JP2007530254A5 - - Google Patents

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Publication number
JP2007530254A5
JP2007530254A5 JP2007504953A JP2007504953A JP2007530254A5 JP 2007530254 A5 JP2007530254 A5 JP 2007530254A5 JP 2007504953 A JP2007504953 A JP 2007504953A JP 2007504953 A JP2007504953 A JP 2007504953A JP 2007530254 A5 JP2007530254 A5 JP 2007530254A5
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JP
Japan
Prior art keywords
tightly coupled
substrate
dryer
enclosure
coating applicator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007504953A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007530254A (ja
JP5009782B2 (ja
Filing date
Publication date
Priority claimed from US10/810,069 external-priority patent/US7032324B2/en
Application filed filed Critical
Publication of JP2007530254A publication Critical patent/JP2007530254A/ja
Publication of JP2007530254A5 publication Critical patent/JP2007530254A5/ja
Application granted granted Critical
Publication of JP5009782B2 publication Critical patent/JP5009782B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2007504953A 2004-03-26 2005-02-04 コーティング方法および装置 Expired - Fee Related JP5009782B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/810,069 US7032324B2 (en) 2000-09-24 2004-03-26 Coating process and apparatus
US10/810,069 2004-03-26
PCT/US2005/003787 WO2005102542A1 (en) 2004-03-26 2005-02-04 Coating process and apparatus

Publications (3)

Publication Number Publication Date
JP2007530254A JP2007530254A (ja) 2007-11-01
JP2007530254A5 true JP2007530254A5 (https=) 2008-01-17
JP5009782B2 JP5009782B2 (ja) 2012-08-22

Family

ID=34960666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007504953A Expired - Fee Related JP5009782B2 (ja) 2004-03-26 2005-02-04 コーティング方法および装置

Country Status (9)

Country Link
US (2) US7032324B2 (https=)
EP (1) EP1732704B1 (https=)
JP (1) JP5009782B2 (https=)
KR (1) KR101152022B1 (https=)
CN (1) CN1956799B (https=)
AT (1) ATE406216T1 (https=)
BR (1) BRPI0509226A (https=)
DE (1) DE602005009338D1 (https=)
WO (1) WO2005102542A1 (https=)

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