JP2010050119A - Sheet bonding device and bonding method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sheet bonding device and a sheet bonding method, for restraining a material from being consumed uselessly, so as to reduce cost. <P>SOLUTION: This sheet bonding device is a sheet bonding means 10 for bonding an adhesive sheet S onto a semiconductor wafer W under decompressed atmosphere, and includes the first feeding means 12 for feeding a rolled material R attached temporarily with the adhesive sheet S on a release sheet RL, a peeling plate 13 for separating the adhesive sheet S from the release sheet RL, the second feeding means 14 for feeding a band-like auxiliary tape T having an adhesive layer A on one face, a temporarily bonding means 15 for bonding temporarily an nonbonding face side of the adhesive sheet S onto the adhesive layer A of the auxiliary tape T, and a bonding means 16 for facing the adhesive sheet S temporarily bonded onto the auxiliary tape T to the semiconductor wafer W in a case 11, and for bonding the adhesive sheet S onto the semiconductor wafer W by decompressing an inside od the case 11. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a sheet sticking apparatus and a sticking method, and for example, relates to a sheet sticking apparatus and a sticking method that can suppress material consumption when a high-cost adhesive sheet is employed.

2. Description of the Related Art Conventionally, a semiconductor wafer (hereinafter simply referred to as “wafer”) has an adhesive sheet attached to its circuit surface and back surface, and is subjected to various processes such as back surface grinding and dicing.
Patent Document 1 discloses a sheet sticking apparatus for sticking a protective tape constituting an adhesive sheet to a wafer. The device uses a suction table to suck the non-adhesive surface side of the protective sheet with the belt-shaped protective tape being fed out onto the affixing table having a circular hole, and cuts the protective tape according to the shape of the wafer. A configuration is adopted in which the protective tape is attached to the wafer in a decompression case.
Japanese Patent No. 3607143

However, in the sheet sticking apparatus of Patent Document 1, since the protective tape is cut along the inner periphery of the circular hole formed in the sticking table, the protective sheet is provided so as to cross the sticking table. At the time of unwinding, at least the protective sheet portion positioned between the inner peripheral edge and the outer peripheral edge of the attaching table is wasted without being involved as a portion attached to the wafer.
Therefore, in the configuration of Patent Document 1, since a large interval between the protective sheets formed by cutting must be ensured, there is a disadvantage that the amount is wasted. Such inconvenience becomes more apparent when an expensive sheet base material having a special function is employed.

[Object of invention]
The present invention has been devised by paying attention to such inconveniences, and an object of the present invention is to provide a sheet sticking apparatus and a sticking method capable of reducing cost by suppressing wasteful consumption of materials. It is in.

  To achieve the above object, the present invention arranges an adherend in an openable / closable case forming a decompression chamber, and decompresses the inside of the case with an adhesive sheet supplied to a position facing the adherend. In the sheet sticking apparatus for sticking the adhesive sheet to the adherend, the first feeding means for feeding out the original fabric on which the adhesive sheet is temporarily attached to one surface of the strip-shaped release sheet with a predetermined interval; A first peeling means for peeling the adhesive sheet from the release sheet in the course of feeding the original fabric; a second feeding means for feeding a belt-like auxiliary tape that is attached to the first feeding means and has an adhesive layer on one surface; A temporary sticking means for temporarily attaching the non-adhesive surface side of the adhesive sheet peeled from the release sheet to the adhesive layer of the auxiliary tape, and an adherend in the case where the adhesive sheet temporarily attached to the auxiliary tape is opened Relative to Causes, and a sticking means for sticking the adhesive sheet to the adherend under a reduced pressure to close the case, adopts a configuration that.

