JP2018535548A5 - - Google Patents

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Publication number
JP2018535548A5
JP2018535548A5 JP2018520529A JP2018520529A JP2018535548A5 JP 2018535548 A5 JP2018535548 A5 JP 2018535548A5 JP 2018520529 A JP2018520529 A JP 2018520529A JP 2018520529 A JP2018520529 A JP 2018520529A JP 2018535548 A5 JP2018535548 A5 JP 2018535548A5
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JP
Japan
Prior art keywords
idler
assembly
drive
robot
arm
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Application number
JP2018520529A
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English (en)
Japanese (ja)
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JP6860562B2 (ja
JP2018535548A (ja
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Priority claimed from US14/921,806 external-priority patent/US9799544B2/en
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Publication of JP2018535548A publication Critical patent/JP2018535548A/ja
Publication of JP2018535548A5 publication Critical patent/JP2018535548A5/ja
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Publication of JP6860562B2 publication Critical patent/JP6860562B2/ja
Expired - Fee Related legal-status Critical Current
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JP2018520529A 2015-10-23 2016-09-28 電子デバイス製造において基板を搬送するためのロボットアセンブリ、基板処理装置、及び方法 Expired - Fee Related JP6860562B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/921,806 2015-10-23
US14/921,806 US9799544B2 (en) 2015-10-23 2015-10-23 Robot assemblies, substrate processing apparatus, and methods for transporting substrates in electronic device manufacturing
PCT/US2016/054093 WO2017069920A1 (en) 2015-10-23 2016-09-28 Robot assemblies, substrate processing apparatus, and methods for transporting substrates in electronic device manufacturing

Publications (3)

Publication Number Publication Date
JP2018535548A JP2018535548A (ja) 2018-11-29
JP2018535548A5 true JP2018535548A5 (enExample) 2020-08-27
JP6860562B2 JP6860562B2 (ja) 2021-04-14

Family

ID=58557609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018520529A Expired - Fee Related JP6860562B2 (ja) 2015-10-23 2016-09-28 電子デバイス製造において基板を搬送するためのロボットアセンブリ、基板処理装置、及び方法

Country Status (6)

Country Link
US (1) US9799544B2 (enExample)
JP (1) JP6860562B2 (enExample)
KR (1) KR102182483B1 (enExample)
CN (1) CN108028215B (enExample)
TW (1) TWI704038B (enExample)
WO (1) WO2017069920A1 (enExample)

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TWI724971B (zh) 2016-06-28 2021-04-11 美商應用材料股份有限公司 包括間隔上臂與交錯腕部的雙機器人以及包括該者之系統及方法
US10453725B2 (en) 2017-09-19 2019-10-22 Applied Materials, Inc. Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same
US10943805B2 (en) 2018-05-18 2021-03-09 Applied Materials, Inc. Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
US11850742B2 (en) 2019-06-07 2023-12-26 Applied Materials, Inc. Dual robot including splayed end effectors and systems and methods including same
KR102211252B1 (ko) * 2019-06-26 2021-02-04 세메스 주식회사 기판 처리 장치
US11565402B2 (en) 2020-03-09 2023-01-31 Applied Materials, Inc. Substrate transfer devices, systems and methods of use thereof
CN113675119A (zh) * 2020-05-15 2021-11-19 拓荆科技股份有限公司 基片传输模块及半导体处理系统
US12208517B2 (en) * 2021-03-18 2025-01-28 Persimmon Technologies Corporation Distributed-architecture robot with multiple linkages
CN118952179B (zh) * 2024-08-27 2025-05-02 中科芯微智能装备(沈阳)有限公司 传动装置、真空机械手及真空机械手的传动方法

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JP2003209156A (ja) * 2002-01-17 2003-07-25 Juki Corp 基板搬送装置
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JP4930949B2 (ja) * 2006-05-29 2012-05-16 株式会社アルバック 基板搬送装置
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KR101366651B1 (ko) 2007-05-31 2014-02-25 어플라이드 머티어리얼스, 인코포레이티드 이중 스카라 로봇 링키지의 리치를 연장하기 위한 방법 및 장치
JP4824645B2 (ja) 2007-08-03 2011-11-30 株式会社アルバック 基板搬送装置
KR101190872B1 (ko) 2008-02-26 2012-10-12 삼성테크윈 주식회사 기판 이송장치
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CN102349146B (zh) 2009-01-11 2013-09-18 应用材料公司 用于制造至机器人及所述机器人的电末端执行器的电连接的系统、设备及方法
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KR102153608B1 (ko) * 2012-07-05 2020-09-08 어플라이드 머티어리얼스, 인코포레이티드 전자 디바이스 제조 시스템들에서 기판들을 운송하기 위한 붐 구동 장치, 멀티-아암 로봇 장치, 전자 디바이스 프로세싱 시스템들, 및 방법들
US9325228B2 (en) 2012-11-30 2016-04-26 Applied Materials, Inc. Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing
CN105164799B (zh) 2013-03-15 2020-04-07 应用材料公司 基板沉积系统、机械手移送设备及用于电子装置制造的方法
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JP6550391B2 (ja) 2014-01-05 2019-07-24 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 電子デバイス製造において基板を搬送するためのロボット装置、駆動アセンブリ、及び方法

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