JP6860562B2 - 電子デバイス製造において基板を搬送するためのロボットアセンブリ、基板処理装置、及び方法 - Google Patents

電子デバイス製造において基板を搬送するためのロボットアセンブリ、基板処理装置、及び方法 Download PDF

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Publication number
JP6860562B2
JP6860562B2 JP2018520529A JP2018520529A JP6860562B2 JP 6860562 B2 JP6860562 B2 JP 6860562B2 JP 2018520529 A JP2018520529 A JP 2018520529A JP 2018520529 A JP2018520529 A JP 2018520529A JP 6860562 B2 JP6860562 B2 JP 6860562B2
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Japan
Prior art keywords
idler
drive
arm
robot
assembly
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Expired - Fee Related
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JP2018520529A
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Japanese (ja)
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JP2018535548A (ja
JP2018535548A5 (enExample
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ポール ズィー． ウィルト，
ポール ズィー． ウィルト，
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Applied Materials Inc
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Applied Materials Inc
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    • H10P72/3202—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J5/00—Manipulators mounted on wheels or on carriages
    • B25J5/02—Manipulators mounted on wheels or on carriages travelling along a guideway
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/104—Programme-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
    • B25J9/1045—Programme-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons comprising tensioning means
    • H10P72/0452—
    • H10P72/0456—
    • H10P72/0464—
    • H10P72/3214—
    • H10P72/3302—
    • H10P72/3402—
    • H10P72/3411—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
JP2018520529A 2015-10-23 2016-09-28 電子デバイス製造において基板を搬送するためのロボットアセンブリ、基板処理装置、及び方法 Expired - Fee Related JP6860562B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/921,806 US9799544B2 (en) 2015-10-23 2015-10-23 Robot assemblies, substrate processing apparatus, and methods for transporting substrates in electronic device manufacturing
US14/921,806 2015-10-23
PCT/US2016/054093 WO2017069920A1 (en) 2015-10-23 2016-09-28 Robot assemblies, substrate processing apparatus, and methods for transporting substrates in electronic device manufacturing

Publications (3)

Publication Number Publication Date
JP2018535548A JP2018535548A (ja) 2018-11-29
JP2018535548A5 JP2018535548A5 (enExample) 2020-08-27
JP6860562B2 true JP6860562B2 (ja) 2021-04-14

Family

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Family Applications (1)

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JP2018520529A Expired - Fee Related JP6860562B2 (ja) 2015-10-23 2016-09-28 電子デバイス製造において基板を搬送するためのロボットアセンブリ、基板処理装置、及び方法

Country Status (6)

Country Link
US (1) US9799544B2 (enExample)
JP (1) JP6860562B2 (enExample)
KR (1) KR102182483B1 (enExample)
CN (1) CN108028215B (enExample)
TW (1) TWI704038B (enExample)
WO (1) WO2017069920A1 (enExample)

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US10043689B2 (en) * 2015-06-05 2018-08-07 Hirata Corporation Chamber apparatus and processing system
TWI724971B (zh) 2016-06-28 2021-04-11 美商應用材料股份有限公司 包括間隔上臂與交錯腕部的雙機器人以及包括該者之系統及方法
US10453725B2 (en) 2017-09-19 2019-10-22 Applied Materials, Inc. Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same
US10943805B2 (en) 2018-05-18 2021-03-09 Applied Materials, Inc. Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
US11850742B2 (en) 2019-06-07 2023-12-26 Applied Materials, Inc. Dual robot including splayed end effectors and systems and methods including same
KR102211252B1 (ko) 2019-06-26 2021-02-04 세메스 주식회사 기판 처리 장치
US11565402B2 (en) 2020-03-09 2023-01-31 Applied Materials, Inc. Substrate transfer devices, systems and methods of use thereof
CN113675119A (zh) * 2020-05-15 2021-11-19 拓荆科技股份有限公司 基片传输模块及半导体处理系统
CN118952179B (zh) * 2024-08-27 2025-05-02 中科芯微智能装备(沈阳)有限公司 传动装置、真空机械手及真空机械手的传动方法

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WO1997010079A1 (en) 1995-09-13 1997-03-20 Silicon Valley Group, Inc. Concentric dual elbow
JP2003209156A (ja) * 2002-01-17 2003-07-25 Juki Corp 基板搬送装置
US8960099B2 (en) 2002-07-22 2015-02-24 Brooks Automation, Inc Substrate processing apparatus
US7905960B2 (en) 2004-03-24 2011-03-15 Jusung Engineering Co., Ltd. Apparatus for manufacturing substrate
US7798764B2 (en) 2005-12-22 2010-09-21 Applied Materials, Inc. Substrate processing sequence in a cartesian robot cluster tool
JP4974118B2 (ja) 2005-02-12 2012-07-11 アプライド マテリアルズ インコーポレイテッド 多軸真空モータアセンブリ
TWI342597B (en) 2005-11-21 2011-05-21 Applied Materials Inc Methods and apparatus for transferring substrates during electronic device manufacturing
WO2007139052A1 (ja) * 2006-05-29 2007-12-06 Ulvac, Inc. 基板搬送装置
JP5185932B2 (ja) 2006-08-11 2013-04-17 アプライド マテリアルズ インコーポレイテッド ロボット・リスト・アセンブリの為の方法および装置
US8419341B2 (en) 2006-09-19 2013-04-16 Brooks Automation, Inc. Linear vacuum robot with Z motion and articulated arm
WO2008111410A1 (ja) * 2007-03-14 2008-09-18 Kabushiki Kaisha Yaskawa Denki 基板搬送ロボット
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KR101190872B1 (ko) * 2008-02-26 2012-10-12 삼성테크윈 주식회사 기판 이송장치
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JP5501375B2 (ja) 2009-01-11 2014-05-21 アプライド マテリアルズ インコーポレイテッド ロボットおよびロボットの電気エンドエフェクタに電気的に接続するシステム、装置、および方法
KR101778519B1 (ko) 2009-01-11 2017-09-15 어플라이드 머티어리얼스, 인코포레이티드 전자 디바이스 제조시에 기판을 이송하기 위한 로봇 시스템, 장치 및 방법
CN102709221A (zh) 2011-06-28 2012-10-03 清华大学 一种平面三自由度晶圆传输装置
US9076830B2 (en) 2011-11-03 2015-07-07 Applied Materials, Inc. Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm
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KR102214398B1 (ko) 2012-11-30 2021-02-08 어플라이드 머티어리얼스, 인코포레이티드 모터 모듈들, 다중-축 모터 구동 조립체들, 다중-축 로봇 장치, 및 전자 디바이스 제조 시스템들 및 방법들
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Also Published As

Publication number Publication date
US20170117171A1 (en) 2017-04-27
CN108028215B (zh) 2022-07-29
JP2018535548A (ja) 2018-11-29
WO2017069920A1 (en) 2017-04-27
TW201725099A (zh) 2017-07-16
TWI704038B (zh) 2020-09-11
CN108028215A (zh) 2018-05-11
KR102182483B1 (ko) 2020-11-24
US9799544B2 (en) 2017-10-24
KR20180061393A (ko) 2018-06-07

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