JP2008044843A - 合成石英ガラス製プリフォーム - Google Patents
合成石英ガラス製プリフォーム Download PDFInfo
- Publication number
- JP2008044843A JP2008044843A JP2007250259A JP2007250259A JP2008044843A JP 2008044843 A JP2008044843 A JP 2008044843A JP 2007250259 A JP2007250259 A JP 2007250259A JP 2007250259 A JP2007250259 A JP 2007250259A JP 2008044843 A JP2008044843 A JP 2008044843A
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- JP
- Japan
- Prior art keywords
- preform
- content
- quartz glass
- ppm
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C4/00—Compositions for glass with special properties
- C03C4/0085—Compositions for glass with special properties for UV-transmitting glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1407—Deposition reactors therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1415—Reactant delivery systems
- C03B19/1423—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/07—Impurity concentration specified
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
- C03B2201/21—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with molecular hydrogen
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
- C03B2201/23—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with hydroxyl groups
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/60—Relationship between burner and deposit, e.g. position
- C03B2207/62—Distance
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
- C03C2201/20—Doped silica-based glasses containing non-metals other than boron or halide
- C03C2201/21—Doped silica-based glasses containing non-metals other than boron or halide containing molecular hydrogen
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
- C03C2201/20—Doped silica-based glasses containing non-metals other than boron or halide
- C03C2201/23—Doped silica-based glasses containing non-metals other than boron or halide containing hydroxyl groups
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2203/00—Production processes
- C03C2203/40—Gas-phase processes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Glass Compositions (AREA)
- Glass Melting And Manufacturing (AREA)
- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
- Preparation Of Compounds By Using Micro-Organisms (AREA)
Abstract
【解決手段】OH含有量≧1150ppm、応力複屈折≦5nm/cm、H2含有量≧1×1018分子/cm3、Cl含有量≦20ppm、微量不純物元素Cr、Co、Fe、Ni、Cu、V、Zu、Al、Li、K、Na含有量最大500ppbであり、且つ、実質的に層状構造を含まないプリフォーム18とする。さらには、コア部の直径がプリフォームの直径の少なくとも50%、コア部のOH含有量が1250ppm以上かつ±10ppmの範囲内で一定であり、層状構造を全く含まないプリフォームとする。
【選択図】図1
Description
−コンパクトな石英ガラスに分子状水素を導入する。
−高純度の原料を使用する。
−塩素を含まない原料を使用する。
−石英ガラスにフッ素等をドーピングする。
10 マッフル炉
11乃至13 シェル
14 炉内空間
15 小さい開口部
16 バーナー
17 大きい開口部
18 プリフォーム
19 放物面状の側面
20 境界面
21 頂部
22 プラトー
23 火炎
X−X 回転軸
Y−Y バーナーの軸
Claims (7)
- 原材料としてSiCl4を用いて、火炎加水分解およびそれに続く冷却により製造された合成石英ガラスから成り、波長250nm以下の高エネルギーDUV輻射に使用するのに適したプリフォームであって、
