1274150 九、發明說明： 【發明所屬之技術領域】 本發明係有關-種角度偏移顯微裝置及方法，尤指一種結合共 光私外差干涉及表面電漿共振(SPR)的顯微方法與裝置，提高光學 顯微鏡之解析度與量測範圍者。 【先前技術】 • 近年來高倍率顯微鏡已經成為廣泛被使用的研究工具，在生醫 電及半導體樣品檢測居於重要的角色，其相關的應用相當多，坊 間有許多的顯微鏡’例如：傳統光學顯微鏡、掃料電子顯微鏡 (SEM)、掃描探針顯微鏡SPM (如：掃描穿關微鏡⑽）、原子力 顯微鏡（AFM)、近場光學顯微鏡⑽M)、磁力顯微鏡（麵））、 魏顯微鏡㈣）、側面力顯微鏡⑽）、極化力顯微鏡（spFM) 等等已有二十多種。其中，一般傳統光學顯微鏡是最早被發展出來 增進人類微觀視野的工具，其主要結構包括：接透鏡、接目鏡及光 鲁源。傳_光賴微鏡所能提供的最鱗析度，大鱗於其使用光 源的波長（〜_)，這樣的解析度已不符目前的需求。為達到， 的解析度，使用的光源必須是X光；然而製作能使χ光聚焦的鏡片 亚不谷易。目此’電子束便成為取代可見光源的必然的選擇；同時， 以電或磁場效應料的透鏡也應運而生，造就了電子顯微鏡的時 代。1940年代發展出來的掃描電子顯微鏡（腿），將解析度提高至 約20埃（A, U = 10 \，原子直徑約為2—3 A)，而成為現代科技 中一項重要技術。其主要原理與傳統光學顯微鑛似，只不過以電 1274150 子取代了光波，玻璃鏡片換成了電磁鏡片。至於掃描探針顯微鏡， 乃屬於接觸式顯微鏡，對於軟質或硬度不夠的材f做掃描，可能會 k成表面的破壞或傷害，故有其適用性與限制性。 知描採針顯微鏡（SpM)與前二項顯微鏡的成像原理不同是採 用探針通過掃㈣絲獲取_，但如要提高職實_表面的分 辨率時’針尖就必須很尖而且要求樣本的黏度不能過大，否則無法 達到原子級的高分辨率。現今的光學顯微鏡已突破了傳統的顯微鏡 在光波繞，傳_微鏡無法提供顧上所需的放大能力， 其發展-度中止，但於八十年代具有極大應用潛力的光學技術陸續 被開發出來。現今光學顯微技術，由於在數位影像處理和雷射光束 掃描的應用這兩方面快速的發展，使得共焦掃描顯微鏡賴術得以 提升至新的境界。 掃描穿隨顯微術(scanning tunneling micr〇sc〇py，簡稱STM) 魯起源於1980年代初期’利用它能解析出晶體表面的原子結構及電 子分佈情形’發明人G· Binnig及H. Rohrer因此於1986年獲頒 諾貝爾物理獎。此技術有效並穩定地操控金屬探針，且利用量子力 學的電子穿隧原理’藉探針在距樣品表面僅約幾個原子大小的範圍 内來回掃描，縣子的制具體地线，有祕我舰基本層面來 瞭解許多物理及化學現象。此外，科學家也空前地展示了搬移原子 的能力’同時也能人為地改變電子量子化的狀態，使製造原子級的 材料和70件，已不再只是夢想。自掃描穿随顯微術問世以來，已衍 1274150 生出許多相關技術，用途更擴展至許多不同的研究領域及產業，對 人類明日的高科技，將造成重大的影響。STM在空間解析度上優於 SEM與光學顯微鏡，尤其是垂直表面（z)方向，電子顯微鏡不太能 分辨10nm以下的高度差，用STM就不難達到〇 〇lnm的解析度。再 者，放入電子顯微鏡觀察之前，非金屬樣品需事先處理。但有些樣 品如生物分子，在乾燥及鍍導電膜等程序處理過後，往往與原始狀 態有所不同。另一方面，電子顯微鏡的高能量電子束對某些樣品（尤 其是脆弱的生物分子）具有破壞性。STM則不具破壞性，樣品也通 常不需事先處理，更可在真空、空氣、水溶液等各種環境下操作， 限制很少；再加上其造價低於電子顯微鏡，體積小，設計彈性又很 高’因此易與其它系統整合；若與光學顯微鏡結合，可以說是「矩 細靡遺」。 U ’ STM也有些缺點’如不導電樣品或表面高度落差過大 材料就不適用。況且，猶掃描速度仍比不上·，產品成熟度 穩定性也還不夠；這些主要是因⑽技術發展時間尚短，商業化 品近數年才出現。STM在金屬探針及導電樣品間加上小碰⑽ 者旦離^持在數埃錢十埃之間，使得探針尖端原子®與樣品; 子牙遂電机保持疋值，而測得表面結獅狀，其解析度可主 由於纽在料虹操作，故要«品㈣導電肩 藉者針尖與樣品間的原子個力，使懸« 所·表面結構形狀，具有原子解析度，但操作時探 1274150 針會施力於樣品表面。 共焦光學麵鏡（OT)最大好處為適合於任何樣品，及跟樣品 為非接觸，且目前所改良的CFM之縱向解析度約可高達為⑽等級， 又不會損毀或改變樣品表面，可對樣品做反射、透射與各種樣品表 面的分析與量測。因此對非接觸性、非破壞性、能顯示透明樣品又 有高解析度峨纖應屬共細纖較為普遍。有焦顯微鏡的 研究及應用在國外方面過去很早就已經展開了，再過去十幾年内國 外把共焦顯微鏡技術結合其他技術使用在各種量測上，1982年英國 的D.K· Hamilton與T· Wilson (如後列參考文獻1)發表了基於共 焦顯微術的表面二維測量技術。該技術是以共焦顯微鏡的縱向反應 曲線極大值，也就是焦平面的位置作基準，在掃描樣本表面時，移 動樣本的南度使共焦訊號堡值在極大值，由樣本的移動量就可得知 其表面咼度的變化。用共焦顯微鏡作表面三維量測，縱向解析率大 約是0.1//m，橫向解析率可達光波繞射極限，約為〇 3//m。結合 鎖相式干涉技術(phase-1 ocked interferometry)發展而成的的共 焦顯微術(如後列參考文獻2、3)，已經可達到奈米級的縱向解析 率。近年來對於結合共焦顯微鏡和L〇w-c〇herence Interferometer(LCI)(如後列參考文獻4)經常被使用在反射表面 的三維影像圖及透明物體的剖面圖，具有三度空間檢測且深入内層 立體透視，此外以波長掃描外差式干涉儀來取代LCI成為波長掃描 干涉式外差共焦顯微鏡（heterodyne wavelength—scanning 1274150 interference confocal microscope)(如後列參考文獻 5)，它使 用的光源為可調的雷射光源，來實現快速分離量測多層介質的折射 率跟厚度採用此方法，所量測到的光程差（〇ptical ι1274150 IX. Description of the Invention: [Technical Field] The present invention relates to an angular offset microscopy apparatus and method, and more particularly to a microscopic method involving surface acoustic resonance (SPR) in combination with co-optical extrapolation With the device, the resolution and measurement range of the optical microscope are improved. [Prior Art] In recent years, high-magnification microscopes have become widely used research tools, and they play an important role in biomedical and semiconductor sample testing. There are many related applications, and there are many microscopes in the room. For example: traditional optical microscopes , scanning electron microscope (SEM), scanning probe microscope SPM (such as: scanning through micromirror (10)), atomic force microscope (AFM), near-field optical microscope (10) M), magnetic microscope (surface), Wei microscope (4), There are more than twenty kinds of side force microscopes (10), polarized force microscopes (spFM), and so on. Among them, the general traditional optical microscope is the earliest tool developed to enhance the microscopic field of human beings. Its main structure includes: lens, eyepiece and light source. The most grading that can be provided by the micro-mirror, the size of the light source (~_), is such a resolution that it does not meet the current needs. In order to achieve the resolution, the light source used must be X-ray; however, the lens that makes the backlight can be made is not easy. Therefore, the electron beam has become an inevitable choice to replace the visible light source; at the same time, a lens with an electric or magnetic field effect material has emerged, creating the era of electron microscopy. The scanning electron microscope (leg) developed in the 1940s increased the resolution to about 20 angstroms (A, U = 10 \, atomic diameter of about 2-3 A), and became an important technology in modern technology. Its main principle is similar to that of traditional optical micro-minerals, except that the light wave is replaced by electric 1274150, and the glass lens is replaced by electromagnetic lens. As for the scanning probe microscope, it is a contact microscope. Scanning a material f that is not soft or hard may cause damage or damage to the surface, so it has its applicability and limitation. The scanning needle microscope (SpM) differs from the imaging principle of the first two microscopes in that it uses the probe to obtain the _ by the sweep (four) wire, but if you want to improve the resolution of the surface _ surface, the tip must be sharp and require the sample. The viscosity should not be too large, otherwise it will not reach the atomic level of high resolution. Today's optical microscopes have broken through the traditional microscopes in the optical wave, the micro-mirrors can not provide the required amplification, and its development - the degree of suspension, but in the 1980s has great potential for the application of optical technology has been developed . Today's optical microscopy technology, due to the rapid development of digital image processing and laser beam scanning, has enabled confocal scanning microscopy to be upgraded to a new level. Scanning tunneling micr〇sc〇py (STM) Lu originated in the early 1980s and used it to resolve the atomic structure and electron