JP2007283614A - フォトマスク保護用粘着フィルム - Google Patents
フォトマスク保護用粘着フィルム Download PDFInfo
- Publication number
- JP2007283614A JP2007283614A JP2006112831A JP2006112831A JP2007283614A JP 2007283614 A JP2007283614 A JP 2007283614A JP 2006112831 A JP2006112831 A JP 2006112831A JP 2006112831 A JP2006112831 A JP 2006112831A JP 2007283614 A JP2007283614 A JP 2007283614A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- antistatic
- release layer
- adhesive film
- photomask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002313 adhesive film Substances 0.000 title claims abstract description 14
- 239000010410 layer Substances 0.000 claims abstract description 107
- 239000002216 antistatic agent Substances 0.000 claims abstract description 30
- 229920005989 resin Polymers 0.000 claims abstract description 21
- 239000011347 resin Substances 0.000 claims abstract description 21
- 125000002091 cationic group Chemical group 0.000 claims abstract description 8
- 239000012790 adhesive layer Substances 0.000 claims abstract description 7
- 150000003242 quaternary ammonium salts Chemical class 0.000 claims abstract description 7
- 229910052698 phosphorus Inorganic materials 0.000 claims abstract description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 5
- 229910052717 sulfur Inorganic materials 0.000 claims abstract description 5
- 230000000694 effects Effects 0.000 claims description 10
- 230000001681 protective effect Effects 0.000 claims description 10
- 239000004820 Pressure-sensitive adhesive Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 abstract description 15
- 238000006243 chemical reaction Methods 0.000 abstract description 14
- 239000011248 coating agent Substances 0.000 abstract description 14
- 238000004132 cross linking Methods 0.000 abstract description 13
- 239000000463 material Substances 0.000 abstract description 10
- 239000000758 substrate Substances 0.000 abstract description 4
- 229910052718 tin Inorganic materials 0.000 abstract description 3
- 239000011229 interlayer Substances 0.000 abstract 2
- 229920001296 polysiloxane Polymers 0.000 description 13
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 11
- 239000011230 binding agent Substances 0.000 description 10
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- -1 polyethylene terephthalate Polymers 0.000 description 7
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 239000003795 chemical substances by application Substances 0.000 description 6
- 125000004429 atom Chemical group 0.000 description 5
- 238000001035 drying Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000003054 catalyst Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 125000004433 nitrogen atom Chemical group N* 0.000 description 3
- 229920000728 polyester Polymers 0.000 description 3
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 3
- 229910001887 tin oxide Inorganic materials 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 229920000180 alkyd Polymers 0.000 description 2
- 238000001723 curing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- YIBPLYRWHCQZEB-UHFFFAOYSA-N formaldehyde;propan-2-one Chemical compound O=C.CC(C)=O YIBPLYRWHCQZEB-UHFFFAOYSA-N 0.000 description 2
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 2
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000002574 poison Substances 0.000 description 2
- 231100000614 poison Toxicity 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 125000001273 sulfonato group Chemical group [O-]S(*)(=O)=O 0.000 description 2
- 229920005992 thermoplastic resin Polymers 0.000 description 2
- 239000008096 xylene Substances 0.000 description 2
- KPAPHODVWOVUJL-UHFFFAOYSA-N 1-benzofuran;1h-indene Chemical compound C1=CC=C2CC=CC2=C1.C1=CC=C2OC=CC2=C1 KPAPHODVWOVUJL-UHFFFAOYSA-N 0.000 description 1
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 1
- GZVHEAJQGPRDLQ-UHFFFAOYSA-N 6-phenyl-1,3,5-triazine-2,4-diamine Chemical compound NC1=NC(N)=NC(C=2C=CC=CC=2)=N1 GZVHEAJQGPRDLQ-UHFFFAOYSA-N 0.000 description 1
- RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- 229920002799 BoPET Polymers 0.000 description 1
- 229920000742 Cotton Polymers 0.000 description 1
- 229920000089 Cyclic olefin copolymer Polymers 0.000 description 1
- 239000004641 Diallyl-phthalate Substances 0.000 description 1
- 244000043261 Hevea brasiliensis Species 0.000 description 1
- 239000013032 Hydrocarbon resin Substances 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004697 Polyetherimide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical group C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 1
- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 description 1
- 241000519995 Stachys sylvatica Species 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 229920001807 Urea-formaldehyde Polymers 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 238000007259 addition reaction Methods 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 150000001413 amino acids Chemical class 0.000 description 1
- 150000001414 amino alcohols Chemical class 0.000 description 1
- DQPBABKTKYNPMH-UHFFFAOYSA-M amino sulfate Chemical class NOS([O-])(=O)=O DQPBABKTKYNPMH-UHFFFAOYSA-M 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910000410 antimony oxide Inorganic materials 0.000 description 1
- 239000004760 aramid Substances 0.000 description 1
- 229920003235 aromatic polyamide Polymers 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- QUDWYFHPNIMBFC-UHFFFAOYSA-N bis(prop-2-enyl) benzene-1,2-dicarboxylate Chemical compound C=CCOC(=O)C1=CC=CC=C1C(=O)OCC=C QUDWYFHPNIMBFC-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000005038 ethylene vinyl acetate Substances 0.000 description 1
- HDNHWROHHSBKJG-UHFFFAOYSA-N formaldehyde;furan-2-ylmethanol Chemical compound O=C.OCC1=CC=CO1 HDNHWROHHSBKJG-UHFFFAOYSA-N 0.000 description 1
- 239000007849 furan resin Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 150000002314 glycerols Chemical class 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229920006270 hydrocarbon resin Polymers 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 239000010954 inorganic particle Substances 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229920003052 natural elastomer Polymers 0.000 description 1
- 229920001194 natural rubber Polymers 0.000 description 1
- VTRUBDSFZJNXHI-UHFFFAOYSA-N oxoantimony Chemical compound [Sb]=O VTRUBDSFZJNXHI-UHFFFAOYSA-N 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920001643 poly(ether ketone) Polymers 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920001230 polyarylate Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 239000011118 polyvinyl acetate Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000002195 soluble material Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 150000003505 terpenes Chemical class 0.000 description 1
- 235000007586 terpenes Nutrition 0.000 description 1
- 125000001302 tertiary amino group Chemical group 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- SOLUNJPVPZJLOM-UHFFFAOYSA-N trizinc;distiborate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-][Sb]([O-])([O-])=O.[O-][Sb]([O-])([O-])=O SOLUNJPVPZJLOM-UHFFFAOYSA-N 0.000 description 1
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 1
- 229920006337 unsaturated polyester resin Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Laminated Bodies (AREA)
- Adhesive Tapes (AREA)
Abstract
【解決手段】帯電防止層と離型層間に帯電防止層の影響を防ぐ中間層を設けたフォトマスク保護用粘着フィルムである。中間層が、分子中にN、P、S、Snの原子を有しない樹脂であるフォトマスク保護用粘着フィルムである。帯電防止層が、第4級アンモニウム塩を有するカチオン性帯電防止剤からなるものであるフォトマスク保護用粘着フィルムである。
【選択図】 なし
Description
中間層の厚みは、0.1〜1.0μmの範囲とするのが好ましい。より好ましくは、0.1〜0.5μmの範囲とする。前記範囲未満であると帯電防止層の影響を防ぐ効果が低下する。前記範囲を超えると帯電防止層の帯電防止性を遮るようになり好ましくない。
厚み6μmのポリエステルフィルムの上に、帯電防止塗工液を塗布して厚み0.3μmの帯電防止層を設けた。
帯電防止塗工液
第4級アンモニウム塩を有するカチオン性帯電防止剤 35重量部
コニシ株式会社製ボンディップPA−100 主剤/硬化剤=1/1
水 22重量部
IPA 43重量部
離型層塗工液
付加反応型シリコーン 100重量部
白金触媒 1重量部
比較例1は、実施例1の作成おいて、中間層を設けなくした他は、実施例1と同じ帯電防止層、離型層を積層してフォトマスク保護用粘着フィルムを作成した。
(1)耐エタノール性
エタノールを浸み込ませた脱脂綿にて離型層の表面を3回拭き、常温下に放置し、外観を下記の基準で目視評価する。
○:変化は見られない。
△:溶剤跡が白い点で残る。
×:離型層が剥がれる。
