TW201018867A - Method and device for measuring object surface topography and defects using phase-type surface plasma resonance method - Google Patents
Method and device for measuring object surface topography and defects using phase-type surface plasma resonance method Download PDFInfo
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201018867 .. -· ....... 1 * *-*·· ，»__. ·.·.·*.. - · \ ' .... -- ....... '六、發明說明： 【發明所屬之技術領域】 本發明係有關一種以相位型表面電漿共振法量測物件表面形 貌與缺陷之方法及裝置，尤指-種結合表面賴共振技術與共光 程外差干涉技術來做高反射率待測物之表面輪廓與粗糙度量測， 再利用表面電漿在共振角時靈敏的相位變化，俾能量測出待測物 表面與内部缺陷資訊者 【先前技術】 隨著工業發展，使得超光滑表面量測技術越來越重要，而發 展出可以應用在檢測粗韃度及表面形貌的各種不同量測方法。近 年來發表了很多測量超光滑表面的表面特性的量測方法，以下就 是這些量測方法之回顧。 粗糙度的量測可分為接觸式量測與非接觸式量測，以傳統型探 ❹針式輪廓儀來說，常常在測量時破壞了待測物表面，也因為探針 尺寸的關係，如參考文獻⑴[2]，使得解析度受到限制^而非接 觸式量測以光學方法量測表面粗链度，並不會對待測物造咸破 壞，也可提供不錯的解析度以及具有即時性的量測優點所以已 經成為域趨勢。町是-些光學法量啦面峽度的讀回顧。 1986年，D· Pantzer如參考文獻[3] ’利用光學外差干涉術 做到縱向崎度可_ 5QA，其理論值更可達到u，橫向解析度 約到3从m甚至可更高。 又 201018867 . .....^ . ---.s · · · .......... ...... ·-· -· -.--..1. · - 1987 年，F. Laeri 及 Timothy C. Strand 如參考文獻[4]， 以 regular interference contrast optics 的原理，由商用顯微 鏡(commercial microscope)結合商用干涉對比物鏡(commerciai interference contrast objectives)，其光源由雷射、調變器、 掃描平面鏡所組成，可在測量出反射光的相位及振幅。此實驗結 果具有足夠的靈敏度及穩定度以定量表示待測物之輪廓和傾斜程 度’而二維表面影像的振幅、斜率、輪廓是一般在〇. 5-2 A的步 φ 階解析度所取得的。 1990年’ K. Creath如參考文獻[5]，更提出了把一個面當作 參考表面取平均值來產生參考面的輪廓，使得參考面的誤差變差 降低，並比較參考面和測試面高度之間的差異，該量測技術可量 到具有0.7A均方根值粗糙度的超光滑平面鏡表面，預期的儀器雜 訊均方根粗糙度的量測誤差為〇. 02A。 1998年如參考文獻[6] ’ c· Chou等人結合線性極化的He- ❹Ne雷射與雙折射透鏡’產生了共光程極化的光學外差輪廓儀（包含 P和S波）。利用線性極化穩頻He_Ne雷射結合聲光調變器（纏） 被用來取代在先前所提的極化共光程光學外差輪廓儀之Zeeman雷 射。因此可改善Zee_雷射細極化和非正交性的缺點，並降低 所引起的相位誤差。使得垂直解析度可達到2A，且在27薩的掃描 範圍内’重複性更可達到5 A。 1999年’ ShizhuoYin等人如參考文獻[了]，以物鏡的微米透 鏡結合微絲是鱗描制物的表面，即可得肺面輪廓。使用 201018867 微米管的唯-特色是有峨⑽校正需求及較高的可信度。使用 不同微米透鏡之焦距長，可以得到從1〇到4〇〇][41]1的深度量測範圍 (次微米到奈米範圍之深度解析度）。同時也提升利用微米管結合 共焦掃私1測微米3D結構之表面輪廓的新方法。使用了具有 200〜2000 μηι之焦距’最後可以分別得到〜1560 nm的深度解析度。 2000年，H.C. Kandpal等人，如參考文獻[8]，在兩束光干涉儀 中的兩束光之間相干性現象能修正發光場的光譜特性，這用來估 ❹計表面粗糙度的平均值。在這個強度干涉儀的例子當中，在干涉 儀的兩臂當中的光程差應該要小於光的同調長度，這光應是準單 色光(quasi-monochromatic)。光譜干涉儀的優點為光不須為準單 色光(quasi-monochromatic) ’且光程差要遠大於光的同調長度。 在干涉儀兩臂之_更料絲差在表面粗糙度制上會更加精 準。這一項研究顯示出光譜干涉儀：光譜可測量在光波長子刻度 之平均表面粗糙度。 ❺ 2001年，Eric J· Klein等人，如參考文獻[9]，描述在微電 子製造過程當中，微粒子光圖案特徵的表面輪廓之共光程外差雷 射干涉儀設計方法。干涉儀的參考與量測臂之共同路徑目的是有 效地移動由目標表面的移動所造成量測之任何光程長度差異。在 鐵銑過程中的重覆表面輪廓特徵允許在光阻層及在基片下一層曝 光部分（需線上監控）之間蝕刻率的差異會被顯示出來。最後測量 兩個光圖案鎳_鐵溝槽及非遮罩銅溝槽之表面輪廓，且利用探針式 掃描輪廓儀和原子力顯微鏡來比較結果。可證實當把待測物產生 201018867 ·「_· ---―" - — - .：--.- -.. ^,..... ·--. -, 的噪擾減到最低，這個設備能重覆地提供準確的inm等級表面輪 廓。同年，Hongzhi Zhao等人，如參考文獻[10]，以一個單模穩 頻雷射二極體（780 nm)當作光源，讓整個系統更加簡化（全部體積 為250L x200W xlOOH臟）。使用信號處理系統包括三個部分：自 動電壓控制、具有更寬範圍及自動對焦控制之相位量測。全部會 使得輪廓干涉儀的重複性及穩定性有更大地提升。這系統具有 0· 39nm縱向解析度和0· 73μιη的橫向解析度。在大約一小時期間， ^ 穩定度在1.95ηιη(3σ)範圍之内。 之後，Oleg V. Angelsky ’如參考文獻[11]，利用光學技術 來測量粗糙的表面具有的非接觸性、非破壞性、效能高的優點。 光學相干術來測定大型非同步（粗糙)表面之高度分佈函數，也應 用在起伏表面的重建。然而，非正向性高度分佈的統計上對於量 測結果產生影響，使得最大粗链度不超過3微米。 結合光學量測的優點以及簡化光學架構為考量，本文提出以 ❹表面電漿共振結合共光程外差干涉術來做高反射率待測物之表面 輪廓與粗糙度量測。利用表面電漿在共振角時靈敏的相位變化， 當光線入射至待測物件，若表面不平整，產生偏向角度，使入射 至表面電漿感測器造成微小角度的偏移，產生相位變化，而相位 變化又成正tb於制物高度差，且彻共光料差干涉術擷取相 位k號。此法具有高靈敏度、抗空氣擾動、快速即時、高精密、 簡易操作···料優點。因此可以雜速掃gg又在不細不破壞表 面的情況下，得到精密的量測結果。 201018867 .. ' · · -· . · . · . - · . .... . ... . . .. _ 有鑑於此，本發明結合光學量測的優點以及簡化光學架構為 考量，並設計能簡單操作與校正以及快速量測的系統。於此提出 一種高精度形貌輪廓的量測技術，於架構上結合表面電漿共振相 位檢測技術與角度偏向法，以共光程外差干涉術方式擷取出此相 位，進而經電腦分析其表面高度情形。 參考文獻：201018867 .. -· ....... 1 * *-*·· ,»__. ·.·.·*.. - · \ ' .... -- ....... 'Six [Technical Field] The present invention relates to a method and apparatus for measuring the surface topography and defects of an object by a phase-type surface plasma resonance method, in particular, a combined surface ray resonance technique and a common optical path Heterodyne interference technique is used to measure the surface profile and roughness of the high reflectivity test object, and then use the sensitive phase change of the surface plasma at the resonance angle, and the energy of the surface of the test object and the internal defect information are measured. Technology] With the development of industry, ultra-smooth surface measurement technology has become more and more important, and various measurement methods that can be applied to detect roughness and surface topography have been developed. In recent years, many methods for measuring the surface characteristics of ultra-smooth surfaces have been published. The following is a review of these measurement methods. The measurement of roughness can be divided into contact measurement and non-contact measurement. In the traditional probe profiler, the surface of the object to be tested is often destroyed during measurement, and also because of the size of the probe. For example, reference (1) [2] makes the resolution limited. Instead of contact measurement, the surface roughness is measured optically, and it does not cause salt damage to the test object. It also provides good resolution and instant The advantages of sexual measurement have therefore become a domain trend. The town is a review of some optical metrics. In 1986, D. Pantzer used the optical heterodyne interferometry as the reference [3] ′ to achieve a vertical roughness of _ 5QA, the theoretical value can reach u, and the lateral resolution is about 3 or even higher. Also 201018867 . .....^ . ---.s · · · .......... ...... ·-· -· -.--..1. · - 1987 In years, F. Laeri and Timothy C. Strand, as in reference [4], based on the principle of regular interference contrast optics, combined with commercial microscopes (commerciai interference contrast objectives), the source of which is laser, The modulator and the scanning plane mirror are used to measure the phase and amplitude of the reflected light. The results of this experiment have sufficient sensitivity and stability to quantitatively represent the contour and tilt of the object to be tested' while the amplitude, slope and contour of the two-dimensional surface image are generally obtained in the step φ step resolution of 5-2 A. of. In 1990, K. Creath, as reference [5], proposed to average a surface as a reference surface to produce a reference plane profile, so that the error of the reference plane is reduced, and the reference plane and test surface height are compared. The difference between the measurement techniques can be measured on the surface of an ultra-smooth mirror with a roughness of 0.7A rms. The expected error of the root mean square roughness of the instrument noise is 〇. 02A. In 1998, an optical heterodyne profiler (including P and S waves) with a common optical path polarization was produced as described in reference [6] ’ c·Chou et al. in combination with a linearly polarized He- ❹Ne laser and birefringent lens. A linear polarization stabilized He_Ne laser combined with an acousto-optic modulator (wrapped) is used to replace the Zeeman laser of the previously proposed polarization common path optical heterodyne profiler. Therefore, the disadvantages of Zee_Laser fine polarization and non-orthogonality can be improved, and the phase error caused can be reduced. This allows a vertical resolution of up to 2A and a reproducibility of up to 5 A over a scanning range of 27 s. In 1999, ShizhuoYin et al., as referenced in the literature, used a micromirror combined with a microscopy of an objective lens to be the surface of a squama, to obtain a contour of the lung surface. The only feature of using the 201018867 micron tube is the 峨(10) calibration requirement and high confidence. Using a long focal length of different microlenses, a depth measurement range (depth resolution from submicron to nanometer range) from 1 〇 to 4 〇〇][41]1 can be obtained. At the same time, it also enhances the new method of using the microtube to combine the confocal smear to measure the surface profile of the micron 3D structure. A focal length of 200 to 2000 μη is used, and finally a depth resolution of ~1560 nm can be obtained. In 2000, HC Kandpal et al., in reference [8], the coherence between