JP2008004547A5 - - Google Patents

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Publication number
JP2008004547A5
JP2008004547A5 JP2007158006A JP2007158006A JP2008004547A5 JP 2008004547 A5 JP2008004547 A5 JP 2008004547A5 JP 2007158006 A JP2007158006 A JP 2007158006A JP 2007158006 A JP2007158006 A JP 2007158006A JP 2008004547 A5 JP2008004547 A5 JP 2008004547A5
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JP
Japan
Prior art keywords
chamber
structure according
chamber structure
shaft
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007158006A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008004547A (ja
JP4668244B2 (ja
Filing date
Publication date
Priority claimed from DE102006027820A external-priority patent/DE102006027820B4/de
Application filed filed Critical
Publication of JP2008004547A publication Critical patent/JP2008004547A/ja
Publication of JP2008004547A5 publication Critical patent/JP2008004547A5/ja
Application granted granted Critical
Publication of JP4668244B2 publication Critical patent/JP4668244B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007158006A 2006-06-16 2007-06-14 電子ビーム加工で使用するためのチャンバ構造 Active JP4668244B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006027820A DE102006027820B4 (de) 2006-06-16 2006-06-16 Kammeranordnung zur Verwendung bei der Elektronenstrahlbearbeitung

Publications (3)

Publication Number Publication Date
JP2008004547A JP2008004547A (ja) 2008-01-10
JP2008004547A5 true JP2008004547A5 (enExample) 2010-06-24
JP4668244B2 JP4668244B2 (ja) 2011-04-13

Family

ID=38523464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007158006A Active JP4668244B2 (ja) 2006-06-16 2007-06-14 電子ビーム加工で使用するためのチャンバ構造

Country Status (5)

Country Link
EP (1) EP1867426B1 (enExample)
JP (1) JP4668244B2 (enExample)
CN (1) CN101096062A (enExample)
AT (1) ATE449659T1 (enExample)
DE (2) DE102006027820B4 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8234049B2 (en) 2008-03-14 2012-07-31 GM Global Technology Operations LLC ECM security strategy for rationalizing and controlling increasing transmission torque requests above driver command
RU2493573C2 (ru) * 2008-06-16 2013-09-20 Конинклейке Филипс Электроникс Н.В. Детектор излучений и способ изготовления детектора излучений
DE102008059741B4 (de) * 2008-12-01 2017-06-01 Global Beam Technologies Ag Vorrichtung zur Bearbeitung von Werkstücken unter Vakuum
CN104858542B (zh) * 2015-06-05 2017-04-05 北京星航机电装备有限公司 针对多舱段薄壁钛合金箱体结构的真空电子束焊接方法
CN106425309A (zh) * 2016-11-14 2017-02-22 北京星航机电装备有限公司 一种钛合金折叠翼面的加工制造方法
CN111347145B (zh) * 2018-12-20 2025-09-05 中核建中核燃料元件有限公司 一种电子束波纹管
JP7178613B2 (ja) * 2019-03-29 2022-11-28 パナソニックＩｐマネジメント株式会社 光検出器
CN110315189B (zh) * 2019-07-17 2021-09-14 陕西千山航空电子有限责任公司 一种电子束焊接辅助件及焊接方法
CN111702317A (zh) * 2020-06-30 2020-09-25 中国航发动力股份有限公司 一种双面行星焊缝结构电子束焊方法
CN112620912B (zh) * 2020-11-27 2022-05-10 广州诺星智能科技有限公司 一种带有放置台的电子束切割设备
CN112719770B (zh) * 2020-12-28 2023-04-28 中国二十冶集团有限公司 一种调整烘干机托圈与筒体间隙尺寸的方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3424891A (en) * 1967-03-16 1969-01-28 North American Rockwell Portable welding chamber
JPS59104282A (ja) * 1982-12-07 1984-06-16 Mitsubishi Electric Corp 電子ビ−ム溶接装置
JPH03226386A (ja) * 1990-01-31 1991-10-07 Mitsubishi Electric Corp 電子ビーム加工機
DE4425090C1 (de) * 1994-07-15 1996-03-07 Saechsische Elektronenstrahl G Schwenkbare Elektronenkanone
JPH08132256A (ja) * 1994-11-11 1996-05-28 Mitsubishi Electric Corp 電子ビーム加工装置
US6710360B2 (en) * 2002-07-10 2004-03-23 Axcelis Technologies, Inc. Adjustable implantation angle workpiece support structure for an ion beam implanter
US7030395B2 (en) * 2004-08-06 2006-04-18 Axcelis Technologies, Inc. Workpiece support structure for an ion beam implanter featuring spherical sliding seal vacuum feedthrough
JP2006095553A (ja) * 2004-09-29 2006-04-13 F C C:Kk 電子ビーム溶接装置

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