JP2007248168A5 - - Google Patents

Download PDF

Info

Publication number
JP2007248168A5
JP2007248168A5 JP2006070132A JP2006070132A JP2007248168A5 JP 2007248168 A5 JP2007248168 A5 JP 2007248168A5 JP 2006070132 A JP2006070132 A JP 2006070132A JP 2006070132 A JP2006070132 A JP 2006070132A JP 2007248168 A5 JP2007248168 A5 JP 2007248168A5
Authority
JP
Japan
Prior art keywords
cantilever
light
reflected
atomic force
light sources
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006070132A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007248168A (ja
JP4939086B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006070132A priority Critical patent/JP4939086B2/ja
Priority claimed from JP2006070132A external-priority patent/JP4939086B2/ja
Publication of JP2007248168A publication Critical patent/JP2007248168A/ja
Publication of JP2007248168A5 publication Critical patent/JP2007248168A5/ja
Application granted granted Critical
Publication of JP4939086B2 publication Critical patent/JP4939086B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006070132A 2006-03-15 2006-03-15 原子間力顕微鏡 Expired - Fee Related JP4939086B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006070132A JP4939086B2 (ja) 2006-03-15 2006-03-15 原子間力顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006070132A JP4939086B2 (ja) 2006-03-15 2006-03-15 原子間力顕微鏡

Publications (3)

Publication Number Publication Date
JP2007248168A JP2007248168A (ja) 2007-09-27
JP2007248168A5 true JP2007248168A5 (enrdf_load_stackoverflow) 2009-05-14
JP4939086B2 JP4939086B2 (ja) 2012-05-23

Family

ID=38592652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006070132A Expired - Fee Related JP4939086B2 (ja) 2006-03-15 2006-03-15 原子間力顕微鏡

Country Status (1)

Country Link
JP (1) JP4939086B2 (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008089510A (ja) * 2006-10-04 2008-04-17 Research Institute Of Biomolecule Metrology Co Ltd 走査型プローブ顕微鏡、走査型プローブ顕微鏡用のプローブ、及び検査方法
JP4936541B2 (ja) * 2007-08-10 2012-05-23 キヤノン株式会社 原子間力顕微鏡
KR101569960B1 (ko) * 2008-12-11 2015-11-27 인피니트시마 리미티드 다이나믹 탐침 검출 시스템
JP6229914B2 (ja) * 2013-08-06 2017-11-15 オックスフォード インストルメンツ アサイラム リサーチ，インコーポレイテッド 原子間力顕微鏡用の光ビーム位置決めユニット
CN103968765B (zh) * 2014-05-27 2016-08-17 海宁科海光电科技有限公司 聚焦偏移位移传感器
CN104897064B (zh) * 2015-06-09 2018-06-01 张白 一种新型光臂放大式高精度长度传感器及测量方法
CN110986761B (zh) * 2019-11-18 2021-07-06 中国科学院上海光学精密机械研究所 皮米显微镜
CN112964909B (zh) * 2020-09-16 2023-12-01 中国科学院沈阳自动化研究所 一种原子力显微镜多探针同时独立运动测量方法与装置
NL2026823B1 (en) * 2020-11-04 2022-06-24 Nearfield Instr B V Arrangement for and method of determining cantilever deflection in a scanning probe microscopy system.

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH074909A (ja) * 1993-06-14 1995-01-10 Fanuc Ltd レーザセンサ装置
JPH07301516A (ja) * 1994-04-29 1995-11-14 Olympus Optical Co Ltd 表面形状測定装置
JP2000234994A (ja) * 1999-02-16 2000-08-29 Jeol Ltd 走査プローブ顕微鏡におけるカンチレバー変位測定方法
JP2001304833A (ja) * 2000-04-21 2001-10-31 Olympus Optical Co Ltd 光てこ式傾き検出装置
JP2003014611A (ja) * 2001-06-29 2003-01-15 Olympus Optical Co Ltd 走査型プローブ顕微鏡
JP2004061349A (ja) * 2002-07-30 2004-02-26 Ishizuka Glass Co Ltd ３次元計測検査方法及びその装置

Similar Documents

Publication Publication Date Title
JP2007248168A5 (enrdf_load_stackoverflow)
US7821647B2 (en) Apparatus and method for measuring surface topography of an object
WO2016070768A1 (zh) 基于荧光共焦显微技术的光滑大曲率样品测量装置与方法
JP2008070363A5 (enrdf_load_stackoverflow)
WO2015006784A3 (en) Planar waveguide apparatus with diffraction element(s) and system employing same
JP2007010659A5 (enrdf_load_stackoverflow)
ATE542107T1 (de) Selbstmischende lasermessvorrichtung
EP2048543A3 (en) An optical focus sensor, an inspection apparatus and a lithographic apparatus
EP4528436A3 (en) Apparatus and methods for eye tracking based on eye imaging via a light-guide optical element
WO2009095220A3 (en) Grazing incidence collector for laser produced plasma sources
RU2010140046A (ru) Оптическая когерентная томография
TWI456255B (zh) 反向聚焦顯微成像結構及方法
ATE333668T1 (de) Strahlungsquelle hoher luminosität für die euv- lithographie
WO2014176479A8 (en) Surface roughness measurement device
JP2006112974A5 (enrdf_load_stackoverflow)
JP2005205429A5 (enrdf_load_stackoverflow)
IL239482B (en) Creating an array of points in sloping areas
JP2009276114A5 (enrdf_load_stackoverflow)
US9945656B2 (en) Multi-function spectroscopic device
WO2009065519A8 (de) Verfahren zur messung der kraft, die auf ein in einer optischen pinzette/falle gefangenes objekt wirkt und optische pinzette/falle
JP2012242389A5 (enrdf_load_stackoverflow)
WO2011083989A3 (ko) 결점 검사장치
RU2012146541A (ru) Лазерная сканирующая система, устройство для стрижки волос и соответствующий способ
JP2014503842A5 (ja) 共焦点レーザー走査顕微鏡
BR112012011819A2 (pt) "espectrômero óptico com retículo de difração côncavo"