WO2016070768A1 - 基于荧光共焦显微技术的光滑大曲率样品测量装置与方法 - Google Patents

基于荧光共焦显微技术的光滑大曲率样品测量装置与方法 Download PDF

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WO2016070768A1
WO2016070768A1 PCT/CN2015/093580 CN2015093580W WO2016070768A1 WO 2016070768 A1 WO2016070768 A1 WO 2016070768A1 CN 2015093580 W CN2015093580 W CN 2015093580W WO 2016070768 A1 WO2016070768 A1 WO 2016070768A1
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sample
objective lens
confocal microscopy
coated
fluorescence
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PCT/CN2015/093580
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French (fr)
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刘俭
谭久彬
刘辰光
张贺
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哈尔滨工业大学
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence

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  • the invention relates to the field of optical precision measurement technology and the method and the method for measuring the surface topography of a sample with smooth large curvature by using confocal microscopy technology.
  • the present invention discloses a smooth large curvature sample measuring device and method based on fluorescence confocal microscopy technology, which can improve measurement accuracy and improve measurement efficiency, compared with the prior art. It also reduces the cost of measurement.
  • a smooth and large curvature sample measuring device based on fluorescent confocal microscopy technology comprising:
  • Lighting module, detection module and coating sample
  • the illumination device is sequentially arranged according to the direction of illumination light: a laser, a conductive fiber, a collimating mirror, a pupil, a dichroic mirror, an objective lens, and a three-dimensional micro-displacement stage;
  • the detecting module according to the signal light propagation direction is: an objective lens, a dichroic mirror, a filter, a collecting lens, a pinhole and a photodetector;
  • the illumination module and the detection module share an objective lens and a dichroic mirror;
  • the coated sample is a sample to be tested on which a phosphor film is surface-plated;
  • the laser emits laser light, forms parallel light after passing through the conductive fiber and the collimating mirror, and then passes through the dichroic mirror reflection and the objective lens to transmit, and forms a focused spot on the coated sample, and the focused spot excites the sample.
  • the fluorescent film on the surface emits fluorescence
  • the fluorescence excited on the surface of the coated sample passes through the objective lens, the dichroic mirror, the filter, the collecting lens and the pinhole, and is collected by the photodetector.
  • the above-mentioned smooth large curvature sample measuring device based on the fluorescence confocal microscopy technology, wherein the surface of the coated sample is coated with an organic fluorescent substance by a vapor deposition method to form a fluorescent film, and the fluorescent film has a thickness of between 0.02 ⁇ m and 2 ⁇ m.
  • the film has a solubility in water or an organic solvent such as alcohol or acetone of more than 10 g/100 g.
  • the above-mentioned smooth large curvature sample measuring device based on fluorescence confocal microscopy technology has a laser emission wavelength range of 200 nm to 1200 nm, and the illumination light has an optical power of less than 1 W after passing through the objective lens.
  • the above-described smooth large curvature sample measuring device based on fluorescent confocal microscopy technology is located on the back focal plane of the collecting lens.
  • a method for measuring a smooth large curvature sample based on a fluorescence confocal microscopy technique implemented on the above-described smooth large curvature sample measuring device based on fluorescent confocal microscopy comprising the following steps:
  • Step a forming an organic fluorescent film having a thickness between 0.02 ⁇ m and 2 ⁇ m on the surface of the sample to be tested by evaporation, so that the sample to be tested becomes a coated sample;
  • Step b The laser emits excitation light, and forms parallel light after passing through the conducting fiber and the collimating objective lens.
  • the parallel beam is reflected by the dichroic mirror and transmitted by the objective lens to form a focused spot on the coated sample, and the focused spot emits fluorescence on the surface of the sample.
  • the film emits fluorescence;
  • Step c the fluorescence excited by the fluorescent film is collected by the photodetector, and the surface position of the coated sample is determined by the position of the apex of the axial response curve;
  • Step d the three-dimensional micro-displacement stage drives the three-dimensional movement of the coating sample to form a three-dimensional scanning image
