TWI477736B - Multiplexing article parameter integrated optically measuring device and method thereof - Google Patents

Description

Multi-work object parameter optical measurement integration device and method

The present invention relates to an optical measuring device; more specifically, the present invention relates to an optical quantity of a multiplexed object parameter for obtaining a surface topography, a full-focus color, a black-and-white image, and a film thickness dimension of an object to be tested. Measure the integrated device.

With the rapid advancement of various micro-fabrication technologies in the industry, the demand for micro-component detection has been continuously improved, and various forms of three-dimensional contour measurement have not been able to meet market demands. In the high-tech industries such as semiconductors, flat panel displays, and micro-electromechanical components and electronic packaging, the accuracy and mechanical properties of microstructure surface contours determine the efficacy and longevity of products, and quality monitoring is required in the process. Therefore, the surface profile of the microstructure is absolutely necessary for precise detection, and optical precision is generally used in conjunction with the optical architecture to achieve such precision detection.

White light interferometers, confocal microscopy and ellipsometers for interference, microscopy and polarization measurement functions are generally well known for the needs of micro-related fields such as semiconductors, which can each detect the relative parameters of a measured object to facilitate Monitoring of semiconductor products in online manufacturing.

Interferometers are widely used in the surface contouring of light paths. They can be divided into three types: Mirau, Linnik and Michelson. The two types of reference surfaces and objective lenses of Mirau and Michelson are integrated on one objective system and cannot be adjusted, and Linnk The optical architecture of the interferometer is more flexible and self-assemblable in adjusting the reference optical path and optical system variations.

A general commercial confocal microscope can be used to obtain a full-focus image of a measured object, which is vertically scanned for the object, and image processing is used to obtain a high-frequency message in each pixel of the scanned image, so that each pixel is located at a The grayscale value in the depth of field of the objective lens, and then the global focus message.

An ellipsometer is commonly used in film thickness measurement. After a light source is processed, a linearly polarized light is formed, and then the phase is modulated by the compensation film. After being injected into a film sample, it is reflected back and then enters a second. The polarization treatment is further compensated, and a detector is used to analyze the Stokes parameters, thereby analyzing the amplitude and phase of the reflected light, and then deriving the thickness information of the film.

However, on the market, interferometers, confocal microscopy and ellipsometry, the functions of each measuring instrument are singular, and the related patents pay more attention to the accuracy and stability of each measurement function algorithm.

In the measurement of the film thickness, the US Patent Publication No. US2013/0033698 A1 discloses that the surface of the object to be tested and the bottom surface are reflected back to different light, and the spectrometer is used to detect the surface and bottom surface spectrum of the object to be tested, and then the operation processing is performed. The thickness of the two layers is analyzed.

U.S. Patent Publication No. US 2012/0218561 A1 discloses the use of a spectrometer or a photodetector to measure the difference in light reflection time between the surface of the test piece and the film interface, that is, the difference in light reflection time between the surface reflected light and the interface reflected light, and then the film thickness is obtained by computer operation. size.

US Patent Publication No. US8416491 B2 uses the principle of confocal microscope to instantly know the surface topography of the test piece, which is injected into a sequence of stripe structured light by the light source, detects the depth response curve of each pixel, and knows that the object is within the measurement range. The depth distribution is reversed back to the surface topography of the object under test. U.S. Patent Publication No. US8416399 B2 utilizes white light interferometry and back measurement to measure the surface topography and thickness dimensions of the object under test.

The Republic of China Patent Application No. 096147071 receives an interference signal spectrum of three colors R, G and B by means of an off-axis digital holographic method, the color image capturing element can receive a beam with an interference signal and the color image capturing element Forming holographic interference, and obtaining the phases of R, G, and B, taking the synthesized wavelengths R, G and their phases, and the synthesized wavelengths G, B and their phases into the calculation, which can obtain the synthesized wavelength and be calculated by computer The three-dimensional contour of the surface of the object to be tested can be obtained by measuring the three colors of R, G, and B on the surface of the object.

However, as the process technology of semiconductor and other industries has already become highly integrated, the time-history is shortened and systematically carried out, thereby saving manufacturing costs and simplifying the process; however, measuring the object under test with the optical instrument for measuring When the parameters are measured, the objects to be tested need to be processed and moved relative to the instruments in stages, so there is still the possibility of reduction in equipment cost and time history, and the movement of the objects in the manufacturing has the possibility of damage, so how Even more in-line measurement characteristics of fine-related industries such as semiconductors can still be a breakthrough in efforts.

In view of the above-mentioned breakthroughs in self-study technology, the above-mentioned conventional optical measuring instruments have been integrated to save equipment costs, achieve real-time measurement, rapid monitoring, shorten manufacturing time, and reduce the possibility of damage of objects in manufacturing. Need to promote industrial progress.

