201237357 六、發明說明： t發明所屬之技術領域】 本發明係有關於一種一維掃瞄表面形貌量測裝置與方法，尤指一 種利用反射率（光強度）量測的方法結合臨界角技術或多層鍍膜技術 所做成的角度感測器，即利用光強度對微小角度變化有線性關係之特 性以及待測物在焦平面附近其反射光因離焦距離而偏折，來進行一維 掃描’進而獲得表面的高度差或縱向位移量的技術。 【先前技術】 按習知表面形貌測量儀器的種類繁多，原理各異，但根據測量原 理的不同來歸類，目前表面測量技術主要可分為三類：接觸式測量法 〔如參考文獻1〕、光學測量法〔如參考文獻24〕以及非光學式掃描顯 微鏡〔如參考文獻5〕。習用接觸式測量法，目前仍被廣彡地應用於表 面形貌測量，其係為一種最基本表面形貌量測方法，原因在於接觸式 儀器具有操作簡單、通雜強、水平分解高等特點，脑在觸針方 面’該儀器卻又有測量速度慢的缺點，特別是在三維形貌量測時間過 長’溫度變化帶給測量結果有較大的轉，另外還有—個主要的缺點，201237357 VI. INSTRUCTIONS: TECHNICAL FIELD The present invention relates to a one-dimensional scanning surface topography measuring device and method, and more particularly to a method using reflectance (light intensity) measurement combined with critical angle technology Or an angle sensor made by a multi-layer coating technique, that is, a linear relationship between a light intensity and a slight angle change, and a deflection of the object to be measured in the vicinity of a focal plane due to a defocusing distance for one-dimensional scanning 'The technique of obtaining the difference in height or the amount of longitudinal displacement of the surface. [Prior Art] According to the conventional surface topography measuring instruments, there are many different types and different principles, but they are classified according to different measurement principles. At present, surface measuring techniques can be mainly divided into three categories: contact measuring methods [eg reference 1] ], optical measurement methods (such as reference 24) and non-optical scanning microscopes (such as reference 5). The conventional contact measurement method is still widely used for surface topography measurement, which is a basic surface topography measurement method. The reason is that the contact instrument has the characteristics of simple operation, strong impurity, and high horizontal decomposition. In terms of stylus, the instrument has the disadvantage of slow measurement speed, especially when the measurement time of the three-dimensional shape is too long. The temperature change brings a big turn to the measurement result, and there is also a major disadvantage.
觸針與被測表面有-定的力量，因此鋒利的觸針容易到傷表面，觸針 本身也容易受損，而使測量結果扭曲。光學測量法最常見的有：幾何 光學探針法及干涉量測法，再測量上具有非接觸與速度上等優點。非 光學式掃描顯微鏡沒有光學物鏡，其與光學測量法不同，不需通過光 學鏡片，目前有兩種類型的非光學掃描顯微鏡，一種是電子顯微鏡， 例如掃描式電子顯纖(SEM)、穿透式電子顯微鏡(TEM)及掃描穿透式 電子顯微鏡(STEM);另一種是掃描探針顯微鏡，例如掃描式穿隨顯I 3 201237357 •鏡(STM)、原子力顯微鏡(AFM)，其缺點在於操作複雜，容易受到灰 -塵干擾’在實際應用上，又因其價格昂貴，且掃描範圍(面積)不大， 故仍無法有效廣泛地作為一般線上的檢測工具，而只能作為少量樣品 的檢測。 再者’掃描共焦顯微鏡(scanning confocal miicroscopy)由Minsky在 1957年首次提出〔如參考文獻6〕，之後有許多的學者對共焦系統做近 一步的研究。基本原理就是，從一個點光源發射的探測光通過透鏡聚 焦到被觀測物體上，如果物體恰在焦點上，那麼反射光通過原透鏡應 當匯聚回到光源，這就是所謂的共聚焦，簡稱共焦。共焦顯微鏡技術 基本架構’光經過物鏡在樣本（Sample)上聚焦，其反射光沿原路返 回，再通過分光鏡傳入空間濾波的共焦孔内，透過焦點在樣本上面的 位置來進行二維或三維成像。掃描共焦顯微鏡之關鍵技術在於共焦針 孔的引入，偵測器只能接收來自物鏡焦點的光訊號，利用光债測器探 測到的光訊號強弱變化來獲得表面輪廓訊息。 此外’聚焦探測法是利用光電偵測器測量表面微小起伏。根據聚 焦誤差訊號檢測方式的不同，聚焦探測法主要有刀緣法、像散法、臨 界角法，這些聚焦法的橫向分辨率與焦點的光點大小有關，垂直分辨 率則因誤差訊號的檢測方式而有所不同。 本發明人對於微小量測技術有深入研究’不斷的投入研發，並有 相關的研發成果接續地產出，例如已獲准中華民國專利第1250269號 及第1274150號專利技術，該二專利技術係採用相位法（外差干涉術） 量測。本發明技術則採用光強度方法，量測範圍較廣，所採用之光源 小[S ] 4 201237357 -及角度感與在先技術不同，且本發明加人-辨次反射的角度感 •測器’以提高角度靈敏度，可增加量測表面高度或位移量之解析度。 本發明採取在二組域_ ’分㈣測其參考光测試光之光強度變 化以求取反射率值，做為量測表面高度或位移量之依據，表面高度 或位移量與反射率成線性關係。 【發明内容】 本發明之主要目的’為了研發—維光學讀郷_或微小位移 量測’其精度在Ιμηι以上，能做快速準確的量測，且在不使用任何干 涉術之情況下，轉以幾何光學原理及簡單物理光學之雜來做量 測’及採肖角度偏向法”來量測表面，由於雷射在光學的量測上具 有速度快錢穩定等伽1目前有關這方面的技術之論文或專利並 不多見’所以本發#提出光強度量測的方法結合臨界角技術或多層鍵 膜技術所做成的角度感測器，即利用光強度對微小角度變化之特性， 並利用待測物在焦平面附近反射光之偏折，來骑_轉描物體，進 而獲得表面的高度差或位移量。此方法成本低精度高，可以讓國内精 密加工產業與其他相關產業的發展速度快速提升。 本發明一維掃瞄表面形貌量測裝置與方法，可用來量測表面高度 或縱向位移量，其方法是利用反射率（光強度）量測的方法結合臨界 角技術或多層鍍膜技術所做成的角度感測器，即利用光強度對微小角 度變化有線性關係之特性以及待測物在焦平面附近其反射光因離焦距 離而偏折，來進行一維掃描，進而獲得表面的高度差或縱向位移量。 此原理乃利用幾何光學光追跡法原理決定光線高度與其角度。 201237357 【實施方式】 壹·本發明之原理 1.幾何光學成像原理 如圖1所示，本發明之幾何光學成像原理，係當入射光平行於光 轴入射進入透鏡，而當待測物表面位於透鏡焦點時，此時反射光返回 透鏡後會平行於入射光；若待測物離開焦點平面ΔΖ時’此時反射光 經過透鏡後不會平行入射光，則產生反射光角度偏移。由圖1所示， 得知在焦平面反射的光，5若待測物離開焦平面ΔΖ，則產生反 射光角度偏移ΑΘ，並由圖2及成像公式得知： 1 1 1 / + ΔΖ+歹-7 ⑴ 其中： — + 2ΑΖ·θί _ 2_ 5 ~ |Δ叫 ⑵ 由(1)與(2)可推得：The stylus and the surface to be tested have a certain amount of force, so the sharp stylus is easy to damage the surface, and the stylus itself is easily damaged, which distort the measurement result. The most common optical measurement methods are: geometric optical probe method and interference measurement method, and the measurement has the advantages of non-contact and speed. Non-optical scanning microscopes do not have optical objectives. They are different from optical measurements and do not require optical lenses. There are currently two types of non-optical scanning microscopes, one is an electron microscope, such as scanning electron microscopy (SEM), penetrating. Electron microscopy (TEM) and scanning transmission electron microscopy (STEM); the other is a scanning probe microscope, such as scanning wear-through I 3 201237357 • mirror (STM), atomic force microscope (AFM), the disadvantage is operation Complex, easy to be affected by gray-dust interference' In practical applications, because of its high price and small scanning range (area), it can not be effectively used as a general online testing tool, but only as a small sample. . Furthermore, scanning confocal miicroscopy was first proposed by Minsky in 1957 (see Reference 6), and many scholars have done further research on confocal systems. The basic principle is that the probe light emitted from a point source is focused by the lens onto the object to be observed. If the object is just in focus, the reflected light should be concentrated back to the source through the original lens. This is called confocal, referred to as confocal. . The basic structure of confocal microscopy technology is that the light is focused on the sample through the objective lens, and the reflected light returns along the original path, and then passes through the spectroscope into the confocal hole of the spatial filtering, and passes through the position of the focus on the sample. Dimensional or three-dimensional imaging. The key technology of the scanning confocal microscope is the introduction of the confocal pinhole. The detector can only receive the optical signal from the focus of the objective lens, and use the optical signal intensity detected by the optical debt detector to obtain the surface contour information. In addition, the focus detection method uses a photodetector to measure surface microscopic fluctuations. According to the different detection methods of the focus error signal, the focus detection method mainly includes the knife edge method, the astigmatism method and the critical angle method. The lateral resolution of these focusing methods is related to the spot size of the focus, and the vertical resolution is detected by the error signal. The way it is different. The inventor has in-depth research on micro-measurement technology, 'continuous investment in research and development, and related research and development results continue to be produced, for example, patents of the Republic of China Patent No. 1250269 and No. 1274150 have been approved, and the two patent technologies adopt phase Method (heterodyne interferometry) measurement. The technology of the invention adopts the light intensity method, the measurement range is wide, the light source used is small [S ] 4 201237357 - and the angle sense is different from the prior art, and the angle sensor of the invention is added-recognition reflection 'In order to increase the angle sensitivity, the resolution of the measured surface height or displacement can be increased. The