JP2008014789A - フローセンサ - Google Patents
フローセンサ Download PDFInfo
- Publication number
- JP2008014789A JP2008014789A JP2006186080A JP2006186080A JP2008014789A JP 2008014789 A JP2008014789 A JP 2008014789A JP 2006186080 A JP2006186080 A JP 2006186080A JP 2006186080 A JP2006186080 A JP 2006186080A JP 2008014789 A JP2008014789 A JP 2008014789A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- flow
- flow path
- inclined surface
- flow sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims abstract description 39
- 238000001514 detection method Methods 0.000 claims abstract description 32
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 32
- 238000009751 slip forming Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 description 15
- 239000000758 substrate Substances 0.000 description 14
- 125000006850 spacer group Chemical group 0.000 description 9
- 239000000428 dust Substances 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 210000000078 claw Anatomy 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 239000003566 sealing material Substances 0.000 description 5
- 239000007788 liquid Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000004734 Polyphenylene sulfide Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229920000069 polyphenylene sulfide Polymers 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Abstract
【解決手段】フローセンサ10は、被測定流体の流量を測定する流量計である。該フローセンサ10は、被測定流体が流れる流路12と、前記流路12を画成する天壁26から流路12に臨むように配置されたセンサ16と、前記センサ16が配置された部分の天壁26と対向する絞り面24aと、前記絞り面24aの上流側に設けられ、前記流路12の入口側に向かって流路が広くなるように設けられた傾斜面24bとを有する。そして、前記傾斜面24bはその延長線が前記センサ16の検出部16aよりも上流側に偏位した位置を通過する角度に形成されている。
【選択図】図3
Description
14…本体
14a、14b、46a、48a、64b、68…孔部
16…センサ 16a…検出部
16b…検出面 18…センサ基板
20…入口部
20a、20b、22a、22b、38…溝部
22…出口部 24…突起部
24a…絞り面 24b、24c…傾斜面
26…天壁 26a…センサ孔
28…底壁 40、42…インサートナット
40a、42a、72…ネジ部 40c、40d、42c、42d…突起
41、43…凹部 44、45…メッシュ
46、48…固定ネジ 60…スペーサ
74…出力基板
Claims (6)
- 被測定流体が流れる流路を形成した本体と、
前記流路を画成する天壁から該流路に臨むように配置されたセンサと、
前記センサと対向する絞り面と、
前記絞り面の上流側に連続して形成され、前記天壁との間で形成される流路が上流側に向かって広くなるように設けられた第1傾斜面と、
を有し、
前記第1傾斜面はその延長線が前記センサの検出面に設けられた検出部よりも上流側に偏位した位置を通過する角度に形成されていることを特徴とするフローセンサ。 - 請求項1記載のフローセンサにおいて、
さらに、前記絞り面の下流側に連続して形成され、前記天壁との間で形成される流路が下流側に向かって広くなるように設けられた第2傾斜面を有し、
前記第2傾斜面はその延長線が前記センサの検出面に設けられた検出部よりも下流側に偏位した位置を通過する角度に形成されていることを特徴とするフローセンサ。 - 請求項1又は2記載のフローセンサにおいて、
前記第1傾斜面の上流側に連続する底壁と該第1傾斜面とがなす角度、及び(又は)、前記第2傾斜面の下流側に連続する底壁と該第2傾斜面とがなす角度は、150°以下であることを特徴とするフローセンサ。 - 請求項1〜3のいずれか1項に記載のフローセンサにおいて、
前記被測定流体の流れ方向での前記絞り面の長さは、該流れ方向での前記センサの長さよりも大きいことを特徴とするフローセンサ。 - 請求項1〜4のいずれか1項に記載のフローセンサにおいて、
前記流路の入口側及び(又は)出口側には網体が設けられていることを特徴とするフローセンサ。 - 請求項5記載のフローセンサにおいて、
前記網体は、該網体に対して前記被測定流体を流通させる固定ネジにより取り付けられていることを特徴とするフローセンサ。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006186080A JP5066675B2 (ja) | 2006-07-05 | 2006-07-05 | フローセンサ |
TW096120929A TWI336393B (en) | 2006-07-05 | 2007-06-11 | Flow sensor |
US11/765,943 US7549332B2 (en) | 2006-07-05 | 2007-06-20 | Flow sensor and throttle structure |
DE102007030439.2A DE102007030439B4 (de) | 2006-07-05 | 2007-06-29 | Strömungssensor |
KR1020070067555A KR20080004406A (ko) | 2006-07-05 | 2007-07-05 | 플로우센서 |
CNB2007101274526A CN100526812C (zh) | 2006-07-05 | 2007-07-05 | 流量传感器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006186080A JP5066675B2 (ja) | 2006-07-05 | 2006-07-05 | フローセンサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008014789A true JP2008014789A (ja) | 2008-01-24 |
JP5066675B2 JP5066675B2 (ja) | 2012-11-07 |
Family
ID=38825459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006186080A Active JP5066675B2 (ja) | 2006-07-05 | 2006-07-05 | フローセンサ |
Country Status (6)
Country | Link |
---|---|
US (1) | US7549332B2 (ja) |
JP (1) | JP5066675B2 (ja) |
KR (1) | KR20080004406A (ja) |
CN (1) | CN100526812C (ja) |
DE (1) | DE102007030439B4 (ja) |
TW (1) | TWI336393B (ja) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8113046B2 (en) * | 2010-03-22 | 2012-02-14 | Honeywell International Inc. | Sensor assembly with hydrophobic filter |
US8397586B2 (en) * | 2010-03-22 | 2013-03-19 | Honeywell International Inc. | Flow sensor assembly with porous insert |
US8656772B2 (en) | 2010-03-22 | 2014-02-25 | Honeywell International Inc. | Flow sensor with pressure output signal |
US8756990B2 (en) | 2010-04-09 | 2014-06-24 | Honeywell International Inc. | Molded flow restrictor |
US8528399B2 (en) | 2010-05-21 | 2013-09-10 | The Mercury Iron and Steel Co. | Methods and apparatuses for measuring properties of a substance in a process stream |
US8418549B2 (en) | 2011-01-31 | 2013-04-16 | Honeywell International Inc. | Flow sensor assembly with integral bypass channel |
US9003877B2 (en) | 2010-06-15 | 2015-04-14 | Honeywell International Inc. | Flow sensor assembly |
USD653136S1 (en) * | 2010-07-02 | 2012-01-31 | The Mercury Iron and Steel Co. | Sensing apparatus |
US8695417B2 (en) | 2011-01-31 | 2014-04-15 | Honeywell International Inc. | Flow sensor with enhanced flow range capability |
JP5932508B2 (ja) | 2012-06-15 | 2016-06-08 | 日立オートモティブシステムズ株式会社 | 熱式流量計およびその製造方法 |
US9052217B2 (en) | 2012-11-09 | 2015-06-09 | Honeywell International Inc. | Variable scale sensor |
US9874467B2 (en) * | 2015-02-23 | 2018-01-23 | Aceinna, Inc. | MEMS thermal flow sensor with compensation for fluid composition |
JP6815847B2 (ja) * | 2016-11-25 | 2021-01-20 | 株式会社堀場エステック | 流路形成構造、流量測定装置及び流量制御装置 |
US10274353B2 (en) * | 2017-03-22 | 2019-04-30 | A. O. Smith Corporation | Flow sensor with hot film anemometer |
CN114288503B (zh) * | 2017-09-13 | 2023-12-15 | 深圳迈瑞生物医疗电子股份有限公司 | 呼吸机 |
JP7005856B2 (ja) * | 2017-11-20 | 2022-01-24 | ミネベアミツミ株式会社 | 気流測定装置、及びこれを用いた環境測定装置 |
US11408961B2 (en) * | 2018-05-03 | 2022-08-09 | The Government Of The United States Of America, As Represented By The Secretary Of The Navy | Floating base vector sensor |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60220864A (ja) * | 1983-12-27 | 1985-11-05 | 株式会社山武 | 流速センサのハウジング |
JPH02221817A (ja) * | 1988-12-16 | 1990-09-04 | Honeywell Inc | 流量計における流体組成補正方法 |
US6234016B1 (en) * | 1997-12-31 | 2001-05-22 | Honeywell International Inc. | Time lag approach for measuring fluid velocity |
US20020078744A1 (en) * | 2000-12-21 | 2002-06-27 | Gehman Richard William | system for sensing the motion or pressure of a fluid |
JP2003523506A (ja) * | 2000-02-16 | 2003-08-05 | ハネウェル・インターナショナル・インコーポレーテッド | 流量モジュールおよび一体化された流れ制限器 |
JP2003270015A (ja) * | 2002-03-14 | 2003-09-25 | Denso Corp | 流量測定装置 |
JP2004003887A (ja) * | 2002-05-31 | 2004-01-08 | Yamatake Corp | 流量計 |
US20050011259A1 (en) * | 2001-10-19 | 2005-01-20 | Ark-Les Corporation, A Massachusetts Corporation | Oil flow sensing |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2933116A1 (de) * | 1979-08-16 | 1981-02-26 | Rico Ges Fuer Microelektronik | Einrichtung zur messung des atemluftstromes von patienten |
JPS57173758A (en) * | 1981-04-20 | 1982-10-26 | Hitachi Ltd | Hot wire type current meter |
JPH0643907B2 (ja) * | 1988-12-15 | 1994-06-08 | 山武ハネウエル株式会社 | 流量計 |
US5081866A (en) * | 1990-05-30 | 1992-01-21 | Yamatake-Honeywell Co., Ltd. | Respiratory air flowmeter |
US5220830A (en) * | 1991-07-09 | 1993-06-22 | Honeywell Inc. | Compact gas flow meter using electronic microsensors |
DE19618520C1 (de) | 1996-05-08 | 1997-09-18 | Franz Willam | Atemstrommesser |
JP3385307B2 (ja) * | 1998-05-11 | 2003-03-10 | 三菱電機株式会社 | 流量センサ |
JP4811695B2 (ja) * | 2000-05-30 | 2011-11-09 | 株式会社デンソー | 流量測定装置 |