  In addition, the present invention provides an adherend in an openable / closable case forming a decompression chamber, and decompresses the inside of the case with an adhesive sheet supplied to a position opposite to the adherend. In a sheet sticking device for sticking an adhesive sheet to a body, first feeding means for feeding an original fabric in which a belt-like adhesive sheet base material is temporarily attached to one surface of a belt-like release sheet, and a closed loop on the adhesive sheet base material An adhesive sheet forming means for forming an adhesive sheet by forming an incision in shape, a first peeling means for peeling the adhesive sheet from the release sheet in the course of feeding the original fabric, A second feeding means for feeding a belt-shaped auxiliary tape having an adhesive layer on the surface thereof, a temporary sticking means for temporarily attaching the non-adhesive surface side of the adhesive sheet peeled from the release sheet to the adhesive layer of the auxiliary tape, Attaching means for attaching the adhesive sheet to the adherend by making the adhesive sheet temporarily attached to the auxiliary tape relative to the adherend in the opened case and closing the case to reduce the pressure, It is also possible to adopt the configuration.

  Further, the present invention is a sheet sticking method for sticking an adhesive sheet to an adherend in a reduced-pressure atmosphere, and a step of feeding out a raw material on which an adhesive sheet is temporarily attached to one surface of a strip-shaped release sheet at a predetermined interval; The process of peeling the adhesive sheet from the release sheet in the course of unwinding the original fabric, and assisting the non-adhesive surface side of the adhesive sheet peeled from the release sheet by feeding a strip-shaped auxiliary tape having an adhesive layer on one side A process of temporarily attaching to an adhesive layer of a tape, and an adhesive sheet temporarily attached to the auxiliary tape, relative to an adherend disposed in a predetermined case, and reducing the pressure in the case And a step of attaching an adhesive sheet to the substrate.

  Furthermore, the present invention is a sheet sticking method for sticking an adhesive sheet to an adherend in a reduced-pressure atmosphere, and a step of feeding a raw material in which a belt-like adhesive sheet base material is temporarily attached to one surface of a belt-like release sheet; A step of forming an adhesive sheet by forming a closed loop incision in the adhesive sheet substrate, a step of peeling the adhesive sheet from the release sheet in the course of feeding out the original fabric, and a belt-like shape having an adhesive layer on one surface A step of temporarily attaching the non-adhesive surface side of the adhesive sheet peeled off from the release sheet to the adhesive layer of the auxiliary tape, and arranging the adhesive sheet temporarily attached to the auxiliary tape in a predetermined case And a step of applying an adhesive sheet to the adherend by reducing the pressure inside the case relative to the adherend that has been made.

According to the present invention, in a state where the adhesive sheet is temporarily attached to the auxiliary tape, the adhesive sheet is disposed at a position facing the adherend disposed in the case, and the adhesive sheet is covered by pressure reduction after closing the case. Since it can be affixed to a kimono body, it becomes possible to use the original fabric which minimized the space | interval of the adhesive sheets temporarily attached to the peeling sheet. Therefore, for example, when an adhesive sheet having a high cost is employed, waste of the adhesive sheet can be minimized and material consumption can be suppressed. On the other hand, since the auxiliary tape is merely for temporarily holding the adhesive sheet while the adhesive sheet temporarily attached to the release sheet is attached to the adherend, it is sufficient to use a low-cost tape. Moreover, the cost burden is not substantially generated by using the auxiliary tape.
In addition, in the configuration in which the adhesive sheet is formed in the course of unwinding the original sheet in which the adhesive sheet base material is temporarily attached to the release sheet, it is possible to omit the step of forming the adhesive sheet in advance, and to match the size of the adherend. Thus, the adhesive sheet can be formed in real time.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 shows a schematic front view of a part of the sheet sticking apparatus according to the present embodiment in a cross-sectional view, and FIG. 2 shows a schematic plan view in which a part of FIG. 1 is omitted. In these drawings, the sheet sticking device 10 is provided with an adhesive sheet S (pressure-sensitive adhesive sheet) temporarily spaced from the openable / closable case 11 forming the decompression chamber C and one surface of the strip-like release sheet RL. The first feeding means 12 for feeding the worn original fabric R, the peel plate 13 as the first peeling means for peeling the adhesive sheet S from the release sheet RL in the middle of feeding the original fabric R, and the first feeding means 12 are provided. In addition, the second feeding means 14 for feeding out the strip-shaped auxiliary tape T having the adhesive layer A on one surface, and the non-adhesive surface side of the adhesive sheet S peeled from the release sheet RL is used as the adhesive for the auxiliary tape T. Temporary sticking means 15 temporarily attached to the layer A; adhesive means 16 for sticking the adhesive sheet S temporarily attached to the auxiliary tape T to a wafer W as an adherend disposed in the case 11; Adhesive sea After sticking a S, a second peeling means 17 for peeling the auxiliary tape T from the adhesive sheet S, and a and a recovery means 18 for recovering the auxiliary tape T. The adhesive layer A of the auxiliary tape T is configured to have a weaker adhesive force than the adhesive layer of the adhesive sheet S.

  The case 11 includes a first case 20 located on the lower side in FIG. 1 and a second case 21 located on the upper side. The first case 20 includes a bottom portion 23 that supports the table 22 via the linear motor 19 and an upright portion 25 that forms a recess 24 in the central portion. The first case 20 is connected to a pipe 26 and a three-way solenoid valve 27 connected to the upright portion 25, and is provided so as to be movable through lifting means (not shown). The three-way solenoid valve 27 is connected to a pipe 28 connected to a decompression pump (not shown) and a pipe 29 for introducing air, and decompresses the decompression chamber C with the case 11 closed or releases the decompression. Or atmospheric pressure.

The second case 21 includes a top portion 30 and a hanging portion 31, and sandwiching means 33 is disposed on the lower surface side of the top portion 30 at a position facing the table 22 that supports the wafer W. The sandwiching means 33 includes a sandwiching plate 36 that can be moved up and down via a linear motion motor 35, and an annular sandwiching protrusion 37 provided on the outer peripheral side of the lower surface of the sandwiching plate 36. including. The sandwiching convex portion 37 is configured to press the auxiliary tape T against the surface of the table 22 and press the adhesive sheet S onto the wafer W on the outer peripheral side of the wafer W. A plurality of through holes 36A are formed in the plane of the sandwiching plate 36, and the sandwiching means 33 sandwiches the adhesive sheet S and the wafer W between the table 11 via the auxiliary tape T. In addition, the space formed between the table 22 and the sandwiching plate 36 communicates with the decompression chamber C and constitutes a part of the decompression chamber C. Further, an O-ring 39 is received on the lower end surface of the hanging part 31. The second case 21 is supported so as to be movable in the vertical direction via a moving means (not shown). The second case 21 descends toward the first case 20 and the lower end surface of the hanging portion 31 is on the upper end side of the upright portion 25. The pressure reducing chamber C is formed by interacting with the first case 20.
Here, the case 11, the table 22, the sandwiching projection 37, the pipes 26, 28, 29 and the three-way solenoid valve 27 constitute the pasting means 16.

  The first feeding means 12 includes a support roller 41 that supports the original fabric R, a drive roller 42 that is connected to the output shaft of the motor M1 and applies an output to the original fabric R, and the drive roller 42. A pinch roller 43 that sandwiches the release sheet RL and a take-up roller 45 that winds the release sheet RL are included. Here, the raw fabric R is formed in a state where the interval between the adjacent adhesive sheets S is as small as possible. When forming this original fabric R, a band-shaped adhesive sheet base material is temporarily attached to the belt-shaped release sheet RL, and a closed-loop cut with a depth reaching the release sheet RL from the adhesive sheet base material side ( (Half cut) is provided and the outer region of the cut is removed as an unnecessary adhesive sheet. Accordingly, the smaller the mutual interval between the adhesive sheets S is, the more the amount of the adhesive sheet base material that can be removed can be suppressed, and the advantage when a special adhesive sheet with a high cost is adopted becomes large.