In view of the above, an object of the present invention is to provide an apparatus and method for optical measurement integration of a multiplex object.

The multiplex object parameter optical measurement integration device of the present invention comprises a light source unit, an aperture unit, a beam splitting unit, an object end unit, a reference light processing unit, a spectral acquisition/image capturing unit, and a signal processing. a unit, and a test object support unit. The light source unit includes an external light source, a collimated light source, and a polarized unit, wherein the collimating unit receives the external light source to provide a collimated reference light and a collimated incident light; and the polarizing unit The collimated reference light and the collimated incident light are polarized to obtain a polarized reference light and a polarized incident light, and the polarized reference light has a traveling path. The aperture unit includes a reference light aperture, an incident light aperture, and a to-be-measured optical aperture, wherein the reference optical aperture controls the throughput of the polarized reference light, has an open state and a closed state, and is turned off Cut off when the state The incident light diaphragm controls the passing amount of the polarized incident light to be measured by the traveling path of the polarized reference light. The beam splitting unit directs the polarized reference light and the polarized incident light to a first path and a second path. The object to be tested is located on the second path for receiving and focusing the polarized incident light passing through the beam splitting unit to the object to be tested through the optical aperture to be measured, and the object to be tested reflects the wearing The light to be measured is generated by the polarized incident light of the light splitting unit, and the light to be measured is refracted through the light splitting unit to a third path in which the second path is reversed. The reference light processing unit is located on the first path for reflecting the polarized reference light to generate a collimated reference light when the reference light aperture is in the open state and the device is in an interference mode. And in the three paths, the light to be tested and the collimated reference light are collectively generated by the beam splitting unit to generate an interference image, and the third path is in the closed state when the reference light aperture is in the closed state and the device is in a micro mode A guided image to be measured is generated. The spectral acquisition/image capturing unit comprises a polarization splitting unit, a spectral acquisition unit, and an image capturing unit, wherein the polarization splitting sheet receives the interference image and the microscopic mode in the interference mode Receiving the image to be tested to obtain a first image to be analyzed and a second image to be analyzed; the spectrum acquisition unit receives the first image to be analyzed to generate a spectral message; and the image capturing unit receives the second image Image to be analyzed. The signal processing unit controls the object to be moved in a vertical direction during the interference mode, and analyzes the second image to be analyzed, thereby finding and recording the zero path length of each pixel in the second image to be analyzed. a difference surface, wherein the spectrum acquisition unit obtains the spectral information, and then calculates a surface topography of the measured object according to at least one of the spectral information and the second image to be analyzed; and closing the reference optical aperture to The device enters the micro mode, the spectrum acquisition unit acquires the spectral information of the zero optical path difference surface, and activates the object to be moved to move in the vertical direction, and analyzes each of the second image to be analyzed a focus information of the pixel to obtain a full focus color image and a full focus black and white image, and establish a depth response curve; actuate the object to be moved laterally to according to the spectral information, the depth And a lateral dispersion phenomenon to obtain a large-area surface topography of the object to be tested; and when the object to be tested has a substrate and a coating layer on the substrate, according to the zero optical path difference surface The spectral information at the time derives a film thickness dimension of the object to be tested and a surface topography, wherein the surface topography is identical to the other surface topography, and the signal processing unit can select only calculation and presentation. One of them.

The multiplexed object parameter optical measurement integration method of the present invention comprises the steps of: (a) providing a collimated reference light and a collimated incident light; (b) polarizing the collimated reference light and the collimated incident light to obtain a a polarized reference light and a polarized incident light, wherein the polarized reference light has a traveling path; (c) controlling a passing amount of the polarized reference light, and having an open state and a closed state, and Turning off the traveling path of the polarized reference light in the off state; (d) controlling the throughput of the polarized incident light; (e) guiding the polarized reference light and the polarized incident light to each a first path and a second path; (f) receiving and focusing the polarized incident light passing through the beam splitting unit along the second path to the object to be tested, and the object to be tested reflects the passing The light splitting unit generates a light to be measured through the polarized incident light, and guides the light to be measured to a third path in which the second path is reversed; (g) the reference light is controlled to the open state and the When the device is in an interference mode, the polarized reference light is reflected to generate a collimated reference light a third path, and the light to be measured generates an interference image with the collimated reference light, and when the reference light is controlled to the off state and the device is in a micro mode, a guided light image is generated (h) receiving, in the interference mode, the interference image and receiving the image to be measured during the micro mode, to obtain a first image to be analyzed and a second image to be analyzed; Receiving the first image to be analyzed to generate a spectral message; (j) receiving the second image to be analyzed; (k) controlling the object to be moved in a vertical direction during the interference mode, and analyzing the image a second image to be analyzed, wherein the zero optical path difference surface of each pixel is found and recorded in the second image to be analyzed, thereby obtaining the spectral information, and then calculating according to one of the second image to be analyzed of the spectral information. Extracting a surface topography of the object to be tested; (1) controlling the reference light aperture to be in the closed state to enter the microscopic mode, and obtaining a spectral information of the zero optical path difference surface, and actuating the received signal The object is moved in the vertical direction, and a focus information of each pixel of the second image to be analyzed is analyzed to obtain a full focus color image and a full focus black and white image, and a depth response curve is established; m) actuating the object to be moved laterally to obtain a large-area surface topography of the object to be tested according to the spectral information, the depth response curve and a lateral dispersion phenomenon; and (n) when the object to be tested is When a substrate is provided and a coating layer is formed on the substrate, a film thickness dimension and a surface morphology of the object to be tested are derived according to the spectral information of the zero optical path difference surface, wherein the surface topography In the same manner as the other surface topography, the signal processing unit may select to calculate and present only one of them.

