from the adhesive sheet. By doing so, the sheet for bonding is extracted from the belt-like sheet and stuck to the adherend. A break prevention cut longer than the length of the non-cut portion is provided inside and / or outside the non-cut portion between the cuts due to the intermittent cut, and the unnecessary sheet portion is separated from the adhesive sheet. 10. The sheet sticking method according to claim 9, wherein the breakage prevention notch dams the breakage in a direction away from the locus of the closed loop. The sheet pressing method according to claim 9 or 10, wherein the pressing force is applied to an area of the adhesive sheet.

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