JP2007502549A - 高温拡散炉の加熱コイルの保持メカニズム - Google Patents

高温拡散炉の加熱コイルの保持メカニズム Download PDF

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Publication number
JP2007502549A
JP2007502549A JP2006533357A JP2006533357A JP2007502549A JP 2007502549 A JP2007502549 A JP 2007502549A JP 2006533357 A JP2006533357 A JP 2006533357A JP 2006533357 A JP2006533357 A JP 2006533357A JP 2007502549 A JP2007502549 A JP 2007502549A
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Japan
Prior art keywords
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heating element
spacers
electric furnace
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Pending
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JP2006533357A
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English (en)
Japanese (ja)
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JP2007502549A5 (https=
Inventor
ビー． ペック，ケビン
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エムアールエル インダストリーズ
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Application filed by エムアールエル インダストリーズ filed Critical エムアールエル インダストリーズ
Publication of JP2007502549A publication Critical patent/JP2007502549A/ja
Publication of JP2007502549A5 publication Critical patent/JP2007502549A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/62—Heating elements specially adapted for furnaces
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/62—Heating elements specially adapted for furnaces
    • H05B3/66—Supports or mountings for heaters on or in the wall or roof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any of groups F27B1/00 - F27B15/00
    • F27B17/0016—Chamber type furnaces
    • F27B17/0025—Chamber type furnaces specially adapted for treating semiconductor wafers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D11/00—Arrangement of elements for electric heating in or on furnaces
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0434—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Resistance Heating (AREA)
  • Furnace Details (AREA)
  • General Induction Heating (AREA)
JP2006533357A 2003-05-23 2004-05-24 高温拡散炉の加熱コイルの保持メカニズム Pending JP2007502549A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/444,128 US6807220B1 (en) 2003-05-23 2003-05-23 Retention mechanism for heating coil of high temperature diffusion furnace
PCT/US2004/016276 WO2004105435A2 (en) 2003-05-23 2004-05-24 Retention mechanism for heating coil of high temperature diffusion furnace

Publications (2)

Publication Number Publication Date
JP2007502549A true JP2007502549A (ja) 2007-02-08
JP2007502549A5 JP2007502549A5 (https=) 2007-07-12

Family

ID=33131529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006533357A Pending JP2007502549A (ja) 2003-05-23 2004-05-24 高温拡散炉の加熱コイルの保持メカニズム

Country Status (8)

Country Link
US (1) US6807220B1 (https=)
EP (1) EP1632110B1 (https=)
JP (1) JP2007502549A (https=)
KR (1) KR20060070482A (https=)
CN (1) CN100536628C (https=)
AT (1) ATE465619T1 (https=)
DE (1) DE602004026720D1 (https=)
WO (1) WO2004105435A2 (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE528334C2 (sv) * 2004-09-16 2006-10-24 Sandvik Intellectual Property Ugnsisolering samt ugn försedd med nämnda islering
NL1028057C2 (nl) * 2005-01-18 2006-07-19 Tempress Systems Inrichting voor het op zijn plaats houden van verhittingsdraden in een horizontale oven.
WO2007024691A2 (en) * 2005-08-19 2007-03-01 Mrl Industries, Inc. Intermingled heating elements having a fault tolerant circuit
US8168927B2 (en) * 2006-11-10 2012-05-01 Nova Coil, Inc. Apparatus, arrangement and method for supporting a helical wire coil heating element
SE530968C2 (sv) * 2007-03-05 2008-11-04 Sandvik Intellectual Property Insats och värmeelement för elektriska ugnar
JP2010520601A (ja) * 2007-03-05 2010-06-10 サンドビック インテレクチュアル プロパティー アクティエボラーグ ヒーター要素ならびに電気炉用のインサート
WO2008131179A1 (en) * 2007-04-20 2008-10-30 Shell Oil Company In situ heat treatment from multiple layers of a tar sands formation
US7564007B2 (en) * 2007-05-14 2009-07-21 Bailey James G Kiln removable ceramic element holder
JP5096182B2 (ja) * 2008-01-31 2012-12-12 東京エレクトロン株式会社 熱処理炉
US8395096B2 (en) * 2009-02-05 2013-03-12 Sandvik Thermal Process, Inc. Precision strip heating element
DE202010001370U1 (de) * 2010-01-25 2010-05-06 Türk & Hillinger GmbH Elektrische Heizvorrichtung
KR200459392Y1 (ko) * 2010-04-29 2012-03-23 주식회사 테라세미콘 히터블록
TWI565367B (zh) * 2010-06-25 2017-01-01 山特維克熱傳動公司 用於加熱元件線圈之支撐結構
US20120061377A1 (en) * 2010-09-10 2012-03-15 Mitch Agamohamadi Thermal processing apparatus with optimized structural support mechanism
CN102560436B (zh) * 2010-12-13 2014-07-16 北京北方微电子基地设备工艺研究中心有限责任公司 一种气相沉积设备
US8987641B2 (en) * 2011-06-20 2015-03-24 Arsalan Emami High performance heater
DE102013113048A1 (de) * 2013-11-26 2015-05-28 Aixtron Se Heizvorrichtung für einen Suszeptor eines CVD-Reaktors
CN104596248B (zh) * 2015-01-23 2016-09-14 李世杰 一种工业电炉
EP3427292A4 (en) 2016-03-10 2019-11-13 Arsalan Emami IMPROVED INDUSTRIAL HEATING
KR102403525B1 (ko) 2016-08-05 2022-05-27 샌드빅 써멀 프로세스. 인크. 비-균일한 절연부를 갖는 열적 프로세스 디바이스
USD810162S1 (en) * 2016-10-04 2018-02-13 Carlisle Thweatt, Jr. Support plate anchor tab
CN222418480U (zh) * 2024-05-31 2025-01-28 拉普拉斯新能源科技股份有限公司 加热炉

