JP2007524130A5 - - Google Patents
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- Publication number
- JP2007524130A5 JP2007524130A5 JP2007500129A JP2007500129A JP2007524130A5 JP 2007524130 A5 JP2007524130 A5 JP 2007524130A5 JP 2007500129 A JP2007500129 A JP 2007500129A JP 2007500129 A JP2007500129 A JP 2007500129A JP 2007524130 A5 JP2007524130 A5 JP 2007524130A5
- Authority
- JP
- Japan
- Prior art keywords
- housing structure
- structure according
- shaped
- structural
- support element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 4
- 239000000853 adhesive Substances 0.000 claims 3
- 230000001070 adhesive effect Effects 0.000 claims 3
- 239000000919 ceramic Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 239000002241 glass-ceramic Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 230000003014 reinforcing effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102004009203 | 2004-02-25 | ||
| PCT/EP2005/001826 WO2005081029A2 (en) | 2004-02-25 | 2005-02-22 | Housing structure for mounting optical elements |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007524130A JP2007524130A (ja) | 2007-08-23 |
| JP2007524130A5 true JP2007524130A5 (https=) | 2008-04-10 |
Family
ID=34877117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007500129A Pending JP2007524130A (ja) | 2004-02-25 | 2005-02-22 | 光学要素を取り付けるためのハウジング構造 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7692881B2 (https=) |
| EP (1) | EP1745317A2 (https=) |
| JP (1) | JP2007524130A (https=) |
| TW (1) | TWI388893B (https=) |
| WO (1) | WO2005081029A2 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005060622A1 (de) * | 2005-12-19 | 2007-04-19 | Carl Zeiss Smt Ag | Montagevorrichtung für eine optische Einrichtung |
| DE102009014972A1 (de) * | 2009-03-18 | 2010-10-14 | Carl Zeiss Laser Optics Gmbh | Optische Anordnung |
| JP5584785B2 (ja) * | 2010-02-23 | 2014-09-03 | エーエスエムエル ネザーランズ ビー．ブイ． | リソグラフィ装置 |
| CN104272427B (zh) * | 2012-03-08 | 2017-05-17 | 迈普尔平版印刷Ip有限公司 | 具有对准传感器和射束测量传感器的带电粒子光刻系统 |
| DE102019201509A1 (de) | 2019-02-06 | 2020-08-06 | Carl Zeiss Smt Gmbh | Abstützung eines optischen Elements |
| US20230152717A1 (en) * | 2020-03-27 | 2023-05-18 | Asml Netherlands B.V. | Interface plate, inspection system and method of installing an inspection system |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60122911U (ja) | 1984-01-27 | 1985-08-19 | 株式会社日立製作所 | 光学部品の保持装置 |
| DE10134387A1 (de) | 2001-07-14 | 2003-01-23 | Zeiss Carl | Optisches System mit mehreren optischen Elementen |
| JP2003241049A (ja) | 2002-02-22 | 2003-08-27 | Nikon Corp | 光学素子保持方法、光学素子研磨加工方法及び光学素子成膜方法 |
| US20030234918A1 (en) * | 2002-06-20 | 2003-12-25 | Nikon Corporation | Adjustable soft mounts in kinematic lens mounting system |
| JP3944095B2 (ja) * | 2003-02-26 | 2007-07-11 | キヤノン株式会社 | 保持装置 |
| WO2005054953A2 (en) * | 2003-11-24 | 2005-06-16 | Carl-Zeiss Smt Ag | Holding device for an optical element in an objective |
-
2005
- 2005-02-22 US US10/597,872 patent/US7692881B2/en not_active Expired - Fee Related
- 2005-02-22 WO PCT/EP2005/001826 patent/WO2005081029A2/en not_active Ceased
- 2005-02-22 EP EP05707566A patent/EP1745317A2/en not_active Withdrawn
- 2005-02-22 JP JP2007500129A patent/JP2007524130A/ja active Pending
- 2005-02-25 TW TW094105858A patent/TWI388893B/zh not_active IP Right Cessation
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