JP2007514306A5 - - Google Patents

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Publication number
JP2007514306A5
JP2007514306A5 JP2006543450A JP2006543450A JP2007514306A5 JP 2007514306 A5 JP2007514306 A5 JP 2007514306A5 JP 2006543450 A JP2006543450 A JP 2006543450A JP 2006543450 A JP2006543450 A JP 2006543450A JP 2007514306 A5 JP2007514306 A5 JP 2007514306A5
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JP
Japan
Prior art keywords
support
carbon
stabilized
skeleton
silicon carbide
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2006543450A
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English (en)
Japanese (ja)
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JP5052137B2 (ja
JP2007514306A (ja
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Priority claimed from DE2003157698 external-priority patent/DE10357698A1/de
Application filed filed Critical
Publication of JP2007514306A publication Critical patent/JP2007514306A/ja
Publication of JP2007514306A5 publication Critical patent/JP2007514306A5/ja
Application granted granted Critical
Publication of JP5052137B2 publication Critical patent/JP5052137B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2006543450A 2003-12-09 2004-12-06 被処理物を受けるための支持体及び支持体の製造方法 Expired - Lifetime JP5052137B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE2003157698 DE10357698A1 (de) 2003-12-09 2003-12-09 Träger für zu behandelnde Gegenstände sowie Verfahren zur Herstellung eines solchen
DE10357698.3 2003-12-09
PCT/EP2004/013838 WO2005059992A1 (de) 2003-12-09 2004-12-06 Träger zur aufnahme eines gegenstandes sowie verfahren zur herstellung eines trägers

Publications (3)

Publication Number Publication Date
JP2007514306A JP2007514306A (ja) 2007-05-31
JP2007514306A5 true JP2007514306A5 (https=) 2008-01-24
JP5052137B2 JP5052137B2 (ja) 2012-10-17

Family

ID=34672544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006543450A Expired - Lifetime JP5052137B2 (ja) 2003-12-09 2004-12-06 被処理物を受けるための支持体及び支持体の製造方法

Country Status (8)

Country Link
US (1) US7919143B2 (https=)
EP (1) EP1692718B1 (https=)
JP (1) JP5052137B2 (https=)
KR (1) KR101148897B1 (https=)
CN (1) CN100446213C (https=)
DE (2) DE10357698A1 (https=)
TW (1) TWI442508B (https=)
WO (1) WO2005059992A1 (https=)

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DE102006055038B4 (de) * 2006-11-22 2012-12-27 Siltronic Ag Epitaxierte Halbleiterscheibe sowie Vorrichtung und Verfahren zur Herstellung einer epitaxierten Halbleiterscheibe
DE102007054526A1 (de) * 2007-11-07 2009-05-14 Deutsches Zentrum für Luft- und Raumfahrt e.V. Wärmetransferelement und Anlage zur thermischen Behandlung von Substraten
US9012766B2 (en) 2009-11-12 2015-04-21 Silevo, Inc. Aluminum grid as backside conductor on epitaxial silicon thin film solar cells
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US9800053B2 (en) 2010-10-08 2017-10-24 Tesla, Inc. Solar panels with integrated cell-level MPPT devices
US9054256B2 (en) 2011-06-02 2015-06-09 Solarcity Corporation Tunneling-junction solar cell with copper grid for concentrated photovoltaic application
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US9865754B2 (en) 2012-10-10 2018-01-09 Tesla, Inc. Hole collectors for silicon photovoltaic cells
US9281436B2 (en) 2012-12-28 2016-03-08 Solarcity Corporation Radio-frequency sputtering system with rotary target for fabricating solar cells
US9412884B2 (en) 2013-01-11 2016-08-09 Solarcity Corporation Module fabrication of solar cells with low resistivity electrodes
US9219174B2 (en) 2013-01-11 2015-12-22 Solarcity Corporation Module fabrication of solar cells with low resistivity electrodes
US9624595B2 (en) 2013-05-24 2017-04-18 Solarcity Corporation Electroplating apparatus with improved throughput
DE102013218883B4 (de) * 2013-09-19 2018-12-06 Siltronic Ag Vorrichtung und Verfahren zum Abscheiden von Halbleitermaterial aus einer Gasphase auf eine Substratscheibe
US20150083046A1 (en) * 2013-09-26 2015-03-26 Applied Materials, Inc. Carbon fiber ring susceptor
US10309012B2 (en) 2014-07-03 2019-06-04 Tesla, Inc. Wafer carrier for reducing contamination from carbon particles and outgassing
US9899546B2 (en) 2014-12-05 2018-02-20 Tesla, Inc. Photovoltaic cells with electrodes adapted to house conductive paste
US9947822B2 (en) 2015-02-02 2018-04-17 Tesla, Inc. Bifacial photovoltaic module using heterojunction solar cells
KR20170126899A (ko) 2015-03-11 2017-11-20 엔브이 베카에르트 에스에이 임시 결합된 웨이퍼용 캐리어
WO2016142240A1 (en) * 2015-03-11 2016-09-15 Nv Bekaert Sa Carrier for temporary bonded wafers
WO2016142239A1 (en) * 2015-03-11 2016-09-15 Nv Bekaert Sa Carrier for temporary bonded wafers
US9761744B2 (en) 2015-10-22 2017-09-12 Tesla, Inc. System and method for manufacturing photovoltaic structures with a metal seed layer
US9842956B2 (en) 2015-12-21 2017-12-12 Tesla, Inc. System and method for mass-production of high-efficiency photovoltaic structures
US9496429B1 (en) 2015-12-30 2016-11-15 Solarcity Corporation System and method for tin plating metal electrodes
US10115838B2 (en) 2016-04-19 2018-10-30 Tesla, Inc. Photovoltaic structures with interlocking busbars
US10672919B2 (en) 2017-09-19 2020-06-02 Tesla, Inc. Moisture-resistant solar cells for solar roof tiles
US11190128B2 (en) 2018-02-27 2021-11-30 Tesla, Inc. Parallel-connected solar roof tile modules
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