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623675Y2 (https=) * 1977-03-16 1981-06-03
JPS62170186A (ja) * 1986-01-23 1987-07-27 東京エレクトロン相模株式会社 熱処理装置
JPS63145291U (https=) * 1987-03-16 1988-09-26
JPS63202097U (https=) * 1987-06-15 1988-12-27
JPS6460988A (en) * 1987-08-31 1989-03-08 Dainippon Screen Mfg Heat treatment furnace for semiconductor substrate
JPH0474299U (https=) * 1990-11-13 1992-06-29
JPH05504227A (ja) * 1990-02-06 1993-07-01 サームテック　インコーポレイテッド 電気炉
JPH0758046A (ja) * 1993-08-11 1995-03-03 Tokyo Electron Ltd 熱処理装置
US5536919A (en) * 1994-11-22 1996-07-16 Taheri; Ramtin Heating chamber
JPH11102874A (ja) * 1997-09-26 1999-04-13 Kokusai Electric Co Ltd ヒータユニット

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US1698282A (en) 1925-11-28 1929-01-08 Edison Electric Appliance Co Electric heater
US2386776A (en) * 1942-08-11 1945-10-16 Westinghouse Electric Corp Heating apparatus
US2602130A (en) 1950-09-26 1952-07-01 Harold N Shaw Electrical heating element
US3043942A (en) 1959-04-29 1962-07-10 Trent Inc Electrical heating apparatus
US3846619A (en) 1973-11-12 1974-11-05 Emerson Electric Co Open coil electric heater
US3953376A (en) 1974-07-10 1976-04-27 International Telephone And Telegraph Corporation Method for preparing emissive coating for electrodes
US3935376A (en) 1974-12-18 1976-01-27 Du-Co Ceramics Company Ceramic insulator for supporting a ribbon-type heating element
USD248943S (en) 1976-12-13 1978-08-15 King Reynold C Insulator for an open coil electric heating unit
USD258877S (en) 1978-06-15 1981-04-14 Emerson Electric Co. Insulator for an open coil electric heating unit
USD261260S (en) 1979-10-22 1981-10-13 Emerson Electric Co. Insulator for an open-coil electric heating element
US4341916A (en) * 1980-10-30 1982-07-27 Manville Service Corporation Electric furnace insulation module
US4692599A (en) 1980-11-14 1987-09-08 Tutco, Inc. Coil support insulator for an electric heater
US4418415A (en) * 1982-03-08 1983-11-29 Kennecott Corporation Ceramic fiber insulated furnaces with electrical hanger element of great mechanical integrity
US4531017A (en) 1983-11-25 1985-07-23 Tutco, Inc. Insulator for an electric heater
US4528441A (en) 1983-12-14 1985-07-09 Carrier Corporation Electrical resistance heating assembly
WO1987003079A1 (fr) * 1985-11-11 1987-05-21 Mikron Ipari És Szolgáltató Kisszövetkezet Corps chauffant autoporteur pour fours electriques et four electrique avec ce corps chauffant
JPH0739908B2 (ja) * 1991-02-28 1995-05-01 ニチアス株式会社 加熱装置
US5461214A (en) 1992-06-15 1995-10-24 Thermtec, Inc. High performance horizontal diffusion furnace system
US5959254A (en) 1996-10-07 1999-09-28 Martin, Sr.; Lendell Tapered support insulator for heating elements having curved surface grooves for retention of the heating elements
US6285013B1 (en) 1997-09-29 2001-09-04 Nova Industries, Inc. Heat coil support assembly and method
US5880440A (en) 1997-11-07 1999-03-09 Emerson Electric Co. Electrical coil insulator
US6512206B1 (en) 2002-01-02 2003-01-28 Mrl Industries Continuous process furnace

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623675Y2 (https=) * 1977-03-16 1981-06-03
JPS62170186A (ja) * 1986-01-23 1987-07-27 東京エレクトロン相模株式会社 熱処理装置
JPS63145291U (https=) * 1987-03-16 1988-09-26
JPS63202097U (https=) * 1987-06-15 1988-12-27
JPS6460988A (en) * 1987-08-31 1989-03-08 Dainippon Screen Mfg Heat treatment furnace for semiconductor substrate
JPH05504227A (ja) * 1990-02-06 1993-07-01 サームテック　インコーポレイテッド 電気炉
JPH0474299U (https=) * 1990-11-13 1992-06-29
JPH0758046A (ja) * 1993-08-11 1995-03-03 Tokyo Electron Ltd 熱処理装置
US5536919A (en) * 1994-11-22 1996-07-16 Taheri; Ramtin Heating chamber
JPH11102874A (ja) * 1997-09-26 1999-04-13 Kokusai Electric Co Ltd ヒータユニット

Also Published As

Publication number Publication date
KR20060070482A (ko) 2006-06-23
ATE465619T1 (de) 2010-05-15
DE602004026720D1 (de) 2010-06-02
EP1632110A4 (en) 2009-04-08
WO2004105435A2 (en) 2004-12-02
EP1632110B1 (en) 2010-04-21
EP1632110A2 (en) 2006-03-08
US6807220B1 (en) 2004-10-19
CN1820545A (zh) 2006-08-16
CN100536628C (zh) 2009-09-02
WO2004105435A3 (en) 2005-03-17

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