distribution of crystal surfaces, inventors G. Binnig and H. Rohrer. In 1986, he was awarded the Nobel Prize in Physics. This technique effectively and stably manipulates the metal probe, and utilizes the electron tunneling principle of quantum mechanics to use the probe to scan back and forth within a range of only about a few atoms from the surface of the sample. The specific ground line of the county is secret. I understand the many physical and chemical phenomena at the basic level of my ship. In addition, scientists have unparalleledly demonstrated the ability to move atoms. At the same time, they can artificially change the state of electronic quantization, making the manufacture of atomic materials and 70 pieces no longer just a dream. Since the advent of microscopy with the introduction of microscopy, many related technologies have been developed, and their use has expanded to many different research fields and industries, which will have a major impact on human high-tech tomorrow. STM is superior to SEM and optical microscopy in spatial resolution, especially in the vertical surface (z) direction. Electron microscopy is not able to resolve height differences below 10 nm. It is not difficult to achieve resolution of 〇lnm with STM. Furthermore, non-metallic samples need to be processed before being placed in an electron microscope. However, some samples, such as biomolecules, tend to differ from the original state after processing in a dry and coated conductive film. On the other hand, the high-energy electron beam of an electron microscope is destructive to certain samples, especially fragile biomolecules. STM is not destructive, samples are usually processed without prior treatment, and can be operated in various environments such as vacuum, air, and aqueous solution, with few restrictions. In addition, the cost is lower than that of an electron microscope, and the volume is small and the design flexibility is very high. 'Therefore, it is easy to integrate with other systems; if combined with an optical microscope, it can be said to be "a moment of detail." U ’ STM also has some drawbacks ‘If the non-conductive sample or the surface height difference is too large, the material is not suitable. Moreover, the speed of scanning is still not comparable, and the stability of product maturity is not enough; these are mainly due to (10) the development of technology is still short, and commercial products have only appeared in recent years. STM adds a small touch (10) between the metal probe and the conductive sample. The holder is held between several angstroms and ten angstroms to make the probe tip atom® and the sample; the gingival motor remains depreciated and the surface is measured. The lion-like shape, the resolution can be mainly due to the operation of the material in the rainbow, so it is necessary to use the atomic force between the needle tip and the sample to make the shape of the surface structure, with atomic resolution, but operate. Time probe 1274150 will apply force to the sample surface. The maximum benefit of the Confocal Optical Mask (OT) is that it is suitable for any sample and is non-contact with the sample, and the current modified CFM has a longitudinal resolution of up to (10) without damaging or changing the surface of the sample. Reflect, transmit, and analyze and measure various sample surfaces. Therefore, it is common for non-contact, non-destructive, transparent samples and high-resolution fiber to be a total fine fiber. The research and application of the focal microscope has been carried out very early in foreign countries. In the past ten years, the confocal microscope technology has been combined with other technologies in various measurements. In 1982, DK· Hamilton and T in the UK. · Wilson (as listed in Ref. 1) published a two-dimensional measurement technique based on confocal microscopy. The technique is based on the maximum value of the longitudinal response curve of the confocal microscope, that is, the position of the focal plane. When scanning the surface of the sample, the southness of the moving sample makes the value of the confocal signal at a maximum value, and the amount of movement of the sample is The change in surface temperature can be known. Using a confocal microscope for surface three-dimensional measurement, the longitudinal resolution is about 0.1//m, and the lateral resolution is up to the diffraction limit of light, which is about / 3//m. The confocal microscopy developed in conjunction with phase-locked interferometry (see, for example, references 2 and 3 below), has reached the longitudinal resolution of the nanometer. In recent years, combined with confocal microscopy and L〇wc〇herence Interferometer (LCI) (such as the following reference 4) are often used in the three-dimensional image of the reflective surface and the cross-sectional view of the transparent object, with three-dimensional space detection and deep into the inner three-dimensional Perspective, in addition to the wavelength scanning heterodyne interferometer to replace the LCI into a wavelength scanning interferometric heterodyne confocal microscope (such as the following reference 5), which uses a light source that is adjustable Laser source for fast separation and measurement of the refractive index and thickness of multilayer dielectrics. This method is used to measure the optical path difference (〇ptical ι
Difference )(〇PD)可以少於1S，比使用LCI快1〇倍。 此外共焦顯微鏡技術也普遍用在材料學上，或是運用在日常半 導體迴路管制上。近年來在光譜影像_上的改進，使的共焦顯微 鏡應用空間更加寬廣，也由三度空間影像，呈現具有四維的意義，Difference ) (〇PD) can be less than 1S, 1x faster than using LCI. In addition, confocal microscopy is also commonly used in materials science or in the control of everyday semiconductor loops. In recent years, the improvement of the spectral image has made the confocal microscope more widely used, and also has a three-dimensional meaning from the three-dimensional image.
即三維空間參鮮成分賴，不但具細微_冑化，且提供相對* 間關係。 I 在國内方面，過去有人改良傳統的共焦顯微技術，使用「差動 共焦顯微術」（如後列參考文獻6)的新型遠場光學顯微術利用共 焦顯微術__向反絲獲得高達2奈㈣縱向解析率系統不 需使用任何回雜制電絲鎖定被測物的位置，完全以開路方式操 作’應此具有快速即時的顯像能力，對於在量測生物薄膜和活生物 鲁、组織的運動具有特別的優勢，可應用於測量活細麟力學擾動的彈 性與生化反應。 另外也還有細雙光子共鱗描顯微鏡的技術(如後列參考文 獻7) ▲的單光子共；|、顯微鏡，通常使用離子雷射產生的可見光 或紫外光作為m來朗轉觸色的樣品，狀絲料材料 受激產生的螢絲組成-個3D f絲像。但顧這種方式得到的 影像卻有缺點’軸共_微鏡收躲鱗面崎光，但在樣品 中光所經之處皆會受到激發，如果待觀測物是活的細胞，可能會因 1274150 浐口j用產生的毒素將活細胞殺死，如果採用雙光子共焦顯微 與々 <吏用產生波長較長的光源，並利用雙光子激發的螢光產生 ^像則僅在光束聚焦的斷面上會會產生染料的激發，可大幅減少不 '要Z光激發’且可增加螢光掃描的深度，用來掃描較厚的樣品。 “合Μ上之結論，對於非導電性高透贿物體，可採用共焦 ^微鏡作如树’這對料物醫學的制是極為t要的事， 雖然共焦顯微鏡有接近2nm的縱向解析能力，但因為在這樣的情況 下’其相對的所能量_物_深度並不深，當透鏡之數值孔徑 (A) H時’雖可增加量測細’但此時卻會降低縱向的解析 度。 本I明乃為-光學顯微技術，完全不同於以往的顯微技術，故 ’、有新穎|±其優點為非接觸性、非破壞性、樣品不須有導電性也 不用作任何額外的處理，成本低、系統簡單、組裝與調整容易、高 解析月b力（<lnm)、大量測範圍（>土i〇vm)、可即時量測反射物體 及透明物體。 本發明人冒於2004年發表以臨界角法作微小位移量測（如後列 參考文獻8);利用平行光入射透鏡經反射面反射回原路徑，當反射 面不在焦平面上，則引發返回透鏡後之光線呈現發散或收斂現象， 此發散或收斂光以臨界角附近入射於一稜鏡，則造成此光束左右兩 邊界光強度有明顯的變化，此光強度之差，正比於發散（收斂）角， 亦正比於面鏡離開焦平面的位移量，故由此可測量待測物的位移 !27415〇 田於表面電漿. μ么 "、㈣⑻社共振角附近時有極為強烈的相位擊 。後列蒼考文獻9)，本_㈣與上軸界綠類似的方式 2光程結構結合絲賴魏，可測量比轉触更精準的微, 角度變量進_得更小驗移量，即_魏献斂光束左右制 界光所得_干涉錢制其社她差爾算咖位_ 斤射率值進而在焦平面附近掃描待測物，測量相位變化可測得农 測物表面之域或是折射率之分布圖，因此可作為雷射掃描顯微 鏡。 由於至目所為止，尚無相關論文或文獻發表有與本發明相同之 顯微技術，故本發明實屬唯一。雖然習知技術中，有關於表面電歡 共振(SPR)的量測應用，如美國專利第6, 775, 〇〇3號及第6, 784, 9的 號前案，該兩個前案都是利用光源入射可產生表面電漿波的反射面 而產生光強度或相位差，以量測待測物的特性，但兩者的具體方式 有所不同’而且也和本發明的技術不同，本發明整體具體技術有獨 特之處’而且具有如后所述的各項優點。 參考文獻： 1. D. K. Hamilton and T. Wilson » "Surface profile measurement using the confocal microscope，"/· A/;〆· /%只.53 ⑺，5320-2 (1982); 2. Alan Bearden ’ Michael Ρ· O’Neill，Leslie C· Osborne，Terrence L，·· Wong· Imaging and vibrational analysis with laser-feedback interferometryM » Optics Letters ^ Vol. 18 Issue 3 Page 238 (February 1993); 3. R. Juskaitis ^ T. Wilson » and N. P. Rea » Opt. Commun.lQ9 ^ 167 (1994); !27415〇 4. D.，Huang，E· A. ’ Swanson ’ C. P.，Lin，J· S·，Schuman，W. G.，Stinson，W.，Chang，M. R·，Hee，T·，Flotte，K.，Gregory， C. A.，Puliafito ^ J. G. 5 Fujimoto ^ Science ^ 254 ? 1178 ? 1991; 5. Takashi Fukano，Ichirou Yamaguchi，"【Geometrical cross-sectional imaging by a heterodyne wavelength-scanning interference confocal microscope " 5 Optics Letters 5 Vol. 25 Issue 8 Page 548 (April 2000); 6. 李超煌、汪治平，”差動共焦顯微術及其應用”，物理學月刊(二十卷 五期)1998年10月； 7·王雍舜、王正宇、高甫仁，”非線性光學於顯微技術上的應用—雙光子 共焦掃描顯微鏡··，物理學月刊(二十卷六期)1998年12月；That is to say, the three-dimensional spatial reference component is not only subtle, but also provides a relative * relationship. I In the domestic aspect, some people have improved the traditional confocal microscopy technique in the past, using the new far-field optical microscopy using "differential confocal microscopy" (such as the following reference 6) to obtain up to 2 by confocal microscopy. Nai (4) Longitudinal resolution system does not need to use any back-to-wire to lock the position of the measured object, completely open-circuit operation 'should have fast and immediate imaging capability, for measuring biofilm and living bio-lu, group The weaving movement has a special advantage and can be applied to measure the elastic and biochemical reactions of the mechanical disturbance of the live fine lin. There are also techniques for fine two-photon co-scaling microscopy (as in the following reference 7) ▲ single photon; |, microscope, usually using visible or ultraviolet light generated by ion laser as a sample of m The filament material is stimulated to produce a filament - a 3D f silk image. However, the images obtained in this way have the disadvantages. 'Axis total _ micro-mirrors are used to hide the scales, but the light in the sample will be excited. If the object to be observed is a living cell, it may be caused by 1274150 浐口 j kills living cells with the produced toxins, if two-photon confocal microscopy and 々& 吏 use a longer-wavelength source, and use two-photon-excited fluorescence to produce a ^ image that is only focused on the beam Excitation of the dye is produced on the cross section, which greatly reduces the "Z-ray excitation" and increases the depth of the fluorescence scan for scanning thicker samples. "Conclusion on the conclusion that for non-conductive high-penetration objects, the use of confocal micromirrors as a tree" is extremely important, although the confocal microscope has a vertical of nearly 2 nm. Analytical ability, but because in such a case, the relative energy_object_depth is not deep, when the numerical aperture of the lens (A) H 'can increase the measurement thin' but at this time it will reduce the longitudinal The resolution is 1. The optical microscopy technology is completely different from the previous microscopy technology, so 'has novelty|± its advantages are non-contact, non-destructive, and the sample does not need to be conductive or used. Any additional processing, low cost, simple system, easy assembly and adjustment, high resolution monthly b force (<lnm), large measurement range (> soil i〇vm), real-time measurement of reflective objects and transparent objects. The inventor of the present invention published in 2004 to use the critical angle method for small displacement measurement (such as the following reference 8); using the parallel light incident lens reflected back to the original path through the reflective surface, when the reflective surface is not in the focal plane, the return lens is triggered After the light appears diverging or converging, this When the scattered or convergent light is incident on a 附近 near the critical angle, the light intensity of the left and right boundaries of the beam changes significantly. The difference between the intensity of the light is proportional to the divergence (convergence) angle, which is also proportional to the exit of the focal plane from the focal plane. The displacement amount, so it can measure the displacement of the object to be tested! 