invention adopts the change of the light intensity of the reference light test light in the two groups of _ 'minutes (four) to obtain the reflectance value, and as the basis for measuring the surface height or the displacement amount, the surface height or the displacement amount and the reflectance become Linear relationship. SUMMARY OF THE INVENTION The main object of the present invention is to perform rapid and accurate measurement for the purpose of R&D-dimensional optical reading 郷 or micro-displacement measurement with a precision of more than ημηι, and without any intervention. Measuring the surface with the principle of geometric optics and simple physical optics, and measuring the surface angle, because the laser has fast speed and stability in optical measurement, etc. The papers or patents are not common. So the present invention proposes a method of measuring the intensity of light combined with a critical angle technique or a multilayer key film technique, that is, using the characteristics of light intensity versus micro angle change, and Using the deflection of the reflected light near the focal plane of the object to be tested, the object can be ridden and the height difference or displacement of the surface can be obtained. This method has low cost and high precision, and can make the domestic precision processing industry and other related industries The development speed is rapidly improved. The one-dimensional scanning surface topography measuring device and method of the invention can be used for measuring surface height or longitudinal displacement by using reflectance (light intensity) The measuring method is combined with the critical angle technique or the multi-layer coating technology to make the angle sensor, that is, the characteristic that the light intensity has a linear relationship with the slight angle change and the reflected light of the object to be tested is near the focal plane due to the defocus distance. The deflection is used to perform one-dimensional scanning to obtain the height difference or the longitudinal displacement of the surface. This principle uses the principle of geometric optical light tracing to determine the height of the light and its angle. 201237357 [Embodiment] 壹· Principle of the invention 1. The principle of geometric optical imaging is shown in FIG. 1. The principle of geometric optical imaging of the present invention is that when incident light enters the lens parallel to the optical axis, and when the surface of the object to be tested is located at the focal point of the lens, the reflected light returns to the lens and is parallel. In the incident light; if the object to be tested leaves the focal plane ΔΖ, 'the reflected light passes through the lens and does not collide with the incident light, and the reflected light is angularly shifted. As shown in Fig. 1, the light reflected at the focal plane is known. 5 If the object to be tested leaves the focal plane ΔΖ, the angle of the reflected light is shifted by ΑΘ, and is known from Fig. 2 and the imaging formula: 1 1 1 / + ΔΖ+歹-7 (1) where: — + 2ΑΖ·θί _ 2_ 5 ~ | Δ (2) can be derived from (1) and (2):
|ΑΛ, Ζ)·ΔΖ+4ΔΖ2 DAZ 丨 .矿 V (3) 由結果得知’角度變化量Δθ與移動量ΛΖ成正比，所以即可由αθ 大小正負號，判斷其位移的大小及方向。 2.量測角度偏向之基本原理 本發明以光強度量測的方法，係結合臨界角技術或多層鐘膜技術 所做成的角度感測器，主要利用光強度對微小角度變化之特性，由於 此角度感測器之光強度（或反射率）變化對光線角度的微小變化極為 靈敏且成線性關係，當反射光之偏折時，角度感測器之出射光強度產 m 6 201237357 -生變化，因此可以由所感測到的光強度變化量來求出角度的改變量。 3·全反射原理 本發明方法係利用臨界法全反射原理及反射率對光強度的變化。 全反射（又稱全内反射）是一種光學現象。當光線經過兩個不同折射 率的介質時，部份的光線會於介質的界面被折射，其餘的則被反射。 但是，當入射角比臨界角大時（光線遠離法線），光線會停止進入另 一介面’反之會全部向内面反射。這只會發生在當光線從光密介質（較 I5J折射率的介質）進入到光疏介質（較低折射率的介質），入射角大於 臨界角時。因為沒有折射（折射光線消失）而都是反射，故稱之為全 反射。例如當光線從玻璃進入空氣時會發生，但當光線從空氣進入玻 璃則不會。 4· Fresnel 定律 為了要計算一個光學系統中所定出之光束上的偏振狀態，我們必 須要能算出通過不同折射率介面下的電場效應。