TWI704038B - 用於在進行電子設備製造時輸送基板的機械手組件、基板處理裝置及方法 - Google Patents

用於在進行電子設備製造時輸送基板的機械手組件、基板處理裝置及方法 Download PDF

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Publication number
TWI704038B
TWI704038B TW105133190A TW105133190A TWI704038B TW I704038 B TWI704038 B TW I704038B TW 105133190 A TW105133190 A TW 105133190A TW 105133190 A TW105133190 A TW 105133190A TW I704038 B TWI704038 B TW I704038B
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TW
Taiwan
Prior art keywords
coupled
arm
drive
manipulator
unloaded
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TW105133190A
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English (en)
Chinese (zh)
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TW201725099A (zh
Inventor
保羅Ｚ 沃斯
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美商應用材料股份有限公司
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    • H10P72/3202—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J5/00—Manipulators mounted on wheels or on carriages
    • B25J5/02—Manipulators mounted on wheels or on carriages travelling along a guideway
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/104—Programme-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
    • B25J9/1045—Programme-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons comprising tensioning means
    • H10P72/0452—
    • H10P72/0456—
    • H10P72/0464—
    • H10P72/3214—
    • H10P72/3302—
    • H10P72/3402—
    • H10P72/3411—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
TW105133190A 2015-10-23 2016-10-14 用於在進行電子設備製造時輸送基板的機械手組件、基板處理裝置及方法 TWI704038B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/921,806 US9799544B2 (en) 2015-10-23 2015-10-23 Robot assemblies, substrate processing apparatus, and methods for transporting substrates in electronic device manufacturing
US14/921,806 2015-10-23

Publications (2)

Publication Number Publication Date
TW201725099A TW201725099A (zh) 2017-07-16
TWI704038B true TWI704038B (zh) 2020-09-11

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW105133190A TWI704038B (zh) 2015-10-23 2016-10-14 用於在進行電子設備製造時輸送基板的機械手組件、基板處理裝置及方法

Country Status (6)

Country Link
US (1) US9799544B2 (enExample)
JP (1) JP6860562B2 (enExample)
KR (1) KR102182483B1 (enExample)
CN (1) CN108028215B (enExample)
TW (1) TWI704038B (enExample)
WO (1) WO2017069920A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10043689B2 (en) * 2015-06-05 2018-08-07 Hirata Corporation Chamber apparatus and processing system
TWI724971B (zh) 2016-06-28 2021-04-11 美商應用材料股份有限公司 包括間隔上臂與交錯腕部的雙機器人以及包括該者之系統及方法
US10453725B2 (en) 2017-09-19 2019-10-22 Applied Materials, Inc. Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same
US10943805B2 (en) 2018-05-18 2021-03-09 Applied Materials, Inc. Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
US11850742B2 (en) 2019-06-07 2023-12-26 Applied Materials, Inc. Dual robot including splayed end effectors and systems and methods including same
KR102211252B1 (ko) 2019-06-26 2021-02-04 세메스 주식회사 기판 처리 장치
US11565402B2 (en) 2020-03-09 2023-01-31 Applied Materials, Inc. Substrate transfer devices, systems and methods of use thereof
CN113675119A (zh) * 2020-05-15 2021-11-19 拓荆科技股份有限公司 基片传输模块及半导体处理系统
CN118952179B (zh) * 2024-08-27 2025-05-02 中科芯微智能装备(沈阳)有限公司 传动装置、真空机械手及真空机械手的传动方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100280654A1 (en) * 2005-12-22 2010-11-04 Mike Rice Substrate processing sequence in a cartesian robot cluster tool
US20100329827A1 (en) * 2006-09-19 2010-12-30 Gee Sun Hoey Linear vacuum robot with z motion and articulated arm
US20110150608A1 (en) * 2004-03-24 2011-06-23 Jusung Engineering Co., Ltd. Apparatus for transferring a substrate
CN102709221A (zh) * 2011-06-28 2012-10-03 清华大学 一种平面三自由度晶圆传输装置