  The second feeding means 14 includes a feeding roller 46 that supports the auxiliary tape T so that the auxiliary tape T can be fed, and a motor M <b> 2 that rotationally drives the feeding roller 46. The auxiliary tape T is fed to the temporary sticking means 15 side, traverses between the first case 20 and the second case 21, and is collected by the collecting means 18 through the second peeling means 17. Here, as shown in FIG. 2, the auxiliary tape T has a width that does not block the decompression chamber C up and down, and a gap is provided so as not to partition the case 11 up and down. C1 is formed, whereby the decompression chamber C is formed as a single space.

  The temporary sticking means 15 includes a press roller 50 and a cylinder 51 that supports the press roller 50 so as to be movable back and forth in the vertical direction in FIG. The press roller 50 presses the auxiliary tape T to the non-adhesive surface (upper surface in FIG. 1) of the adhesive sheet S with a predetermined pressing force at the front end of the peel plate 13, and thereby adheres to the adhesive layer A of the auxiliary tape T. The sheet S can be temporarily attached.

  The second peeling means 17 is provided between a single-axis robot 55 having a slider 54 movable in the left-right direction in FIG. 1, a peeling roller 56 supported by the slider 54, and the peeling roller 56. A pinch roller 57 that sandwiches the tape T and a motor M3 that rotationally drives the peeling roller 56 are configured.

  The collection means 18 includes a collection roller 60 and a motor M4 that drives the collection roller 60 to rotate.

  Next, the sheet sticking method according to the present embodiment will be described with reference to FIGS.

  First, after the original fabric R supported by the support roller 41 of the first feeding means 12 is pulled out and wound around the peel plate 13, the lead end of the release sheet RL is fixed to the take-up roller 45, The adhesive sheet S is set so that the end in the feeding direction of the adhesive sheet S is located at a predetermined position. On the other hand, the auxiliary tape T is pulled out from the supply roller 46 of the second supply means 14, and the first and second cases 20 are passed through the second peeling means 17 positioned on the temporary sticking means 15 side. , 21 so as to pass through the gap between them, and the lead end is fixed to the collecting roller 60.

  When the wafer W is transferred to the table 22 via a transfer means (not shown), the second peeling means 17 is indicated by a solid line from the position indicated by the two-dot chain line in FIG. 1 while the motor M3 is locked. Move to position. At this time, the motor M1 is driven, the auxiliary tape T is pressed against the adhesive sheet S by the press roller 50, and the adhesive sheet S peeled off by the peel plate 13 is transferred to the auxiliary tape T. The motors M2 and M4 apply a predetermined tension to the auxiliary tape T so that the auxiliary tape T does not loosen.

  Then, when the adhesive sheet S temporarily attached to the auxiliary tape T as shown in FIG. 1 is drawn out to a position facing the wafer W, as shown in FIG. 3, the first and second cases 20, 21 are shown. Move in a direction approaching each other to close the case 11, and in this state, the three-way solenoid valve 27 is opened to the pipe 28 side, and the decompression of the decompression chamber C is started.

  When it is detected by the detection means (not shown) that the inside of the decompression chamber C has reached a predetermined decompression state, the linear motor 19 is driven and the upper surface of the table 22 is moved to the first case 20 as shown in FIG. The linear motion motor 35 is driven and the sandwiching convex portion 37 is lowered to press the auxiliary tape T against the table 22. In this state, the three-way solenoid valve 27 is opened to the pipe 29 side to make the inside of the decompression chamber C the atmosphere, and the adhesive sheet S is attached to the wafer W by this atmospheric pressure.

  Thereafter, as shown in FIG. 5, with the case 11 opened and the motors M2 and M4 locked, the peeling roller 56 is rotated to the right while being rotated by the motor M3 in synchronization with the drive of the single-axis robot 55. By moving, the auxiliary tape T is peeled from the adhesive sheet S.

