JP2007513856A - 積層構造物 - Google Patents
積層構造物 Download PDFInfo
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- JP2007513856A JP2007513856A JP2006541890A JP2006541890A JP2007513856A JP 2007513856 A JP2007513856 A JP 2007513856A JP 2006541890 A JP2006541890 A JP 2006541890A JP 2006541890 A JP2006541890 A JP 2006541890A JP 2007513856 A JP2007513856 A JP 2007513856A
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- Prior art keywords
- layer
- laminated structure
- intermediate layer
- diamond
- coating
- Prior art date
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- 238000000576 coating method Methods 0.000 claims abstract description 66
- 239000011248 coating agent Substances 0.000 claims abstract description 59
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 24
- 239000002114 nanocomposite Substances 0.000 claims abstract description 20
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000000203 mixture Substances 0.000 claims abstract description 18
- 238000000034 method Methods 0.000 claims abstract description 12
- 239000010936 titanium Substances 0.000 claims description 38
- 229910052719 titanium Inorganic materials 0.000 claims description 37
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 35
- 239000011651 chromium Substances 0.000 claims description 9
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 8
- 229910052804 chromium Inorganic materials 0.000 claims description 8
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 97
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 150000001721 carbon Chemical class 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000760 Hardened steel Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000000071 blow moulding Methods 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
- 150000003608 titanium Chemical class 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/046—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with at least one amorphous inorganic material layer, e.g. DLC, a-C:H, a-C:Me, the layer being doped or not
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/343—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one DLC or an amorphous carbon based layer, the layer being doped or not
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
- F16C2206/02—Carbon based material
- F16C2206/04—Diamond like carbon [DLC]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12014—All metal or with adjacent metals having metal particles
- Y10T428/12028—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, etc.]
- Y10T428/12049—Nonmetal component
- Y10T428/12056—Entirely inorganic
Abstract
Description
IVB族、VB族、又はVIB族の少なくとも1つの元素を含む第一中間層と、
前記第一中間層の上に堆積した、ダイヤモンド様ナノコンポジット組成物を含む第二中間層と、
前記第二中間層の上に堆積したダイヤモンド様炭素層と
を備える。
第一中間層は、IVB族、VB族、又はVIB族の少なくとも1つの元素を含む。有利には、第一中間層は、例えばチタン層、クロム層、チタンを基礎とする層又はクロムを基礎とする層として、チタン及び/又はクロムを含む。チタンを基礎とする層は、例えばTiC層、TiN層又はTiCN層を含んでよい。クロムを基礎とする層は、例えばCrN層又はCr3C2層を含んでよい。チタンを基礎とする層を含む積層構造物は再処理又は再生するのがより容易であるので、多くの用途のためには、チタンを基礎とする層が、クロムを基礎とする層よりも好ましい。例えば、脱被覆(decoat)のために使用される反応性イオンエッチングは、クロムを基礎とする中間層とは協働しない。
第二中間層は、ダイヤモンド様ナノコンポジット組成物を含む。ダイヤモンド様ナノコンポジット組成物は、C、H、Si及びOのアモルファス構造を含む。有利には、ナノコンポジット組成物は、C、Si及びOの合計に対する割合で、Cを40〜90%、Siを5〜40%及びOを5〜25%含む(at%で示す)。有利には、ダイヤモンド様ナノコンポジット組成物は、a−C:H及びa−S:Oの2つの相互侵入網目構造を含む。
ダイヤモンド様炭素コーティングは、アモルファス水素化炭素(a−C:H)を含む。有利には、ダイヤモンド様炭素コーティングは、水素濃度が0〜60%であるsp2結合とsp3結合が混在している炭素を含む。
基材を用意するステップと、
例えばチタン及び/又はクロム等のIVB族、VB族、又はVIB族の少なくとも1つの元素を含む第一中間層を適用するステップと、
ダイヤモンド様ナノコンポジット組成物を含む第二中間層を適用するステップと、
ダイヤモンド様炭素層を適用するステップと
を含む。
a)第一のコーティングタイプは、DLN層及びこのDLN層上に堆積させたDLC層の積層構造物を含む。
b)第二のコーティングタイプは、チタン層及び、このチタン層上に堆積させたDLC層の積層構造物を含む。チタン層の組成は、チタン層からDLC層へと徐々に変化する。
c)第三のコーティングタイプは、本発明に係る積層構造物を含む。この積層構造物は、チタン層、このチタン層上に堆積させたDLN層及びDLN層上に堆積させたDLC層を含む。チタン層とDLN層との間には勾配はないが、DLN層はDLC層へと徐々に変化していく。
Claims (12)
- IVB族、VB族、又はVIB族の少なくとも1つの元素を含む第一中間層と、
前記第一中間層の上に堆積した、ダイヤモンド様ナノコンポジット組成物を含む第二中間層と、
前記第二中間層の上に堆積したダイヤモンド様炭素層と
を備えた積層構造物。 - 前記第一中間層がチタン及び/又はクロムを含む請求項1に記載の積層構造物。
- 前記構造物が、前記ダイヤモンド様炭素層の上に、ダイヤモンド様ナノコンポジット組成物を含む少なくとも1つの層を更に備えた請求項1又は2に記載の積層構造物。
- 前記第一中間層が0.001〜1μmの厚さを有する請求項1〜3のいずれか1項に記載の積層構造物。
- 前記第二中間層が0.01〜5μmの厚さを有する請求項1〜4のいずれか1項に記載の積層構造物。
- 前記ダイヤモンド様炭素層が0.1〜10μmの厚さを有する請求項1〜5のいずれか1項に記載の積層構造物。
- 前記ナノコンポジット組成物が、C、Si及びOの合計に対するat%で、Cを40〜90%、Siを5〜40%及びOを5〜25%含む請求項1〜6のいずれか1項に記載の積層構造物。
- 前記第二中間層が、金属をドープしたダイヤモンド様ナノコンポジット組成物を含む請求項1〜7のいずれか1項に記載の積層構造物。
- 前記ダイヤモンド様炭素層に金属がドープされている請求項1〜8のいずれか1項に記載の積層構造物。
- 請求項1〜9のいずれか1項に記載の積層構造物で少なくとも部分的に被覆された基材。
- 請求項10に記載の基材の高剪断及び/又は高衝撃用途への使用。
- 基材を用意するステップと、
IVB族、VB族、又はVIB族の少なくとも1つの元素を含む第一中間層を適用するステップと、
ダイヤモンド様ナノコンポジット組成物を含む第二中間層を適用するステップと、
ダイヤモンド様炭素層を適用するステップと
を含む、請求項1〜10のいずれか1項に記載の積層構造物により基材を被覆する方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EPPCT/EP03/50923 | 2003-12-02 | ||
PCT/EP2003/050923 WO2005054539A1 (en) | 2003-12-02 | 2003-12-02 | A layered structure |
PCT/EP2004/013676 WO2005054540A1 (en) | 2003-12-02 | 2004-11-30 | A layered structure |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007513856A true JP2007513856A (ja) | 2007-05-31 |
JP5248778B2 JP5248778B2 (ja) | 2013-07-31 |
Family
ID=34639241
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006541890A Active JP5248778B2 (ja) | 2003-12-02 | 2004-11-30 | 積層構造物とそれに被覆された基材、積層構造物により基材を被覆する方法及び該基材を使用する方法 |
Country Status (9)
Country | Link |
---|---|
US (1) | US8518553B2 (ja) |
EP (1) | EP1704264B1 (ja) |
JP (1) | JP5248778B2 (ja) |
CN (1) | CN1890398B (ja) |
AU (2) | AU2003298338A1 (ja) |
BR (1) | BRPI0417226B1 (ja) |
ES (1) | ES2426170T3 (ja) |
RU (1) | RU2006123417A (ja) |
WO (2) | WO2005054539A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013501897A (ja) * | 2009-08-13 | 2013-01-17 | フェデラル−モグル・ブルシャイト・ゲーエムベーハー | コーティングを有する摺動要素、とりわけピストンリング |
JP2013529249A (ja) * | 2010-03-09 | 2013-07-18 | フェデラル−モグル・ブルシャイト・ゲーエムベーハー | ピストンリングの少なくとも内側面を被覆する方法およびピストンリング |
JP2014129826A (ja) * | 2012-12-28 | 2014-07-10 | Riken Corp | シリンダとピストンリングの組合せ |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1883717A1 (en) | 2005-05-26 | 2008-02-06 | NV Bekaert SA | Piston ring having hard multi-layer coating |
CN1899992A (zh) * | 2005-07-19 | 2007-01-24 | 鸿富锦精密工业(深圳)有限公司 | 模仁及其制备方法 |
EP1915472B1 (en) * | 2005-08-18 | 2018-09-05 | Oerlikon Surface Solutions AG, Pfäffikon | Substrate coated with a layered structure comprising a tetrahedral carbon layer and a softer outer layer |
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- 2004-11-30 CN CN2004800357649A patent/CN1890398B/zh active Active
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Also Published As
Publication number | Publication date |
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CN1890398B (zh) | 2010-09-01 |
EP1704264A1 (en) | 2006-09-27 |
US20080166287A1 (en) | 2008-07-10 |
BRPI0417226A (pt) | 2007-03-06 |
BRPI0417226B1 (pt) | 2015-08-04 |
RU2006123417A (ru) | 2008-01-20 |
EP1704264B1 (en) | 2013-08-21 |
AU2003298338A1 (en) | 2005-06-24 |
WO2005054540A1 (en) | 2005-06-16 |
AU2004295440B2 (en) | 2009-10-29 |
WO2005054539A1 (en) | 2005-06-16 |
US8518553B2 (en) | 2013-08-27 |
ES2426170T3 (es) | 2013-10-21 |
CN1890398A (zh) | 2007-01-03 |
JP5248778B2 (ja) | 2013-07-31 |
AU2004295440A1 (en) | 2005-06-16 |
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