JP2007248168A5 - - Google Patents
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- JP2007248168A5 JP2007248168A5 JP2006070132A JP2006070132A JP2007248168A5 JP 2007248168 A5 JP2007248168 A5 JP 2007248168A5 JP 2006070132 A JP2006070132 A JP 2006070132A JP 2006070132 A JP2006070132 A JP 2006070132A JP 2007248168 A5 JP2007248168 A5 JP 2007248168A5
- Authority
- JP
- Japan
- Prior art keywords
- cantilever
- light
- reflected
- atomic force
- light sources
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000006073 displacement reaction Methods 0.000 claims 3
- 230000003287 optical Effects 0.000 claims 2
Claims (2)
互に波長の異なるレーザー光を発生する２つの独立した光源と、
前記２つの光源によるレーザー光のうちの一方を前記カンチレバーの自由端部で反射させ、他方を前記カンチレバーの固定端部で反射させる２つの集光光学系と、
前記カンチレバーの自由端部で反射した反射光と前記カンチレバーの固定端部で反射した反射光とをそれぞれ受光する２つの受光器と、を有し、
前記２つの受光器による独立した２つの出力に基づいて前記カンチレバーの変位を演算することを特徴とする原子間力顕微鏡。 In the atomic force microscope that receives the reflected light of the light incident on the cantilever and measures the displacement of the cantilever due to the atomic force with the object to be measured,
Two independent light sources that generate laser light of different wavelengths,
Two condensing optical systems that reflect one of the laser beams from the two light sources at the free end of the cantilever and the other at the fixed end of the cantilever;
Anda two light receivers for receiving respectively the reflected light reflected by the fixed end portion of the reflected and the reflected light the cantilever at the free end portion of said cantilever,
An atomic force microscope characterized in that the displacement of the cantilever is calculated based on two independent outputs from the two light receivers.
前記複数の光源は互にすべて異なる波長のレーザー光を発生することを特徴とする請求項１記載の原子間力顕微鏡。 It said cantilever comprises multiple displacement detecting device comprising the two light sources and the two focusing optical system,
Wherein the plurality of light sources each other all characterized by generating a laser beam of different wavelengths according to claim 1, wherein the atomic force microscope.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006070132A JP4939086B2 (en) | 2006-03-15 | 2006-03-15 | Atomic force microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006070132A JP4939086B2 (en) | 2006-03-15 | 2006-03-15 | Atomic force microscope |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007248168A JP2007248168A (en) | 2007-09-27 |
| JP2007248168A5 true JP2007248168A5 (en) | 2009-05-14 |
| JP4939086B2 JP4939086B2 (en) | 2012-05-23 |
Family
ID=38592652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006070132A Expired - Fee Related JP4939086B2 (en) | 2006-03-15 | 2006-03-15 | Atomic force microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4939086B2 (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008089510A (en) * | 2006-10-04 | 2008-04-17 | Research Institute Of Biomolecule Metrology Co Ltd | Scanning probe microscope, probe for the same, and inspection method |
| JP4936541B2 (en) * | 2007-08-10 | 2012-05-23 | キヤノン株式会社 | Atomic force microscope |
| EP2374011B1 (en) * | 2008-12-11 | 2018-11-21 | Infinitesima Limited | Dynamic probe detection system and method |
| JP6229914B2 (en) * | 2013-08-06 | 2017-11-15 | オックスフォード インストルメンツ アサイラム リサーチ，インコーポレイテッド | Light beam positioning unit for atomic force microscope |
| CN103968765B (en) * | 2014-05-27 | 2016-08-17 | 海宁科海光电科技有限公司 | Focus on offset displacement sensor |
| CN104897064B (en) * | 2015-06-09 | 2018-06-01 | 张白 | A kind of new smooth arm amplifying type high precision length sensor and measuring method |
| CN110986761B (en) * | 2019-11-18 | 2021-07-06 | 中国科学院上海光学精密机械研究所 | Picomicroscope |
| CN112964909B (en) * | 2020-09-16 | 2023-12-01 | 中国科学院沈阳自动化研究所 | Method and device for measuring simultaneous independent movement of multiple probes of atomic force microscope |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH074909A (en) * | 1993-06-14 | 1995-01-10 | Fanuc Ltd | Laser sensor apparatus |
| JPH07301516A (en) * | 1994-04-29 | 1995-11-14 | Olympus Optical Co Ltd | Surface shape measuring instrument |
| JP2000234994A (en) * | 1999-02-16 | 2000-08-29 | Jeol Ltd | Method for measuring displacement of cantilever in scanning probe microscope |
| JP2001304833A (en) * | 2000-04-21 | 2001-10-31 | Olympus Optical Co Ltd | Optical lever type inclination detecting apparatus |
| JP2003014611A (en) * | 2001-06-29 | 2003-01-15 | Olympus Optical Co Ltd | Scanning type probe microscope |
| JP2004061349A (en) * | 2002-07-30 | 2004-02-26 | Ishizuka Glass Co Ltd | 3-dimensional measurement inspection method and its system |
-
2006
- 2006-03-15 JP JP2006070132A patent/JP4939086B2/en not_active Expired - Fee Related
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