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0123025Y1 (ko) * 1992-09-28 1998-10-01 이범창 차량 배기가스의 소음저감구조
WO1997010079A1 (en) 1995-09-13 1997-03-20 Silicon Valley Group, Inc. Concentric dual elbow
JP2003209156A (ja) * 2002-01-17 2003-07-25 Juki Corp 基板搬送装置
US8960099B2 (en) 2002-07-22 2015-02-24 Brooks Automation, Inc Substrate processing apparatus
JP4974118B2 (ja) 2005-02-12 2012-07-11 アプライド マテリアルズ インコーポレイテッド 多軸真空モータアセンブリ
TWI342597B (en) 2005-11-21 2011-05-21 Applied Materials Inc Methods and apparatus for transferring substrates during electronic device manufacturing
WO2007139052A1 (ja) * 2006-05-29 2007-12-06 Ulvac, Inc. 基板搬送装置
JP5185932B2 (ja) 2006-08-11 2013-04-17 アプライド マテリアルズ インコーポレイテッド ロボット・リスト・アセンブリの為の方法および装置
WO2008111410A1 (ja) * 2007-03-14 2008-09-18 Kabushiki Kaisha Yaskawa Denki 基板搬送ロボット
CN103862463B (zh) 2007-05-31 2017-08-15 应用材料公司 延伸双scara机械手连接装置的伸出距离的方法及设备
JP4824645B2 (ja) * 2007-08-03 2011-11-30 株式会社アルバック 基板搬送装置
KR101190872B1 (ko) * 2008-02-26 2012-10-12 삼성테크윈 주식회사 기판 이송장치
US8777547B2 (en) 2009-01-11 2014-07-15 Applied Materials, Inc. Systems, apparatus and methods for transporting substrates
JP5501375B2 (ja) 2009-01-11 2014-05-21 アプライド マテリアルズ インコーポレイテッド ロボットおよびロボットの電気エンドエフェクタに電気的に接続するシステム、装置、および方法
KR101778519B1 (ko) 2009-01-11 2017-09-15 어플라이드 머티어리얼스, 인코포레이티드 전자 디바이스 제조시에 기판을 이송하기 위한 로봇 시스템, 장치 및 방법
US9076830B2 (en) 2011-11-03 2015-07-07 Applied Materials, Inc. Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm
US20130149076A1 (en) 2011-12-12 2013-06-13 Applied Materials, Inc. Fully-independent robot systems, apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
WO2013154863A1 (en) 2012-04-12 2013-10-17 Applied Materials, Inc Robot systems, apparatus, and methods having independently rotatable waists
WO2014008009A1 (en) 2012-07-05 2014-01-09 Applied Materials, Inc Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems
KR102214398B1 (ko) 2012-11-30 2021-02-08 어플라이드 머티어리얼스, 인코포레이티드 모터 모듈들, 다중-축 모터 구동 조립체들, 다중-축 로봇 장치, 및 전자 디바이스 제조 시스템들 및 방법들
WO2014143662A1 (en) 2013-03-15 2014-09-18 Applied Materials, Inc Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing
CN105814677B (zh) 2013-10-18 2019-06-18 布鲁克斯自动化公司 处理设备
TWI641458B (zh) 2014-01-05 2018-11-21 美商應用材料股份有限公司 用於傳輸電子裝置製造中之基板之機器人設備、驅動組件，及方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110150608A1 (en) * 2004-03-24 2011-06-23 Jusung Engineering Co., Ltd. Apparatus for transferring a substrate
US20100280654A1 (en) * 2005-12-22 2010-11-04 Mike Rice Substrate processing sequence in a cartesian robot cluster tool
US20100329827A1 (en) * 2006-09-19 2010-12-30 Gee Sun Hoey Linear vacuum robot with z motion and articulated arm
CN102709221A (zh) * 2011-06-28 2012-10-03 清华大学 一种平面三自由度晶圆传输装置

Also Published As

Publication number Publication date
US20170117171A1 (en) 2017-04-27
CN108028215B (zh) 2022-07-29
JP2018535548A (ja) 2018-11-29
WO2017069920A1 (en) 2017-04-27
TW201725099A (zh) 2017-07-16
CN108028215A (zh) 2018-05-11
KR102182483B1 (ko) 2020-11-24
US9799544B2 (en) 2017-10-24
KR20180061393A (ko) 2018-06-07
JP6860562B2 (ja) 2021-04-14

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