27415 Putian in the surface of the plasma. μ? ", (4) (8) near the resonance angle of the body has a very strong phase hit. After the column of the examination paper 9), this _ (4) The mode similar to the upper axis boundary green 2 The optical path structure combined with the silk Lai Wei can measure the micro-precision more accurately than the touch, and the angle variable enters the smaller the amount of the inspection, that is, the result of the Wei-contracted beam is about the boundary light. _ Interfering with the money system, her husband's calculation of the gamma _ jin yin rate value and then scanning the object under the focal plane, measuring the phase change can be measured the surface of the surface of the agricultural object or the refractive index map, so it can be used as Laser scanning microscopy. Since no related literature or literature has published the same microscopic technique as the present invention, the present invention is unique. Although the prior art relates to surface electro-resonance (SPR) Measurement applications, such as US Patent No. 6, In the previous cases of 775, 〇〇3 and No. 6, 784, 9, the two previous cases all use the light source incident on the reflecting surface of the surface plasma wave to generate light intensity or phase difference to measure the test. The characteristics of the object, but the specific ways of the two are different 'and different from the technology of the present invention, the overall specific technology of the present invention is unique' and has various advantages as described later. References: 1. DK Hamilton and T. Wilson » "Surface profile measurement using the confocal microscope,"/· A/;〆· /% only .53 (7), 5320-2 (1982); 2. Alan Bearden ' Michael Ρ·O'Neill , Leslie C. Osborne, Terrence L,··· Wong· Imaging and vibrational analysis with laser-feedback interferometryM » Optics Letters ^ Vol. 18 Issue 3 Page 238 (February 1993); 3. R. Juskaitis ^ T. Wilson » and NP Rea » Opt. Commun.lQ9 ^ 167 (1994); !27415〇4. D.,Huang,E· A. 'Swanson ' CP,Lin,J·S·,Schuman,WG,Stinson,W.,Chang, M. R., Hee, T., Flotte, K., Gregory, CA, Puliafito ^ JG 5 Fujimoto ^ Science ^ 254 ? 1178 ? 1991; 5. Takashi Fukano, Ichirou Yamaguchi, " [Geometrical cross-sectional imaging by a heterodyne wavelength-scanning interference confocal microscope " 5 Optics Letters 5 Vol. 25 Issue 8 Page 548 (April 2000); 6. Li Chaohuang, Wang Zhiping, "Differential Confocal Microscopy and Its Application", Physics Monthly (20 volumes and 5 issues), October 1998; 7. Wang Wei, Wang Zhengyu, Gao Yuren, "Non Application of Linear Optics to Microscopy - Two-Photon Confocal Scanning Microscope··, Monthly Physics (20 volumes, six issues), December 1998;
8. Shu-Jen Liao, Shinn-Fwu Wang , Ming-Hun^; Chin 2004，“A new method for measuring a small displacement by using the critical method and confocal technology SPIE PA04 Photonics Asia Vol. 5635, pp.211-218(2004);及 9. Chien-Ming Wu, Zhi-Cheng Jian, Shen-Fen Joe, and Liann-Be Chang, High-sensitivity sensor based on surface plasmon resonance and heterodyne interferometry, Sensors and Actuators B, 92,133-136. (2003) 〇 【發明内容】 本發明第一目的，在於提供一種結合共光程外差干涉及表面電 襞共振(SPR)的顯微方法，利用光源射向待測物，經待測物反射或 折射而為測絲，絲得其職光兩邊界光之她差，再以該二相 差的變化S而求得到f靖試光的肖度偏移量，再依該肖度偏移量 計算出該制物馳移量，或高度差，或折射率差。 本發明第 的，在於提供一種利用上述第一目的之原理， 、帚洛方式求出待猶之表缺伏或折射率分布，並侧顯示或 出結果。 本& Θ第—目的，在於提供—種結合共光料奸涉及表面 趙置，包括外差光源、將光齡成反射光與 “的刀光鏡’用以取得參考信號的光侧器使透射光射向待 12 1274150 物’由待測物反射或穿透待測物而形成測試光，再由角度感測器感 測測試光之角度偏移，再由光偵測器接收由該角度感測器所產生之 干涉信號的光制II，再由放大器與鎖減A||接收干涉信號，再 求得測試光的肢偏移量，並計算出該待麟的位移量，或高度 差，或折射率差。 【實施方式】 本發明基於同時增加量測的範圍及其縱向之解析度，提出另一 種光學顯微鏡，名稱定為『角度偏向顯微鏡（angular deflecti〇n miciOscope: ADM)』，可分為反射式與穿透式兩種，反射式角度偏 向顯微鏡可針對任何物體的反射光作量測，只要此反射光線足以達 到光偵測器的量測最小值以上即可測量；穿透式角度偏向顯微鏡乃 針對透明物體之量測，此對於生物樣本的檢測有相當大的助益。 為便於審查了解本發明之技術特點與具體可行性，特將本發明 原理與系統架構的具體實施方式及模擬實驗分述如下。 A·多層Kretschmann-Raether (KR)组態之表面電漿共振原理 表面電漿共振感測器KR組態，在表面電漿共振條件下，可得 很高的相位靈敏度。如第一圖之多層表面電漿共振感測器（1〇)，該 感測器（10)包括一稜鏡(H)，該棱鏡(U)包括一入射面（11〇)、一 反射面（111)與一出射面（112),該反射面（111)上附有至少一金屬 層’當光源入射稜鏡(11)之入射面（110)的入射角α等於共振角 Αρ ’即在稜鏡(11)之反射面（111)上激發出表面電漿波。 13 1274150 以三層結構制’如第-騎示，由Maxwell方程式可得水平 (P)與垂直（S)偏振光的反射係數，如下： P，s ⑴ Ε\8. Shu-Jen Liao, Shinn-Fwu Wang, Ming-Hun^; Chin 2004, “A new method for measuring a small displacement by using the critical method and confocal technology SPIE PA04 Photonics Asia Vol. 5635, pp.211-218 (2004); and 9. Chien-Ming Wu, Zhi-Cheng Jian, Shen-Fen Joe, and Liann-Be Chang, High-sensitivity sensor based on surface plasmon resonance and heterodyne interferometry, Sensors and Actuators B, 92, 133-136. (2003) 〇 [Summary of the Invention] A first object of the present invention is to provide a microscopic method for combining surface electro-mechanical resonance (SPR) with a common optical path heterodyne, which is directed to a test object by a light source and reflected by the object to be tested. Or refracting and measuring the wire, the silk gets the difference between the two boundary lights of the light, and then the difference of the two phase difference S is obtained to obtain the Xiao offset of the light test, and then according to the Xiao offset The amount of the workpiece is shifted, or the height difference, or the refractive index difference. The first aspect of the present invention provides a method for determining the vacancy or refractive index distribution of the surface to be used by using the principle of the first object described above. And the side shows or results. Ben & The first purpose is to provide a combination of symmetry and light, including a heterodyne light source, a light source that reflects light and a light source that is used to obtain a reference signal to transmit light. Shooting to 12 1274150 object 'reflects or penetrates the object to be tested to form test light, and then the angle sensor senses the angular deviation of the test light, and then the light detector receives the angle sensing The optical signal II of the interference signal generated by the device, and then the interference signal is received by the amplifier and the lock A||, and then the limb offset of the test light is obtained, and the displacement amount or height difference of the to-be, or the height difference, or The difference in refractive index. [Embodiment] The present invention proposes another optical microscope based on the simultaneous increase of the range of measurement and the resolution of its longitudinal direction, and is named "angular deflecti〇n miciOscope (ADM)", which can be divided into reflection type and Transmissive two-way, reflective angle-biased microscope can measure the reflected light of any object, as long as the reflected light is enough to reach the minimum of the photodetector measurement; the transmissive angle-biased microscope is aimed at The measurement of transparent objects is quite helpful for the detection of biological samples. In order to facilitate the review of the technical features and specific feasibility of the present invention, the specific embodiments and simulation experiments of the present principles and system architecture are described as follows. Surface Acoustic Resonance Principle of A·Multilayer Kretschmann-Raether (KR) Configuration The surface-plasma resonance sensor KR configuration provides high phase sensitivity under surface plasma resonance conditions. A multi-layer surface plasma resonance sensor (1) as shown in the first figure, the sensor (10) comprising a 稜鏡 (H), the prism (U) comprising an incident surface (11 〇), a reflective surface (111) and an exit surface (112) having at least one metal layer attached to the reflective surface (111). The incident angle α of the incident surface (110) of the light source incident 稜鏡 (11) is equal to the resonance angle Αρ′ A surface plasma wave is excited on the reflecting surface (111) of the crucible (11). 13 1274150 In a three-layer structure, such as the first-riding, the reflection coefficient of horizontal (P) and vertical (S) polarized light can be obtained by Maxwell's equation, as follows: P, s (1) Ε\
P (2) 其中心⑺為由介㈣对，沿著4向傳播的波向量所組成 kzi(j) =k0^nKj) ^n\ sin2 a) 其中％分別為棱鏡、金屬層、空氣層的折射率，々。為真空 中的波向量。 ⑷P (2) The center (7) is composed of four (four) pairs, and the wave vector propagating along the four directions is composed of kzi(j) = k0^nKj) ^n\ sin2 a) where % is the refraction of prism, metal layer and air layer respectively Rate, hehe. Is the wave vector in vacuum. (4)
^123=^3^, <23= |<23 P相對於S偏振光的相位差J為 δ = φρ 此外，Ρ、S偏振光的反射率分別為〜^ 。 因為只有在Ρ偏振光才會激發表面電聚共振，且共振角位於最 小反射率值~。第二圖為反射率々與相位差^對應入射角α之關 係圖。若人射角等於共振角（α =〜），斜此時角度偏㈣，且 相位差J令此時之相位差~=〇。由此可知，在共振角附近的地方， 入射光角度變化正比於相位變化，曲線呈線性_，因此_正比 於ΑΘ 〇 Β·待測面偏離透鏡之焦平面和角度偏向之關係 第三圖顯示了位於透鏡⑽焦距為,上的待測物（為高反射 14 1274150 體），當位移Δζ時，造成光路偏離原來路徑方向，而形成角度之偏 移量Α/9或-ΔΘ。在此裝置中，雷射光先經由透鏡(2〇)到待測物（μ) 後再被待測物（21)反射回去。若待測物（21)的位置是在該透鏡(2〇) 的焦平面上，反射回去的雷射光線則與入射光線平行，若待測物（21) 位置非在焦平面上，會產生一個ΔΘ或-的角度變化量，使得雷 射光束會產生些許收斂或發散的現象。此現象可由第三圖的幾何關 係可導出為： φ /2 Δζ =--ΑΘ D (6) 其中/為透鏡焦距、D為光束的直徑、是指待測物離焦平面位置 的距離、^收斂或發散之微小角度變量。由式⑹可知&和^幾 乎是維持一個線性關係。再加上棱鏡表面電漿共振（spR)原理 (Δ〜却），可知&和却亦成一個線性關係。由第三圖知，若待測物 遠離透鏡（Δζ > 0 )，則由待測物（21)反射回來再經過透鏡(2〇)的光為 • 收斂光，反之（Δζ<0)，由待測物(21)反射回來再經過透鏡(20)的 光為發散光。 C·角度偏移舆折射率之關係 對於穿透式顯微技術而言，待測材料為高透明度之物件，如第 四圖（a)所示，以幾何關係做近軸近似，當雷射光由一透鏡(3〇)聚 焦經過厚度D、折射率為„的物件⑽時，其焦點位移&的距離為 15 (7)1274150 d - D sin Θ 1 1 -sin 2 Θ^123=^3^, <23= |<23 P The phase difference J with respect to S-polarized light is δ = φρ In addition, the reflectances of Ρ and S-polarized light are respectively ~^. Because only the Ρpolarized light will excite the surface electro-convergence resonance, and the resonance angle is at the minimum reflectance value~. The second graph is a relationship between the reflectance 々 and the phase difference ^ corresponding to the incident angle α. If the angle of incidence of the person is equal to the resonance angle (α = ~), the angle is inclined (4), and the phase difference J makes the phase difference at this time ~=〇. It can be seen that in the vicinity of the resonance angle, the incident light angle changes proportionally to the phase change, and the curve is linear _, so _ is proportional to ΑΘ 〇Β · the surface to be measured deviates from the focal plane of the lens and the angle deviation is shown in the third figure. The object to be tested (which is a high reflection 14 1274150 body) located at the focal length of the lens (10), when displaced by Δζ, causes the optical path to deviate from the original path direction, and forms an angular offset of Α/9 or -ΔΘ. In this device, the laser light is first reflected back to the object to be tested (21) via the lens (2〇) to the object to be tested (μ). If the position of the object to be tested (21) is on the focal plane of the lens (2〇), the reflected laser light is parallel to the incident light. If the position of the object to be tested (21) is not in the focal plane, it will be generated. An angular change in ΔΘ or - causes the laser beam to converge or diverge. This phenomenon can be derived from the geometric relationship of the third graph as follows: φ /2 Δζ =--ΑΘ D (6) where / is the focal length of the lens, D is the diameter of the beam, and refers to the distance from the focal plane of the object to be measured, ^ A small angle variable that converges or diverges. It can be seen from equation (6) that & and ^ almost maintain a linear relationship. Coupled with the prism surface plasma resonance (spR) principle (Δ~ but), it can be seen that & and it also has a linear relationship. It is known from the third figure that if the object to be tested is far away from the lens (Δζ > 0 ), the light reflected by the object (21) and passing through the lens (2〇) is a convergent light, and vice versa (Δζ < 0), The light reflected by the object to be tested (21) and passed through the lens (20) is divergent light. C. Angle offset 舆 refractive index relationship For the transmissive microscopy technology, the material to be tested is a highly transparent object, as shown in the fourth figure (a), the near-axis approximation is made by the geometric relationship, when the laser light When an object (10) having a thickness D and a refractive index of „ is focused by a lens (3〇), the distance of the focus shift & is 15 (7) 1274150 d - D sin Θ 1 1 - sin 2 Θ
d sin^ ...(8) 故由（7)及(8)是可知，焦點的位移與此物件（3幻的厚度及折射 率有關。當厚度D固定’折射率/2愈大，則&愈大。d sin^ (8) Therefore, it can be seen from (7) and (8) that the displacement of the focus is related to the thickness of the object (3 illusion and refractive index. When the thickness D is fixed, the larger the refractive index/2 is, then & the bigger.
