JP2007258647A - 半導体発光装置及び半導体発光素子 - Google Patents
半導体発光装置及び半導体発光素子 Download PDFInfo
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- JP2007258647A JP2007258647A JP2006084755A JP2006084755A JP2007258647A JP 2007258647 A JP2007258647 A JP 2007258647A JP 2006084755 A JP2006084755 A JP 2006084755A JP 2006084755 A JP2006084755 A JP 2006084755A JP 2007258647 A JP2007258647 A JP 2007258647A
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- Prior art keywords
- layer
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- semiconductor light
- silver
- light emitting
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 104
- 239000000758 substrate Substances 0.000 claims abstract description 134
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 84
- 239000004332 silver Substances 0.000 claims abstract description 81
- 229910001316 Ag alloy Inorganic materials 0.000 claims abstract description 68
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 34
- 239000010410 layer Substances 0.000 claims description 257
- 229910052709 silver Inorganic materials 0.000 claims description 81
- 229910052751 metal Inorganic materials 0.000 claims description 79
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 78
- 239000002184 metal Substances 0.000 claims description 78
- 239000011241 protective layer Substances 0.000 claims description 38
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- 239000012790 adhesive layer Substances 0.000 claims description 23
- 239000000463 material Substances 0.000 claims description 20
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- 238000000605 extraction Methods 0.000 abstract description 13
- 230000017525 heat dissipation Effects 0.000 abstract description 11
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- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 229910010093 LiAlO Inorganic materials 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 229910020068 MgAl Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
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- 229910020220 Pb—Sn Inorganic materials 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 229910006776 Si—Zn Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
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- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
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- 238000005336 cracking Methods 0.000 description 1
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- 238000009826 distribution Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 150000003378 silver Chemical class 0.000 description 1
- OGFYIDCVDSATDC-UHFFFAOYSA-N silver silver Chemical compound [Ag].[Ag] OGFYIDCVDSATDC-UHFFFAOYSA-N 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
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Abstract
