JP2007506081A5 - - Google Patents
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- Publication number
- JP2007506081A5 JP2007506081A5 JP2006526625A JP2006526625A JP2007506081A5 JP 2007506081 A5 JP2007506081 A5 JP 2007506081A5 JP 2006526625 A JP2006526625 A JP 2006526625A JP 2006526625 A JP2006526625 A JP 2006526625A JP 2007506081 A5 JP2007506081 A5 JP 2007506081A5
- Authority
- JP
- Japan
- Prior art keywords
- image
- wafer
- image field
- size
- field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 description 38
- 238000000034 method Methods 0.000 description 32
- 238000005286 illumination Methods 0.000 description 29
- 238000003384 imaging method Methods 0.000 description 19
- 238000005457 optimization Methods 0.000 description 15
- 230000008859 change Effects 0.000 description 14
- 230000007547 defect Effects 0.000 description 14
- 238000012545 processing Methods 0.000 description 14
- 238000000926 separation method Methods 0.000 description 14
- 230000005540 biological transmission Effects 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 239000011159 matrix material Substances 0.000 description 4
- 238000003909 pattern recognition Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000012447 hatching Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- 238000004590 computer program Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10343148A DE10343148A1 (de) | 2003-09-18 | 2003-09-18 | Verfahren und Vorrichtung zur Inspektion eines Wafers |
| PCT/EP2004/051946 WO2005029052A1 (de) | 2003-09-18 | 2004-08-27 | Verfahren und vorrichtung zur inspektion eines wafers |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007506081A JP2007506081A (ja) | 2007-03-15 |
| JP2007506081A5 true JP2007506081A5 (enExample) | 2007-07-12 |
Family
ID=34352925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006526625A Pending JP2007506081A (ja) | 2003-09-18 | 2004-08-27 | ウェハの検査方法及び装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20070064224A1 (enExample) |
| JP (1) | JP2007506081A (enExample) |
| CN (1) | CN1839308A (enExample) |
| DE (1) | DE10343148A1 (enExample) |
| WO (1) | WO2005029052A1 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005017642B4 (de) * | 2005-04-15 | 2010-04-08 | Vistec Semiconductor Systems Jena Gmbh | Verfahren zur Inspektion eines Wafers |
| JP5099848B2 (ja) * | 2006-08-10 | 2012-12-19 | 芝浦メカトロニクス株式会社 | 円盤状基板の検査装置及び検査方法 |
| US8401272B2 (en) * | 2007-08-02 | 2013-03-19 | Asti Holdings Limited | Patterned wafer defect inspection system and method |
| DE102007060355A1 (de) | 2007-12-12 | 2009-06-25 | Vistec Semiconductor Systems Gmbh | Verfahren und Vorrichtung zur Verarbeitung der von mindestens einer Kamera aufgenommenen Bilddaten der Oberfläche eines Wafers |
| SG164292A1 (en) | 2009-01-13 | 2010-09-29 | Semiconductor Technologies & Instruments Pte | System and method for inspecting a wafer |
| CN101964316B (zh) * | 2009-07-24 | 2012-05-23 | 中芯国际集成电路制造(上海)有限公司 | 晶圆测试方法 |
| CN102759334A (zh) * | 2011-04-25 | 2012-10-31 | 范玉兰 | 一种测量晶体管尺寸的装置 |
| DE102011051355A1 (de) * | 2011-06-27 | 2012-12-27 | Hseb Dresden Gmbh | Inspektionsvorrichtung |
| US9546862B2 (en) * | 2012-10-19 | 2017-01-17 | Kla-Tencor Corporation | Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool |
| CN102980897A (zh) * | 2012-12-10 | 2013-03-20 | 深圳市华星光电技术有限公司 | 检测方法及检测装置 |
| US9164043B2 (en) | 2012-12-10 | 2015-10-20 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Detecting method and detecting device |
| WO2017171651A1 (en) * | 2016-03-30 | 2017-10-05 | Agency For Science, Technology And Research | System and method for imaging a surface defect on an object |
| WO2018071747A1 (en) * | 2016-10-13 | 2018-04-19 | Life Technologies Holdings Pte Limited | Systems, methods, and apparatuses for optimizing field of view |
| US11600504B2 (en) * | 2020-06-29 | 2023-03-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Detecting damaged semiconductor wafers utilizing a semiconductor wafer sorter tool of an automated materials handling system |
| JP7431694B2 (ja) * | 2020-07-28 | 2024-02-15 | キヤノン株式会社 | 情報処理装置、膜形成装置、物品の製造方法、およびプログラム |
| US12462375B2 (en) * | 2022-08-05 | 2025-11-04 | Tokyo Electron Limited | Methods to automatically adjust one or more parameters of a camera system for optimal 3D reconstruction of features formed within/on a semiconductor substrate |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6273716A (ja) * | 1985-09-27 | 1987-04-04 | Fujitsu Ltd | 検査装置 |
| WO1991018313A1 (en) * | 1990-05-21 | 1991-11-28 | Interactive Video Systems, Inc. | Projected image focus system and method of use |
| US5529623A (en) * | 1994-09-28 | 1996-06-25 | Ciba-Geigy Corporation | Pigmentary solid solutions of pyrrolo[3,4-c]pyrroles and quinacridones |
| KR960015001A (ko) * | 1994-10-07 | 1996-05-22 | 가나이 쓰토무 | 반도체 기판의 제조방법과 피검사체상의 패턴결함을 검사하기 위한 방법 및 장치 |
| JP3744966B2 (ja) * | 1994-10-07 | 2006-02-15 | 株式会社ルネサステクノロジ | 半導体基板の製造方法 |
| JP3683298B2 (ja) * | 1995-02-02 | 2005-08-17 | オリンパス株式会社 | 欠陥検出用顕微鏡装置 |
| US6895109B1 (en) * | 1997-09-04 | 2005-05-17 | Texas Instruments Incorporated | Apparatus and method for automatically detecting defects on silicon dies on silicon wafers |
| JP2001144148A (ja) * | 2001-05-12 | 2001-05-25 | Advantest Corp | 半導体試験装置のウエハマップ表示装置 |
| JP2003098112A (ja) * | 2001-09-25 | 2003-04-03 | Hitachi Ltd | 薄膜デバイスの表面画像の検出・出力方法及びその装置並びにそれを用いた薄膜デバイスの製造方法及びその製造装置 |
| US7558419B1 (en) * | 2003-08-14 | 2009-07-07 | Brion Technologies, Inc. | System and method for detecting integrated circuit pattern defects |
-
2003
- 2003-09-18 DE DE10343148A patent/DE10343148A1/de not_active Ceased
-
2004
- 2004-08-27 WO PCT/EP2004/051946 patent/WO2005029052A1/de not_active Ceased
- 2004-08-27 US US10/571,207 patent/US20070064224A1/en not_active Abandoned
- 2004-08-27 CN CNA2004800239479A patent/CN1839308A/zh active Pending
- 2004-08-27 JP JP2006526625A patent/JP2007506081A/ja active Pending
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