  • Step e Dissolve the coated sample in water or an organic solvent such as alcohol or acetone, clean the film, and restore the state of the sample to be tested before coating.
  • the present invention can measure the surface morphology of a smooth large-area mirror object and a mirror-like object in a full-scale manner. Compared with the existing method, since mechanical scanning and multi-angle detector technology are not required, mechanical scanning and multi-angle detection can be avoided. The uncertainty brought by the technology improves the measurement accuracy; since the steps of data fusion are saved, the measurement efficiency can be improved; and the mechanical scanning device or the multi-detector is omitted, thereby reducing the cost.
  • FIG. 1 is a schematic view showing the structure of a smooth large curvature sample measuring device based on the fluorescence confocal microscopy technique of the present invention.
  • FIG. 2 is a flow chart of a method for measuring a sample of smooth large curvature based on the fluorescence confocal microscopy technique of the present invention.
  • 1 laser 1 laser, 2 conducting fiber, 3 collimating mirror, 4 diaphragm, 5 dichroic mirror, 6 objective lens, 7 coated sample, 8 three-dimensional micro-displacement stage, 9 filter, 10 collecting lens, 11 Pinhole, 12 photodetector.
  • a smooth large curvature sample measuring device based on fluorescence confocal microscopy is provided for surface topography of a sample having a smooth large curvature.
  • FIG. 1 is a schematic diagram of an embodiment of a smooth large curvature sample measuring device based on a fluorescent confocal microscopy technique of the present invention.
  • a smooth large curvature sample measuring device based on fluorescent confocal microscopy technology includes: a lighting module, a detecting module, and a coated sample.
  • the illumination device follows the direction of illumination light propagation: laser 1, conductive fiber 2, collimator lens 3, aperture 4, dichroic mirror 5, objective lens 6 and three-dimensional micro-displacement stage 8; detection module according to signal light propagation direction In order: the objective lens 6, the dichroic mirror 5, the filter 9, the collecting lens 10, the pinhole 11, and the photodetector 12.
  • the illumination module and the detection module share the objective lens 6 and the dichroic mirror 5.
  • the coated sample 7 is a sample to be tested whose surface is plated with a fluorescent substance film.
  • the laser 1 emits laser light, and after forming the parallel light through the conductive fiber 2 and the collimating mirror 3, and after being reflected by the dichroic mirror 5 and transmitted by the objective lens 6, a focused spot is formed on the coated sample 7, and the focused spot excites the surface of the sample.
  • the fluorescent film emits fluorescence; the fluorescence excited on the surface of the coated sample 7 passes through the objective lens 6, the dichroic mirror 5, the filter 9, the collecting lens 10, and the pinhole 11, and is collected by the photodetector 12.
  • the surface of the coated sample 7 is coated with a layer of organic fluorescent substance to form a fluorescent film by evaporation.
  • the thickness of the fluorescent film is between 0.02 ⁇ m and 2 ⁇ m, and the solubility of the film in water or an organic solvent such as alcohol or acetone is more than 10 g. /100g.
  • the laser emits in the wavelength range of 200 nm to 1200 nm, and the optical power of the illumination light after passing through the objective lens is less than 1 W.
  • the pinhole 11 is located on the back focal plane of the collecting lens 10.
  • a method for measuring a smooth large curvature sample based on a fluorescence confocal technique for surface topography of a sample having a smooth large curvature is provided.
  • Step a forming an organic fluorescent film having a thickness of between 0.02 ⁇ m and 2 ⁇ m on the surface of the sample to be tested by evaporation, so that the sample to be tested becomes the coated sample 7;
  • Step b the laser 1 emits excitation light, and forms parallel light after passing through the conductive fiber 2 and the collimating objective lens 3.
  • the parallel beam is reflected by the dichroic mirror 5 and transmitted by the objective lens 6 to form a focused spot on the coated sample 7, the focusing
  • the light spot excites the fluorescent film on the surface of the sample to emit fluorescence;
  • Step c the fluorescence excited by the fluorescent film is collected by the photodetector 12, and the surface position of the coated sample is determined by the position of the apex of the axial response curve;
  • Step d the three-dimensional micro-displacement stage 8 drives the coating sample 7 to move three-dimensionally to form a three-dimensional scanning image;
  • Step e Dissolve the coating sample 7 in water or an organic solvent such as alcohol or acetone, wash the film, and restore the state before the sample to be tested is coated.