the two beams in two interferometers corrected the spectral properties of the luminescence field, which was used to estimate the average surface roughness of the enthalpy. value. In the example of this intensity interferometer, the optical path difference between the arms of the interferometer should be less than the coherence length of the light, which should be quasi-monochromatic. The advantage of a spectral interferometer is that the light does not have to be quasi-monochromatic and the optical path difference is much greater than the coherence length of the light. The difference in the wire between the arms of the interferometer is more precise in terms of surface roughness. This study shows a spectral interferometer: the spectrum measures the average surface roughness at the sub-scale of the wavelength of light. ❺ In 2001, Eric J. Klein et al., as reference [9], described the design method of a common optical path heterodyne laser interferometer for the surface profile of microscopic light pattern features during microelectronic fabrication. The common path of the interferometer's reference and measuring arm is to effectively move any optical path length difference measured by the movement of the target surface. The repeated surface profile feature during iron milling allows for differences in etch rate between the photoresist layer and the underlying exposed portion of the substrate (on-line monitoring). Finally, the surface profiles of the two light-patterned nickel-iron trenches and the non-masked copper trenches were measured, and the results were compared using a probe scanning profiler and an atomic force microscope. It can be confirmed that when the object to be tested is produced 201018867 · "_· --- "" - - - .:--.- -.. ^,..... ·--. -, the noise is minimized This device can repeatedly provide accurate inm-level surface contours. In the same year, Hongzhi Zhao et al., such as reference [10], used a single-mode frequency-stabilized laser diode (780 nm) as the light source to make the whole The system is more simplified (all volumes are 250L x 200W xlOOH dirty). The use of the signal processing system consists of three parts: automatic voltage control, phase measurement with wider range and auto focus control, all making the contour interferometer repeatable and stable. Sex has a greater improvement. This system has a longitudinal resolution of 0·39 nm and a lateral resolution of 0.73 μηη. During about one hour, the ^ stability is within the range of 1.95 ηιη (3σ). After that, Oleg V. Angelsky ' As in reference [11], optical techniques are used to measure the non-contact, non-destructive, and high-efficiency advantages of rough surfaces. Optical coherence to determine the height distribution function of large non-synchronous (rough) surfaces is also used in Reconstruction of the undulating surface. The non-positive height distribution statistically affects the measurement results, so that the maximum coarse chain degree does not exceed 3 microns. Considering the advantages of optical measurement and simplifying the optical architecture, this paper proposes a combination of ❹ surface plasma resonance. Optical path heterodyne interferometry is used to make the surface profile and roughness measurement of the high reflectivity test object. The sensitive phase change of the surface plasma at the resonance angle is used when the light is incident on the object to be tested, if the surface is uneven, The deflection angle causes a slight angle shift to the surface of the plasma sensor, causing a phase change, and the phase change becomes a positive tb in the height difference of the workpiece, and the cross-community difference interference captures the phase k. The method has the advantages of high sensitivity, anti-air disturbance, fast and immediate, high precision, simple operation, etc. Therefore, it is possible to scan gg at a low speed and obtain precise measurement results without damaging the surface. 201018867 .. '······································································ A system for calibration and rapid measurement. This paper proposes a measurement technique for high-precision topography contours, which is combined with surface plasma resonance phase detection technology and angle deflection method to extract the external path heterodyne interference method. This phase is then analyzed by computer for its surface height. References:
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[2] K. H. Chen, C.C. Hsu, D.C. Su, ^Measurement of wavelength shift by using surface plasmon resonance heterodyne interferometryM, Optics Communications, 209y 167-172, (2002).[2] K. H. Chen, C.C. Hsu, D.C. Su, ^Measurement of wavelength shift by using surface plasmon resonance heterodyne interferometryM, Optics Communications, 209y 167-172, (2002).
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[4] L. Ward, «The optical constants of bulk materials and films^ Institute of Physics Publishing, 2nd, pp. 283-285, (1991).[4] L. Ward, «The optical constants of bulk materials and films^ Institute of Physics Publishing, 2nd, pp. 283-285, (1991).
[5] D. C. Su, Μ. H. Chiu, and C. D. Chen, «Two-frequency lase^, Precision Engineering, 18,161-163, (1996). 【發明内容】 本發明之目的在提供一種以相位型表面電漿共振法量測物件 表面形貌與缺陷之方法及裝置，主要係利用表面電漿原理結合共 光程外差干涉術來做高反射率待測物之表面輪廓與粗糙度量測， 201018867 ~ ........-........ .................·· ·- .................................. ....... 且係利用表面電漿在共振角時靈敏的相位變化，因而可應用於各 種移動平台各軸向的偏轉之測量及光學或其他系統之校正、安 裝、對準’由於採非破雜、非接觸性設置，故不需任何表面處 理’因而具有即時性制、A量測範圍、可觀察物體粗链度、表 面輪廓、折射率變化、系統架構與原理簡單、成本低廉、快速量 . 測以及不須專業人員操作等特點。 為達成上述功效，本發_狀技術手段係以光學掃猫手段 ❹發射-掃描光束及-反射光束，反射光束入射第一光侧器後產 生一參考健’独掃描光束人射—良品，#神光束由良品反 射至表面«共㈣度感測科，曝練轉平台使掃猫光束之 入射角達到共振角，再使掃晦光束人射第二光侧器而產生一測 試信號，再以相位比較手段比較該參考信號與職錢而產生一 基準相位，再使掃猫光束入射一待測物，當掃猫光束由制物反 射至表面電漿共振角度感·時，财藉由制物表面或内部缺 ❹陷使該掃猫光束偏離共振角而產生相位變化，再使掃猫光束入射 至第-光债測器而產生另-測試信號，經相位比較手段比較後產 生-測試相位，再以運算手段將基準相位與測試相位進行比較， 進而得到待測物之缺陷資訊者。 【實施方式】 壹•本發明基本技％ 1.1方法基本技術特徵 請參看第六至八圖所示，本發明主要係利用表面電浆原理結 201018867 ............,,, 合共光程外差干涉術來做高反射率待測物(la)之表面輪__ 度量測’且係利用表面電漿在共振角時靈敏的相位變&，因而可 應用於各種移動平台各軸向的偏轉之測量，為達上述功效，本發 明綠係提供-絲掃斜段⑽、—表面電漿舰角度感測器 (20)、-旋轉平台（3〇)、一第一光偵測器⑽）、一第二光铺測器 ；(41)、一相位比較手段⑽及一運算手段⑽），其中，旋轉平台 (30)可供該表面電漿共振角度感測器（2〇)設置其上。 ❹ 請參看第六至八圖所示，本發明係以光學掃晦手段⑽發射 一掃描光束，及-反射縣，再以反射光束人射該第—光偵測器 (40)以產生-參考信號；同時哺描光束人射—良品⑴，當掃晦 光束由良品⑴反射至表面電漿共振角度感測器⑽)時，則轉動旋 轉平台（30)使掃猫光束之入射角達到共振角，以達表面電浆共振 現象，再使掃瞄光束入射第二光偵測器（41)以產生一第一測試信 號。 ° ❹ 4參看第六至八圖所示，本發明再以相位比較手段(5〇)比較 該參考信號與第-測試信號而產生一基準相位。其中，上述相位 比較手段⑽之具體實施例可以是鎖相放大器，或是相位計。 請參看第六至八圖所示，再以掃瞄光束入射一待測物〇a)， 當該掃猫絲由制物（la)反射至表面t漿共振角度制器（2〇) 時，則可藉由待測物（la)表面高低變化或缺陷使入射至表面電漿 共振角度感測器（20)之掃猫光束偏離共振角而產生相位變化，再 使掃瞄光束入射至第二光偵測器（41)而產生一第二測試信號，經 201018867 相位比較手段⑽比較後產生—測試相位n面再以運算 手段⑽將基準她朗試她進行峨，細剌崎測物㈤ 之表面尚度差、缺陷、形貌輪廊或粗糙度等資訊。 1.2裝置基本技術特徵 請參看第六至八圖所示，本發明主要係糊表面電聚原理結 ••合共光程外差干涉術來做高反射率待測物⑻之表面輪廊與粗链 度量測，且係利用表面電漿在共振角時靈敏的相位變化，因而可 ❹應用於各種移動平台各軸向的偏轉之測4，為達上述功效，本發 明裝置包括-光學掃猫手段(1〇)、一第一光偵測器(4〇)、一旋轉 平台（30)、-表面電襞共振角度感測器⑽、一第二光侧器 (41)、-相位比較手段⑽及—運算手段⑽，歸本發明之具 體結構形態詳細陳述如后。 請參看第六至八圖所示，本發明係以光學掃瞄手段（1〇)來發 射一掃描光束及一反射光束，第一光偵測器（4〇)可供反射光束入 ❹射而產生一參考信號，並於旋轉平台（30)上設置表面電漿共振角 度感測器(2G) ’以掃描光束人射—良品⑴，當該掃喊束由良品 (1)反射至表面電漿共振角度感測器（2〇)時，可藉由轉動該旋轉平 台（30)使掃瞄光束之入射角達到共振角，以達表面電漿共振現 象。同時由表面電漿共振角度感測器（2〇)反射之掃瞄光束入射至 第二光偵測器（41)的緣故，故第二光偵測器（41)便產生一第一測 試信號，再以相位比較手段(50)來比較參考信號與第一測試信 號’進而產生一基準相位。 201018867 ’ ' ".......-......... 請參看第六至八圖所示，再以掃瞒光束入射一制物⑽， 當掃猫光束由待測物（la)反射至表面電聚共振角度感測器⑽ 時，藉由待測物（la)表面高低變化或缺陷使入射至表面電漿共振 角度感測器（20)之掃猫光束偏離共振角而產生相位變化，經由第 二光偵測器(41)接收而產生一第二測試信號，經相位比較手段(5〇) 比較後產生-測試相位，再以運算手段⑽)將基準相位與測試相 位進行比較，進而得到待測物（la)之表面高度差、缺陷、形貌輪 m 廓或粗糙度等資訊。 貳.本發明具體技術特徵 2.1光學掃猫手段第一種實施例 請參看第六圖所示，本發明光學掃瞄手段(1〇)主要係發射掃 瞄光束及反射光束，用以掃瞄待測物（la)之形貌，故於本實施例 中係為一種垂直入射反射式掃描表面形貌儀之具體架構，其包括 -外差雷射光源(11)、-分絲⑽、—偏極板⑽及一檢偏板 ❿（⑷’並以外差雷射光源⑴）發出兩種偏極(P極、s極）的外差雷 射光源（11)，再以分光鏡(12)將外差雷射光源(U)分成反射光束 及入射待測物（la)的掃描光束，再將由待測物（la)反射之該掃描 光束入射至該表面電漿共振角度感測器（2〇)中。因偏極板(13)介 置於第一光偵測器（40)與分光鏡(12)之間，偏極板(13)可供反射 光束入射以產生干涉現象，使第一光偵測器（4〇)產生參考信號。 另一方面，檢偏板(14)介置於第二光偵測器（41)與表面電漿共振 角度感測器（20)之間，用以調節光強度分量，使第二光俄測器（μ) 201018867 * ................... ........... * .. ...______ . %._ _ _.一.，.…-.... . 產生測試信號。 如第六圊所示，於本實施例中，具有高反射率之待測物 (la)(Sample)被放置於一單軸移動平台（7〇)上，假設光行進方向 定為z軸’掃描方向則以x軸方向，利用以固定程行χ方向掃描， 所測得每-·點的相位變化量’再代入公式得到相對應的从，連續 紀錄ΔΑ，將可得到待測物(ia)表面高度差、缺陷、形貌與粗糙度。 2. 2光學掃瞄手段第二種實施例 ❿ 請參看第七圖所示，本發明光學掃瞄手段(1〇)主要係發射掃 瞒光束及反射光束，用以掃晦待測物（la)之形貌，故於本實施例 中係為一種垂直入射加物鏡(16)聚焦反射式掃描表面形貌儀之具 體架構，其包括一外差雷射光源(11)、一分光鏡(12)、一偏極板 (13)及一檢偏板(14)、一面鏡(15)及一物鏡(16)，其中，外差雷 射光源（11)用以發出兩種偏極的外差雷射光源（1丨），且分光鏡(12) 用以將外差雷射光源（11)分成入射待測物（la)或良品（1)的掃描 光束以及反射光束。 請參看第七圖所示，本發明之偏極板(13)係介置於第一光價 測器（40)與分光鏡（12)之間，偏極板(13)可供反射光束入射以產 生干涉現象，使第一光偵測器(40)產生參考信號。另，物鏡（16) 係介置於分光鏡(12)與待測物(la)之間，以將掃描光束聚焦至待 測物（la)上。且面鏡(15)係介置於物鏡(16)與表面電漿共振角度 感測器（20)之間，以將由物鏡(16)反射之掃描光束入射至表面電 漿共振角度感測器（20)中》 12 201018867 ................. ..........- - -—...... ...-. - ,,. - 而檢偏板(14)係介置於第二光偵測器（41)與表面電漿共振角度感 測器（20)之間，用以調節掃描光束之光強度分量，使第二光^測 器（41)產生測試信號。 如第七圖所示，於本實施例中，掃描光束經由物鏡 (16)(0bjectLens)聚焦到待測物（ia)(sample)，之後光再經由物 鏡(16)(0bject Lens)反射到面鏡(i5)(Mirror)。此法之光點會比 第六圖的先Ιέ更小，絲更好。具有高反射率之侧物㈤被放 ❹置於-單轴移動平台（70)上’假設光行進方向定為z轴，掃描方 向則以X轴方向，利用以固定程行x方向掃描，所測得每一點的 相位變化量，再代入公式得到相對應的M，連續紀錄M，將可得 到待測物(la)表面高度差、缺陷、形貌與粗链度。 2. 3光學掃瞄手段第三種實施例 請參看第八圖所示，本發明光學掃瞄手段(10)主要係發射掃 猫光束及反射光束，用以掃瞒待測物（la)之形貌，故於本實施例 φ 中係為一種斜向入射反射式掃描表面形貌儀之具體架構，其包括 一外差雷射光源(11)、一分光鏡(12)、一偏極板(13)、一移動平 台及一檢偏板(14)，其中，外差雷射光源（丨丨）用以發出兩種偏極 的外差雷射光源(11)。再以分光鏡(12)將外差雷射光源(π)分成 入射待測物(la)的掃描光束，及反射光束。 請參看第八圖所示，本發明偏極板(13)係介置於第一光偵測 器（40)與分光鏡(12)之間，且偏極板(13)可供反射光束入射以產 生干涉現象’使第一光偵測器（40)產生參考信號，並於單軸移動 13 201018867 平台（70)置放待測物（la)於其上，並使待測物（ia)傾斜一角度， 以將由分光鏡(12)入射之掃描光束反射至表面電漿共振角度感測 器（20)中。另，檢偏板(14)係介置於第二光偵測器（41)與表面電 漿共振角度感測器（20)之間，以調節由表面電浆共振角度感測器 (20)反射之光強度分量，使第二光偵測器（4丨）產生測試信號。 如第八圖所示，於本實施例中，具有高反射率之待測物（la) 被放置於一單軸移動平台（7〇)上，假設光以一個角度方向入射此 ❺待測物Oa)，掃描方向則以X軸方向，利用以固定程行χ方向掃 描’所測得每一點的相位變化量，再代入公式得到相對應的灿， 連續紀錄Μ，將可得到待測物⑽表面高度差、缺陷、形貌與粗 糙度。 2.4單轴移動平台的實施[5] DC Su, Μ. H. Chiu, and CD Chen, «Two-frequency lase^, Precision Engineering, 18, 161-163, (1996). SUMMARY OF THE INVENTION The object of the present invention is to provide a phase type surface electric The method and device for measuring the surface topography and defects of the workpiece by the slurry resonance method, mainly by using the surface plasma principle combined with the common path heterodyne interferometry to make the surface profile and roughness measurement of the high reflectivity test object, 201018867~ ........-........ ......................................... ............................ and is sensitive to the phase change of the surface plasma at the resonance angle, so it can be applied to various movements The measurement of the deflection of the axial direction of the platform and the correction, installation and alignment of the optical or other system 'because of the non-breaking and non-contact setting, no surface treatment is required', so the system has the instantaneous system, the A measurement range, Observable object coarse chain degree, surface profile, refractive index change, system architecture and principle are simple, low cost, fast quantity, measurement and no professional operation. In order to achieve the above-mentioned effects, the present invention uses an optical scanning method to emit a scanning-beam and a reflected beam, and the reflected beam is incident on the first optical side device to generate a reference health detector beam. The divine beam is reflected from the good product to the surface «Total (four) degree sensing section, and the exposure to the platform makes the incident angle of the sweeping cat beam reach the resonance angle, and then the broom beam is shot by the second optical side device to generate a test signal, and then The phase comparison means compares the reference signal with the job money to generate a reference phase, and then causes the sweeping cat beam to be incident on a test object. When the sweeping cat beam is reflected from the object to the surface plasma resonance angle sense, the waste material is manufactured. The surface or internal defect trap causes the sweeping cat beam to deviate from the resonance angle to produce a phase change, and then the sweeping cat beam is incident on the first-light debt detector to generate another test signal, which is compared by the phase comparison means to generate a test phase. Then, the reference phase is compared with the test phase by an arithmetic means, and then the defect information of the object to be tested is obtained. [Embodiment] 基本• Basic Skills of the Invention 1.1 Basic Technical Features of the Method Please refer to Figures 6 to 8. The present invention mainly utilizes the surface plasma principle to form 201018867 ............ , a total optical path heterodyne interferometry to make the surface of the high reflectivity test object (la) __ Measured 'and uses the phase change of the surface plasma at the resonance angle sensitive & The measurement of the deflection of each axial direction of various mobile platforms, in order to achieve the above-mentioned effects, the green system of the present invention provides a wire sweeping section (10), a surface plasma ship angle sensor (20), a rotating platform (3 turns), and a a first photodetector (10)), a second photodetector, (41), a phase comparison means (10) and an arithmetic means (10), wherein the rotating platform (30) is adapted to the surface plasma resonance angle sensing (2〇) is set on it. ❹ Referring to Figures 6 to 8, the present invention emits a scanning beam by means of an optical broom (10), and a reflection county, and then the reflected light beam is incident on the first photodetector (40) to generate a reference. Signal; at the same time, the beam is shot--good (1). When the broom beam is reflected from the good (1) to the surface plasma resonance angle sensor (10), the rotating platform (30) is rotated to bring the incident angle of the sweeping cat beam to the resonance angle. In order to achieve the surface plasma resonance phenomenon, the scanning beam is incident on the second photodetector (41) to generate a first test signal. ° ❹ 4 Referring to Figures 6 to 8, the present invention compares the reference signal with the first test signal by a phase comparison means (5 〇) to generate a reference phase. The specific embodiment of the phase comparison means (10) may be a lock-in amplifier or a phase meter. Please refer to the sixth to eighth figures, and then the scanning beam is incident on a sample to be tested 〇a). When the brush wire is reflected from the product (la) to the surface t-plasm resonance angle controller (2〇), Then, the surface of the scanning plasma beam incident on the surface plasma resonance angle sensor (20) is deviated from the resonance angle by the height change or defect of the object to be tested (la), and then the scanning beam is incident on the second. The photodetector (41) generates a second test signal, which is generated after comparison by the phase comparison means (10) of 201018867. The test phase n-plane is further tested by the operation means (10), and the sample is tested by her. Information such as poor surface finish, defects, topography or roughness. 