如第四圖（b)所示，當雷射光經一透鏡(3〇)聚焦在物件（32) 上，其透射光又經過另一個透鏡(31)後成為平行光，即此物件(32) 處在兩透鏡(30)(31)的共焦處。若如第四圖（c)所示，當物件（32) 有折射率改變時（Δ")即造絲關位移，並產生最後的出射光 收斂或發散（折射率增加，Δζ增加，光發散；反之，光收斂。）， 此發散或收斂光經角度感測器後，即可換算出Δη。 D·系統架構原理 我們將以外差干涉儀基本原理絲面賴共振原理為基礎再 • Μ過一些巧妙的光路安排，來量測微小位移的移動量(待測物之高 度變化）。大致上是以-個具有兩種偏極（Ρ偏極與s偏極）的外差 光源以透鏡聚焦在某待測面上，其反射光藉由在一 Kmschmann-Raether⑽組態的直紐鏡反射後，以檢偏板個別 取出光束的兩個邊界光的干涉信號心，〜，其相位差值$哨办與 待測物離開焦平面的距離&成正比。因此，藉由兩邊界光之間的相 位差變化量ΔΦ，可計算出待測物的位移量或高度差。 E·以SPR共光程外差干涉儀作微小位移量測之實驗架構 16 1274150 實驗的整個光學系統的架構如第五圖所示，第六圖為反射式架 構’第七®為穿透式架構。主要可分成三個部份：⑷外差光源部 份’（B)光路架構與(〇信號處理部份。 (A)外差光源(40)，該外差光源⑽為一可發#出具有相互垂 直之線性偏振（P與㈣極）且有—頻率的差值之雷概的雷射光 源0 (B)光路架構，包括有： -分光鏡⑽，該雷㈣源發射出來的雷射光經該分光鏡⑽ 分成反射光與穿透光。 一第一檢偏板Mr與一第一光偵測器Dr，該反射光經該第一檢 偏板ANr與該第一光偵測器Dr得到參考信號/r。 一透鏡(41)、一具有入射面與反射面及出射面而且可在反射面 被激發產生表面電漿波的稜鏡(11)、一第二檢偏板ANt，將待測物 (42)置於透鏡(41)後方’使該穿透光經該透鏡（μ)再經該待測物 (42)反射返回原路徑而為測試光，該測試光經過該分光鏡防之 後，入射該稜鏡(11)，並於稜鏡(11)的反射面激發表面電漿波，再 經該第二檢偏板Ant後’由該第二光偵測器j)t接收干涉信號，該 干涉信號為測試信號心。其中，該稜鏡(11)可置於一旋轉平台（43) 上，以便調整測試光的入射角接近表面電漿波的共振角。另可使該 待測物(42)置於一具有多轴移動功能的平台（44)上（其可以壓電致 動器PZT來致動）’以便透射光可連續移動至該待測物(42)上的不 17 1274150 同位置做掃描，使該待測物（42)各位置之角度偏移量，或位移量， 或高度差，得以被計算出來。 (C)^5虎處理^包括有·· 將測试仏唬分成兩個部分，為該測試光的兩邊緣，分別為0與 〜，此一k號可經由放大器（45)放大，再輸入至鎖相放大器（46)。 將測試信號〇與/β分職參考信狀經鎖減Ali (46)比 較出相位差分別為〜與〜，其之間的差為ϋ其中〜是測 試光某-邊緣錢與參考光之相位差、為測試光另—邊緣信號 與參考域之她差。當制物在透鏡之焦平面時，φ=().知厂 當待測物不在透鏡之焦平面時，φ_λ⑷。且位移前後之相位變 化量ΔΦ正比於位移量Δζ。 將妙值代入公式ΛΦ =歸與，即可得到角度偏移 莖及位移1△”此運算過程皆由個人電腦（pc)依撰寫程式完成。 ❿其中K值為-比例常數與角度感測器上的鑛膜有關。最後依所得的 位移量Δζ作圖，並顯示或輸出結果。 ^ Α ·，入別八丹及偏移顯微鏡之實驗架構 如第八圖所Τ纟結構與微小位移量測系統架構相似，一具1 高反射率之制物42被放置於—具有多__平台从之上，」 在透鏡41之焦平面附近，採用之原理與微小位移量測相同。當另 束前進之方向定為ζ軸，掃_在xy平面上，糊多軸微小卿 控制器移解台44與待嶋42，掃描待_2的π平面連: 18 1274150 紀錄被掃描之制物每―點的高度差Δζ (相當於料 移），然後依高度差作圖，即可得到待測物表面之微細結構。 G·穿透式角度偏移顯微鏡之實驗架構 如第傾麻，-财高_度之制物42被放置於一 夕軸移動的平台44之上，财透鏡41之鮮_近採用之原理 與微小位移量測姻，_透制物42之緣故，需要另—個透鏡 剔將光束收集’此二透鏡4卜乃是共焦結構。當光束前進之 方向定為Z軸，掃描則在xy平面上，利用多轴微小位移控制哭移 動平台44與制物42，掃描待測物xy平面，連續紀錄被掃描之每 一點的高度差或折鱗差（相#於縱向z_位移），然後依高度 差或折射率差個，即可得到待測物内部之微細結構。 又 H·模擬舆實驗結果 a·相位差值對不同待測物位移&之變化 第八圖顯示了外差光源在各種透鏡下對不同的待測物位移量 & (由壓電致動态ΡΖΤ控制移動-l〇〇nm〜l〇〇nm)，所對應的相位差φ 之模擬及實驗量測結果。由此圖可得知相位差相對於位移量為線性 變化。我們以四個不同NA值的透鏡作模擬，分別為NA=〇. 85、 ΝΑ-0· 65、ΝΑ=0· 4、ΝΑ=0· 25，並由ΝΑ=0· 4作為首次實驗的結果， 由第八圖可看出’實驗值與理論值相當吻合。因此可證明此方法之 可行性。其可測量之範圍（深度）至少為十幾。 bt靈敏度 19 (9) 1274150 此系統的靈敏度S(Sensitivity)可表示成： d(j) 二-- dz 其中為微小位移、抑為微小位移所對應的相位差改變值。我們 以第九圖的模擬數據來計算在NA值為〇· 85之透鏡，最佳靈敏度可 達S=0· 2048 degree/nm。第九圖顯示了不同να值的透鏡所得到的 靈敏度值，對於一個敏感的光學量測系統而言，靈敏度愈大愈好。 c·解析度： 解析度R(Resolution)是指在系統中能判別最小的位移值，定 義如下 ΔΦ (10) 其中ΔΦ為鎖相放大器（Lock-in ampiifier#&判讀最小的相位改變 量，在此實驗中δφ，經由計算可得NA值為〇· 4之透鏡，解析度可 達R=0· 3nm ; ΝΑ=0· 85時，R=〇· 〇5nm。第十圖顯示了不同NA值的透 鏡所得到的解析度值，對於一個敏感的光學量測系統而言，解析度 愈小愈好。 I·特點舆功效 a·角度偏移顯微鏡（麵）是利用精確的測量光束之角偏移，而得 到其相對應之待測物理量，例如位移量，高度差、或折射率之 差，經雷射掃描技術，求出每一點的物理量，繪圖進而得出待 測物之表面或内部微細結構。 b· /則里之範圍，系統之靈敏度與解析度皆決定於NA的大小。值 1274150 越大，量測範圍越小，解析度越高。 C·里測範圍可局於十幾 “一 卞她（"m)，解析度可高於him。 :、先程結構，穩定性高，容易架設與量測。 e.系統結構與原理簡單，成本低廉。 ί.可即時量測透明與非透明樣本，適用性極佳。 g _破紐非接觸性，不需任何表面處理、高縱向解析度（< m)與大里測耗圍（>±1〇_之光學顯微鏡，可觀察物體 表面⑽造度、輪廓、分子排列、缺陷、與系統之對準定位、 校正、安裝等功能。以及可觀察物體内部結構、排列分布與 異樣分析。赠為生物科技之組織、細胞、基因、蛋白質科 夺觀測不會對樣品有任何破壞與毒性故可作為活體試驗。 可作為半導體、光電、精密製造、生醫產業之製程中物件表面 粗操、鍍膜厚度、之量測。 h·本發明乃利用表面電漿共振原理結合共光程外差干涉儀高精確 穩定的優點，因而可測出在共振角附近之相位與強度的變化， 及換异出入射光的角度，並由相位差或光強度的改變，即可知 其旋轉的方向與旋轉角度的大小，因此，本發明確實可提升量 測時的精準度及精確度。 i·本發明乃利用表面電漿共振原理結合共光程外差干涉儀，因而 可應用於各種移動平台各轴向的偏轉之測量及光學或其他系統 之校正，安裝，對準以及可延伸做為顯微鏡定位技術等方面之 21 1274150 應用因此，本發明確實深具產業之利用性。 以上所逑’僅為本發明之一可行實施例，並非用以限定本發明 之專圍凡舉依據下列申請專利範圍所述之内容、特徵以及其 精神而為之其他變化的等效實施，皆應包含於本發明之專利範圍 内。本發騎具體砂於ψ料利棚之結構雜，未見於同類物 口口’且具實祕與進步性，已符合發明專利要件，爰依法具文提出 I ’心釣局依法核科利，以維護本申請人合法之權益。 【圖式簡單說明】 第-圖係本發明表面魏共振之敝態圖； 第-圖係本發明反神心與相位差靖應人㈣〃之關係圖； 第三圖係本發明待側面偏雜平面與肢偏向之關係圖； 第四-8圖係本發明透射光穿越制物產生折射現象示意圖； 第四-b圖係本發明透射光穿越位在兩透鏡之共焦平面上的待測物 產生折射現象示意圖； _ 第四-C圖係本發明透射光穿越待測物產生折射率變化示意圖； 第五圖係本發明SPR共光程外差干涉儀作微小位移量測之架構圖； 第六圖係本發明反射式架構示意圖； 第七圖係本發明之穿透式架構示意圖； 弟八圖係本發明各種NA值透鏡下之位移量實驗與模擬圖； 第九圖係本發明各種NA值透鏡下之靈敏度實驗與模擬圖；及 弟十圖係本發明各種NA值透鏡下之解析度實驗與模擬圖。 【主要元件符號說明】 22 1274150 (10)角度感測器 (11)棱鏡 (110)入射面 (111)反射面 (112)出射面 (20)(30)(31)(41)(410)透鏡 (21)(42)待測物 (32)物件 (40)外差光源 (43)(44)平台 (45)放大器 (46)鎖相放大器As shown in the fourth figure (b), when the laser light is focused on the object (32) via a lens (3), the transmitted light passes through the other lens (31) and becomes parallel light, that is, the object (32). It is at the confocal point of the two lenses (30) (31). If, as shown in the fourth figure (c), when the object (32) has a refractive index change (Δ"), the wire is turned off and the final exit light converges or diverges (increased refractive index, Δζ increases, light divergence) Conversely, the light converges.), after the diverging or converging light passes through the angle sensor, Δη can be converted. D·System Architecture Principle Based on the basic principle of the heterodyne interferometer, the principle of the surface is based on the resonance principle. • Some subtle optical path arrangements are used to measure the amount of movement of the small displacement (the height of the object to be tested). In general, a heterodyne light source with two kinds of polarizations (Ρpolar and s-polar) is focused on a certain surface to be measured by a lens, and the reflected light is configured by a Knockmann-Raether (10) configuration. After the reflection, the interference signal cores of the two boundary lights of the beam are individually taken out by the analyzer, and the phase difference value of the post is proportional to the distance from the focal plane of the object to be tested. Therefore, the displacement amount or height difference of the object to be tested can be calculated by the phase difference change amount ΔΦ between the two boundary lights. E·Experimental architecture for small displacement measurement with SPR common path heterodyne interferometer 16 1274150 The whole optical system of the experiment is constructed as shown in the fifth figure, and the sixth picture is the reflective structure 'Seventh® is transmissive Architecture. It can be divided into three parts: (4) the heterodyne light source part '(B) optical path structure and (〇 signal processing part. (A) heterodyne