DE10135142A1 (de) * | 2001-04-20 | 2002-10-31 | Bosch Gmbh Robert | Vorrichtung zur Bestimmung zumindest eines Parameters eines in einer Leitung strömenden Mediums |
JP3999050B2 (ja) | 2002-05-31 | 2007-10-31 | 株式会社山武 | 流量計 |
JP4193612B2 (ja) * | 2003-06-30 | 2008-12-10 | オムロン株式会社 | 整流素子の取付け構造 |
JP2005140672A (ja) | 2003-11-07 | 2005-06-02 | Toyota Boshoku Corp | 吸気ダクト装置 |
JP4079116B2 (ja) | 2004-04-30 | 2008-04-23 | オムロン株式会社 | 流量計 |
-
2006
- 2006-07-05 JP JP2006186080A patent/JP5066675B2/ja active Active
-
2007
- 2007-06-11 TW TW096120929A patent/TWI336393B/zh active
- 2007-06-20 US US11/765,943 patent/US7549332B2/en active Active
- 2007-06-29 DE DE102007030439.2A patent/DE102007030439B4/de active Active
- 2007-07-05 KR KR1020070067555A patent/KR20080004406A/ko active Search and Examination
- 2007-07-05 CN CNB2007101274526A patent/CN100526812C/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60220864A (ja) * | 1983-12-27 | 1985-11-05 | 株式会社山武 | 流速センサのハウジング |
JPH02221817A (ja) * | 1988-12-16 | 1990-09-04 | Honeywell Inc | 流量計における流体組成補正方法 |
US6234016B1 (en) * | 1997-12-31 | 2001-05-22 | Honeywell International Inc. | Time lag approach for measuring fluid velocity |
JP2003523506A (ja) * | 2000-02-16 | 2003-08-05 | ハネウェル・インターナショナル・インコーポレーテッド | 流量モジュールおよび一体化された流れ制限器 |
US20020078744A1 (en) * | 2000-12-21 | 2002-06-27 | Gehman Richard William | system for sensing the motion or pressure of a fluid |
US20050011259A1 (en) * | 2001-10-19 | 2005-01-20 | Ark-Les Corporation, A Massachusetts Corporation | Oil flow sensing |
JP2003270015A (ja) * | 2002-03-14 | 2003-09-25 | Denso Corp | 流量測定装置 |
JP2004003887A (ja) * | 2002-05-31 | 2004-01-08 | Yamatake Corp | 流量計 |
Also Published As
Publication number | Publication date |
---|---|
US20080006085A1 (en) | 2008-01-10 |
CN100526812C (zh) | 2009-08-12 |
TW200806963A (en) | 2008-02-01 |
DE102007030439A1 (de) | 2008-01-17 |
JP5066675B2 (ja) | 2012-11-07 |
KR20080004406A (ko) | 2008-01-09 |
US7549332B2 (en) | 2009-06-23 |
DE102007030439B4 (de) | 2021-07-29 |
CN101101227A (zh) | 2008-01-09 |
TWI336393B (en) | 2011-01-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5066675B2 (ja) | フローセンサ | |
US7059184B2 (en) | Split-flow-type flow sensor device | |
KR100827759B1 (ko) | 유량계 | |
RU2222784C2 (ru) | Расходомер | |
JP4158980B2 (ja) | マルチ渦流量計 | |
US7559256B2 (en) | Flow rate measuring device | |
US7302862B2 (en) | Flow rate-measuring device | |
JP2008232943A (ja) | 超音波ガスメーター | |
JP4719075B2 (ja) | 流量計 | |
WO2004025226A1 (ja) | 整流装置 | |
EP2245431A1 (en) | Thermal flow sensor with turbulence inducers | |
JP2003185477A (ja) | 流量計 | |
JP3921518B2 (ja) | 電子化ガスメータの脈動吸収構造 | |
JP2002148091A (ja) | ガスメータ | |
JP4053797B2 (ja) | 整流器 | |
JP5035957B2 (ja) | 気体流量計およびその取り付け方法 | |
JP4993352B2 (ja) | 流量計 | |
JP2015206629A (ja) | 渦流量計 | |
JP2006349643A (ja) | ガスメータ | |
JP3017832B2 (ja) | フルイディック流量計 | |
JP2591172Y2 (ja) | フルイディック流量計の整流器取付構造 | |
JPH10185643A (ja) | 流量計 | |
JP2004093393A (ja) | 電子化ガスメータの脈動吸収構造 | |
JP2008267821A (ja) | 流量計 | |
JP2002162276A (ja) | ガスメータ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090617 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20111109 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20111115 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120113 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120327 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120517 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120605 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120709 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150824 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5066675 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |