JP2007502519A - プラズマプロセス環境におけるプラズマ特性測定用センサアレイ - Google Patents
プラズマプロセス環境におけるプラズマ特性測定用センサアレイ Download PDFInfo
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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Abstract
【選択図】図1
Description
ここで、I+ satはイオン飽和電流、V0はバイアスが無い状態でのプローブの浮遊電位、VDFPは別個に印加されたプローブ電圧、Teは見かけ上の電子温度である。式1は、バイアス電位の増加に伴う有効プローブ領域の拡大、非対象的なプローブ領域、不均一なプラズマ、および非マックスウェル電子エネルギー分布を含む非理想的な状態を考慮するために修正してもよい。式1に帰結する通常の分析は、DCフローティングDFPの場合に対してであるが、強いRF電場があり、かつRFフィルタリングを用いてDFPセンサがプラズマプロセスに内在するRF電位のゆらぎに追随できるプラズマ環境にも適用可能である。
非対角項の電流 Ii,j 172および176は、アレイ中の非ローカルなDFPセンサプローブに関連する同様に平均化されたイオン飽和電流項となる。このプローブ間で刺激された電流は非ローカルであり、プラズマ本体の大部分に伝導する必要があるため、これらの電流項は、プラズマ本体のバルク状態に関する付加的な情報を有する。あるいは、この配列はまた、Vbiasのパルス振幅を比較的小さなものとした場合、I−Vデータから得た実効的電子温度データを有することになる。
Claims (18)
- プラズマプロセスシステムにおけるプラズマ境界特性を測定する方法であって、
(a)プラズマチャンバを有するプラズマプロセスシステムを用意し、
(b)前記プラズマチャンバ内に配置した複数のセンサを備えるセンサアレイを設け、
(c)プラズマプロセスに用いるために前記プラズマチャンバ内でプラズマを発生させ、
(d)前記センサアレイを用いて前記プラズマの境界特性を測定することを備える前記方法。 - 前記センサは、デュアルフローティング・ラングミュアプローブである請求項1に記載の方法。
- 前記センサアレイは、前記プラズマチャンバ内に含まれるチャンバライナに沿って配置される請求項1に記載の方法。
- 前記センサアレイは、前記プラズマチャンバ内に含まれる絶縁分離リングに沿って配置される請求項1に記載の方法。
- 前記センサアレイは、前記プラズマチャンバ内に含まれる試料チャック周りに配置される請求項1に記載の方法。
- 前記プラズマの前記境界特性は、リアルタイムに測定される請求項1に記載の方法。
- 前記プラズマの前記測定した境界特性を用いて、前記プラズマのバルク特性を計算する請求項1に記載の方法。
- 前記プラズマの前記測定した境界特性は、前記プラズマプロセスを制御するプロセスシステムコントローラに供給される請求項1に記載の方法。
- 前記複数のセンサは、動的にパルス化されて、前記プラズマの境界特性を測定する請求項1に記載の方法。
- 前記プラズマは、パルス化電力源を用いて発生させ、前記複数のセンサの動的パルスは、このパルス化電力源のパルスと同期する請求項9に記載の方法。
- プラズマプロセスシステムであって、
(a)プロセス用のプラズマを内部で発生させることができるプラズマチャンバと、
(b)前記プラズマチャンバ内に配置された複数のセンサを備えるセンサアレイと、
(c)前記プロセス用のプラズマの境界特性を測定するために、前記複数のセンサを刺激する回路とを備える前記システム。 - 前記センサは、デュアルフローティング・ラングミュアプローブである請求項11に記載のシステム。
- 前記センサアレイは、前記プラズマチャンバ内に含まれるチャンバライナに沿って配置される請求項11に記載のシステム。
- 前記センサアレイは、前記プラズマチャンバ内に含まれる絶縁分離リングに沿って配置される請求項11に記載のシステム。
- 前記センサアレイは、前記プラズマチャンバ内に含まれる試料チャック周りに配置される請求項11に記載のシステム。
- 前記複数のセンサを刺激する前記回路は、動的パルス回路である請求項11に記載のシステム。
- 前記複数のセンサを刺激する前記回路は、多重回路である請求項11に記載のシステム。
- 前記プラズマの測定した境界特性を記録して、プロセスシステムコントローラに前記プラズマの測定した境界特性を通信する回路をさらに備える請求項11に記載のシステム。
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Application Number | Priority Date | Filing Date | Title |
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US10/640,892 US6902646B2 (en) | 2003-08-14 | 2003-08-14 | Sensor array for measuring plasma characteristics in plasma processing environments |
US10/640,892 | 2003-08-14 | ||
PCT/US2004/026127 WO2005017937A2 (en) | 2003-08-14 | 2004-08-12 | Sensor array for measuring plasma characteristics in plasma processing enviroments |
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JP2007502519A true JP2007502519A (ja) | 2007-02-08 |
JP2007502519A5 JP2007502519A5 (ja) | 2011-02-24 |
JP5015596B2 JP5015596B2 (ja) | 2012-08-29 |
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US (2) | US6902646B2 (ja) |
JP (1) | JP5015596B2 (ja) |
KR (1) | KR20060067957A (ja) |
TW (1) | TWI342898B (ja) |
WO (1) | WO2005017937A2 (ja) |
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US6902646B2 (en) | 2005-06-07 |
US8545669B2 (en) | 2013-10-01 |
WO2005017937A3 (en) | 2005-06-09 |
US20050151544A1 (en) | 2005-07-14 |
TWI342898B (en) | 2011-06-01 |
KR20060067957A (ko) | 2006-06-20 |
JP5015596B2 (ja) | 2012-08-29 |
US20050034811A1 (en) | 2005-02-17 |
TW200506388A (en) | 2005-02-16 |
WO2005017937A2 (en) | 2005-02-24 |
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