With the device and method of the present invention, since the functions of the conventional white light interferometer, confocal microscopy and ellipsometer are effectively integrated into a single device, equipment cost is saved, real-time measurement, rapid monitoring, shortened manufacturing time, and The advantages and benefits of reducing the possibility of damage to objects in manufacturing are achieved.

10‧‧‧ Collimation Light Module

11‧‧‧Double lens

12‧‧‧ pinhole

13‧‧‧focus lens

14‧‧‧Polar piece

15‧‧‧polar plate rotating table

16‧‧‧Reference light mirror

17‧‧‧Infinity Correction Objectives

18‧‧‧Infinity Correcting Objectives

19‧‧ ‧focus lens

20‧‧‧ pinhole

21‧‧‧focus lens

22‧‧‧focus lens

101‧‧‧Light source unit

101a‧‧‧External light source

101b‧‧ ‧ Collimation unit

101c‧‧‧polar unit

102‧‧‧ aperture unit

102a‧‧‧Reference light aperture

102b‧‧‧Incoming light aperture

102c‧‧‧Measurement aperture

103‧‧‧Distribution unit

104‧‧‧Measurement object unit

104a‧‧‧Light path difference precision displacement mechanism

104b‧‧‧Reference light mirror precision displacement mechanism

105‧‧‧Reference light processing unit

106‧‧‧Spectrum acquisition/image capture unit

106a‧‧‧polar spectroscopic unit

106b‧‧‧spectral acquisition unit

106c‧‧‧Image capture unit

107‧‧‧Signal Processing Unit

108‧‧‧Test object support unit

108a‧‧‧ Piezoelectric Actuator

108b‧‧‧Precision displacement stage

S301‧‧‧ provides a collimated reference light and a collimated incident light

S302‧‧‧ polarizing the collimated reference light and the collimated incident light to obtain a polarized reference light and a polarized incident light, and the polarized reference light has a traveling path

S303‧‧‧ controls the passing amount of the polarized reference light, and has an open state and a closed state, and cuts the traveling path of the polarized reference light in the closed state

S304‧‧‧Control the throughput of the polarized incident light

S305‧‧‧ guiding the polarized reference light and the polarized incident light to a first path and a second path

S306‧‧‧ receiving and focusing the polarized incident light passing through the spectroscopic unit along the second path to the object to be tested, and the object to be tested reflects the polarized incident light passing through the spectroscopic unit Generating a light to be measured, and guiding the light to be measured to a third path in which the second path is reversed

S307‧‧ ‧ when the reference light is controlled to the on state and the device is in an interference mode, the polarized reference light is reflected to generate a collimated reference light on the third path, and the light to be measured is The collimating action reference light generates an interference image, and when the reference light is controlled to the off state and the device is in a micro mode, generating a guided light image to be on the third path

S308‧‧‧ In the interference mode, receiving the interference image and receiving the image to be tested during the micro mode, to obtain a first image to be analyzed and a second image Image to be analyzed

S309‧‧‧ receiving the first image to be analyzed to generate a spectral message

S310‧‧‧ Receiving the second image to be analyzed

S311‧‧‧ In the interference mode, controlling the object to be moved to move in a vertical direction, and analyzing the second image to be analyzed, thereby finding and recording the zero light of each pixel in the second image to be analyzed Obtaining the spectral information, and calculating a surface topography of the measured object according to at least one of the spectral information and the second image to be analyzed