一般而言，當一個平 面波碰到一個介面’部份波被折射，部份波則被反射。（為了單純起見， 我們假設介質不吸收）。而描述穿透與反射跟入射場的比值叫做Fresnd 方程式。 電場永遠都可以分成二個分量(如圖3所示），一個與入射面平行， 另一則是與入射面垂直。平行的分量被稱p、兀或者TM (transverse magnetic)偏振，而垂直分量則被稱作s、或丁£ (壮咖资纪electrfc) 偏振，（s源自德文「senkrecht」，意指正交）。如果我們註記入射角叫 01，折射角叫02 ’而反射光振幅與入射光振幅比值叫做]^·，稱之為反 射係數；透射（折射）光振幅與入射光振幅比值t，稱之為穿透係數。 則Fresnel方程式如下： 201237357 r ”2. cose-'· cos民 P ^-COS^+Wj-cos^ r % .COS0-〜.cos民 '«i*c〇s^+w2.c〇s^2 t 2nl -cos^j P n2-cos0l+nl>cos02 2nx -cos^. ts —---—i-- ^•cos^+^-cos^ 其中n!為入射的折射率和叱為出射的折射率； P、S偏光之反射率分別為： (4) (5) (6) (7) (8) (9) 5·反射率與外角變化關係 如圖4所其係代表规由空氣人射至稜鏡(取&為稜鏡之折射 率和巧為线的折射率），根據Snell定律可財出折射角^及入射角 h的關係，與外角0和入射稜鏡内角&之間的關係： 0 =45°-3ΰτΥϋ^、 I «ι J (10) \ n2 ) (11) 貳•本發明之實驗例 1·本發明實驗例之系統架構 如圖5所示’係本發明實驗例之系統架構。我們以前面所介紹的幾 何光學成像原理與臨界肖反射料基礎，設計丨本㈣實驗例之系統:] 8 201237357 -架構，來做表面輪廓及形貌的量測’藉由絲度（反射率）的不同來 -計算出縱向位移量或分析出物體表面的高低差，整個過程以掃描方式 測出物體表面高低，並緣圖顯示結果。 2.本發明實驗例之系統架構的各組件 如圖5所示，本發明實驗例之系統架構，包括： 光源(1)，用以發射出光束，光源⑴可為單-波長光源或採用雷 射光源； 偏極板(Polarizer)(2)，其可調整角度，用以接收來自光源⑴的光 束，以改變光束之光偏極方向； 透鏡(Lens)(3)，其焦距已知，其用以接收來自偏極板(2)的光束， 功能為讓入射光束進入透鏡(3)後，聚焦在待測物(4)上，使光點變小， 藉此提咼橫向解析度；並利用幾何光學成像原理，當待測物(4)表面不 在透鏡焦點時’待測物(4)的反射光則會偏離光轴，藉角度變化來觀察 待測物(4)表面之位移量； 待測物(4) ’其為待量測之物件（可為透明或非透明物件）；本發 明實驗例係以反射鏡(5)與一表面有高低落差之樣品作為待測物，反射 鏡(5)用來測試位移量，而高低落差之樣品以塗佈有機材料方式製作； 反射鏡(5)，由於入射光束與反射光束之間距有限，為了方便測 量，所以利用反射鏡(5)讓反射自待測物⑷的反射光束做9〇。反射； 光圈(6)，用以擋住阻隔來自反射鏡(5)之反射光束中不必要的雜訊 光，降低接收器的雜訊； 分光鏡(Beam-Splitter)(7)，接收來自光圈⑹的反射光束，可讓反射 L 3] 9 201237357 光束一部份(50%)穿透，及另一部份(50%)反射； 平行四邊形稜鏡(Parallelogram Prism)(9)，其做為角度感測器 之用’供來自分光鏡的穿透光束入射，並做多次反射，以測量穿透光 束之微小角度變化’本實驗例之反射次數為兩次，所用之平行四邊形 稜鏡材質為BK 7; 第一、第二光接收器(8)(80)，用以偵測光強度變化，第一光接收 器⑻在此實驗的功能用於偵測經過平行四邊形稜鏡⑼内部而反射出 來的光強度’第二光接收器(80)的功能是用於抵銷雷射本身的雜訊及 待測物(4)反射率不同所造成測量上的誤差；及 一運算手段，本發明實施例係使用有運算程式之電腦，用以將該 第一光接收器（8)之光強度除以該第二光接收器（80)之光強度，獲取實 際之反射率值，再利用反射率值進而量出該待測物(4)表面的高度差或 縱向位移量。 3.本發明實驗例之操作 依據如圖5所示之本發明實驗例架構，本發明實驗例之操作，係以 固態綠光雷射光源(1)(波長532nm)當光源，藉由入射透鏡(3)讓光聚焦 在待測物(4)之待測面上’之後經由待測物(4)表面反射返回透鏡(3)，當 待測物(4)表面遠離透鏡(3)的焦點時，反射回來的雷射光經過透鏡(3) 後會偏離光轴，產生角度的改變，再經過一反射鏡(5)將光線反射通過 光圈(6)，過光圈(6)之後可以濾掉待測物(4)表面所產生的雜光，再由分 光鏡⑺將光分別入射光接收器PD2(80)與平行四邊形棱鏡(9)内，進入 棱鏡(9)的光線，藉由反射光角度的改變，使反射率產生變化，之後由 ί S1 201237357 -第一光接收器PD1(8)所測量出的光強度A來當做入射光之光強度，而 -第二光接收器PD2(80)所得之光強度為/2，第二光接收器PD2_其功 能是用於抵銷雷射光本身的雜訊及待測物(4)反射率不同所造成測量 上的誤差以及藉以力//2可量出反射率，進而計算出待測物(4)樣本 (Sample)表面的高度差或位移量。 4.本發明實驗例之量測結果 本發明實驗例所量測之待測物，係以塗佈方式製作高度約2〇am 的待測物樣本（Sample)，利用本發明實驗例之系統架構進行一維掃瞄 表面輪廓的量測，觀察其膜厚高度與接面形狀。附件一為樣本 (Sample) ’ A區為塗佈2〇em高度之區塊，B區則為基板區塊，表面輪 廟量測方向由A至B，測量距離為4〇〇〇，量測結果將與商用測膜機 Dektak 6M進行比對。 圖6所示為測量表面形貌之高度(反射率赋)之變化，由圖6所示可 知最向向度為27.5；czm，平整區塊大約為19.8私m。 5·本發明測量結果舆測膜機Dektak 6M综合比較 由測膜機所測得結果如圖7 ’可知樣本（Sample)上接面之表面 輪廓，其最大高度大約為27.5从m，平整區塊大約為20_，由此測試 物表面量測結果，本發明實驗例之系統架構⑽測膜機所測 得的向低落差與變化之距離都相當接近，由此可證明本發明之方法的 可行性。 參.結論 本發明為一種光學非破壞性、 非接觸式之強度型一維位移量測裝^ s] 201237357 置及方法之技術。 本發明可作為精密定位與加工等量測。 本發明可作為透明與非透明表面形貌量測。 本發明可作為膜厚或表面高度差量測。 本發明乃是一種利用表面高度在透鏡焦平面附近，其反射光返回 透鏡後造成光線偏向的特性，以此偏向角來做為主要的量測的依據。 本發明乃是一種利用光強度改變轉換成表面高度差的一種量測裝 置及方法之技術。 本發明乃是一種利用光感測器作為接收光強度信號然後轉成電信 號，其反射率值作為量測表面高度的資訊。 本發明乃是包含利用表面高度變化所造成的反射光線角度變化的 一種裝置及方法之技術。 本發明乃是包含利用光線角度偏向造成的反射率或光強度改變的 一種裝置及方法之技術。 本發明之縱向解析度最小可達到〇.3阿。 本發明之縱向高度量測範圍可超過±5〇阿。 本發明可量測最小寬度為3.25/zm。 本發明所使用之角度感測器是一種反射率或光強度對入射角變化 之轉換’可以為稜鏡或有鍍膜之元件。 本發明所使用之光源為單一波長光源或採用雷射光源。 以上所述，僅為本發明之一可行實施例，並非用以限定本發明之 專利範圍，凡舉依據下列請求項所述之内容、特徵以及其精神而為之^ 12 201237357 -^變化的等效實施，皆應包含於本發明之專利範圍内 述優料，輸版娜，可她雜驗啦生之缺1， 而且所具體界定於請求項之舰，未見於咖技術，故而具新颖性、 實雜、進步性及產業利雜，已完全符合發明專利要件，爰依法具 文提出申請’謹請釣局依法核予專利，以維護本申請人合法之權益。 【圖式簡單說明】 圖1為習知入射角等於反射角之示意圖； 圖2為本發明待測物離開焦平面時之示意圖； 圖3為本發明偏光斜向入射不同介質界面電磁理論分析示意圖； 圖4為本發明光入射棱鏡之角度偏向之示意圖； 圖5為本發明實驗架構圖； 圖6為本發明咼度20μιη待測物樣本Sample反射率Rp2變化轉 換為向度圖；及 圖7為本發明測膜機Dektak6M量測結果圖。 附件一：為本發明高度20μπι之待測物樣本照片。 附件二：參考文獻。 【主要元件符號說明】 (1)光源 (2) 偏極板 (3) 透鏡 (4) 待測物 (5) 反射鏡 13 201237357 -(6)光圈 -(7)分光鏡 (8) (80)光接收器 (9) 平行四邊形稜鏡|ΑΛ, Ζ)·ΔΖ+4ΔΖ2 DAZ 丨. Mine V (3) It is known from the results that the angle change amount Δθ is proportional to the movement amount ,, so the magnitude and direction of the displacement can be judged by the positive and negative signs of αθ. 2. The basic principle of measuring the angle deviation The invention adopts the method of measuring the light intensity, which is an angle sensor made by combining the critical angle technique or the multi-layer clock technology, mainly utilizing the characteristics of the light intensity to the micro angle change, The change of light intensity (or reflectivity) of the angle sensor is extremely sensitive and linear to the small change of the ray angle. When the reflected light is deflected, the intensity of the light emitted by the angle sensor is m 6 201237357 - change Therefore, the amount of change in the angle can be obtained from the amount of change in the intensity of the light sensed. 3. Principle of Total Reflection The method of the present invention utilizes the principle of total reflection total reflection and the change of reflectance to light intensity. Total reflection (also known as total internal reflection) is an optical phenomenon. When light passes through two media of different refractive indices, some of the light is refracted at the interface of the medium and the rest is reflected. However, when the angle of incidence is greater than the critical angle (light away from the normal), the light will stop entering the other interface' and vice versa. This only occurs when light enters the light-diffusing medium (the medium of lower refractive index) from the optically dense medium (the medium with a refractive index of I5J), and the incident angle is greater than the critical angle. Since there is no refraction (the refracted light disappears) and it is a reflection, it is called total reflection. This occurs, for example, when light enters the air from the glass, but does not enter the glass when it enters the glass from the air. 4. Fresnel's Law In order to calculate the polarization state on a beam defined in an optical system, we must be able to calculate the electric field effect through different refractive index interfaces. In general, when a flat wave hits an interface, part of the wave is refracted and part of the wave is reflected. (For the sake of simplicity, we assume that the medium is not absorbed). The ratio of the penetration and reflection to the incident field is called the Fresnd equation. The electric field can always be divided into two components (as shown in Figure 3), one parallel to the incident surface and the other perpendicular to the incident surface. Parallel components are called p, 兀 or TM (transverse magnetic) polarization, while vertical components are called s, or ding (electrfc) polarization, (s from German "senkrecht", meaning orthogonal ). If we note that the incident angle is 01, the angle of refraction is called 02' and the ratio of the amplitude of the reflected light to the amplitude of the incident light is called ^^·, called the reflection coefficient; the ratio of the amplitude of the transmitted (refractive) light to the amplitude of the incident light is called wear. Permeability coefficient. Then the Fresnel equation is as follows: 201237357 r ”2. cose-'· cos民 P ^-COS^+Wj-cos^ r % .COS0-~.cos民'«i*c〇s^+w2.c〇s^ 2 t 2nl -cos^j P n2-cos0l+nl>cos02 2nx -cos^. ts —---—i-- ^•cos^+^-cos^ where n! is the incident refractive index and 叱 is the exit The refractive index of P and S polarized light are: (4) (5) (6) (7) (8) (9) 5. The relationship between reflectance and external angle is shown in Figure 4. The person shoots to 稜鏡 (takes & is the refractive index of 稜鏡 and the refractive index of the line), according to Snell's law, the relationship between the angle of refraction and