1.2 Basic technical features of the device, please refer to the sixth to eighth figures. The present invention mainly relates to the surface electrocoagulation principle of the paste surface. • The total optical path heterodyne interferometry is used to make the surface reflector and the thick chain of the high reflectivity test object (8). Measured, and utilizes the phase change sensitive of the surface plasma at the resonance angle, and thus can be applied to the measurement of the deflection of each axial direction of various mobile platforms. To achieve the above-mentioned effects, the device of the present invention includes an optical scanning method. (1〇), a first photodetector (4〇), a rotating platform (30), a surface electro-thermal resonance angle sensor (10), a second optical side device (41), a phase comparison means (10) And the operation means (10), the specific structural form of the present invention is described in detail later. Referring to Figures 6 to 8, the present invention emits a scanning beam and a reflected beam by means of an optical scanning device (1〇), and the first photodetector (4〇) can be used to reflect the beam into the beam. A reference signal is generated, and a surface plasma resonance angle sensor (2G) is disposed on the rotating platform (30) to scan the beam of the person--good (1), when the sweeping beam is reflected from the good (1) to the surface plasma When the resonance angle sensor (2〇) is rotated, the rotation angle of the scanning beam can be made to reach the resonance angle by rotating the rotating platform (30) to achieve the surface plasma resonance phenomenon. At the same time, the scanning beam reflected by the surface plasma resonance angle sensor (2〇) is incident on the second photodetector (41), so the second photodetector (41) generates a first test signal. Then, the phase comparison means (50) is used to compare the reference signal with the first test signal' to generate a reference phase. 201018867 ' ' ".......-......... Please refer to Figure 6 to Figure 8, and then use the broom beam to enter an object (10). When the object (la) is reflected to the surface electro-convex resonance angle sensor (10), the sweeping cat beam incident on the surface plasma resonance angle sensor (20) deviates from the resonance by the surface height change or defect of the object to be tested (la) Phase change occurs, and a second test signal is generated by receiving through the second photodetector (41), and the phase is compared by the phase comparison means (5〇) to generate a test phase, and then the reference phase is obtained by the operation means (10) The test phases are compared to obtain information such as surface height difference, defect, profile wheel profile or roughness of the object to be tested (la).具体. The specific technical features of the present invention 2.1 optical scanning cat means the first embodiment, please refer to the sixth figure, the optical scanning means (1 〇) of the present invention mainly emits a scanning beam and a reflected beam for scanning The topography of the object (la) is a specific structure of a vertical incidence reflective scanning surface topographer, which includes a heterodyne laser source (11), a split wire (10), and a partial bias. The plate (10) and an analyzer plate ❿ ((4)' and the differential laser source (1) emit two kinds of biased laser sources (11) with polarized poles (P pole and s pole), and then the beam splitter (12) The heterodyne laser source (U) is divided into a reflected beam and a scanning beam incident on the object (la), and the scanning beam reflected by the object to be tested (la) is incident on the surface plasma resonance angle sensor (2〇) )in. Since the polarizing plate (13) is interposed between the first photodetector (40) and the beam splitter (12), the polarizing plate (13) is adapted to be incident on the reflected beam to generate interference, so that the first light detecting is performed. The device (4〇) generates a reference signal. On the other hand, the analyzer (14) is interposed between the second photodetector (41) and the surface plasma resonance angle sensor (20) for adjusting the light intensity component to make the second optical detector (μ) 201018867 * ................................. . . .______ . %._ _ _. A.,....-.. . Generate test signals. As shown in the sixth embodiment, in the present embodiment, the sample (la) having a high reflectance is placed on a single-axis moving platform (7〇), assuming that the light traveling direction is set to the z-axis' The scanning direction is in the x-axis direction, and the phase change amount per point is measured by scanning in a fixed direction, and the corresponding phase is obtained by substituting the formula into a continuous recording ΔΑ, and the object to be tested is obtained. ) Surface height difference, defects, topography and roughness. 2. 2 optical scanning means second embodiment ❿ See the seventh figure, the optical scanning means (1 〇) of the present invention mainly emits a broom beam and a reflected beam for brooming the object to be tested (la The topography of the present invention is a vertical incident mirror (16) focusing reflective scanning surface topographer, which comprises a heterodyne laser source (11) and a beam splitter (12). a polarizing plate (13) and an analyzer (14), a mirror (15) and an objective lens (16), wherein the heterodyne laser source (11) is used to emit two kinds of polarities. A laser source (1 丨), and a beam splitter (12) is used to divide the heterodyne laser source (11) into a scanning beam and a reflected beam incident on the object (la) or the good (1). Referring to the seventh figure, the polarizing plate (13) of the present invention is interposed between the first photometric detector (40) and the beam splitter (12), and the polarizing plate (13) is adapted to be incident on the reflected beam. In order to generate an interference phenomenon, the first photodetector (40) generates a reference signal. In addition, the objective lens (16) is interposed between the beam splitter (12) and the object to be tested (la) to focus the scanning beam onto the object to be tested (1a). And the mirror (15) is interposed between the objective lens (16) and the surface plasma resonance angle sensor (20) to inject the scanning beam reflected by the objective lens (16) into the surface plasma resonance angle sensor ( 20) 中》 12 201018867 .............................----.........-. - , The detection plate (14) is interposed between the second photodetector (41) and the surface plasma resonance angle sensor (20) for adjusting the light intensity component of the scanning beam, so that The two photodetectors (41) generate test signals. As shown in the seventh figure, in the present embodiment, the scanning beam is focused to the object to be tested (ia) via the objective lens (16) (0bjectLens), and then the light is reflected to the surface via the objective lens (16) (0bject Lens). Mirror (i5) (Mirror). The light point of this method will be smaller than the first picture of the sixth picture, and the silk is better. The side with high reflectivity (5) is placed on the - single-axis moving platform (70) 'assuming that the direction of light travel is defined as the z-axis, and the direction of scanning is in the direction of the X-axis, using a fixed-direction x-direction scan. The phase change amount of each point is measured, and then substituted into the formula to obtain the corresponding M, and the continuous record M, the surface height difference, defect, topography and coarse chain degree of the object to be tested (la) can be obtained. 2. 