S312‧‧‧ controlling the reference optical aperture to be in the closed state to enter the microscopic mode, and obtain the spectral information of the zero optical path difference surface, and actuate the object to be moved in the vertical direction, and By analyzing a focus information of each pixel of the second image to be analyzed, to obtain a full focus color image and a full focus black and white image, and establishing a depth response curve

S313‧‧‧ actuation of the object to be moved laterally to obtain a large-area surface topography of the object to be tested according to the spectral information, the depth response curve and a lateral dispersion phenomenon

S314‧‧‧Deriving a film thickness of the object to be tested based on the spectral information of the zero-path difference surface

The following drawings are used to clarify the detailed description of the present invention, so that those skilled in the art can better understand the features and spirit of the present invention. FIG. 1 is a block diagram of the multiplexed object parameter optical measurement integration device of the present invention. FIG. 2 is a schematic diagram showing a more detailed structure of the multiplexed object parameter optical measurement integration device of the present invention; and FIG. 3A and FIG. 3B are flowcharts of the method for integrating the optical measurement of the multiplex object parameter of the present invention.

The features and embodiments of the present invention are described in detail below with reference to the drawings and embodiments, which are sufficient to enable those skilled in the art to fully understand the technical means to which the present invention solves the technical problems. Thereby, the achievable effects of the present invention are achieved.

The invention provides a device and a method for measuring optical parameters of a multiplex object. First, the description of the device of the present invention is carried out in conjunction with "Fig. 1" and "Fig. 2", wherein "Fig. 1" is a block diagram of the multiplexed object parameter optical measurement integration device of the present invention, "Fig. 2" It is a schematic diagram of a more detailed structure of the multiplexed object parameter optical measurement integration device of the present invention.

As shown in the figure, the multiplex object parameter optical measurement integration device 100 of the present invention comprises a light source unit 101, an aperture unit 102, a beam splitting unit 103, an object end unit 104 to be tested, a reference light processing unit 105, and a The spectral acquisition/image capturing unit 106, a signal processing unit 107, and an object to be tested support unit 108 are configured to measure geometric parameters of an object A to be tested, wherein the object A to be tested has a film layer. An object on one of its surfaces, and is typically a component such as a semiconductor element or the like.

The light source unit 101 includes an external light source 101a, a collimating unit 101b, and a polarizing unit 101c. The external light source 101a can be a white halogen lamp or an infrared lamp, and its light intensity has a Gaussian distribution. The polarizing unit 101c receives the external light source 101a for providing a collimated reference light R1 and a collimated incident light I1. The polarization unit 101c polarizes the collimated reference light R1 and the collimated incident light I1 to obtain a polarized reference light R2 and a polarized incident light I2.

The aperture unit 102 includes a reference aperture 102a, an incident aperture 102b, and a to-be-measured aperture 102c. The reference optical aperture 102a controls the throughput of the polarized reference light R2, has an open state and a closed state, and cuts the travel path of the polarized reference light R2 in the closed state, that is, the device 100 There is no presence of the polarized reference light R2 in the entire subsequent element. The incident light aperture 102b controls the throughput of the polarized incident light I2, which will be described later.

The beam splitting unit 103 guides the polarized reference light R2 and the polarized incident light I2 to a first path P1 and a second path P2, respectively. on.

The object end unit 104 is located on the second path P2, and is configured to receive and focus the polarized incident light I2 passing through the beam splitting unit 103 to the object to be tested A through the optical aperture 102c to be measured, and is tested. The object A reflects the polarized incident light I2 passing through the beam splitting unit 103 to generate a light to be measured M1. The light to be measured M1 is refracted through the light splitting unit 103 to a third path P3 opposite to the second path P2. .

The reference light processing unit 105 is located on the first path P1. When the reference optical aperture 102a is in the on state, the device 100 is in an interference mode, and the reference light processing unit 105 reflects the polarized reference light R2, thereby generating a collimation effect reference light R3 traveling on the third path P3. And the interference light M1 and the collimation action reference light R3 jointly generate an interference image through the light splitting unit 103, and the interference mode refers to the operation state of the device 100 at this time. When the reference aperture 102a is in the closed state, the device 100 is in a micro mode, and at this time, there is a presence of the guided light image to be measured M2 on the third path P3.

The spectrum acquisition / image capturing unit 106 comprises a biasing electrode spectroscopic units 106a, 106b a spectrum acquisition unit and an image capture unit 106 c.

In the interference mode, the polarization beam splitting unit 106a receives the interference image; and in the micro mode, receives the image to be measured to obtain a first image to be analyzed and a second image to be analyzed. The spectrum acquisition unit 106b receives the first image to be analyzed to generate a corresponding one of the spectral information under each operating condition. The image capturing unit 106c receives the second image to be analyzed for subsequent analysis processing to obtain the geometric parameters of the object A to be tested by using the relationship between the second image to be analyzed and the object A to be tested.

The signal processing unit 107 is configured to analyze and calculate various geometric parameters of the tested object A. In the interference mode, the signal processing unit 107 controls the object A to be moved in a vertical direction V, and analyzes the second image to be analyzed, thereby finding and recording one zero path of each pixel in the second image to be analyzed. difference The surface acquisition unit 106b obtains the spectral information under the operating condition, and calculates a surface topography of the measured object A based on the spectral information.

Next, the signal processing unit 107 turns off the reference optical aperture 102a to cause the device 100 to enter the microscopic mode, and the spectral acquisition unit 106b obtains the spectral information when the zero optical path difference surface corresponds to the operating condition, and activates the measured object A in the vertical direction. Moving on V, and analyzing a focus information of each pixel of the second image to be analyzed, to obtain a full focus color image and a full focus black and white image, and establishing a depth response curve.

Then, the signal processing unit 107 actuates the object A to move laterally to obtain a large-area surface topography of the object A according to the spectral information under the operating conditions, the obtained depth response curve and a lateral dispersion phenomenon. .

Finally, when the object to be tested A has a structure with a substrate and a coating layer on the substrate, a film of the object A to be tested is derived according to the spectral information obtained under the operating conditions corresponding to the zero-path difference surface. Thickness, and a surface topography can be derived at the same time, wherein the surface topography is different from the above surface topography, but the obtained values are the same, so the surface topography of the measured object A can be the above two The method is determined, and one of them can be calculated and presented.

The above-described apparatus 100 will be described with respect to its more detailed embodiment.

The object to be tested unit 104 further includes an optical path difference precision displacement mechanism 104a and a reference light mirror precision displacement mechanism 104b, wherein the optical path difference precision displacement mechanism 104a adjusts the collimation action reference light to have a relationship with the light to be measured. With zero optical path difference, the reference light mirror precision displacement mechanism 104b adjusts the contrast of the complex stripe in the interference image.

The polarizing beam splitting unit 106a further includes an adjusting beam splitter angle rotating platform (not shown) for adjusting the image of the plurality of stripes in the interference image. Sharpness.

The device 100 of the present invention further includes a DUT support unit 108. The DUT support unit 108 includes a piezoelectric actuator 108a and a precision displacement stage 108b. The piezoelectric actuator 108a is the signal processing unit 107. In the interference mode, control is performed to move the object to be tested A in the vertical direction V, and the precision displacement stage 108b is used to support the piezoelectric actuator 108a.

The signal processing unit 107 moves the object A to be moved in the vertical direction V in the micro mode, and analyzes a high frequency message in each pixel of the second image to be analyzed, and splicing one depth of each pixel The grayscale value restores an image out of focus information to form the full focus color image and the full focus black and white image, and establishes the depth response curve.

The signal processing unit 107 uses an image contrast mask filter and the analyzed high frequency information to analyze the high frequency information of each pixel of the image to be analyzed to restore the image out of focus information to obtain the full focus black and white image, and separate The image to be analyzed is an image of three colors of RGB, and then the three color images of RGB are analyzed and superimposed to be restored to the full-focus color image.

The spectrum acquisition unit 106b extracts the spectral information on one of the upper surface of the substrate of the object A and the coating layer in the microscopic mode, and reverses the substrate of the object A according to the spectral information of the zero-optical difference surface. The distance between the upper surface and the upper surface of the coating layer, and the distance is taken as the thickness of the coating layer.

The light suitable for the image capturing unit 106c and the spectrum acquiring unit 106b may be visible light or non-visible light.

The signal processing unit 107 applies a phase shift algorithm to the interference fringes, and analyzes the maximum intensity of one of the interference fringes, thereby establishing a surface topography information to obtain the surface topography of the object A to be tested.

Please refer to "Figure 2" for the purpose of explaining the detailed components of each unit in "Figure 1".

As shown in the figure, the light source unit 101 includes a collimating optical module 10 and a polarizing plate 14 , wherein the collimating optical module 10 includes a doublet 11 and a The pinhole 12 and a focusing lens 13 include a polarizing plate rotating table 15. The reference light processing unit 105 includes a reference light mirror 16 and an infinity type correction objective lens 17. An infinity-type correction objective lens 18 and a focus lens 19 are provided on the object to be tested M1 leading to the object support unit 108 (not shown in the drawing, but including the piezoelectric actuator 108a and the precision displacement stage 108b). . There is a pinhole 20 and a focus lens 21 on the path of the polarization splitting unit 106a to the spectrum obtaining unit 106b. The polarizing beam splitting unit 106a further includes a polarizing beam splitting unit rotating platform (not shown) in the polarizing beam splitting unit. The path from 106a to the image capturing unit 106c further includes a focusing lens 22. Those skilled in the art can easily understand the functions of the above-mentioned generally used detailed optical elements 10, 11, and 22, and the detailed description is omitted here for brevity.

As can be seen from the foregoing description, the device of the present invention is constructed by using a Linnik interference microscopy as a basic structure, integrating the functions of a conventional interferometer, a microscopy instrument and an ellipsometer, that is, integrating the surface topography measurement function of a conventional white light interferometer, The panoramic deep image analysis function of the confocal microscope and the film thickness measurement function of the ellipsometer can simultaneously measure the surface topography of the object under test, full-focus color and black-and-white image, large-area surface topography, and film. Three-dimensional geometric parameters such as thick dimensions. Thereby, compared with the conventional device, the micro-learning related components such as semiconductors can utilize the measurement processing of the device of the invention to save equipment cost, simplify the device system, save space occupied by the device, perform real-time measurement, quickly monitor, and shorten manufacturing time. And reduce the advantages and effects of moving the object to be tested and reducing the possibility of damage to the object in manufacture.

Hereinafter, the multiplexed object parameter optical measurement integration method of the present invention will be described in conjunction with "3A" and "3B" showing the flow of the multiplex object.

The steps involved in the optical measurement integration method of the multiplex object of the present invention will be described in detail below. First, a collimated reference light and a collimated incident light are provided (S301). Secondly, the collimated reference light and the collimated incident light are polarized to obtain a polarized reference light and a polarized incident light, and the polarized reference optical device There is a travel path (S302). Next, the throughput of the polarized reference light is controlled, and has an open state and a closed state, and the traveling path of the polarized reference light is cut off in the closed state (S303). Next, the throughput of the polarized incident light is controlled (S304). Then, the polarized reference light and the polarized incident light are respectively guided to a first path and a second path (S305). Continuing, receiving and focusing the polarized incident light passing through the beam splitting unit along the second path to the object to be tested, and the measured object reflects the polarized incident light passing through the beam splitting unit to generate The light to be measured is guided to the third path in which the second path is reversed (S306). In addition, when the reference light is controlled to the on state and the device is in an interference mode, the polarized reference light is reflected to generate a collimated reference light on the third path, and the light to be measured and the The collimating action reference light generates an interference image, and when the reference light is controlled to the off state and the device is in a micro mode, a guided light image is generated on the third path (S307). Then, in the interference mode, the interference image is received and the image to be tested is received during the micro mode, and a first image to be analyzed and a second image to be analyzed are obtained (S308). Then, the first image to be analyzed is received to generate a spectral message (S309). Then, the second image to be analyzed is received (S310). Then, in the interference mode, the object to be tested is controlled to move in a vertical direction, and the second image to be analyzed is analyzed, thereby finding and recording the zero optical path difference of each pixel in the second image to be analyzed. The surface information is obtained by the surface, and a surface topography of the object to be tested is calculated according to at least one of the spectral information and the second image to be analyzed (S311). In addition, the reference light aperture is controlled to enter the micro mode, and the spectral information of the zero optical path difference surface is obtained, and the object to be tested is actuated to move in the vertical direction, and A focus information of each pixel of the second image to be analyzed is analyzed to obtain a full focus color image and a full focus black and white image, and a depth response curve is established (S312). Actuating the object to be moved laterally to obtain a large-area surface topography of the object to be tested according to the spectral information, the depth response curve and a lateral dispersion phenomenon (S313). Finally, according to the zero optical path difference The spectral information derives a film thickness dimension of the object under test (S314).

The detailed description of the method of the present invention is similar to that of the above-described apparatus of the present invention, and it is to be understood by referring to the foregoing description, which is omitted here for brevity.

Compared with the conventional method, the advantages and the advantages of the method of the present invention are similar to those of the above-mentioned device of the present invention, and it is to be understood by referring to the foregoing description, which is omitted here for brevity.

The present invention has been described in detail above, and those skilled in the art can use the description of the preferred embodiments and the drawings to practice the invention, and all the modifications and variants of the present invention in spirit are claimed. The description of the scope of the patent application is considered to be within the scope of the invention.

101‧‧‧Light source unit

101a‧‧‧External light source

101b‧‧ ‧ Collimation unit

101c‧‧‧polar unit

102‧‧‧ aperture unit

102a‧‧‧Reference light aperture

102b‧‧‧Incoming light aperture

102c‧‧‧Measurement aperture

103‧‧‧Distribution unit

104‧‧‧Side side unit

104a‧‧‧Light path difference precision displacement mechanism

104b‧‧‧Reference light mirror precision displacement mechanism

105‧‧‧Reference light processing unit

106‧‧‧Spectrum acquisition/image capture unit

106a‧‧‧polar spectroscopic unit

106b‧‧‧spectral acquisition unit

106c‧‧‧Image capture unit

107‧‧‧Signal Processing Unit

108‧‧‧Test object support unit

108a‧‧‧ Piezoelectric Actuator

108b‧‧‧Precision displacement stage

Claims (16)

A multiplexed object parameter optical measurement integration device comprises: a light source unit comprising: an external light source; a collimating unit receiving the external light source for providing a collimated reference light and a collimated incident light; a unit for polarizing the collimated reference light and the collimated incident light to obtain a polarized reference light and a polarized incident light, and the polarized reference light has a traveling path; an aperture unit, including a reference light aperture for controlling the throughput of the polarized reference light, having an open state and a closed state, and cutting the traveling path of the polarized reference light in the closed state; an incident light An aperture for controlling the throughput of the polarized incident light; and a light aperture to be measured; a light splitting unit for guiding the polarized reference light and the polarized incident light to a first path and a a second path is disposed on the second path for receiving and focusing the polarized incident light passing through the beam splitting unit to the object to be tested through the optical aperture to be measured, and the The object under test reflects this Passing the polarized incident light of the spectroscopic unit to generate a light to be measured, the light to be measured is refracted through the spectroscopic unit to a third path in which the second path is reversed; a reference light processing unit is located in the first path And, when the reference optical aperture is in the open state and the device is in an interference mode, the polarized reference light is reflected to generate a collimated reference light on the third path, and the light to be tested is And collimating the reference light to generate an interference image through the beam splitting unit, and generating a guided light image on the third path when the reference light aperture is in the closed state and the device is in a micro mode; Spectral acquisition/image capture unit, comprising: a polarization splitting unit for receiving the interference image in the interference mode and receiving the image to be measured during the micro mode, to obtain a first image to be analyzed and a second image to be analyzed; a spectrum acquisition unit Receiving the first image to be analyzed to generate a spectral message; and an image capturing unit for receiving the second image to be analyzed; and a signal processing unit controlling the object to be tested in the interference mode Moving in a vertical direction and analyzing the second image to be analyzed, thereby finding and recording a zero path difference surface of each pixel in the second image to be analyzed, so that the spectrum acquiring unit obtains the spectral information. And calculating a surface topography of the object to be tested according to at least one of the spectral information and the second image to be analyzed; turning off the reference light aperture to cause the device to enter the microscopic mode, the spectral acquisition unit obtaining the zero The spectral information of the optical path difference surface, and actuating the object to be moved in the vertical direction, and analyzing a focus information of each pixel of the second image to be analyzed to obtain a full a focus color image and a full focus black and white image, and establishing a depth response curve; actuating the object to be moved laterally to obtain a large range of the object to be tested according to the spectral information, the depth response curve and a lateral dispersion phenomenon An area surface topography; and when the object to be tested has a substrate and a coating layer on the substrate, the film thickness of the object to be tested is derived according to the spectral information of the zero optical path difference surface and In another surface topography in which the surface topography is identical to the other surface topography, the signal processing unit may select to calculate and present only one of them. The device of claim 1, wherein the reference light processing unit further comprises: an optical path difference precision displacement mechanism for adjusting the collimated reference light to have a zero optical path difference from the light to be measured. And a reference light mirror precision displacement mechanism to adjust the contrast of the plurality of stripes in the interference image; The polarizing beam splitting unit further includes an adjusting beam splitter angle rotating platform for adjusting image sharpness of the plurality of stripes in the interference image; and the device further comprises a DST supporting unit, comprising: a piezoelectric actuator The signal processing unit controls the object to be moved in the vertical direction during the interference mode; and a precision displacement stage for supporting the piezoelectric actuator. The device of claim 1, wherein the signal processing unit actuates the object to be moved in the vertical direction in the micro mode, and analyzes one of each pixel in the second image to be analyzed. The high frequency message is spliced and the gray scale value of one depth of each pixel is spliced to restore an image out of focus information to form the full focus color image and the full focus black and white image, and the depth response curve is established. The device of claim 3, wherein the signal processing unit uses an image contrast mask filtering method and the analyzed high frequency information to restore the image out of focus information to obtain the full focus black and white image, and separate The image to be analyzed is an image of three colors of RGB, and then the three color images of the RGB are analyzed and superimposed to be restored to the full focus color image. The apparatus of claim 1, wherein the spectrum acquisition unit captures a spectral information on an upper surface of the substrate and one of the coating layers of the object to be tested in the micro mode, and according to the zero light The spectral information of the path surface reverses the distance between the upper surface of the substrate of the object to be tested and the upper surface of the coating layer, and the distance is regarded as the thickness of the coating layer. The device of claim 1, wherein the external light source is one of a white halogen lamp and an infrared lamp, and has a Gaussian distribution intensity. The device of claim 1, wherein the image capturing unit and the spectrum acquiring unit are sensible to visible light and non-visible light. The device of claim 1, wherein the signal processing unit performs a phase shift algorithm on the interference fringes and analyzes a maximum intensity of the interference fringes to establish a surface topography information to obtain the measured The surface topography of the object. A method for integrating optical measurement of multiplex object parameters includes the following steps: (a) providing a collimated reference light and a collimated incident light; (b) polarizing the collimated reference light and the collimated incident light to obtain a polarized reference light and a polarized incident light, and the polarized The reference light has a traveling path; (c) controlling the throughput of the polarized reference light, and having an open state and a closed state, and cutting the traveling path of the polarized reference light in the closed state; (d) controlling the throughput of the polarized incident light; (e) guiding the polarized reference light and the polarized incident light to a first path and a second path; (f) receiving and Focusing the polarized incident light passing through the light splitting unit along the second path to the object to be tested, and the measured object reflects the polarized incident light passing through the light splitting unit to generate a light to be measured, and Directing the light to be measured to a third path in which the second path is reversed; (g) generating the polarized reference light when the reference light is controlled to the open state and the device is in an interference mode a collimating action reference light is on the third path, and the light to be measured and the collimated action reference light are generated And receiving an image to be measured on the third path when the reference light is controlled to the off state and the device is in a micro mode; (h) receiving the interference image in the interference mode And receiving the image to be measured during the micro mode to obtain a first image to be analyzed and a second image to be analyzed; (i) receiving the first image to be analyzed to generate a spectral message; (j) receiving The second image to be analyzed; (k) in the interference mode, controlling the object to be moved to move in a vertical direction, and analyzing the second image to be analyzed, thereby finding and recording in the second image to be analyzed a zero optical path difference surface of each pixel, to obtain the spectral information, and then calculating a surface topography of the object to be tested according to one of the second image to be analyzed of the spectral information; (1) controlling the reference light aperture To close the state to enter the micromode And obtaining the spectral information of the zero optical path difference surface, and actuating the object to be moved in the vertical direction, and analyzing a focus information of each pixel of the second image to be analyzed to obtain a full focus color image and a full focus black and white image, and establish a depth response curve; (m) actuate the object to move laterally to obtain the measured according to the spectral information, the depth response curve and a lateral dispersion phenomenon a large-area surface topography of the object; and (n) when the object to be tested has a substrate and a coating layer on the substrate, the spectral information is derived from the zero-path difference surface Measuring a film thickness dimension of the object and a surface topography, wherein the surface topography is identical to the other surface topography, the signal processing unit may select to calculate and present only one of them. The method of claim 9, wherein: the step (c) further comprises the following steps; (c1) adjusting the collimated reference light to have the zero optical path difference between the light to be measured; Further comprising the steps of: (e1) adjusting the contrast of the plurality of stripes in the interference image; and (e2) adjusting the image sharpness of the plurality of stripes in the interference image; and the method further comprises before step (a) The following steps: (a1) supporting the object to be tested, and controlling the object to be moved to move in the vertical direction in the interference mode. The method of claim 9, wherein the step (1) further comprises the following steps: (l1) analyzing a high frequency message in each pixel of the second image to be analyzed, and splicing one of each pixel The grayscale value in the depth of field restores an image out of focus information to form the full focus color image and the full focus black and white image, and establishes the depth response curve. For example, the method of claim 11 wherein the step (l1) further includes Column step: (l2) using an image contrast mask filtering method and the analyzed high frequency information to restore the image out of focus information to obtain the full focus black and white image, and separating the image to be analyzed into three colors of RGB The image is then analyzed and superimposed on the RGB three color images to be restored to the full focus color image. The method of claim 9, wherein the step (n) further comprises the step of: extracting spectral information on an upper surface of the substrate and one of the coating layers of the object to be tested in the micro mode; And according to the spectral information of the zero optical path difference surface, the distance between the upper surface of the substrate and the upper surface of the coating layer of the object to be tested is reversed, and the distance is regarded as the thickness of the coating layer. The method of claim 9, wherein the collimated reference light and the collimated incident light are one of a white halogen lamp and an infrared lamp, and have a Gaussian distribution intensity. The method of claim 9, wherein the first and second images to be analyzed are visible light and non-visible light images. The method of claim 9, wherein the step (k) further comprises the steps of: applying a phase shift algorithm to the interference fringes and analyzing a maximum intensity of the interference fringes to establish a surface shape; The surface topography of the object to be tested is obtained by the appearance information.