  When the peeling of the auxiliary tape T is completed, the wafer W is transferred to the next process or a predetermined stocker via a transfer means (not shown), and thereafter the same operation as described above is repeated.

Therefore, according to such an embodiment, since the adhesive sheet S is temporarily attached to the auxiliary tape T, and the adhesive sheet S is adhered to the wafer W by feeding the auxiliary tape, the adhesive sheet S is attached to the auxiliary tape T. Even when the wafer W is disposed in the case 11 having a large plane size and the adhesive sheet S is stuck in a reduced pressure atmosphere, the adhesive sheet S of the raw fabric R may be one having a minimum mutual spacing. it can. For this reason, for example, even if the adhesive sheet base material forming the adhesive sheet S is expensive, the amount of removal as an unnecessary region can be reduced as much as possible to reduce the cost burden.
Further, since the auxiliary tape T is used for temporarily attaching and temporarily holding the adhesive sheet S, it is sufficient to use a general-purpose type tape that can be obtained at a low price. After being collected, it can be reused by being rewound onto the feeding roller 46, and no substantial cost burden is generated.

The best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
That is, the invention has been illustrated and described with particular reference to particular embodiments, but it should be understood that the above-described embodiments are not deviated from the technical idea and scope of the invention. On the other hand, various modifications can be made by those skilled in the art in shape, quantity, and other detailed configurations.
Therefore, the description limited to the shape disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded one part or all part is included in this invention.

For example, in the above-described embodiment, the case where the original sheet R temporarily attached to the release sheet RL with a predetermined interval is used is illustrated and described, but the configuration illustrated in FIG. 6 may be used. That is, a platen 71 that employs an original fabric R1 in which a strip-shaped adhesive sheet substrate SB is temporarily attached to one surface of the strip-shaped release sheet RL, and constitutes an adhesive sheet forming means 70 on the feeding path of the original fabric R1. And a cutter die 72 provided so as to be separated from and approachable to the platen 71, and the cutter sheet 72 forms a closed-loop cut in the adhesive sheet substrate SB to form the adhesive sheet S. May be. In this configuration, the unnecessary adhesive sheet base material portion located outside the adhesive sheet S is wound up via a winding means (not shown) before the adhesive sheet S is temporarily attached to the auxiliary tape T. preferable.
With such a configuration, the adhesive sheet S corresponding to the number of wafers to be processed can be formed and attached to the wafer W, and wafers of different sizes can be attached to this. It can respond by using a corresponding cutter die.

  Further, although the pressure sensitive adhesive sheet is used as the adhesive sheet S, the present invention is not limited to this, and a heat sensitive adhesive sheet such as an adhesive sheet for die bonding can also be adopted. In this case, a heater may be built in the table 22 or the air supplied via the pipes 26 and 29 may be warm air.

  Furthermore, the adherend is not limited to the wafer W, and other plate-like members such as a glass plate, a steel plate, or a resin plate can be targeted. The semiconductor wafer may be a silicon wafer or a compound wafer. .

1 is a schematic front view of a part of a sheet sticking device according to an embodiment. The schematic plan view which abbreviate | omitted a part of FIG. The schematic front view which shows the state in which the case formed the decompression chamber. The schematic sectional drawing which shows the state which pressed the adhesive sheet against the wafer. The schematic sectional drawing which shows the state which has peeled the auxiliary tape from the adhesive sheet. The schematic front view similar to FIG. 1 which shows a modification.