3 optical scanning means third embodiment, please refer to the eighth figure, the optical scanning means (10) of the present invention mainly emits a scanning cat beam and a reflected beam for brooming the object to be tested (la) The topography of the present embodiment is a specific structure of an oblique incident reflective scanning surface topographer, which comprises a heterodyne laser source (11), a beam splitter (12), and a polarizing plate. (13), a mobile platform and an analyzer (14), wherein the heterodyne laser source (丨丨) is used to emit two kinds of polarized heterodyne laser sources (11). Then, the heterodyne laser light source (π) is divided into a scanning beam incident on the object to be tested (1a) and a reflected beam by a beam splitter (12). Referring to FIG. 8 , the polarizing plate (13) of the present invention is interposed between the first photodetector (40) and the beam splitter (12), and the polarizing plate (13) is adapted to be incident on the reflected beam. To generate an interference phenomenon, the first photodetector (40) generates a reference signal, and the uniaxial movement 13 201018867 platform (70) places the object to be tested (la) thereon, and causes the object to be tested (ia) An angle is tilted to reflect the scanning beam incident by the beam splitter (12) into the surface plasma resonance angle sensor (20). In addition, the analyzer (14) is interposed between the second photodetector (41) and the surface plasma resonance angle sensor (20) to adjust the surface acoustic resonance sensor (20). The intensity component of the reflected light causes the second photodetector (4丨) to generate a test signal. As shown in the eighth figure, in the present embodiment, the object to be tested (1a) having a high reflectance is placed on a single-axis moving platform (7〇), assuming that the light is incident on the object to be tested in an angular direction. Oa), the scanning direction is in the X-axis direction, and the phase change amount of each point measured by scanning in the direction of the fixed-pass direction is substituted into the formula to obtain the corresponding can, and the continuous recording is performed, and the object to be tested is obtained (10). Surface height difference, defects, topography and roughness. 2.4 Implementation of single-axis mobile platform
請參看第六至八圖所示，為選擇良品⑴或待測物⑽所欲量 測之部位，本發明更包括一供待測物⑽或良品⑴置放的單轴移 動平台⑽’用以控繼待測物⑽或該良品⑴所欲量測之部 位，再以該運齡段⑽來控繼單軸移師台⑽往χ轴方向 移動’以控制獅光束掃物_a)或良品⑴的行程進 以控制娜待測物(la)所需掃⑽資料，以♦出量測結果。 2.5運算手段的實施 位及測試相位資料記錄的記憶體（圖中未示) 請參看第六至人圖所示’本發明於—種具體實施例中， 算手段⑽係為-制咖），其包含—分析健，及—供基準相 ’其中，分析軟體用 201018867 以將基準相位與測試相位進行比較及分析後，即可得到該測物之 形貌、輪廓或缺陷資訊並記錄於記憶體中。 2. 5表面電漿共振角度感測器 請參看第三圖所示，本發明表面電槳共振角度感測器⑽係 為一包含鍍有四層膜厚的表面電漿共振角度感測器 (20)SPR(angular sens〇r)，以對光束角度偏移具有極為靈敏的性 質其中’《2 ’ & ’ ％分別代表介質1 —梭鏡(prism)、介質2、 ❹介質3 (金屬）、介質4—空氣(air)之折射率。 參·本發明之原理 3.1待測物之光線偏向推導 如第-圖所示，光線入射至具有微小内部偏移角的透明平板 (待測物(la))，令内部偏移角為“，在第一界面的入射角為^，第 一界面折射角為化。根據幾何光學理論，偏向角度可寫成下式： β = θη+θη~α (1) _ 如第二周所示，假設光線垂直入射於第一界面，即〜=〇、 I 在這裡的„為平板之折射率。所以偏向角度又可重寫 為々 = sin (2) 從上式可知’角度偏向是正比於内部偏移角。當我們已知待測物 (la)的折料，就可崎蝴量〃角可經由公式制待測物（⑻ 内部偏移角α。 3· 2待測物件表面高度變化和偏向角度之關係 由第二圖中得知，測試之掃猫光束入射於待測物(la)，當待 15 201018867 —- - ----- - _ - - — .s.. .. . —·— 測物（la)表面有λα的變化時，會造成光路偏移原來路徑方向，形 成+^或->5的角度偏移量。在此裝置中，掃瞄光束先入射至待測 物（la)件再折射出去。若待測物（la)的表面（平面1與平面2)互 相平行時，透射出去的光線不會產生角度的偏移，若待測物（la) 的兩表面間產生的角度，則會分別形成+户或一々的偏向角度變 化量。此現象可由第二圖的幾何關係圖推導出來。 心，其中“為待測物（13)内部偏移的角度’當第 ❹二面的斜率為正時，我們定義《值為正，反之，貝忪為負。&為出 射角，《為待測物㈤的折射率，&為每單位掃描的㈣距離，从 為每單位掃描的★度變化。已知#和“幾乎是轉—個線性關係。 因此表面高度差可寫成 故掃描此平板，即可求出每—錄置上的贿，絲出制平板 之缺陷或傾斜角度。 • 3表面電漿共振原理 本發赚四層之表Φ電料振肖度制胃⑽糾r組態⑴Please refer to the sixth to eighth figures. In order to select the part to be measured (1) or the object to be tested (10), the present invention further includes a single-axis mobile platform (10) for the object to be tested (10) or good (1). Controlling the part to be measured (10) or the part to be measured by the good product (1), and then controlling the single-axis shifting table (10) to move in the direction of the x-axis to control the lion beam sweeping object _a or good product (1) The stroke is taken to control the required data (10) of the test object (la) to measure the result. 2.5 Implementation means of the calculation means and the memory of the test phase data record (not shown) Please refer to the sixth to the human figure. In the specific embodiment of the present invention, the calculation means (10) is - the coffee maker, It includes - analysis and - for the reference phase. The analysis software uses 201018867 to compare and analyze the reference phase and the test phase, and then obtain the shape, contour or defect information of the object and record it in the memory. in. 2. 5 surface plasma resonance angle sensor, as shown in the third figure, the surface electric paddle resonance angle sensor (10) of the present invention is a surface plasma resonance angle sensor comprising four layers of film thickness ( 20) SPR (angular sens〇r), which is extremely sensitive to beam angle shift, where '2' & '% represents medium 1 - prism, medium 2, tantalum medium 3 (metal) , medium 4 - the refractive index of air. The principle of the present invention 3.1 The light deflection of the object to be tested is as shown in the first figure, the light is incident on a transparent plate (subject (la)) having a small internal offset angle, so that the internal offset angle is ", The angle of incidence at the first interface is ^, and the angle of refraction of the first interface is normal. According to the theory of geometric optics, the deflection angle can be written as follows: β = θη + θη~α (1) _ As shown in the second week, the light is assumed Normally incident on the first interface, ie ~=〇, I here is the refractive index of the plate. Therefore, the deflection angle can be rewritten as 々 = sin (2) From the above equation, the angle deviation is proportional to the internal offset angle. When we know the material to be tested (la), we can use the formula to make the object to be tested ((8) Internal offset angle α. 3. 2 Relationship between surface height change and deflection angle of the object to be tested It is known from the second figure that the test cat beam is incident on the object to be tested (la), and is to be tested by 15 201018867 --- - ----- - _ - - - .s.. . . . When the surface of the object (la) has a change of λα, the optical path is shifted from the original path direction to form an angular offset of +^ or -> 5. In this device, the scanning beam is first incident on the object to be tested (la) The member is refracted again. If the surface of the object to be tested (la) (plane 1 and plane 2) are parallel to each other, the transmitted light does not have an angular offset if the object (la) is produced between the two surfaces. The angle of the deflection will be formed by + household or one turn. This phenomenon can be derived from the geometric relationship diagram of the second figure. The heart, where "the angle of the internal offset of the object (13) is the first" When the slope of the two sides is positive, we define the value as positive, and vice versa, bei is negative. & is the exit angle, "for the refractive index of the object (five), &am p; for the distance of (four) per unit scan, from the degree of change for each unit of scan. Known # and "almost a linear relationship. So the surface height difference can be written so that the plate can be scanned, then each can be found The bribes on the record, the defects or tilt angle of the flat plate. • 3 surface plasma resonance principle. Earn four layers of the table Φ electric material vibration Xiaodu system stomach (10) correct r configuration (1)
這裡的及〜分別為在空氣中的波向 (4) 量以及在SPR狀況下之波向 201018867 量，4及&分別為介質3 (金屬）、空氣之介電常數。其中共振角心 又可寫成： θψ =sin_1 根據 Fresnel’ s 數可寫成 \l/2' , (5) equation，P偏極光和s偏極光所造成的反射係 t = r{2+r^ak^ 1234 Ϊ+^V^· >ί=Λ5> (6) 這裡的么 1 + /，23r34e，2A，3i/3Here and ~ are the wave direction (4) in the air and the wave direction 201018867 in the SPR condition, respectively, 4 and & are the dielectric constants of the medium 3 (metal) and air, respectively. The resonance angle can be written as follows: θψ = sin_1 can be written as \l/2' according to the Fresnel's number, (5) equation, P-polarized light and s-polarized light caused by the reflection system t = r{2+r^ak ^ 1234 Ϊ+^V^· >ί=Λ5> (6) Here's what 1 + /, 23r34e, 2A, 3i/3