light source (40), the heterodyne light source (10) is a A mutually perpendicular linear polarization (P and (four) poles) and a laser source with a difference in frequency - 0 (B) optical path architecture, including: - a beam splitter (10), which emits laser light from a source The beam splitter (10) is divided into reflected light and transmitted light. A first analyzer plate Mr and a first photodetector Dr, the reflected light is obtained by the first analyzer ANR and the first photodetector Dr. Reference signal /r. A lens (41), a 具有(11) having an incident surface, a reflecting surface and an emitting surface, and being excited on the reflecting surface to generate a surface plasma wave, a second analyzer ANT, to be The test object (42) is placed behind the lens (41) to pass the transmitted light through the lens (μ) and then reflected back to the original path through the object to be tested (42) to be test light, and the test light passes through the spectroscope Afterwards, the 稜鏡 (11) is incident, and the surface plasma wave is excited on the reflective surface of the 稜鏡 (11), and then received by the second photodetector j)t after the second analyzer Interference signal, the interference signal is a test signal heart. Wherein, the crucible (11) can be placed on a rotating platform (43) to adjust the incident angle of the test light to be close to the resonance angle of the surface plasma wave. Alternatively, the object to be tested (42) can be placed on a platform (44) having a multi-axis moving function (which can be actuated by the piezoelectric actuator PZT) so that the transmitted light can be continuously moved to the object to be tested ( 42) No 17 1274150 The same position is scanned so that the angular offset, or the displacement amount, or the height difference of each position of the object to be tested (42) can be calculated. (C)^5 Tiger processing^includes ··· The test 仏唬 is divided into two parts, for the two edges of the test light, respectively 0 and ~, this k number can be amplified by the amplifier (45), and then input To the lock-in amplifier (46). Comparing the test signal 〇 with the /β sub-reference letter, the phase difference is ~~~, and the difference between them is ϋ where ～ is the phase of the test light some-edge money and reference light Poor, for the test light, the edge signal is not the same as the reference field. When the workpiece is in the focal plane of the lens, φ = (). Know factory When the object to be tested is not in the focal plane of the lens, φ_λ(4). The phase change amount ΔΦ before and after the displacement is proportional to the displacement amount Δζ. Substituting the magic value into the formula Λ Φ = return, you can get the angle offset stem and the displacement 1 △" This calculation process is completed by the personal computer (pc) according to the writing program. ❿ where K value - proportional constant and angle sensor It is related to the mineral film. Finally, it is based on the obtained displacement amount Δζ, and displays or outputs the result. ^ Α ·, the experimental structure of the Eighth Dan and the offset microscope, as shown in the eighth figure, the structure and the micro displacement measurement The system architecture is similar, with a 1 high reflectivity article 42 placed over - with more __ platform from above," near the focal plane of lens 41, using the same principle as the micro displacement measurement. When the direction of the other beam advances as the ζ axis, the sweep _ in the xy plane, the paste multi-axis micro-controller shifting station 44 and the to-be-twisted 42, scanning the π plane of the _2 plane: 18 1274150 The record is scanned The height difference Δζ (equivalent to the material shift) per point of the object is then plotted according to the height difference to obtain the fine structure of the surface of the object to be tested. G. The experimental framework of the penetrating angle-shifting microscope is as follows: the material 42 of the penetrating angle-shifting microscope is placed on the platform 44 of the moving axis of the idyllic axis. Small displacement measurement, _ through the material 42, the need for another lens to collect the beam 'the two lenses 4 is a confocal structure. When the direction in which the beam advances is defined as the Z-axis, the scanning is performed on the xy plane, and the multi-axis micro-displacement is used to control the crying mobile platform 44 and the workpiece 42, scanning the xy plane of the object to be tested, and continuously recording the height difference of each point scanned or The difference of the scales (phase #z displacement in the longitudinal direction), and then according to the height difference or the difference in refractive index, the fine structure inside the object to be tested can be obtained. H. Simulated 舆 experimental results a· Phase difference for different object displacements & changes The eighth graph shows the displacement of different heterodyne sources under various lenses & (actuated by piezoelectric The state ΡΖΤ controls the movement - l 〇〇 nm ~ l 〇〇 nm), the corresponding phase difference φ simulation and experimental measurement results. From this figure, it can be seen that the phase difference changes linearly with respect to the amount of displacement. We simulated the lenses with four different NA values, NA = 〇. 85, ΝΑ-0· 65, ΝΑ=0·4, ΝΑ=0·25, and ΝΑ=0· 4 as the result of the first experiment. It can be seen from the eighth figure that the experimental values are in good agreement with the theoretical values. Therefore, the feasibility of this method can be proved. Its measurable range (depth) is at least a dozen. Bt sensitivity 19 (9) 1274150 The sensitivity S(Sensitivity) of this system can be expressed as: d(j) 2 -- dz where is the small displacement, which is the phase difference change value