Abstract

一种基于荧光共焦显微技术的光滑大曲率样品测量装置，包括照明模块、探测模块和镀膜样品（7），照明模块中激光器（1）发出激光，经过传导光纤（2）和准直镜（3）之后形成平行光，再经过二向色镜（5）反射和物镜（6）透射后，在镀膜样品（7）上形成聚焦光斑，聚焦光斑激发样品表面的荧光膜发出荧光；镀膜样品（7）表面激发的荧光依次经过物镜（6）、二向色镜（5）、滤光片（9）、收集透镜（10）和针孔（11）后，被光电探测器（12）收集。还公开了一种基于荧光共焦显微技术的光滑大曲率样品测量方法。该装置和方法可提高测量精度和测量效率，并降低测量成本。

Description

基于荧光共焦显微技术的光滑大曲率样品测量装置与方法 技术领域
基于荧光共焦显微技术的光滑大曲率样品测量装置与方法光学精密测量技术领域，具体涉及一种利用共焦显微技术测量光滑大曲率样品表面形貌的装置和方法。
背景技术
随着精密加工制造行业对测量精度要求的提高，光滑大区率镜面物体和类镜面物体的测量受到越来越多的重视。对此类样品采用光学三维传感方法进行测量时，根据反射定理，只能在于入射光线成特殊夹角方向才能接收到较强光信号，而由于收集物镜口径的限制，造成测量分辨率下降，在不增加自由度的情况下无法完成对此类样品全貌的测量。将传统共焦显微技术、干涉测量技术、条纹投影技术配合机械扫描或多角度探测技术，可以实现对此类样品全貌的测量，然而，机械扫描与多角度探测器引入数据融合带来的不确定度，使得测量无法准确高效完成。
发明内容
为了解决上述问题，本发明公开了一种基于荧光共焦显微技术的光滑大曲率样品测量装置与方法，该装置与方法同现有技术相比，不仅可以提高测量精度，而且可以提高测量效率，同时还可以降低测量成本。
本发明的目的是这样实现的：
基于荧光共焦显微技术的光滑大曲率样品测量装置，包括：
照明模块、探测模块和镀膜样品：
所述的照明装置按照照明光传播方向依次为：激光器、传导光纤、准直镜、光阑、二相色镜、物镜和三维微位移载物台；
所述的探测模块按照信号光传播方向依次为：物镜、二向色镜、滤光片、收集透镜、针孔和光电探测器；
所述的照明模块、探测模块共用物镜与二向色镜；
所述的镀膜样品为表面镀了荧光物质薄膜的待测样品；
所述的照明模块中激光器发出激光，经过传导光纤和准直镜之后形成平行光，再经过二向色镜反射和物镜透射后，在镀膜样品上形成聚焦光斑，所述的聚焦光斑激发样品 表面的荧光膜发出荧光；
所述镀膜样品表面激发出的荧光依次经过物镜、二向色镜、滤光片、收集透镜和针孔后，被光电探测器收集。
上述基于荧光共焦显微技术的光滑大曲率样品测量装置，所述的镀膜样品表面通过蒸镀的方法镀上一层有机荧光物质形成荧光膜，所述的荧光膜厚度在0.02μm-2μm之间，膜在水或酒精、丙酮等有机溶剂中的溶解度大于10g/100g。
上述基于荧光共焦显微技术的光滑大曲率样品测量装置，激光器发射波长范围200nm-1200nm，照明光经过物镜后光功率小于1W。
上述基于荧光共焦显微技术的光滑大曲率样品测量装置，所述的针孔位于收集透镜的后焦面上。
在上述基于荧光共焦显微技术的光滑大曲率样品测量装置上实现的基于荧光共焦显微技术的光滑大曲率样品测量方法，包括以下步骤：
步骤a、通过蒸镀的方法在待测样品表面形成一层厚度在0.02μm-2μm之间的有机荧光膜，使待测样品成为镀膜样品；
步骤b、激光器发出激发光，经过传导光纤和准直物镜之后形成平行光，平行光束经过二向色镜反射和物镜透射后在镀膜样品上形成聚焦光斑，所述的聚焦光斑激发样品表面的荧光膜发出荧光；
步骤c、荧光膜激发出的荧光经过光电探测器收集后，通过轴向响应曲线顶点位置来确定镀膜样品表面位置；
步骤d、三维微位移载物台带动镀膜样品三维移动，形成三维扫描成像；
步骤e、将镀膜样品溶于水或酒精、丙酮等有机溶剂，清洗膜，恢复待测样品镀膜前的状态。
有益效果：本发明能够全貌测量光滑大区率镜面物体和类镜面物体表面形貌，同现有方法相比，由于无需结合机械扫描与多角度探测器技术，因此可以避免机械扫描与多角度探测器技术带来的不确定度，提高测量精度；由于节省了数据融合的步骤，因此可以提高测量效率；由于省略了机械扫描装置或多探测器，因此又降低了成本。
附图说明
图1是本发明基于荧光共焦显微技术的光滑大曲率样品测量装置结构示意图。
图2是本发明基于荧光共焦显微技术的光滑大曲率样品测量方法流程图。
图中：1激光器、2传导光纤、3准直镜、4光阑、5二相色镜、6物镜、7镀膜样品、8三维微位移载物台、9滤光片、10收集透镜、11针孔、12光电探测器。
具体实施方式
根据本发明的一具体实施例，提供一种基于荧光共焦显微技术的光滑大曲率样品测量装置，用于光滑大曲率样品的表面形貌。
请参照图1，图1为本发明的基于荧光共焦显微技术的光滑大曲率样品测量装置的实施例示意图。如图1所示，基于荧光共焦显微技术的光滑大曲率样品测量装置，包括：照明模块、探测模块和镀膜样品。照明装置按照照明光传播方向依次为：激光器1、传导光纤2、准直镜3、光阑4、二相色镜5、物镜6和三维微位移载物台8；探测模块按照信号光传播方向依次为：物镜6、二向色镜5、滤光片9、收集透镜10、针孔11和光电探测器12。照明模块、探测模块共用物镜6与二向色镜5。镀膜样品7为表面镀了荧光物质薄膜的待测样品。
照明模块中激光器1发出激光，经过传导光纤2和准直镜3之后形成平行光，再经过二向色镜5反射和物镜6透射后，在镀膜样品7上形成聚焦光斑，聚焦光斑激发样品表面的荧光膜发出荧光；镀膜样品7表面激发出的荧光依次经过物镜6、二向色镜5、滤光片9、收集透镜10和针孔11后，被光电探测器12收集。
其中镀膜样品7表面通过蒸镀的方法镀上一层有机荧光物质形成荧光膜，所述的荧光膜厚度在0.02μm-2μm之间，膜在水或酒精、丙酮等有机溶剂中的溶解度大于10g/100g。激光器发射波长范围200nm-1200nm，照明光经过物镜后光功率小于1W。针孔11位于收集透镜10的后焦面上。
根据本发明的一具体实施例，提供一种基于荧光共焦技术的光滑大曲率样品测量方法，用于光滑大曲率样品的表面形貌。
该实施例包括以下步骤：
步骤a、通过蒸镀的方法在待测样品表面形成一层厚度在0.02μm-2μm之间的有机荧光膜，使待测样品成为镀膜样品7；
步骤b、激光器1发出激发光，经过传导光纤2和准直物镜3之后形成平行光，平行光束经过二向色镜5反射和物镜6透射后在镀膜样品7上形成聚焦光斑，所述的聚焦光斑激发样品表面的荧光膜发出荧光；
步骤c、荧光膜激发出的荧光经过光电探测器12收集后，通过轴向响应曲线顶点位置来确定镀膜样品表面位置；
步骤d、三维微位移载物台8带动镀膜样品7三维移动，形成三维扫描成像；
步骤e、将镀膜样品7溶于水或酒精、丙酮等有机溶剂，清洗膜，恢复待测样品镀膜前的状态。
本发明不局限于上述最佳实施方式，任何人应该得知在本发明的启示下作出的结构变化或方法改进，凡是与本发明具有相同或相近的技术方案，均落入本发明的保护范围之内。

Claims (5)

  1. 基于荧光共焦显微技术的光滑大曲率样品测量装置，其特征在于，包括：
    照明模块、探测模块和镀膜样品：
    所述的照明装置按照照明光传播方向依次为：激光器(1)、传导光纤(2)、准直镜(3)、光阑(4)、二相色镜(5)、物镜(6)和三维微位移载物台(8)；
    所述的探测模块按照信号光传播方向依次为：物镜(6)、二向色镜(5)、滤光片(9)、收集透镜(10)、针孔(11)和光电探测器(12)；
    所述的照明模块、探测模块共用物镜(6)与二向色镜(5)；
    所述的镀膜样品(7)为表面镀了荧光物质薄膜的待测样品；
    所述的照明模块中激光器(1)发出激光，经过传导光纤(2)和准直镜(3)之后形成平行光，再经过二向色镜(5)反射和物镜(6)透射后，在镀膜样品(7)上形成聚焦光斑，所述的聚焦光斑激发样品表面的荧光膜发出荧光；
    所述镀膜样品(7)表面激发出的荧光依次经过物镜(6)、二向色镜(5)、滤光片(9)、收集透镜(10)和针孔(11)后，被光电探测器(12)收集。
  2. 根据权利要求1所述的基于荧光共焦显微技术的光滑大曲率样品测量装置，其特征在于，所述的镀膜样品(7)表面通过蒸镀的方法镀上一层有机荧光物质形成荧光膜，所述的荧光膜厚度在0.02μm-2μm之间，膜在水或酒精、丙酮等有机溶剂中的溶解度大于10g/100g。
  3. 根据权利要求1所述的基于荧光共焦显微技术的光滑大曲率样品测量装置，其特征在于，激光器发射波长范围200nm-1200nm，照明光经过物镜后光功率小于1W。
  4. 根据权利要求书1所述的基于荧光共焦显微技术的光滑大曲率样品测量装置，其特征在于，所述的针孔(11)位于收集透镜(10)的后焦面上。
  5. 在权利要求1所述的基于荧光共焦显微技术的光滑大曲率样品测量装置上实现的基于荧光共焦显微技术的光滑大曲率样品测量方法，其特征在于，包括以下步骤：
    步骤a、通过蒸镀的方法在待测样品表面形成一层厚度在0.02μm-2μm之间的有机荧光膜，使待测样品成为镀膜样品(7)；
    步骤b、激光器(1)发出激发光，经过传导光纤(2)和准直物镜(3)之后形成 平行光，平行光束经过二向色镜(5)反射和物镜(6)透射后在镀膜样品(7)上形成聚焦光斑，所述的聚焦光斑激发样品表面的荧光膜发出荧光；
    步骤c、荧光膜激发出的荧光经过光电探测器(12)收集后，通过轴向响应曲线顶点位置来确定镀膜样品表面位置；
    步骤d、三维微位移载物台(8)带动镀膜样品(7)三维移动，形成三维扫描成像；
    步骤e、将镀膜样品(7)溶于水或酒精、丙酮等有机溶剂，清洗膜，恢复待测样品镀膜前的状态。
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