是表示由介質2、3及4層反射的反射係 數。~ = 為從介質Z•及7•間反射的反射係數；之及ί/3分別為介 質_2/ 度；f可表示S或P偏極光；符號4可表示為[2] 幻=ί λ/ ks，/=W，>W，4.在(6)式中，&為由介質，·⑺ 中’沿著2方肖賴敝向量，可表稍下卿奸 kzi(j) = ko(nf〇) -«!2 sin2 ΘΫ1 . (8) =^34μ^^34 =|^234|e^ 〇it 裡6、V相為p、s偏極麵引起_位，此外，p、s偏極光的 反射率分別為，及水|2。將反射率办及相位偏料目對於 入射角响模擬絲如第四騎示，紅色圓關紗是代表我們用 來量測的她曲線。在驗肖附近，制顯地反射率是固定的， 而相位偏移峨80。急劇下降到7『。為了方便分析，我們把相位 偏f 和共振“歸零，而且定義一個新的座標系統_來取代 先m的㈣即_善也)和。這個在共振角附近的新座標。 系統如第五圖所不。從這個相位的曲線來看，相位值多與偏離 17 201018867 ........ ..-.· ,.......-广.....·、， ... 共振角之角細)成反比，而最靈敏的地方是靠近_時，因為這 裡的斜率是最大值（可參看參考文獻[3]的麟）。因此，我們首 先設定Δθ = 0是在沒有任何肖度偏移賴上，且她彳在零的值置。 當光束偏移時，即ΛΘ…則卢會產生偏移。換言之，續〆分別稱 為共振角偏離量及相位偏移。 由第五圖得知，相位偏移並不完全與共振肖偏離量成正比關 係。從第三圖的第-個入射平面來看，根據Snell定律可得到 ❷〜叫=«丨伽A，把n峨回前式，可得到„4_1=W神5。_句 把上式做微分運算可得％ cay =_qc<w(45。_ 這裡的Α值很小，〜45〇(接近共振角），且邶Μ，所以^ ―么魴。 從式（2)中可知角度偏向咸正比於待測物（la)内部偏移^。因 此’相位偏移多也與偏移角OT成正比’即jiocor。 舉例說明，如第三圖，四層之表面電漿共振角度感測器 (20)(BK7稜鏡•鈦Ti-金Au-空氣)的條件參數如下：4=25_， ❹ 4=44.3膽，入射波長Α=632.8·，介電常數分別為Βκ_7稜鏡 (4=0 ’ 鈦 Ti〇2=”22)，金 Au〇3=”32) ’ 空氣（〜=〇，其中 ει =(1.51509)2，f2=_3.84+12.5z·，¢3=-12+1.26/，=(1.0003)2 (參看參考 文獻[4]的論述)。將這些參數代入(4K8)式，所得4對入射角0圖 如第四圖所示。 1-8 201018867 ' - -...· ... ….. — 因為只有在P偏極光才會激發表面電祕振，且共振角 (心-43.85。）位於最小反射率值4，此時光強度為最弱，即， 如第五圖所示’我們可以選擇最佳金膜厚度及靠近^之入射角去 找出相位之中的最大斜率，其靈敏度也是最大。 3.4待測物高度變化和表面電漿共振相位之關係 首先先將未有刮痕之制物(la)放置於表面電漿共振角度感 貝J器（20)之刚’然後轉動旋轉平台（3〇)(R〇tati〇n &聯），調整 ©入射肖等於共振肖，此時的絲度絲準光誠，並由共光程外 差干涉術；f iH該基準她。㈣腦⑽。記錄此值，當作待測物⑽ 該位置的基準相位。之後再把未有刮痕之待測物(la)換成有刮痕 (缺陷）之待測物(la)，當掃猫光束入射至缺陷待測物(la)時，即 產生光線偏移，使得掃瞒光束入射至表面電漿共振角度感測器⑽) 會偏離原本角度，而造成相位增加或減少，之後再由電腦(6此)記 錄該值，此為測試相位。經算出該位置之相位變化（測試相位減 ❹去基準相位），再換算出高度差，如此以雷射之掃瞄光束做掃瞄， 计錄所有的面度差，即可獲得待測物（la)表面形貌、粗糙度與缺 陷等資訊。 3.5共光程外差干涉技術 從外差雷射光源(11) (heterodyne light source)出射的光 束具有兩個互相垂直、不同頻率的線性偏極的性質，一般稱之為 兩頻率之光。當光入射至待測物（la)時，經待測物（la)反射，所 得到反射光將會因兩偏極光所引入的相位偏移。由於兩偏極光經 201018867 檢偏板(14)元件（analyzer)造成兩偏極光部分電場強度分量的 結合’該檢偏板(14)(analyzer)之透光轴設定在兩個偏極方向之 間’其目的是用來得到干涉信號(測試信號）。而被引入的相位差 則是在測試信號的相位中，該信號之拍頻(beat frequency)為兩 個偏極光之間的頻率差。在相同拍頻頻率的條件下，將測試信號 的相位與參考信號的相位相比，再使用鎖相放大器（L〇ck_in Amplifier)或相位計(Phase Meter)，得到相位偏移。由於這兩個 瘳偏極幾乎是在同一個光路徑上，所以一般稱此干涉法為共光程外 差干涉術。 3.6.系統架構 (1) 外差雷射光源(11 )(Heterodyne Light Source) ··具有兩 個相互垂直之線性偏極且有一頻率的差值之雷射光源。 (2) 分光鏡(12)BS(Beam splitter):將光分為掃描光與反射 光。 . . (3) 檢偏板(14) (Analyzer):使得P偏極光與s偏極光在此 因取出分量而產生干涉現象。 (4) 旋轉平台（30)(Rotation Stage):可改變角度的平台。 (5) 第一光偵測器（40)、第二光偵測器（41) ( Ph〇t〇 Detector):把檢偏板(14)產生的干涉光信號轉成電信號。 (6) 鎖相放大器(Lock-in Amplifier) ··比較光镇測器產生的 待測電信號與參考電信號的相位差。 3.7系統架構原理 20 201018867 本發明以共光程外差干涉儀基本原理及表面電漿共振原理為 基礎再經過-些巧賴光路安m測制物（la)之微小高 度變化。一個具有兩種偏極（P與S偏極）的外差雷射光源 (llXHeterodyne Source)，經分光鏡（12)胳邙嘯 splitter)分 成反射光與掃描光，其中反射光經過偏極板(13)ANr (Analyzer) (其中透光軸與x抽夾45°)產生干涉現象，由第一光偵測器（40) (photo detector) Dr得到參考信號,，。掃描光束經由表面電漿 ❻共振角度感測器（20)(SPR Sensor)，藉由轉動旋轉平台 (30)(RotationStage) ’使之達到共振角產生表面電漿共振現象， 由於會使P光強度瞬間衰落，為使其強度與S光強度均等，故接 下所經過的檢偏板(14)ANt(Analyzer)其透光轴須與X軸夾1〇。， 如此P光才能分得較多的光強度分量；再經由第二光偵測器（Μ )於 接收干涉信號’此為測試信號（。最後將參考信號心與測試信號心接 到鎖相放大器（Lock-in Amplifier) ’並由鎖相放大器（L〇ck-in ❹ Amplifier)比較得到相位差’其中办為未加待測物 (la)(Sample)之初始相位差，&為參考信號（引起的相位，*為測 试虎/，引起的相位。之後再加入待測物（la)(Sample)，由於待測 物（la)(Sample)表面起伏、不平整、缺陷，造成入射至表面電聚 共振角度感測器（20)的角度偏離共振角，產生相位變化办μ，,， 其中沁為加入待測物（la)之測試信號起引的相位。所以只要將待 測物（la)引起相位办減掉初始相位&，即可得到待測物〇a)表面起 伏引入的相位# ’即办。又因為待測物（la)相位彡與高度差仙成 21 201018867 - -- · --T-··· ----=.-..- ........... - · ·· - 一 ...*·〆 正比，所以我們量測出相位0，故可直接轉換成待測物（la)的高度 差、缺陷、形貌、粗糙度等值。 肆·本發明實驗例 本發明實驗例的光學系統架構如第六圖、第七圖、第八圖所 示。此光路系統可分成三個部份：（1)外差雷射光源（11)部份，（2) 光路‘構與（3)彳§说處理部份》外差雷射光源（ii)(jjeter〇dyneIs the reflection coefficient reflected by the layers 2, 3, and 4 of the medium. ~ = is the reflection coefficient from the media Z• and 7•; ί/3 is the medium_2/degree; f can represent S or P polarized light; symbol 4 can be expressed as [2] 幻=ί λ / ks, /=W, > W, 4. In (6), & is the medium, · (7) ' along the 2 square Xiao Lai vector, can be slightly smug kzi (j) = Ko(nf〇) -«!2 sin2 ΘΫ1 . (8) =^34μ^^34 =|^234|e^ 〇it 6, V phase is p, s polar plane causes _ bit, in addition, p, The reflectance of s-polar light is, respectively, and water |2. The reflectance and phase offset are for the incident angle to simulate the filament as shown in the fourth ride, and the red round yarn is the curve that we use to measure. In the vicinity of the test, the apparent reflectance is fixed, and the phase shift is 峨80. Sharply dropped to 7". To facilitate the analysis, we “return the phase offset f and the resonance to zero, and define a new coordinate system _ to replace the first m (four) ie _good also) and this new coordinate near the resonance angle. The system is as shown in the fifth figure. No. From the curve of this phase, the phase value is more than the deviation of 17 201018867 ..........-..,.......-广.....,, .. The angle of the resonance angle is inversely proportional, and the most sensitive place is close to _ because the slope here is the maximum value (see the quotation of Reference [3]). Therefore, we first set Δθ = 0 in the absence. Any slanting offset depends on it, and she is at the value of zero. When the beam is offset, ie ΛΘ... then Lu will produce an offset. In other words, continuation 称为 is called the resonance angle deviation and phase offset, respectively. The fifth figure shows that the phase shift is not completely proportional to the amount of deviation from the resonance. From the first incident plane of the third graph, according to Snell's law, you can get ❷~叫=«丨加A, put n When you return to the front, you can get „4_1=W神5. _ sentence to the above formula to do the differential operation can get % cay = _qc < w (45. _ here the Α value is very small, ~ 45 〇 (close to the resonance angle), and 邶Μ, so ^ ― 鲂 鲂. From the formula (2 It can be seen that the angle bias is proportional to the internal offset of the object to be tested (la). Therefore, the 'phase offset is also proportional to the offset angle OT', ie jiocor. For example, as shown in the third figure, the surface of the four layers The conditional parameters of the slurry resonance angle sensor (20) (BK7稜鏡•Titanium Ti-Gold Au-Air) are as follows: 4=25_, ❹ 4=44.3 biliary, incident wavelength Α=632.8·, and the dielectric constant is Βκ_7稜鏡(4=0 'Titanium Ti〇2=”22), gold Au〇3=”32) 'Air (~=〇, where ει =(1.51509)2,f2=_3.84+12.5z·,¢ 3=-12+1.26/,=(1.0003)2 (Refer to the discussion in Reference [4].) Substituting these parameters into (4K8), the resulting four pairs of incident angles are shown in Figure 4. 201018867 ' - -...· ... ..... — because the surface acoustic vibration is only excited by P-polarized light, and the resonance angle (heart -43.85.) is at the minimum reflectance value of 4, at which time the light intensity is the most Weak, that is, as shown in the fifth figure, 'we can choose the best gold film thickness And the angle of incidence close to ^ to find the maximum slope among the phases, the sensitivity is also the maximum. 3.4 The relationship between the height change of the object to be tested and the surface resonance phase of the surface first place the unscratched material (la) first The surface of the plasma resonance angle sensor J (20) is just 'then turn the rotating platform (3 〇) (R〇tati〇n & joint), adjust © incident Xiao is equal to the resonance Xiao, at this time the filament is light Cheng, and by common path heterodyne interferometry; f iH the benchmark she. (d) brain (10). Record this value as the reference phase of the object to be tested (10). Then the undetected object ( La) is replaced with a scratch (defect) object to be tested (la). When the sweeping cat beam is incident on the defect object (la), a light shift occurs, so that the broom beam is incident on the surface plasma resonance angle. The sensor (10) will deviate from the original angle, causing the phase to increase or decrease, and then the value is recorded by the computer (6), which is the test phase. After calculating the phase change of the position (test phase minus the reference phase), and then converting the height difference, the laser scan beam is used for scanning, and all the face differences are recorded to obtain the object to be tested ( La) Information on surface topography, roughness and defects. 3.5 Common optical path heterodyne interference technique The light beam emitted from a heterodyne light source (11) has two perpendicular and different frequency linear polarization characteristics, which are generally called two-frequency light. When light is incident on the object to be tested (la), it is reflected by the object to be tested (1a), and the resulting reflected light will be shifted by the phase introduced by the two polarized lights. Because the two polarized light is combined with the electric field intensity component of the two polarized light parts by the analyzer of the 201018867 analyzer (14), the transmission axis of the analyzer (14) (analyzer) is set between the two polarization directions. 