corresponding to the small displacement. We use the simulation data of the ninth figure to calculate the lens with an NA value of 〇·85, and the best sensitivity can reach S=0·2048 degree/nm. The ninth graph shows the sensitivity values obtained for lenses with different να values. For a sensitive optical measurement system, the greater the sensitivity, the better. c·Resolution: Resolution R (Resolution) refers to the smallest displacement value that can be discriminated in the system, defined as ΔΦ (10) where ΔΦ is the lock-in amplifier (Lock-in ampiifier#& the smallest phase change amount, In this experiment, δφ, through calculation, can obtain a lens with an NA value of 〇·4, and the resolution can reach R=0·3nm; when ΝΑ=0·85, R=〇· 〇5nm. The tenth figure shows different NA The resolution value obtained from the value of the lens, the smaller the resolution is, the better the resolution is for a sensitive optical measurement system. I·Features 舆Efficacy a·Angle offset microscope (surface) is the angle of the precise measurement beam Offset, and obtain the corresponding physical quantity to be tested, such as the amount of displacement, height difference, or difference in refractive index. Through the laser scanning technique, the physical quantity of each point is obtained, and the surface or interior of the object to be tested is obtained by drawing. Microstructure. The range of b· /, the sensitivity and resolution of the system are determined by the size of NA. The larger the value is 1274150, the smaller the measurement range is, the higher the resolution is. C·The range of measurement can be less than ten "After seeing her ("m), the resolution can be higher than him.: Advanced structure, high stability, easy to set up and measure e. System structure and principle are simple, low cost. ί. Instantly measure transparent and non-transparent samples, excellent applicability. g _ broken non-contact, no Any surface treatment, high longitudinal resolution (<m) and large-scale measurement (>±1〇_ optical microscope, observable object surface (10) build-up, contour, molecular alignment, defects, alignment with the system Positioning, calibration, installation, etc., as well as the internal structure, arrangement and distribution of observable objects. The organization, cells, genes, and proteins that are given to biotechnology will not cause any damage or toxicity to the sample, so it can be used as a living test. It can be used as a semiconductor, optoelectronic, precision manufacturing, biomedical industry process in the rough surface of the workpiece, coating thickness, and measurement. h · The invention uses the surface plasma resonance principle combined with the common optical path heterodyne interferometer to be highly accurate and stable. The advantage of the phase and intensity changes around the resonance angle, and the angle of the incident light, and the phase difference or the change of the light intensity can be known. The direction of rotation and the angle of rotation, therefore, the present invention can indeed improve the accuracy and accuracy of measurement. i. The present invention utilizes the principle of surface plasma resonance combined with a common optical path heterodyne interferometer, and thus can be applied to Measurement of the axial deflection of various mobile platforms and correction, mounting, alignment and extension of optical or other systems as a microscope positioning technology 21 1274150 Application Therefore, the present invention is indeed industrially useful. The present invention is intended to be only one of the possible embodiments of the present invention, and is not intended to limit the scope of the present invention. Within the scope of the patent of the present invention. The hair ride of the specific sand in the material shed is not found in the mouth of the similar kind and has the secret and progressive nature. It has been in conformity with the patent requirements of the invention, and it has been proposed according to law. To protect the legal rights of the applicant. BRIEF DESCRIPTION OF THE DRAWINGS The first diagram is a diagram of the surface Wei resonance of the present invention; the first diagram is a diagram of the relationship between the anti-sacred heart of the present invention and the phase difference Jingying (four) ;; The relationship between the miscellaneous plane and the limb deflection; the fourth to eighth diagrams are schematic diagrams of the refraction phenomenon of the transmitted light passing through the workpiece; the fourth-b diagram is the transmitted light passing position of the present invention on the confocal plane of the two lenses to be tested Schematic diagram of the phenomenon of refraction of the object; _ fourth-C diagram is a schematic diagram of the refractive index change of the transmitted light passing through the object to be tested; the fifth figure is an architecture diagram of the SPR common optical path heterodyne interferometer for micro displacement measurement; 6 is a schematic diagram of a reflective architecture of the present invention; seventh is a schematic diagram of a transmissive architecture of the present invention; FIG. 8 is an experimental and simulation diagram of displacements under various NA-value lenses of the present invention; The sensitivity experiment and simulation diagram under the NA value lens; and the Tenth diagram are the resolution experiments and simulation diagrams of the various NA value lenses of the present invention. [Main component symbol description] 22 1274150 (10) Angle sensor (11) Prism (110) Incidence surface (111) Reflecting surface (112) Exit surface (20) (30) (31) (41) (410) Lens (21) (42) Object to be tested (32) Object (40) Heterodyne light source (43) (44) Platform (45) Amplifier (46) Lock-in amplifier
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