OH含有量≧1150ppm、応力複屈折≦5nm/cm、H2含有量≧1×1018分子/cm3、Cl含有量≦20ppm、微量不純物元素Cr、Co、Fe、Ni、Cu、V、Zn、Al、Li、K、Na含有量最大500ppbであり、且つ、実質的に層状構造を含まず、そして、波長λ1=248nm、レーザー入射周波数≧300Hz、レーザー入射回数≧109、エネルギー密度≦10mJ/cm2、または波長λ2=193nm、レーザー入射周波数≧300Hz、レーザー入射回数≧109、エネルギー密度≦5mJ/cm2の条件で照射したときの高エネルギーDUV輻射に対して耐性を有し、特に、波長λ1=248nm、レーザー入射周波数=300Hz、レーザー入射回数=109、エネルギー密度=10mJ/cm2、または波長λ2=193nm、レーザー入射周波数=300Hz、レーザー入射回数=109、エネルギー密度=5mJ/cm2の条件で照射したときの高エネルギーDUV輻射に対する耐性が、厚さ1cmにつきΔT≦0.1%の透過率低下で示されるコア部を有することを特徴とするプリフォーム。 - 照射条件を変化させたとき、透過率低下は変化するが、同じダメージ挙動に順ずることを特徴とする、請求項1のプリフォーム。
- コア部の直径がプリフォームの直径の少なくとも50%であることを特徴とする、請求項2のプリフォーム。
- 全く層状構造を含まないことを特徴とする、請求項3のプリフォーム。
- コア部のOH含有量が≧1250ppmであることを特徴とする、請求項4のプリフォーム。
- コア部のOH含有量が許容差±10ppmの範囲内で一定であることを特徴とする、請求項1または5のプリフォーム。
- コア部の少なくとも一部において屈折率の均一性が≦0.5×10-6であることを特徴とする、請求項1から6のいずれかのプリフォーム。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19709379 | 1997-03-07 | ||
DE19709379.5 | 1997-03-07 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53919898A Division JP4189441B2 (ja) | 1997-03-07 | 1998-03-06 | 合成石英ガラス製プリフォームおよびその製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008044843A true JP2008044843A (ja) | 2008-02-28 |
JP4834635B2 JP4834635B2 (ja) | 2011-12-14 |
Family
ID=7822572
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53919898A Expired - Fee Related JP4189441B2 (ja) | 1997-03-07 | 1998-03-06 | 合成石英ガラス製プリフォームおよびその製造装置 |
JP2007250259A Expired - Lifetime JP4834635B2 (ja) | 1997-03-07 | 2007-09-26 | 合成石英ガラス製プリフォーム |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53919898A Expired - Fee Related JP4189441B2 (ja) | 1997-03-07 | 1998-03-06 | 合成石英ガラス製プリフォームおよびその製造装置 |
Country Status (6)
Country | Link |
---|---|
US (2) | US6423656B1 (ja) |
EP (1) | EP0964832B1 (ja) |
JP (2) | JP4189441B2 (ja) |
AT (1) | ATE201390T1 (ja) |
DE (1) | DE59800763D1 (ja) |
WO (1) | WO1998040319A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010159206A (ja) * | 2008-12-29 | 2010-07-22 | Schott Ag | 高屈折率合成シリカガラスの製造方法、該方法に用いるマッフル炉、及び該方法により得られるシリカガラス |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19850736C2 (de) * | 1998-11-04 | 2003-04-17 | Heraeus Tenevo Ag | Kernglas für eine Vorform für eine optische Faser, unter Verwendung des Kernglases hergestellte Vorform, sowie Verfahren zur Herstellung des Kernglases einer Vorform für eine optische Faser |
JP4601022B2 (ja) * | 1999-03-04 | 2010-12-22 | 信越石英株式会社 | ArFエキシマレーザーリソグラフィー用合成石英ガラス部材 |
EP1114802A4 (en) * | 1999-04-21 | 2008-12-31 | Nikon Corp | SILICA GLASS ELEMENT, PRODUCTION METHOD AND PROJECTION ALIGNER USING THE SAME |
KR100662319B1 (ko) * | 1999-07-05 | 2006-12-28 | 가부시키가이샤 니콘 | 석영글래스 부재의 제조방법 및 그 방법에 의해 얻어지는석영글래스 부재 |
EP1149056B1 (de) | 1999-10-14 | 2005-02-16 | Schott Ag | Anordnung zur erzeugung optisch homogener, schlierenfreier quarzglaskörper durch flammenhydrolyse |
DE50312961D1 (de) * | 2002-03-01 | 2010-09-23 | Schott Ag | Verfahren zu Herstellung von Quarzglas und einer Quarzglasvorform |
