JP2007524130A - 光学要素を取り付けるためのハウジング構造 - Google Patents

光学要素を取り付けるためのハウジング構造 Download PDF

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Publication number
JP2007524130A
JP2007524130A JP2007500129A JP2007500129A JP2007524130A JP 2007524130 A JP2007524130 A JP 2007524130A JP 2007500129 A JP2007500129 A JP 2007500129A JP 2007500129 A JP2007500129 A JP 2007500129A JP 2007524130 A JP2007524130 A JP 2007524130A
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JP
Japan
Prior art keywords
housing structure
structure according
structural
support
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
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JP2007500129A
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English (en)
Japanese (ja)
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JP2007524130A5 (https=
Inventor
イム−ブン パトリック クワン
ベルンハルト ゴイペルト
ニコ ケンペル
Original Assignee
カール・ツァイス・エスエムティー・アーゲー
エーエスエムエル ネザーランズ ビー．ヴイ．
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Application filed by カール・ツァイス・エスエムティー・アーゲー, エーエスエムエル ネザーランズ ビー．ヴイ． filed Critical カール・ツァイス・エスエムティー・アーゲー
Publication of JP2007524130A publication Critical patent/JP2007524130A/ja
Publication of JP2007524130A5 publication Critical patent/JP2007524130A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lens Barrels (AREA)
JP2007500129A 2004-02-25 2005-02-22 光学要素を取り付けるためのハウジング構造 Pending JP2007524130A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004009203 2004-02-25
PCT/EP2005/001826 WO2005081029A2 (en) 2004-02-25 2005-02-22 Housing structure for mounting optical elements

Publications (2)

Publication Number Publication Date
JP2007524130A true JP2007524130A (ja) 2007-08-23
JP2007524130A5 JP2007524130A5 (https=) 2008-04-10

Family

ID=34877117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007500129A Pending JP2007524130A (ja) 2004-02-25 2005-02-22 光学要素を取り付けるためのハウジング構造

Country Status (5)

Country Link
US (1) US7692881B2 (https=)
EP (1) EP1745317A2 (https=)
JP (1) JP2007524130A (https=)
TW (1) TWI388893B (https=)
WO (1) WO2005081029A2 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013520816A (ja) * 2010-02-23 2013-06-06 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置
JP2018061048A (ja) * 2012-03-08 2018-04-12 マッパー・リソグラフィー・アイピー・ビー．ブイ． アライメントセンサーとビーム測定センサーを備えている荷電粒子リソグラフィシステム

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005060622A1 (de) * 2005-12-19 2007-04-19 Carl Zeiss Smt Ag Montagevorrichtung für eine optische Einrichtung
DE102009014972A1 (de) * 2009-03-18 2010-10-14 Carl Zeiss Laser Optics Gmbh Optische Anordnung
DE102019201509A1 (de) 2019-02-06 2020-08-06 Carl Zeiss Smt Gmbh Abstützung eines optischen Elements
US20230152717A1 (en) * 2020-03-27 2023-05-18 Asml Netherlands B.V. Interface plate, inspection system and method of installing an inspection system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60122911U (ja) 1984-01-27 1985-08-19 株式会社日立製作所 光学部品の保持装置
DE10134387A1 (de) 2001-07-14 2003-01-23 Zeiss Carl Optisches System mit mehreren optischen Elementen
JP2003241049A (ja) 2002-02-22 2003-08-27 Nikon Corp 光学素子保持方法、光学素子研磨加工方法及び光学素子成膜方法
US20030234918A1 (en) * 2002-06-20 2003-12-25 Nikon Corporation Adjustable soft mounts in kinematic lens mounting system
JP3944095B2 (ja) * 2003-02-26 2007-07-11 キヤノン株式会社 保持装置
WO2005054953A2 (en) * 2003-11-24 2005-06-16 Carl-Zeiss Smt Ag Holding device for an optical element in an objective

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013520816A (ja) * 2010-02-23 2013-06-06 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置
KR101496882B1 (ko) * 2010-02-23 2015-03-02 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치 및 디바이스 제조 방법
JP2018061048A (ja) * 2012-03-08 2018-04-12 マッパー・リソグラフィー・アイピー・ビー．ブイ． アライメントセンサーとビーム測定センサーを備えている荷電粒子リソグラフィシステム

Also Published As

Publication number Publication date
TWI388893B (zh) 2013-03-11
WO2005081029A2 (en) 2005-09-01
US7692881B2 (en) 2010-04-06
US20070165311A1 (en) 2007-07-19
EP1745317A2 (en) 2007-01-24
TW200537153A (en) 2005-11-16

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