JP2007535413A - ナノワイヤ成長および採取のための系および方法 - Google Patents

ナノワイヤ成長および採取のための系および方法 Download PDF

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JP2007535413A
JP2007535413A JP2007511037A JP2007511037A JP2007535413A JP 2007535413 A JP2007535413 A JP 2007535413A JP 2007511037 A JP2007511037 A JP 2007511037A JP 2007511037 A JP2007511037 A JP 2007511037A JP 2007535413 A JP2007535413 A JP 2007535413A
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nanowire
substrate
nanowires
precursor gas
gas mixture
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JP2007535413A5 (https=
Inventor
ヤオリン パン，
シァンフェン デュアン，
ボブ ダブロー，
ジェイ ゴールドマン，
シャーリアー モスターシュド，
チュンミン ニウ，
リンダ ティー． ロマノ，
デイブ スタンボ，
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Nanosys Inc
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Nanosys Inc
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
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    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
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    • H10D62/117—Shapes of semiconductor bodies
    • H10D62/118—Nanostructure semiconductor bodies
    • H10D62/119—Nanowire, nanosheet or nanotube semiconductor bodies
    • H10D62/121—Nanowire, nanosheet or nanotube semiconductor bodies oriented parallel to substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
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    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
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    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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    • B82—NANOTECHNOLOGY
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  • Chemical & Material Sciences (AREA)
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  • Nanotechnology (AREA)
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  • Organic Chemistry (AREA)
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  • Metallurgy (AREA)
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  • Condensed Matter Physics & Semiconductors (AREA)
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  • Thin Film Transistor (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP2007511037A 2004-04-30 2005-04-29 ナノワイヤ成長および採取のための系および方法 Pending JP2007535413A (ja)

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US56660204P 2004-04-30 2004-04-30
US58836304P 2004-07-16 2004-07-16
PCT/US2005/014923 WO2005119753A2 (en) 2004-04-30 2005-04-29 Systems and methods for nanowire growth and harvesting

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JP2007535413A true JP2007535413A (ja) 2007-12-06
JP2007535413A5 JP2007535413A5 (https=) 2008-05-15

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US (3) US7105428B2 (https=)
EP (1) EP1747577A2 (https=)
JP (1) JP2007535413A (https=)
KR (1) KR20070011550A (https=)
CN (2) CN101010780B (https=)
AU (1) AU2005251089A1 (https=)
CA (1) CA2564220A1 (https=)
WO (1) WO2005119753A2 (https=)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010260170A (ja) * 2009-04-28 2010-11-18 Commissariat A L'energie Atomique & Aux Energies Alternatives シリコン及び／又はゲルマニウムナノワイヤの組立方法
JP2011519730A (ja) * 2008-03-25 2011-07-14 インターナショナル・ビジネス・マシーンズ・コーポレーション 超格子／量子井戸ナノワイヤ
JP2012502187A (ja) * 2008-09-12 2012-01-26 エルジー・ケム・リミテッド 金属ナノベルト、その製造方法、それを含む導電性インク組成物および伝導性フィルム
KR20120130751A (ko) * 2009-12-22 2012-12-03 큐나노에이비 나노와이어 구조체를 제조하는 방법
JP2013528698A (ja) * 2010-03-11 2013-07-11 エルジー・ケム・リミテッド 金属ナノベルトの製造方法
JP2013530302A (ja) * 2010-03-11 2013-07-25 エルジー・ケム・リミテッド ベルト状の金属ナノ構造体及びその製造方法
JP2015159121A (ja) * 2010-05-28 2015-09-03 株式会社半導体エネルギー研究所 蓄電装置の作製方法

Families Citing this family (203)

* Cited by examiner, † Cited by third party
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