【解決手段】半導体素子が実装用基板にダイボンディングされてなる半導体装置であって、半導体素子を構成する半導体層が配置する透光性基板表面の反対側の面に、銀又は銀合金メタライズ層、ニッケル層、応力緩和層、接着層がこの順に配置されてなる半導体装置。
【選択図】 図1
Description
このような、半導体発光素子において、光の出力を増大させるために、例えば、発光素子の基板側を実装基板に固定する場合、基板裏面に反射層を設け、素子構造側への光の反射率を向上させて、光の取り出し効率を上げるという方法がある。
具体的には、基板上に設ける金属反射層としてAg等の金属の単体又は合金を用い、リードフレームに実装するときの耐ハンダ性、耐熱性、耐ボンディング性を向上させるためNi等の金属を積層し、発光素子チップをリードフレームにダイボンディングするための材料として、Au―Si、Pb−Sn合金系ハンダ、Bi、In、GaにSn等を添加して合金化したもの、Au等の金属、Au等を含んだ導電性ペーストなどを用いることが提案されている(例えば、特許文献1)。
また、結晶基板裏面に、金属積層体を形成する(反射層としてAg等、基板と反射層との間に密着層としてTi等、Auを含む共晶半田でダイボンドを行うときに共晶半田との密着性を向上させるためのAu層、等を積層)及びダイボンド材料としてAu−Sn系半田等を用いることが提案されている(例えば、特許文献2)。
さらに、GaN基板と第2の金属(裏面電極:Ag)との密着性向上のために、基板と電極の間に第1の金属(Hf、Zr、Sc)と第2の金属(Ag、Al)を含む層を形成することが提案されている(例えば、特許文献3)。
一方、反射率の高いAgを用いて反射膜を形成する場合には、理論上光取り出し効率はよくなるが、基板、特に透光性基板とAg反射膜との密着性が極端に悪く、実装時に剥がれが生じることによる歩留まり低下、剥がれが生じることによる光の取り出し効率の低下、そのことによる発光素子・装置の出力低下という実用上の問題があった。さらには、実装基板への放熱性が低下して電流−光出力特性が悪化し、高出力化が困難となってしまう。一方で、透光性基板と銀又は銀合金からなる反射膜との剥がれを防止するために、特許文献2及び3のように発光素子の基板と金属反射層との間に密着層を設けると、金属反射層の反射率が低下し、光の取り出し効率が不十分になってしまう。
また別の態様においては、第1金属層がニッケルを含み、それとは異なる材料の第2金属層を有する発光素子であり、特に第2金属層として白金族元素を有することである。これにより、比較的に凝集性が強い銀(合金)において、好適にそれを基板上で保持する第1金属層と第2金属層とできる。
σNi×dNi+σ2×d2
(式中、σNi及びσ2は、前記基板上にそれぞれ前記ニッケル及び緩和層材料の1000Å換算応力値(Mpa)であり、dNi及びd2は、それぞれニッケル層及び応力緩和層の膜厚を示す。)で算出される値が−1000から−50の範囲になる材料及び膜厚で形成されてなるか、(5)応力緩和層がRhからなるか、(6)銀又は銀合金の反射層が、銀合金層の単層又はこれを含む積層構造であるか、であり、このような態様とすることが好ましい。
また、本発明の発光素子によれば、密着性に優れた反射層形成が可能となり、反射層の剥がれを防止し、反射層による光の取り出し効率を良好に維持し、透光性基板と反射膜との剥がれを防止することができる。
本発明の半導体発光素子の各構成について説明する。
透光性基板としては、特に限定されるものではなく、例えば、窒化物半導体を成長させる基板として、サファイア(C面、A面、R面)、スピネル(MgAl2O4)、NGO(NdGaO3)基板、LiAlO2基板、LiGaO3基板、GaN等が挙げられ、好ましくは酸化物基板であり、更に好ましくはウルツ鉱型結晶である。なかでも、サファイア基板が最も有効である。これは、比較的硬質な酸化物基板、さらにはウルツ鉱型結晶の基板と銀又は銀合金との密着性が低くなる傾向にあり、特に、サファイア基板と、銀又は銀合金の反射層との密着性は極端に悪いため、銀又は銀合金の反射層を基板表面に形成すると、接合強度が問題となるが、本発明の構成によって、それらの密着性を向上させることができるからである。
透光性基板の第1の主面上に形成される半導体は、少なくとも発光構造を有し、好ましくはn型半導体若しくはp型半導体が含まれているものであり、さらに好ましくはp−n接合を有するものである。さらには、n型半導体及びp型半導体を有することもできるし、n型半導体とp型半導体の間に活性層を有する構造にすることもできる。本発明においては、半導体が活性層を有さない構造でもよく、この場合は、n型半導体とp型半導体との界面において、発光し、発光領域となる。具体例としては、図2に示すように、基板の第1の主面上に、発光素子構造が積層された半導体層を有し、同一面側に各導電型層の電極(n電極、p電極)がそれぞれ設けられた構造とし、第1の主面側を光取り出し側とする発光素子構造となる。なお、絶縁性基板は、その表面(第1の主面)又は裏面(第2の主面)が凹凸形状に加工されて、光取り出し効率を高める構造を有していてもよい。また、透光性基板の第1の主面上にマスク層、バッファ層、中間層等を介して半導体層が形成されていてもよい。
透光性基板の第2の主面上に形成される銀又は銀合金の反射層は、半導体素子によって発光した光を、効率的に反射させて、最大限の光を外部に取り出す層である。また、反射層として銀又は銀合金を用いることにより、放熱性の良好な半導体装置を得ることができる。そのため、大電流を流したときの発熱を緩和することができ、素子を高出力化することが可能となる。
銀又は銀合金の反射層は、酸化等により反射率が変化しやすく不安定で、実装用基板に実装する際の接着層を直接形成することはできない。また、銀は凝集性があり、基板と銀又は銀合金の層との密着性に対する相性が劣悪であるため容易に剥がれてしまうと考えられる。
そのため、本発明においては、銀又は銀合金の反射層の上に、保護層を設けて銀又は銀合金を保護し、銀又は銀合金膜の膜質を補って、基板上に好適に形成させ、さらに保護層上の接着層形成、また素子の接着を好適なものとする。
まず、透光性基板の反りを曲率半径で測定し、この値を基準値とする。次に、応力の測定対象とする層を基板に形成し、基板の層形成側の反り(曲率半径)を測定する。透光性基板の厚さ,膜形成前後の反りの大きさと透光性基板のヤング率から、膜内部の応力を算出する。なお、その値が+の場合にはその層は基板に対して引張応力を有し、−の場合にその層は圧縮応力を有するとして表わす。