EP1471038A3 (de) * | 2003-04-26 | 2005-11-23 | Schott Ag | Verfahren zur Herstellung von Glaskörpern aus dotiertem Quarzglas |
US7265070B2 (en) * | 2003-11-26 | 2007-09-04 | Corning Incorporated | Synthetic silica glass optical material having high resistance to optically induced index change |
US20060218971A1 (en) * | 2005-02-10 | 2006-10-05 | Rolf Martin | Synthetic quartz glass and process for producing a quartz glass body |
EP1690837A1 (de) * | 2005-02-10 | 2006-08-16 | Schott AG | Synthetisches Quarzglas sowie Verfahren zur Herstellung eines Quarzglas-Körpers |
US9399000B2 (en) | 2006-06-20 | 2016-07-26 | Momentive Performance Materials, Inc. | Fused quartz tubing for pharmaceutical packaging |
JP5737070B2 (ja) * | 2010-09-02 | 2015-06-17 | 信越化学工業株式会社 | チタニアドープ石英ガラス及びその製造方法 |
DE102012000418A1 (de) * | 2011-12-23 | 2013-06-27 | J-Plasma Gmbh | Verfahren zum Herstellen von Stablinsen und Vorrichtung hierfür |
US9903054B2 (en) | 2014-08-27 | 2018-02-27 | Nike, Inc. | Knitted component having tensile strand for adjusting auxetic portion |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03109233A (ja) * | 1989-06-14 | 1991-05-09 | Shinetsu Sekiei Kk | 紫外線レーザ用合成シリカガラス光学体及びその製造方法 |
JPH06305736A (ja) * | 1993-04-27 | 1994-11-01 | Shin Etsu Chem Co Ltd | 合成石英ガラス部材の製造方法 |
JPH07267662A (ja) * | 1994-03-26 | 1995-10-17 | Shinetsu Quartz Prod Co Ltd | 光学用合成石英ガラス成形体及びその製造方法 |
JPH092828A (ja) * | 1995-01-06 | 1997-01-07 | Nikon Corp | 石英ガラス、それを含む光学部材、並びにその製造方法 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4398474A (en) * | 1979-02-09 | 1983-08-16 | Pyreflex Corporation | Insulating structure for high temperature devices |
JPS6041538A (ja) * | 1983-08-16 | 1985-03-05 | Sumitomo Electric Ind Ltd | 窓くもり防止装置 |
US4707173A (en) * | 1986-05-15 | 1987-11-17 | The Furukawa Electric Co., Ltd. | Method of fabricating porous glass rod and apparatus for fabricating the same |
JPS63123831A (ja) | 1986-11-10 | 1988-05-27 | Sumitomo Electric Ind Ltd | 光フアイバ用母材の製造方法 |
JPS63248734A (ja) * | 1987-04-06 | 1988-10-17 | Hitachi Cable Ltd | 光フアイバ母材の製造方法 |
JPH01257146A (ja) | 1988-04-05 | 1989-10-13 | Japan Metals & Chem Co Ltd | 合成石英インゴット製造用保温炉 |
DE69015453T3 (de) * | 1989-06-09 | 2001-10-11 | Heraeus Quarzglas | Optische Teile und Rohlinge aus synthetischem Siliziumdioxidglas und Verfahren zu ihrer Herstellung. |
US5410428A (en) * | 1990-10-30 | 1995-04-25 | Shin-Etsu Quartz Products Co. Ltd. | Optical member made of high-purity and transparent synthetic silica glass and method for production thereof or blank thereof |
JPH04193730A (ja) * | 1990-11-26 | 1992-07-13 | Fujikura Ltd | 光ファイバ母材の製造方法および酸水素バーナ用フード |
DE4203287C2 (de) | 1992-02-03 | 1994-05-26 | Bql Burgauer Quarzglasschmelze | Verfahren zum Kontrollieren des Abstandes zwischen einem Brenner und einer rotierenden, in Achsrichtung verstellbaren Ablagerungsfläche für glasiges Material und Vorrichtung zur Durchführung des Verfahrens |