(2)帯電防止性
表面電気抵抗測定器(三菱化学製Hi-resta)を使って、離型層表面の表面電気抵抗を測定した。測定環境は25×50%RHである。 1012Ω/□以下であれば実用範囲内である。
(3)剥離力
図1に示す剥離力測定方法の模式図の通りに、180度剥離力を測定した。接着テープは、日東電工製ニットー31B、テープ幅25mm。剥離速度は、300mm/分である。
剥離力は、100mN/cm以下であれば実用範囲内である。
評価結果は、表1の通りであった。
Claims (3)
- 透明な基材フィルムの一方の面に粘着層が設けられ、他面に帯電防止層、離型層を積層したフォトマスク保護用粘着フィルムにおいて、帯電防止層と離型層間に帯電防止層の影響を防ぐ中間層を設けたことを特徴とするフォトマスク保護用粘着フィルム。
- 前記中間層が、分子中にN、P、S、Snの原子を有しない樹脂であることを特徴とする請求項1記載のフォトマスク保護用粘着フィルム。
- 前記帯電防止層が、第4級アンモニウム塩を有するカチオン性帯電防止剤からなるものであることを特徴とする請求項1、2記載のフォトマスク保護用粘着フィルム。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006112831A JP4919391B2 (ja) | 2006-04-17 | 2006-04-17 | フォトマスク保護用粘着フィルム |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006112831A JP4919391B2 (ja) | 2006-04-17 | 2006-04-17 | フォトマスク保護用粘着フィルム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007283614A true JP2007283614A (ja) | 2007-11-01 |
JP4919391B2 JP4919391B2 (ja) | 2012-04-18 |
Family
ID=38755825
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006112831A Active JP4919391B2 (ja) | 2006-04-17 | 2006-04-17 | フォトマスク保護用粘着フィルム |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4919391B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009169186A (ja) * | 2008-01-17 | 2009-07-30 | Mitsubishi Plastics Inc | フォトマスク保護テープ用ポリエステルフィルム |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0459207A (ja) * | 1990-06-29 | 1992-02-26 | Toshiba Silicone Co Ltd | 離型フィルム |
JPH07281420A (ja) * | 1994-04-04 | 1995-10-27 | Sekisui Chem Co Ltd | フォトマスク保護用粘着フイルム |
JP2003206454A (ja) * | 2002-01-10 | 2003-07-22 | Sekisui Chem Co Ltd | フォトマスク保護用粘着テープ |
JP2005153250A (ja) * | 2003-11-25 | 2005-06-16 | Lintec Corp | 帯電防止性を有する離型フィルム及びその製造方法 |
-
2006
- 2006-04-17 JP JP2006112831A patent/JP4919391B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0459207A (ja) * | 1990-06-29 | 1992-02-26 | Toshiba Silicone Co Ltd | 離型フィルム |
JPH07281420A (ja) * | 1994-04-04 | 1995-10-27 | Sekisui Chem Co Ltd | フォトマスク保護用粘着フイルム |
JP2003206454A (ja) * | 2002-01-10 | 2003-07-22 | Sekisui Chem Co Ltd | フォトマスク保護用粘着テープ |
JP2005153250A (ja) * | 2003-11-25 | 2005-06-16 | Lintec Corp | 帯電防止性を有する離型フィルム及びその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009169186A (ja) * | 2008-01-17 | 2009-07-30 | Mitsubishi Plastics Inc | フォトマスク保護テープ用ポリエステルフィルム |
Also Published As
Publication number | Publication date |
---|---|
JP4919391B2 (ja) | 2012-04-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4876289B2 (ja) | 帯電防止シリコン離型フィルム | |
CN102754055B (zh) | 导电性层叠体及使用其的触摸面板 | |
JP3996800B2 (ja) | 表面保護フィルムおよびそれを用いた積層体 | |
KR20140064842A (ko) | 광학적으로 투명한 도전성 접착제 및 그 용품 | |
JP2006326961A (ja) | 表面保護フィルム | |
KR101987643B1 (ko) | 박리성이 우수한 이형 필름 | |
JP2013196918A (ja) | 透明導電膜の形成に用いられる塗膜形成用組成物 | |
SG184460A1 (en) | Photoresist film and methods for abrasive etching and cutting | |
JP2010516856A (ja) | 表面保護フィルム | |
JP2020019953A (ja) | ディスプレイ用粘着シートおよびこれを含むディスプレイ | |
CN101589340B (zh) | 用于保护光掩模的胶粘带 | |
JP2017146492A (ja) | 保護フィルム付き透明導電膜積層用フィルム、および透明導電性フィルムの製造方法 | |
TWI686454B (zh) | 黏著片、雙面黏著片及光學構件 | |
KR20190098046A (ko) | 점착 시트 및 점착 시트 적층체 | |
TW201141703A (en) | Hard coat film and process for producing same | |
CN108690528A (zh) | 保护片 | |
JP4919391B2 (ja) | フォトマスク保護用粘着フィルム | |
JP6694981B2 (ja) | 剥離性に優れた離型フィルム | |
JP2010168474A (ja) | 帯電防止型フォトマスク保護用粘着フィルム | |
WO2008038946A1 (en) | Surface protective film | |
JP2014213545A (ja) | 耐熱性貼着用シート | |
JP3732963B2 (ja) | 表面保護フィルム | |
EP0192377B1 (en) | Non-photosensitive transfer resist | |
JP3083588B2 (ja) | 表面保護フィルム | |
JP2000351952A (ja) | 塗膜保護用シート |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090406 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110519 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20111121 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20111226 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120117 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120127 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4919391 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150210 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |