JP2018535548A5 - - Google Patents

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Publication number
JP2018535548A5
JP2018535548A5 JP2018520529A JP2018520529A JP2018535548A5 JP 2018535548 A5 JP2018535548 A5 JP 2018535548A5 JP 2018520529 A JP2018520529 A JP 2018520529A JP 2018520529 A JP2018520529 A JP 2018520529A JP 2018535548 A5 JP2018535548 A5 JP 2018535548A5
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JP
Japan
Prior art keywords
idler
assembly
drive
robot
arm
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Granted
Application number
JP2018520529A
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English (en)
Japanese (ja)
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JP6860562B2 (ja
JP2018535548A (ja
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Priority claimed from US14/921,806 external-priority patent/US9799544B2/en
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Publication of JP2018535548A publication Critical patent/JP2018535548A/ja
Publication of JP2018535548A5 publication Critical patent/JP2018535548A5/ja
Application granted granted Critical
Publication of JP6860562B2 publication Critical patent/JP6860562B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2018520529A 2015-10-23 2016-09-28 電子デバイス製造において基板を搬送するためのロボットアセンブリ、基板処理装置、及び方法 Expired - Fee Related JP6860562B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/921,806 2015-10-23
US14/921,806 US9799544B2 (en) 2015-10-23 2015-10-23 Robot assemblies, substrate processing apparatus, and methods for transporting substrates in electronic device manufacturing
PCT/US2016/054093 WO2017069920A1 (en) 2015-10-23 2016-09-28 Robot assemblies, substrate processing apparatus, and methods for transporting substrates in electronic device manufacturing

Publications (3)

Publication Number Publication Date
JP2018535548A JP2018535548A (ja) 2018-11-29
JP2018535548A5 true JP2018535548A5 (enExample) 2020-08-27
JP6860562B2 JP6860562B2 (ja) 2021-04-14

Family

ID=58557609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018520529A Expired - Fee Related JP6860562B2 (ja) 2015-10-23 2016-09-28 電子デバイス製造において基板を搬送するためのロボットアセンブリ、基板処理装置、及び方法

Country Status (6)

Country Link
US (1) US9799544B2 (enExample)
JP (1) JP6860562B2 (enExample)
KR (1) KR102182483B1 (enExample)
CN (1) CN108028215B (enExample)
TW (1) TWI704038B (enExample)
WO (1) WO2017069920A1 (enExample)

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US10043689B2 (en) * 2015-06-05 2018-08-07 Hirata Corporation Chamber apparatus and processing system
TWI724971B (zh) 2016-06-28 2021-04-11 美商應用材料股份有限公司 包括間隔上臂與交錯腕部的雙機器人以及包括該者之系統及方法
US10453725B2 (en) 2017-09-19 2019-10-22 Applied Materials, Inc. Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same
US10943805B2 (en) 2018-05-18 2021-03-09 Applied Materials, Inc. Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
US11850742B2 (en) 2019-06-07 2023-12-26 Applied Materials, Inc. Dual robot including splayed end effectors and systems and methods including same
KR102211252B1 (ko) 2019-06-26 2021-02-04 세메스 주식회사 기판 처리 장치
US11565402B2 (en) 2020-03-09 2023-01-31 Applied Materials, Inc. Substrate transfer devices, systems and methods of use thereof
CN113675119A (zh) * 2020-05-15 2021-11-19 拓荆科技股份有限公司 基片传输模块及半导体处理系统
CN118952179B (zh) * 2024-08-27 2025-05-02 中科芯微智能装备(沈阳)有限公司 传动装置、真空机械手及真空机械手的传动方法

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KR0123025Y1 (ko) * 1992-09-28 1998-10-01 이범창 차량 배기가스의 소음저감구조
WO1997010079A1 (en) 1995-09-13 1997-03-20 Silicon Valley Group, Inc. Concentric dual elbow
JP2003209156A (ja) * 2002-01-17 2003-07-25 Juki Corp 基板搬送装置
US8960099B2 (en) 2002-07-22 2015-02-24 Brooks Automation, Inc Substrate processing apparatus
US7905960B2 (en) 2004-03-24 2011-03-15 Jusung Engineering Co., Ltd. Apparatus for manufacturing substrate
US7798764B2 (en) 2005-12-22 2010-09-21 Applied Materials, Inc. Substrate processing sequence in a cartesian robot cluster tool
JP4974118B2 (ja) 2005-02-12 2012-07-11 アプライド マテリアルズ インコーポレイテッド 多軸真空モータアセンブリ
US7927062B2 (en) 2005-11-21 2011-04-19 Applied Materials, Inc. Methods and apparatus for transferring substrates during electronic device manufacturing
CN101454888B (zh) * 2006-05-29 2011-02-09 株式会社爱发科 基板输送装置
JP5185932B2 (ja) 2006-08-11 2013-04-17 アプライド マテリアルズ インコーポレイテッド ロボット・リスト・アセンブリの為の方法および装置
US8419341B2 (en) 2006-09-19 2013-04-16 Brooks Automation, Inc. Linear vacuum robot with Z motion and articulated arm
JP5195745B2 (ja) 2007-03-14 2013-05-15 株式会社安川電機 基板搬送ロボット
US8016542B2 (en) 2007-05-31 2011-09-13 Applied Materials, Inc. Methods and apparatus for extending the reach of a dual scara robot linkage
JP4824645B2 (ja) 2007-08-03 2011-11-30 株式会社アルバック 基板搬送装置
KR101190872B1 (ko) 2008-02-26 2012-10-12 삼성테크윈 주식회사 기판 이송장치
US8777547B2 (en) 2009-01-11 2014-07-15 Applied Materials, Inc. Systems, apparatus and methods for transporting substrates
US8784033B2 (en) 2009-01-11 2014-07-22 Applied Materials, Inc. Robot systems, apparatus and methods for transporting substrates
KR101287000B1 (ko) 2009-01-11 2013-07-23 어플라이드 머티어리얼스, 인코포레이티드 로봇 및 로봇의 전기 엔드 이펙터로 전기 연결을 하기 위한 시스템, 장치 및 방법
CN102709221A (zh) 2011-06-28 2012-10-03 清华大学 一种平面三自由度晶圆传输装置
US9076830B2 (en) 2011-11-03 2015-07-07 Applied Materials, Inc. Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm
WO2013090181A1 (en) 2011-12-12 2013-06-20 Applied Materials, Inc Fully-independent robot systems, apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
US9117865B2 (en) 2012-04-12 2015-08-25 Applied Materials, Inc. Robot systems, apparatus, and methods having independently rotatable waists
WO2014008009A1 (en) 2012-07-05 2014-01-09 Applied Materials, Inc Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems
WO2014085483A1 (en) 2012-11-30 2014-06-05 Applied Materials, Inc Motor modules, multi-axis motor drive assemblies, multi-axis robot apparatus, and electronic device manufacturing systems and methods
KR102214394B1 (ko) 2013-03-15 2021-02-08 어플라이드 머티어리얼스, 인코포레이티드 기판 증착 시스템, 로봇 이송 장치, 및 전자 디바이스 제조 방법
KR102316440B1 (ko) 2013-10-18 2021-10-22 브룩스 오토메이션 인코퍼레이티드 공정 장치
US9724834B2 (en) 2014-01-05 2017-08-08 Applied Materials, Inc. Robot apparatus, drive assemblies, and methods for transporting substrates in electronic device manufacturing

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