TWI388893B - 用於製造半導體所使用之投影曝光系統型式之結構 - Google Patents
用於製造半導體所使用之投影曝光系統型式之結構 Download PDFInfo
- Publication number
- TWI388893B TWI388893B TW094105858A TW94105858A TWI388893B TW I388893 B TWI388893 B TW I388893B TW 094105858 A TW094105858 A TW 094105858A TW 94105858 A TW94105858 A TW 94105858A TW I388893 B TWI388893 B TW I388893B
- Authority
- TW
- Taiwan
- Prior art keywords
- support
- structural
- structural member
- arm
- plate
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims description 4
- 238000004519 manufacturing process Methods 0.000 title description 2
- 230000003014 reinforcing effect Effects 0.000 claims description 25
- 239000012790 adhesive layer Substances 0.000 claims description 18
- 230000002093 peripheral effect Effects 0.000 claims description 14
- 239000000853 adhesive Substances 0.000 claims description 7
- 230000001070 adhesive effect Effects 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 239000002241 glass-ceramic Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 230000005484 gravity Effects 0.000 description 4
- 239000007769 metal material Substances 0.000 description 4
- 238000010276 construction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 239000006094 Zerodur Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006112 glass ceramic composition Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000003351 stiffener Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Lens Barrels (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102004009203 | 2004-02-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200537153A TW200537153A (en) | 2005-11-16 |
| TWI388893B true TWI388893B (zh) | 2013-03-11 |
Family
ID=34877117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW094105858A TWI388893B (zh) | 2004-02-25 | 2005-02-25 | 用於製造半導體所使用之投影曝光系統型式之結構 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7692881B2 (https=) |
| EP (1) | EP1745317A2 (https=) |
| JP (1) | JP2007524130A (https=) |
| TW (1) | TWI388893B (https=) |
| WO (1) | WO2005081029A2 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005060622A1 (de) * | 2005-12-19 | 2007-04-19 | Carl Zeiss Smt Ag | Montagevorrichtung für eine optische Einrichtung |
| DE102009014972A1 (de) * | 2009-03-18 | 2010-10-14 | Carl Zeiss Laser Optics Gmbh | Optische Anordnung |
| JP5584785B2 (ja) * | 2010-02-23 | 2014-09-03 | エーエスエムエル ネザーランズ ビー．ブイ． | リソグラフィ装置 |
| CN104272427B (zh) * | 2012-03-08 | 2017-05-17 | 迈普尔平版印刷Ip有限公司 | 具有对准传感器和射束测量传感器的带电粒子光刻系统 |
| DE102019201509A1 (de) | 2019-02-06 | 2020-08-06 | Carl Zeiss Smt Gmbh | Abstützung eines optischen Elements |
| US20230152717A1 (en) * | 2020-03-27 | 2023-05-18 | Asml Netherlands B.V. | Interface plate, inspection system and method of installing an inspection system |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60122911U (ja) | 1984-01-27 | 1985-08-19 | 株式会社日立製作所 | 光学部品の保持装置 |
| DE10134387A1 (de) | 2001-07-14 | 2003-01-23 | Zeiss Carl | Optisches System mit mehreren optischen Elementen |
| JP2003241049A (ja) | 2002-02-22 | 2003-08-27 | Nikon Corp | 光学素子保持方法、光学素子研磨加工方法及び光学素子成膜方法 |
| US20030234918A1 (en) * | 2002-06-20 | 2003-12-25 | Nikon Corporation | Adjustable soft mounts in kinematic lens mounting system |
| JP3944095B2 (ja) * | 2003-02-26 | 2007-07-11 | キヤノン株式会社 | 保持装置 |
| WO2005054953A2 (en) * | 2003-11-24 | 2005-06-16 | Carl-Zeiss Smt Ag | Holding device for an optical element in an objective |
-
2005
- 2005-02-22 US US10/597,872 patent/US7692881B2/en not_active Expired - Fee Related
- 2005-02-22 WO PCT/EP2005/001826 patent/WO2005081029A2/en not_active Ceased
- 2005-02-22 EP EP05707566A patent/EP1745317A2/en not_active Withdrawn
- 2005-02-22 JP JP2007500129A patent/JP2007524130A/ja active Pending
- 2005-02-25 TW TW094105858A patent/TWI388893B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| WO2005081029A2 (en) | 2005-09-01 |
| US7692881B2 (en) | 2010-04-06 |
| US20070165311A1 (en) | 2007-07-19 |
| EP1745317A2 (en) | 2007-01-24 |
| JP2007524130A (ja) | 2007-08-23 |
| TW200537153A (en) | 2005-11-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |