JP2007248291A5 - - Google Patents

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Publication number
JP2007248291A5
JP2007248291A5 JP2006072772A JP2006072772A JP2007248291A5 JP 2007248291 A5 JP2007248291 A5 JP 2007248291A5 JP 2006072772 A JP2006072772 A JP 2006072772A JP 2006072772 A JP2006072772 A JP 2006072772A JP 2007248291 A5 JP2007248291 A5 JP 2007248291A5
Authority
JP
Japan
Prior art keywords
substrate
levitation
rotating body
stage
stage portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006072772A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007248291A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006072772A priority Critical patent/JP2007248291A/ja
Priority claimed from JP2006072772A external-priority patent/JP2007248291A/ja
Priority to TW096108188A priority patent/TW200741197A/zh
Priority to KR1020070025525A priority patent/KR101346048B1/ko
Priority to CN2007100883527A priority patent/CN101038260B/zh
Publication of JP2007248291A publication Critical patent/JP2007248291A/ja
Publication of JP2007248291A5 publication Critical patent/JP2007248291A5/ja
Pending legal-status Critical Current

Links

JP2006072772A 2006-03-16 2006-03-16 基板検査装置 Pending JP2007248291A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006072772A JP2007248291A (ja) 2006-03-16 2006-03-16 基板検査装置
TW096108188A TW200741197A (en) 2006-03-16 2007-03-09 Substrate inspection apparatus
KR1020070025525A KR101346048B1 (ko) 2006-03-16 2007-03-15 기판 검사 장치
CN2007100883527A CN101038260B (zh) 2006-03-16 2007-03-16 基板检查装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006072772A JP2007248291A (ja) 2006-03-16 2006-03-16 基板検査装置

Publications (2)

Publication Number Publication Date
JP2007248291A JP2007248291A (ja) 2007-09-27
JP2007248291A5 true JP2007248291A5 (enExample) 2009-04-30

Family

ID=38592757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006072772A Pending JP2007248291A (ja) 2006-03-16 2006-03-16 基板検査装置

Country Status (4)

Country Link
JP (1) JP2007248291A (enExample)
KR (1) KR101346048B1 (enExample)
CN (1) CN101038260B (enExample)
TW (1) TW200741197A (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009085865A (ja) * 2007-10-02 2009-04-23 Olympus Corp 基板検査装置
TWI464390B (zh) * 2008-02-06 2014-12-11 尼康股份有限公司 Surface inspection device and surface inspection method
TWI381257B (zh) * 2008-07-07 2013-01-01 Race Ahead Technology Co Ltd 自動調整照明強度的基材檢測裝置及方法
CN101936916A (zh) * 2009-07-02 2011-01-05 法国圣-戈班玻璃公司 检测分离的低刚度的透明或半透明体的缺陷的设备和方法
KR101570169B1 (ko) 2014-05-09 2015-11-20 세메스 주식회사 광 배향막 형성 장치
TWI585395B (zh) * 2015-01-27 2017-06-01 政美應用股份有限公司 面板檢測裝置與方法
CN109860080A (zh) * 2018-12-28 2019-06-07 浙江中晶新能源有限公司 一种硅片的定位输送装置
CN111377143A (zh) * 2020-03-24 2020-07-07 杭州酿蜜科技有限公司 一种用于超薄玻璃针对运输的包装设备
CN112192301B (zh) * 2020-10-16 2025-07-04 江苏立导科技有限公司 角度纠偏装置
CN112595722B (zh) * 2021-03-02 2021-06-08 苏州天准科技股份有限公司 一种分段式气浮平台、平台模组和检测设备
TWI870602B (zh) * 2021-06-24 2025-01-21 由田新技股份有限公司 氣浮式輸送平台及其檢測系統
KR102729416B1 (ko) * 2021-12-17 2024-11-13 세메스 주식회사 기판 처리 장치 및 방법
CN119044184B (zh) * 2024-09-06 2025-10-24 马鞍山钢铁股份有限公司 一种龙门架式钢卷端面视觉检测系统及控制方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE756333A (fr) * 1969-09-19 1971-03-18 Pilkington Brothers Ltd Perfectionnements relatifs au transport de feuilles de verre
TWI222423B (en) * 2001-12-27 2004-10-21 Orbotech Ltd System and methods for conveying and transporting levitated articles
JP2004345744A (ja) * 2003-05-20 2004-12-09 Hitachi Zosen Corp 空気浮上装置および空気浮上式搬送装置
KR100582344B1 (ko) * 2003-12-09 2006-05-22 삼성코닝정밀유리 주식회사 유리기판의 검사장치
JP5076723B2 (ja) * 2007-08-09 2012-11-21 富士通株式会社 研磨装置、基板及び電子機器の製造方法

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