Explanation of symbols

10 Sheet sticking device 11 Case (sticking means)
12 First feeding means 13 Peel plate (first peeling means)
14 Second feeding means 15 Temporary sticking means 17 Second peeling means 22 Table (sticking means)
33 Clamping means (sticking means)
26, 28, 29 Piping (sticking means)
70 Adhesive sheet forming means A Adhesive layer C Decompression chamber (sticking means)
R, R1 Original fabric RL Release sheet S Adhesive sheet T Auxiliary tape W Semiconductor wafer (Substrate)

Claims (4)

The adherend is placed in an openable / closable case forming a decompression chamber, and the adhesive sheet is attached to the adherend by reducing the pressure in the case in a state where the adhesive sheet is supplied to a position facing the adherend. In the sheet sticking device to stick,
First feeding means for feeding out the original fabric with the adhesive sheet temporarily attached to one surface of the strip-like peeling sheet at a predetermined interval, and first peeling means for peeling the adhesive sheet from the peeling sheet in the course of feeding the original fabric And a second feeding means for feeding a belt-like auxiliary tape having an adhesive layer on one side thereof, and a non-adhesive surface side of the adhesive sheet peeled off from the release sheet. A temporary sticking means for temporarily adhering to the adhesive layer, and an adhesive sheet temporarily attached to the auxiliary tape to be opposed to the adherend in the opened case, and closing the case to reduce pressure A sheet sticking device comprising: sticking means for sticking an adhesive sheet to the sheet. The adherend is placed in an openable / closable case forming a decompression chamber, and the adhesive sheet is attached to the adherend by reducing the pressure in the case in a state where the adhesive sheet is supplied to a position facing the adherend. In the sheet sticking device to stick,
A first feeding means for feeding out a raw material in which a belt-like adhesive sheet base material is temporarily attached to one surface of the belt-like release sheet; and adhesion for forming an adhesive sheet by forming a closed-loop cut in the adhesive sheet base material Sheet forming means, first peeling means for peeling the adhesive sheet from the release sheet in the course of feeding out the original fabric, and a strip-shaped auxiliary tape that is attached to the first feeding means and has an adhesive layer on one surface The second feeding means for feeding, the temporary sticking means for temporarily attaching the non-adhesive surface side of the adhesive sheet peeled from the release sheet to the adhesive layer of the auxiliary tape, and the adhesive sheet temporarily attached to the auxiliary tape are opened. A sheet sticking apparatus comprising: an attaching means for attaching an adhesive sheet to an adherend by closing the case and reducing the pressure while making the case opposite to the adherend in the case. In the sheet sticking method of sticking the adhesive sheet to the adherend in a reduced pressure atmosphere,
A step of feeding out the original fabric on which the adhesive sheet is temporarily attached to one surface of the strip-shaped release sheet at a predetermined interval;
Peeling the adhesive sheet from the release sheet in the course of unwinding the original fabric,
A step of temporarily attaching a non-adhesive surface side of an adhesive sheet to be peeled off from the release sheet by feeding a belt-like auxiliary tape having an adhesive layer on one surface to the adhesive layer of the auxiliary tape;
A process of attaching the adhesive sheet to the adherend by causing the adhesive sheet temporarily attached to the auxiliary tape to be opposed to the adherend disposed in a predetermined case and reducing the pressure in the case. The sheet sticking method characterized by this. In the sheet sticking method of sticking the adhesive sheet to the adherend in a reduced pressure atmosphere,
A step of feeding out a raw material in which a belt-like adhesive sheet base material is temporarily attached to one surface of the belt-like release sheet;
Forming an adhesive sheet by forming a closed-loop cut in the adhesive sheet substrate; and
Peeling the adhesive sheet from the release sheet in the course of unwinding the original fabric,
A step of temporarily attaching a non-adhesive surface side of an adhesive sheet to be peeled off from the release sheet by feeding a belt-like auxiliary tape having an adhesive layer on one surface to the adhesive layer of the auxiliary tape;
A process of attaching the adhesive sheet to the adherend by causing the adhesive sheet temporarily attached to the auxiliary tape to be opposed to the adherend disposed in a predetermined case and reducing the pressure in the case. The sheet sticking method characterized by this.

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