the angle of incidence h, and the outer angle 0 and the angle of incidence && Relationship between: 0 = 45° - 3 ΰ Υϋ 、, I «ι J (10) \ n2 ) (11) 实验 • Experimental Example 1 of the present invention. The system architecture of the experimental example of the present invention is as shown in FIG. Inventing the system architecture of the experimental example. We designed the system of the experimental example (4) based on the geometric optical imaging principle and the critical oscillating material foundation introduced above: 8 201237357 - Architecture, to measure the surface profile and shape ' Calculate the amount of longitudinal displacement by the difference in filament (reflectance) or The height difference of the surface of the object is precipitated, and the surface of the object is detected by scanning in the whole process, and the result is displayed in the edge diagram. 2. The components of the system architecture of the experimental example of the present invention are as shown in FIG. 5, and the system architecture of the experimental example of the present invention is The method comprises: a light source (1) for emitting a light beam, the light source (1) can be a single-wavelength light source or a laser light source; a polarizer (2), the angle can be adjusted to receive the light beam from the light source (1) To change the direction of the light polarization of the beam; the lens (Lens) (3), whose focal length is known, is used to receive the light beam from the polarizing plate (2), functioning to allow the incident beam to enter the lens (3), focus On the object to be tested (4), the spot is made smaller, thereby improving the lateral resolution; and using the principle of geometric optical imaging, when the surface of the object to be tested (4) is not at the focus of the lens, the object to be tested (4) The reflected light is deviated from the optical axis, and the displacement of the surface of the object to be tested (4) is observed by the angle change; the object to be tested (4) 'is the object to be measured (which may be a transparent or non-transparent object); the experiment of the present invention For example, a sample with a height difference between a mirror (5) and a surface is used as a sample to be tested. The mirror (5) is used to test the displacement, while the high and low drop samples are made by coating organic materials; the mirror (5), due to the limited distance between the incident beam and the reflected beam, for the convenience of measurement, the mirror is used (5) The reflection beam reflected from the object to be tested (4) is 9 〇. Reflection; the aperture (6) is used to block unnecessary noise light from the reflected beam from the mirror (5), and reduce the noise of the receiver; Beam-Splitter (7), receiving the reflected beam from the aperture (6), allows the reflection L 3] 9 201237357 beam part (50%) to penetrate, and the other part (50%) reflection; parallel Parallelogram Prism (9), which is used as an angle sensor for the incident beam from the beam splitter to be incident and to make multiple reflections to measure the small angular change of the transmitted beam. The number of reflections is twice, and the parallelogram used is BK 7; the first and second light receivers (8) (80) are used to detect changes in light intensity, and the first light receiver (8) is used in this experiment. Function for detecting reflections inside the parallelogram 稜鏡 (9) Light intensity 'the function of the second light receiver (80) is to offset the error caused by the noise of the laser itself and the reflectivity of the object to be tested (4); and an operation means, the embodiment of the invention A computer having an arithmetic program for dividing the light intensity of the first light receiver (8) by the light intensity of the second light receiver (80) to obtain an actual reflectance value, and then using the reflectance value Further, the height difference or the amount of longitudinal displacement of the surface of the object to be tested (4) is measured. 