JPS5623675Y2 - - Google Patents
Info
- Publication number
- JPS5623675Y2 JPS5623675Y2 JP3084977U JP3084977U JPS5623675Y2 JP S5623675 Y2 JPS5623675 Y2 JP S5623675Y2 JP 3084977 U JP3084977 U JP 3084977U JP 3084977 U JP3084977 U JP 3084977U JP S5623675 Y2 JPS5623675 Y2 JP S5623675Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Resistance Heating (AREA)
- Tunnel Furnaces (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3084977U JPS5623675Y2 (https=) | 1977-03-16 | 1977-03-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3084977U JPS5623675Y2 (https=) | 1977-03-16 | 1977-03-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53125368U JPS53125368U (https=) | 1978-10-05 |
| JPS5623675Y2 true JPS5623675Y2 (https=) | 1981-06-03 |
Family
ID=28881281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3084977U Expired JPS5623675Y2 (https=) | 1977-03-16 | 1977-03-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5623675Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007502549A (ja) * | 2003-05-23 | 2007-02-08 | エムアールエル インダストリーズ | 高温拡散炉の加熱コイルの保持メカニズム |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3848442B2 (ja) * | 1997-08-20 | 2006-11-22 | 株式会社日立国際電気 | ヒータ支持装置及び半導体製造装置及び半導体装置の製造方法 |
| KR20040003434A (ko) * | 2002-07-03 | 2004-01-13 | 조성호 | 전기로의 전열선용 애자 |
-
1977
- 1977-03-16 JP JP3084977U patent/JPS5623675Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007502549A (ja) * | 2003-05-23 | 2007-02-08 | エムアールエル インダストリーズ | 高温拡散炉の加熱コイルの保持メカニズム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53125368U (https=) | 1978-10-05 |