JP2007248168A5 - - Google Patents

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Publication number
JP2007248168A5
JP2007248168A5 JP2006070132A JP2006070132A JP2007248168A5 JP 2007248168 A5 JP2007248168 A5 JP 2007248168A5 JP 2006070132 A JP2006070132 A JP 2006070132A JP 2006070132 A JP2006070132 A JP 2006070132A JP 2007248168 A5 JP2007248168 A5 JP 2007248168A5
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JP
Japan
Prior art keywords
cantilever
light
reflected
atomic force
light sources
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Application number
JP2006070132A
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English (en)
Japanese (ja)
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JP4939086B2 (ja
JP2007248168A (ja
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Priority to JP2006070132A priority Critical patent/JP4939086B2/ja
Priority claimed from JP2006070132A external-priority patent/JP4939086B2/ja
Publication of JP2007248168A publication Critical patent/JP2007248168A/ja
Publication of JP2007248168A5 publication Critical patent/JP2007248168A5/ja
Application granted granted Critical
Publication of JP4939086B2 publication Critical patent/JP4939086B2/ja
Expired - Fee Related legal-status Critical Current
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JP2006070132A 2006-03-15 2006-03-15 原子間力顕微鏡 Expired - Fee Related JP4939086B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006070132A JP4939086B2 (ja) 2006-03-15 2006-03-15 原子間力顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006070132A JP4939086B2 (ja) 2006-03-15 2006-03-15 原子間力顕微鏡

Publications (3)

Publication Number Publication Date
JP2007248168A JP2007248168A (ja) 2007-09-27
JP2007248168A5 true JP2007248168A5 (de) 2009-05-14
JP4939086B2 JP4939086B2 (ja) 2012-05-23

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ID=38592652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006070132A Expired - Fee Related JP4939086B2 (ja) 2006-03-15 2006-03-15 原子間力顕微鏡

Country Status (1)

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JP (1) JP4939086B2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008089510A (ja) * 2006-10-04 2008-04-17 Research Institute Of Biomolecule Metrology Co Ltd 走査型プローブ顕微鏡、走査型プローブ顕微鏡用のプローブ、及び検査方法
JP4936541B2 (ja) * 2007-08-10 2012-05-23 キヤノン株式会社 原子間力顕微鏡
EP2374011B1 (de) * 2008-12-11 2018-11-21 Infinitesima Limited Dynamisches sondendetektionssystem und -verfahren
JP6229914B2 (ja) * 2013-08-06 2017-11-15 オックスフォード インストルメンツ アサイラム リサーチ，インコーポレイテッド 原子間力顕微鏡用の光ビーム位置決めユニット
CN103968765B (zh) * 2014-05-27 2016-08-17 海宁科海光电科技有限公司 聚焦偏移位移传感器
CN104897064B (zh) * 2015-06-09 2018-06-01 张白 一种新型光臂放大式高精度长度传感器及测量方法
CN110986761B (zh) * 2019-11-18 2021-07-06 中国科学院上海光学精密机械研究所 皮米显微镜
CN112964909B (zh) * 2020-09-16 2023-12-01 中国科学院沈阳自动化研究所 一种原子力显微镜多探针同时独立运动测量方法与装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH074909A (ja) * 1993-06-14 1995-01-10 Fanuc Ltd レーザセンサ装置
JPH07301516A (ja) * 1994-04-29 1995-11-14 Olympus Optical Co Ltd 表面形状測定装置
JP2000234994A (ja) * 1999-02-16 2000-08-29 Jeol Ltd 走査プローブ顕微鏡におけるカンチレバー変位測定方法
JP2001304833A (ja) * 2000-04-21 2001-10-31 Olympus Optical Co Ltd 光てこ式傾き検出装置
JP2003014611A (ja) * 2001-06-29 2003-01-15 Olympus Optical Co Ltd 走査型プローブ顕微鏡
JP2004061349A (ja) * 2002-07-30 2004-02-26 Ishizuka Glass Co Ltd ３次元計測検査方法及びその装置

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