3. The operation of the experimental example of the present invention is based on the experimental example structure of the present invention as shown in FIG. 5. The experimental example of the present invention operates as a solid-state green laser light source (1) (wavelength 532 nm) as a light source through an incident lens. (3) Focusing the light on the surface to be tested of the object to be tested (4) and then returning it to the lens (3) via the surface of the object to be tested (4), when the surface of the object to be tested (4) is away from the focus of the lens (3) When the reflected laser light passes through the lens (3), it will deviate from the optical axis, and the angle will change. Then, through a mirror (5), the light will be reflected through the aperture (6). After passing through the aperture (6), it can be filtered out. The stray light generated on the surface of the object (4) is then incident on the light receiver PD2 (80) and the parallelogram prism (9) by the beam splitter (7), and the light entering the prism (9) is reflected by the angle of the light. The change causes the reflectance to change, and then the light intensity A measured by ί S1 201237357 - the first light receiver PD1 (8) is taken as the light intensity of the incident light, and the second light receiver PD2 (80) The obtained light intensity is /2, and the function of the second photoreceiver PD2_ is to offset the noise of the laser light itself and the reflectivity of the object to be tested (4) Error and thereby to measure the force @ 2 may Measure reflectance, then calculate the height difference between the amount of displacement of samples (the Sample) surface under test (4). 4. Measurement results of the experimental examples of the present invention The sample to be tested measured in the experimental example of the present invention is a sample of a sample of a sample having a height of about 2 〇am by a coating method, and the system architecture of the experimental example of the present invention is utilized. The measurement of the profile of the one-dimensional scanning surface was performed, and the film thickness height and the junction shape were observed. Attachment 1 is the sample (Sample) 'A area is a block with a height of 2〇em, and area B is a substrate block. The direction of the surface wheel is measured from A to B, and the measurement distance is 4〇〇〇. The result will be compared to the commercial film measuring machine Dektak 6M. Figure 6 shows the change in height (reflectance) of the surface topography. The most visible degree is 27.5 as shown in Figure 6; czm, the flat block is about 19.8 private m. 5. The measurement result of the present invention The demeasure film machine Dektak 6M comprehensive comparison is measured by the film measuring machine as shown in Fig. 7 'the surface contour of the upper surface of the sample (Sample), the maximum height is about 27.5 from m, the flat block It is about 20_, and thus the surface measurement result of the test object, the system structure of the experimental example of the present invention (10) The measured distance between the low drop and the change is quite close, thereby demonstrating the feasibility of the method of the present invention. . Reference. The present invention is an optical non-destructive, non-contact type of intensity type one-dimensional displacement measurement device s] 201237357. The invention can be used as a measurement for precise positioning and processing. The invention can be used as a measurement of transparent and non-transparent surface topography. The present invention can be measured as a film thickness or a difference in surface height. The invention is characterized in that the surface height is in the vicinity of the focal plane of the lens, and the reflected light returns to the lens to cause the light to be deflected, and the deflection angle is used as the basis for the main measurement. SUMMARY OF THE INVENTION The present invention is a technique for measuring a device and method that utilizes a change in light intensity to convert to a surface height difference. The present invention is a method in which a photosensor is used as a received light intensity signal and then converted into an electrical signal whose reflectance value is used as information for measuring the height of the surface. SUMMARY OF THE INVENTION The present invention is a technique that includes an apparatus and method for utilizing changes in the angle of reflected light caused by changes in surface height. SUMMARY OF THE INVENTION The present invention is a technique that includes a device and method for utilizing changes in reflectance or light intensity caused by light angle deflection. The vertical resolution of the present invention can be as small as 〇3. The longitudinal height measurement range of the present invention can exceed ±5 〇. The invention can measure a minimum width of 3.25/zm. The angle sensor used in the present invention is a conversion of reflectance or light intensity to incident angle change' which may be tantalum or coated. The light source used in the present invention is a single wavelength source or a laser source. The above description is only one of the possible embodiments of the present invention, and is not intended to limit the scope of the patent of the present invention, which is based on the content, features and spirit of the following claims. Effective implementation, should be included in the scope of the patent of the present invention, the loss of the Na, but she misunderstood the lack of life, and specifically defined in the request of the ship, not seen in the coffee technology, so the novelty , Miscellaneous, Progressive and Industrial Miscellaneous, have fully complied with the requirements of the invention patent, and filed an application according to law. 'Please ask the fishing bureau to grant a patent according to law to protect the legitimate rights and interests of this applicant. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a conventional incident angle equal to a reflection angle; FIG. 2 is a schematic view of the object to be tested when it leaves the focal plane according to the present invention; FIG. 3 is a schematic diagram of electromagnetic theoretical analysis of a polarized oblique incident different medium interface according to the present invention; 4 is a schematic view showing the angle deviation of the light incident prism of the present invention; FIG. 5 is an experimental structural diagram of the present invention; FIG. 6 is a diagram showing the change of the Sample reflectance Rp2 of the sample of the sample 20% of the present invention into a directionality diagram; It is the measurement result of the measuring instrument Dektak6M of the invention. Annex I: A photograph of a sample of the sample to be tested at a height of 20 μm. Annex II: References. [Main component symbol description] (1) Light source (2) Polar plate (3) Lens (4) Object to be tested (5) Mirror 13 201237357 - (6) Aperture - (7) Beam splitter (8) (80) Optical receiver (9) parallelogram 稜鏡