'The purpose is to get the interference signal (test signal). The phase difference introduced is in the phase of the test signal, and the beat frequency of the signal is the frequency difference between the two polarized lights. At the same beat frequency, the phase of the test signal is compared with the phase of the reference signal, and then the phase shift is obtained using a lock-in amplifier (L〇ck_in Amplifier) or a phase meter (Phase Meter). Since the two yaw poles are almost in the same light path, the interference method is generally referred to as total optical path heterodyne interferometry. 3.6. System Architecture (1) Heterodyne Light Source (•) (Heterodyne Light Source) • A laser source with two mutually perpendicular linear poles and a difference in frequency. (2) Beam splitter (12) BS (Beam splitter): divides light into scanned light and reflected light. (3) Analyzer (14) (Analyzer): This causes the P-polarized light and the s-polarized light to interfere with each other due to the extraction of components. (4) Rotation Stage (30): A platform that can change the angle. (5) The first photodetector (40) and the second photodetector (41) ( Ph〇t〇 Detector): convert the interference light signal generated by the analyzer (14) into an electrical signal. (6) Lock-in Amplifier · Compare the phase difference between the electrical signal to be measured and the reference electrical signal generated by the optical detector. 3.7 System Architecture Principles 20 201018867 The invention is based on the basic principle of the common optical path heterodyne interferometer and the principle of surface plasma resonance, and then undergoes a slight height change of the material (la). A heterodyne laser source (llXHeterodyne Source) with two polar poles (P and S poles) is split into reflected light and scanned light by a beam splitter (12), where the reflected light passes through a polarizing plate ( 13) Anr (Analyzer) (where the transmission axis and the x-clamping 45°) interfere with each other, and the reference signal is obtained by the first photodetector Dr. The scanning beam passes through the surface plasma ❻ resonance angle sensor (20) (SPR Sensor), and by rotating the rotating platform (30) (RotationStage), it reaches the resonance angle to generate surface plasma resonance phenomenon, which causes the P light intensity. Instantaneous fading, in order to make the intensity equal to the intensity of the S light, the ANt (Analyzer) of the analyzer (14) that passes through it must be clamped with the X-axis. Therefore, the P light can be divided into more light intensity components; and the second optical detector (Μ) receives the interference signal 'this is the test signal (. Finally, the reference signal core and the test signal core are connected to the lock-in amplifier) (Lock-in Amplifier) 'And the phase difference is obtained by the lock-in amplifier (L〇ck-in ❹ Amplifier)', which is the initial phase difference of the uncharged object (la) (Sample), & is the reference signal (The phase caused, * is the phase of the test tiger /, and the sample to be tested (la) (Sample), due to the surface of the object (la) (Sample) undulations, unevenness, defects, causing incident The angle of the surface electro-convergence resonance angle sensor (20) deviates from the resonance angle, and a phase change is generated, where 沁 is the phase of the test signal to be added to the test object (la), so that the object to be tested is La) causing the phase to reduce the initial phase &, then the object 〇a) the surface undulation introduced phase # ', that is, because the object (la) phase 彡 and height difference Xiancheng 21 201018867 - - - · --T-··· ----=.-..- ........... - · ·· - one...*·〆 Ratio, so we measure the phase 0, so it can be directly converted into the height difference, defect, topography, roughness and other values of the object to be tested (la). 实验·Inventive example of the invention The optical system architecture of the experimental example of the present invention is as follows: Figure 6, Figure 7, Figure 8. This optical path system can be divided into three parts: (1) part of the heterodyne laser source (11), (2) the path of the light path and (3) 彳§ Said to deal with part of the heterodyne laser light source (ii) (jjeter〇dyne
Source):具有兩個相互垂直之線性偏極且有一頻率的差值之雷射 _ 光源。 ❹ 4.1光路架構·· 1. 雷射光經分光鏡(12)BS(Beam splitter)分成反射光與掃描 光。 2. 反射光經檢偏板(14) (analyzer) ANr與第一光摘測器（40) (photo detector) Dr得到參考信號^掃描光束經待測物（la) (Sample)反射，直接入射表面電漿共振角度感測器（2〇) ❹ （angular sensor) ’最後經由檢偏板(14)ANt後，由第二個光 偵測器Dt接收干涉信號’此為測試信號7<。 4. 2信號處理： 測試信號（、參考信號可直接輸入至鎖相放大器（l〇ck_irl amplifier)。測試信號，,與參考信號i經鎖相放大器（1〇ck_in amp 1 i f i er )比較得到未加待測物（1 a ) (samp 1 e)之初始相位（即即反 感測器本身引起相位、(=為_么），其為參考信號7引起的相位， 為為測試信號/,引起的相位。之後再加入待測物（la)(Sample)，引 22. 201018867 起相位變化為斗“)，其中4加入制 的相位。所以待測物(la)表面起伏引起的相位差。當待測 物(la)表面平整，沒有任何角度偏移時，外角變化量叫=0，則 相位差㈣。當待測物⑽有表面起伏時，則會產生光束偏移時， 即叫尹0，則卜0。 將待測物（la)起伏引入相位變化量~值先後代入以下公式： = n fl 、 β t w Θ = -[ΔΘ 、从：-滅，即可得到待測物（la) ❹1¾度差Μ。 ’此運算過程皆由個人電腦(6〇a)依撰寫分析軟體完成，其中瞻 為-比例常數絲面電漿共㈣度翻H⑽)上的麵有關，最 後作圖輸出結果。 伍•本發明可應用範園 1·在光學及精《械製造業與電機及電子機械^材業方面， ❹可細在玻璃平板、光學面、面鏡、光學賊表面、光學元件表 面與内部等的表面形貌、平整度、氣泡或缺陷量測與檢驗，以及 LCD面板玻璃缺陷檢測。 2. 在機械製造業與模具製造業方面’可應用在表面缺陷、光 滑與粗糖的檢測。 3. 在醫療^材製造f方面’可應用於樣本外表翻部輪靡量 測。 陸•結論 23 201018867 因此，藉由上述技術特徵的建置，本發明確實具有下列所述 之特點： 1/發_光束_測物件所造朗量光束的角度偏 移’ ^•成表面賴共振角度感測H的相位變化*制其相對應之 待測物理量’如粗縫度、高度差、或折射率之變化，經雷射婦描 技術’而得到待測物表面之輪廓、粗糙度、或内部細微結構。 2. 本發明由於採用共光程外差架構，故而穩定性高，容易架 ❹設與快速量測，而且係以掃瞒物件方式進行測量其輪靡或粗糖 度，所以系統架構與原理簡單、成本低廉。 3. 本發明測量的範圍和解析度皆決定於系統的選用，量測範 圍越小，解析度越高，且待測物選用非透明樣本，適用性極佳， 另待測物可適用於各型的精密度樣本，應用性廣泛。 4. 本發明係採用非破壞性、非接觸性，不需任何表面處理、 即時f生量/則與大1測範圍之表面形貌粗糖度檢測技術，可觀察物 〇體粗輪度、表面輪廓、折射率變化、與系統的對準、定位、校正、 安裝等功能。極可觀夾物體表面或結構的排列分佈、與異樣分析， 故可作為生物科技的組織、細胞、基因、蛋白質…等及時觀測， 對樣品也不會產生任何破壞與毒性，故可做為活體試驗◊可做為 半導體、光電、精密製造、生醫產業之製程中物件表面粗糙、輪 廓、鍍膜厚度之量測》 5.利用表面電漿原理結合共光程外差干涉術，因而可應用於 各種移動平台各軸向的偏轉之測量及光學或其他系統之校正、安 24 201018867 .. — - — -. - — ,...- — 裝、對準。 6.本發明結合表面電漿共振技術、角度偏向法與共光程外差 干涉技術’是-種全新敝合且相當簡單，對於快速量測與不須 專業人員猶的伽’轉適合作躲上檢_方式之一。 以上所述，僅為本發明之一可行實施例，並非用以限定本發 明之專利範圍，凡舉依據下财料職騎述之内容、特徵以 及其精神而权其峻化的粒餘，錄包含於本發明之專利 ❹範目内。本發明之方法及其機構，除上述優點外，並深具產業之 利用性’可有效改善習用所產生之缺失’而且所具體界定於申請 專利la圍之特徵’未見於同類物品，故而具實用性與進步性，已 符合發明專利要件，爰依法具文提出申請，謹請鈞局依法核予 專利，以維護本申請人合法之權益。 【圖式簡單說明】 第一®係本發明光經過待測物之偏向角度示意圖。 ❹第二圖係本發明待測面傾斜之高度差與角度偏向關係示意圖。 第二圖係本發明四層KR組態之表面電漿共振角度感測器之示意 圖。 第四圖係本發明SPR反射率與相位對應入射角的關係示意圖。 第五圖係本發_位偏移對共振角偏移量之_示意圖。 第、圖係本發明第—種光學掃猫手段之架構*意圖。 第七圖係本發明第二種光學掃猫手段之架構示意圖。 第八圖係本發明第三種光學胸手段之架構示意圖。 25 201018867 _ r -.-———.—-·—·.- 【主要元件符號說明】 (1)良品 (10)光學掃瞄手段 (12)分光鏡 (14)檢偏板 (16)物鏡 (30)旋轉平台 β (41)第二光偵測器 (60)運算手段 (70)單轴移動平台 (la)待測物 (11)外差雷射光源 (13)偏極板 (15)面鏡 (20)表面電漿共振角度感測器 (40)第一光偵測器 (50)相位比較手段 (60a)電腦 ❿ -26Source): A laser _ source with two mutually perpendicular linear poles and a difference in frequency. ❹ 4.1 Optical path architecture·· 1. The laser beam is split into reflected light and scanned light by a beam splitter (12) BS (Beam splitter). 2. The reflected light is passed through the analyzer (14) (analyzer) ANr and the first light extractor (40) (photo detector) Dr to obtain the reference signal. The scanning beam is reflected by the object to be tested (la) (Sample) and directly incident. Surface Plasma Resonance Angle Sensor (2〇) ang (angular sensor) 'After the ANt via the analyzer (14), the second photodetector Dt receives the interference signal 'this is the test signal 7<. 4. 