US5352230A (en) * | 1992-02-19 | 1994-10-04 | Biomet, Inc. | Pneumatic impulse tool |
JP3137517B2 (ja) | 1993-11-17 | 2001-02-26 | 信越化学工業株式会社 | 合成石英ガラス部材の製造方法および合成石英ガラス製造用バーナー |
JP3705501B2 (ja) * | 1994-08-03 | 2005-10-12 | 信越化学工業株式会社 | エキシマレーザ光学素材用合成石英ガラス部材の製造方法 |
US6087283A (en) * | 1995-01-06 | 2000-07-11 | Nikon Corporation | Silica glass for photolithography |
US5707908A (en) * | 1995-01-06 | 1998-01-13 | Nikon Corporation | Silica glass |
JP3064857B2 (ja) | 1995-03-28 | 2000-07-12 | 株式会社ニコン | 光リソグラフィー用光学部材および合成石英ガラスの製造方法 |
EP0850201B1 (en) * | 1995-09-12 | 2003-07-16 | Corning Incorporated | Containment vessel for producing fused silica glass |
EP0780345A1 (en) | 1995-12-22 | 1997-06-25 | Corning Incorporated | Optical element for UV transmission |
US5958809A (en) * | 1996-08-21 | 1999-09-28 | Nikon Corporation | Fluorine-containing silica glass |
US6543257B1 (en) * | 1999-05-28 | 2003-04-08 | The Furukawa Electric Co., Ltd. | Dehydration and sintering apparatus for porous optical fiber preform |
EP1149056B1 (de) * | 1999-10-14 | 2005-02-16 | Schott Ag | Anordnung zur erzeugung optisch homogener, schlierenfreier quarzglaskörper durch flammenhydrolyse |
-
1998
- 1998-03-06 US US09/381,490 patent/US6423656B1/en not_active Expired - Lifetime
- 1998-03-06 AT AT98921387T patent/ATE201390T1/de not_active IP Right Cessation
- 1998-03-06 WO PCT/EP1998/001311 patent/WO1998040319A1/de active IP Right Grant
- 1998-03-06 JP JP53919898A patent/JP4189441B2/ja not_active Expired - Fee Related
- 1998-03-06 EP EP98921387A patent/EP0964832B1/de not_active Revoked
- 1998-03-06 DE DE59800763T patent/DE59800763D1/de not_active Revoked
-
2002
- 2002-05-30 US US10/161,433 patent/US6920766B2/en not_active Expired - Fee Related
-
2007
- 2007-09-26 JP JP2007250259A patent/JP4834635B2/ja not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03109233A (ja) * | 1989-06-14 | 1991-05-09 | Shinetsu Sekiei Kk | 紫外線レーザ用合成シリカガラス光学体及びその製造方法 |
JPH06305736A (ja) * | 1993-04-27 | 1994-11-01 | Shin Etsu Chem Co Ltd | 合成石英ガラス部材の製造方法 |
JPH07267662A (ja) * | 1994-03-26 | 1995-10-17 | Shinetsu Quartz Prod Co Ltd | 光学用合成石英ガラス成形体及びその製造方法 |
JPH092828A (ja) * | 1995-01-06 | 1997-01-07 | Nikon Corp | 石英ガラス、それを含む光学部材、並びにその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010159206A (ja) * | 2008-12-29 | 2010-07-22 | Schott Ag | 高屈折率合成シリカガラスの製造方法、該方法に用いるマッフル炉、及び該方法により得られるシリカガラス |
Also Published As
Publication number | Publication date |
---|---|
WO1998040319A1 (de) | 1998-09-17 |
US20020148256A1 (en) | 2002-10-17 |
JP4834635B2 (ja) | 2011-12-14 |
US6423656B1 (en) | 2002-07-23 |
EP0964832B1 (de) | 2001-05-23 |
ATE201390T1 (de) | 2001-06-15 |
JP2001516325A (ja) | 2001-09-25 |
JP4189441B2 (ja) | 2008-12-03 |
US6920766B2 (en) | 2005-07-26 |
DE59800763D1 (de) | 2001-06-28 |
EP0964832A1 (de) | 1999-12-22 |
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