[(単位膜厚100nmにおける)規定応力値(MPa)]=([測定応力値(MPa)]/[形成時の膜厚(nm)])×100(nm)
である。
σNi×dNi+σ2×d2
(式中、σNi及びσ2は、それぞれニッケル及び応力緩和層材料の単位膜厚100nmの規定応力値(Mpa)であり、dNi及びd2は、それぞれニッケル層及び応力緩和層の膜厚を示す。)
で算出される値が−1000から0程度の範囲、さらに−500から−250程度の範囲になるような材料及び膜厚を選択することが好ましい。
実装用基板としては、図2A、Bに示すように、実装用の基体・領域201の発光素子実装部となるもので、素子をダイボンディングするためのものであればよく、例えば、発光素子用、受光素子用のステム、平面実装用セラミック基板、プラスチック基板等が挙げられる。発光装置の例は、図2に示すように、装置の基体・筐体220に設けられた素子実装部216に接着層115を介して、多層構造を設けた素子100を熱圧着などで実装して、各電極にワイヤ250などで、発光装置200のリード電極210(a,b)とそれぞれ接続して、発光素子を封止部材230で封止するなどしたものとなる。
以下に、本発明の一実施形態に係る半導体発光素子、発光装置の具体例を図面に基づいて詳細に説明する。
この実施例の半導体発光装置200は、図2A、Bに示すように、サファイア基板101の表面上に、n型窒化物半導体層121、発光層122及びp型窒化物半導体層123を積層した半導体層120、n層及びp層上に電極を形成してなる半導体発光素子100を用いる。
この基板を研磨して薄くし、そのサファイア基板の裏面に、スパッタ法により、Ag膜(120nm)112、Ni膜(200nm)113、Rh膜(300nm)114を形成する。
なお、比較のために、サファイア基板の裏面に、Al膜(1000Å)、W膜(3000Å)、Pt膜(1500Å)を形成し、それ以外は上記実施例と同様に作製した半導体発光装置も用意する。
実施例の双方及び比較例の発光波長465nmの青色発光素子を用いる例では、いずれもVfはほとんど同程度のものが得られ、上記銀層を用いる半導体発光装置では、光出力が約18.0mWのものが得られるのに対して、比較例では、光出力が約17.1mW程度のものとなる。つまり、メタライズ層として、銀層を用いることにより、Al膜を用いた比較例に対して5%向上することが確認できる。
半導体発光素子を構成するサファイア基板の裏面に対して、Ag膜(120nm)の反射層、Ni膜(200nm)、Rh膜(500nm)、Au膜(5000Å)を形成し、これにAu−Sn共晶半田(膜厚:1μm)を用いて、実装基板上に350℃にてダイボンディングする以外、実施例1と同様に半導体装置を作製する。また、比較例として、サファイア基板の裏面に、Al膜(100nm)、W膜(300nm)、Pt膜(150nm)、Au膜(500nm)を形成し、上記実施例と同様にAu−Sn共晶半田(膜厚:1μm)を用いて、実装基板上に350℃にてダイボンディングをし、半導体発光装置を作製する。
従って、上記実施例で得られる発光装置についても同様に、比較例のAl反射層に比して優れた反射率を実現でき、熱耐性、引いては装置の信頼性に優れ、また、放熱性に優れた装置とできる。
11、120 半導体層
12、112 銀又は銀合金メタライズ層
130 保護層
13、113 ニッケル層・第1金属層
14、114 応力緩和層・第2金属層
15、115 接着層
16、116 実装用基板、実装部
Claims (11)
- 第1の主面と第2の主面とを有する透光性基板の第1の主面上に半導体層が形成されてなる半導体発光素子において、
前記第2の主面上に、銀又は銀合金の反射層、保護層がこの順に積層された積層膜を有し、
前記保護層が、第1金属層、第2金属層をこの順に積層された構造を有すると共に、前記第1,2金属層が白金族元素、該白金族元素と同族元素からなる群から選択される元素で、互いに異なる金属である半導体発光素子。 - 前記第1金属層がニッケルであり、第2金属層が白金族元素である請求項1記載の半導体発光素子。
- 第1の主面と第2の主面とを有する透光性基板の第1の主面上に半導体層が形成されてなる半導体発光素子において、
前記第2の主面上に、銀又は銀合金の反射層、保護層がこの順に積層された積層膜を有し、
前記保護層が、ニッケルを含む第1金属層、該第1金属層と異なる材料で、少なくとも白金族元素を有する第2金属層、をこの順に積層された構造を有すると共に半導体発光素子。 - 前記保護層が、第1金属層のニッケル層、第2金属層である応力緩和層がこの順に配置されてなる請求項1乃至3のいずれか1つに記載の半導体発光素子。
- 前記保護層は、前記透光性基板上に各層を設けて測定される基板の曲率と、基板のヤング率と、から得られる基板上の単位膜厚当たりの規定応力値が、それぞれσ1(第1金属層)、σ2(第2金属層)であるとき、|σ1+σ2|<|σ1|+|σ2|である請求項1〜4のいずれか1つに記載の半導体発光素子。
- 請求項1〜5のいずれか1つに記載の半導体発光素子の第2の主面側が実装用基板に実装されてなる半導体発光装置であって、
前記半導体発光素子に、前記第2金属層と実装用基板との間に接着層が配置され、実装用基板と接着されてなることを特徴とする半導体発光装置。 - 透光性基板はサファイアからなる請求項6に記載の半導体発光装置。
- 接着層は共晶合金からなる請求項6又は7に記載の半導体発光装置。
- 応力緩和層は、
σNi×dNi+σ2×d2
(式中、σNi及びσ2は、前記基板上にそれぞれ前記ニッケル及び前記応力緩和層材料を設けて、該基板のヤング率と測定された曲率から得られる応力値を各材料層の膜厚で除した単位膜厚当たりの規定応力値(Mpa)であり、dNi及びd2は、それぞれ前記ニッケル層及び応力緩和層の膜厚を示す。)
で算出される値が−1000から−50の範囲になる材料及び膜厚で形成されてなる請求項5〜8のいずれか1つに記載の半導体発光装置。 - 前記応力緩和層は、Rhからなる請求項5〜9のいずれか1つに記載の半導体発光装置。
- 反射層は、銀合金層の単層又はこれを含む積層構造である請求項5〜10のいずれか1つに記載の半導体発光装置。
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