2 signal processing: test signal (, the reference signal can be directly input to the lock-in amplifier (l〇ck_irl amplifier). The test signal, compared with the reference signal i via the lock-in amplifier (1〇ck_in amp 1 ifi er) Add the initial phase of the object to be tested (1 a ) (samp 1 e) (ie, the phase of the anti-sensor itself causes (== is _), which is the phase caused by the reference signal 7, which is caused by the test signal /, Phase. Then add the object to be tested (la) (Sample), lead 22. The phase change from 201018867 is the bucket "), where 4 is added to the phase of the system. Therefore, the phase difference caused by the surface fluctuation of the object (la) is to be treated. The surface of the measuring object (la) is flat. When there is no angular offset, the amount of change in the outer angle is called =0, then the phase difference is (4). When the object to be tested (10) has surface undulation, when the beam is deflected, it is called Yin 0. Then, 0. Introduce the fluctuation of the object (la) into the phase change amount~ value and substitute the following formula: = n fl , β tw Θ = -[ΔΘ , from: - off, the object to be tested (la) ❹13⁄4 Degree difference. 'This process is completed by the personal computer (6〇a) according to the writing software, including - Proportional constant silk surface plasma is related to the surface on the (four) degree turning H(10)), and finally the output is shown. Wu·This invention can be applied to Fan Yuan 1·In the optical and fine machinery manufacturing and electrical and electronic machinery industry In terms of surface morphology, flatness, bubble or defect measurement and inspection of glass plates, optical surfaces, mirrors, optical thief surfaces, surface and interior of optical components, and glass panel glass defect detection. In the field of machinery manufacturing and mold manufacturing, it can be applied to the detection of surface defects, smooth and raw sugar. 3. It can be applied to the measurement of the surface rim of the sample in the manufacture of medical materials. Lu•Conclusion23 201018867 Therefore With the above technical features, the present invention does have the following characteristics: 1 / _ _ beam _ measuring object angular displacement of the beam of the object ' ^ · surface sensation resonance angle sensing H phase The change* is determined by the corresponding physical quantity to be tested, such as the change of the degree of sag, the height difference, or the refractive index, and the contour, roughness, or internal fine structure of the surface of the object to be tested is obtained by the laser pegging technique. Ben Because of the common optical path heterodyne structure, the system has high stability, easy installation and rapid measurement, and measures the rim or coarse sugar content by means of broom objects, so the system structure and principle are simple and the cost is low. 3. The range and resolution of the measurement of the invention are determined by the selection of the system. The smaller the measurement range is, the higher the resolution is, and the non-transparent sample is selected for the object to be tested, and the applicability is excellent, and the object to be tested can be applied to each The precision sample of the type has wide applicability. 4. The invention adopts non-destructive, non-contact, no-surface treatment, instant f-generation/thickness and large-scale measurement surface surface roughness measurement technology. Observable functions such as coarse wheel width, surface profile, refractive index change, alignment with the system, positioning, calibration, and installation. Extremely visible on the surface or structure of the object, and the analysis of the same, so it can be used as a biotechnology organization, cells, genes, proteins, etc., and it will not cause any damage or toxicity to the sample, so it can be used as a living test. ◊ can be used as a measurement of surface roughness, contour and coating thickness of articles in semiconductor, optoelectronic, precision manufacturing, and biomedical industries. 5. Using surface plasma principle combined with common path heterodyne interferometry, it can be applied to various Measurement of the deflection of the axial direction of the mobile platform and correction of optical or other systems, An 24 201018867 .. — - — -. - — ,...- — Mounting, alignment. 6. The invention combines surface plasma resonance technology, angle deflection method and common path heterodyne interference technology to be a new type of combination and is quite simple, and is suitable for fast measurement and no need for professionals. Check one of the ways. The above description is only one of the possible embodiments of the present invention, and is not intended to limit the scope of the patent of the present invention, and the content of the patent is based on the content, characteristics and spirit of the game. It is included in the patent specification of the present invention. The method and the mechanism of the invention, in addition to the above advantages, and the industrial utilization 'can effectively improve the deficiency caused by the use' and are specifically defined in the characteristics of the patent application la is not found in the same kind of articles, so it is practical Sex and progressive, have met the requirements of the invention patent, and filed an application according to law. I would like to ask the bureau to approve the patent in accordance with the law to protect the legitimate rights and interests of the applicant. [Simple Description of the Drawings] The first® is a schematic diagram of the deflection angle of the light passing through the object to be tested. The second figure is a schematic diagram showing the relationship between the height difference and the angle deviation of the slope of the surface to be tested of the present invention. The second figure is a schematic diagram of a surface plasma resonance angle sensor of the four-layer KR configuration of the present invention. The fourth figure is a schematic diagram showing the relationship between the SPR reflectance and the phase corresponding incident angle of the present invention. The fifth figure is a schematic diagram of the _ bit offset versus the resonance angle offset. The drawings and drawings are the structure of the first optical scanning method of the present invention. The seventh figure is a schematic diagram of the structure of the second optical sweeping cat method of the present invention. The eighth figure is a schematic diagram of the structure of the third optical chest means of the present invention. 25 201018867 _ r -.---..----..- [Main component symbol description] (1) Good product (10) Optical scanning means (12) Beam splitter (14) Polarization plate (16) Objective lens (30) Rotating platform β (41) Second photodetector (60) Operation means (70) Single-axis moving platform (la) Object to be tested (11) Heterodyne laser source (13) Polar plate (15) Mask (20) surface plasma resonance angle sensor (40) first light detector (50) phase comparison means (60a) computer ❿ -26
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI427270B (en) * | 2010-06-02 | 2014-02-21 | Univ Nat Yunlin Sci & Tech | Multi-beam interferometric displacement measurement system with one-dimensional ccd |
| TWI491844B (en) * | 2013-10-15 | 2015-07-11 | Univ Nat Formosa | 3D Morphology Analysis Method |
| CN110411368A (en) * | 2018-04-27 | 2019-11-05 | 日本株式会社日立高新技术科学 | The method for correcting phase of interference signal |
-
2008
- 2008-11-14 TW TW97144038A patent/TW201018867A/en unknown
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI427270B (en) * | 2010-06-02 | 2014-02-21 | Univ Nat Yunlin Sci & Tech | Multi-beam interferometric displacement measurement system with one-dimensional ccd |
| TWI491844B (en) * | 2013-10-15 | 2015-07-11 | Univ Nat Formosa | 3D Morphology Analysis Method |
| CN110411368A (en) * | 2018-04-27 | 2019-11-05 | 日本株式会社日立高新技术科学 | The method for correcting phase of interference signal |
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