JP2007221000A5 - - Google Patents
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- Publication number
- JP2007221000A5 JP2007221000A5 JP2006041424A JP2006041424A JP2007221000A5 JP 2007221000 A5 JP2007221000 A5 JP 2007221000A5 JP 2006041424 A JP2006041424 A JP 2006041424A JP 2006041424 A JP2006041424 A JP 2006041424A JP 2007221000 A5 JP2007221000 A5 JP 2007221000A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- processing
- substrates
- holding
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006041424A JP4895634B2 (ja) | 2006-02-17 | 2006-02-17 | 基板処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006041424A JP4895634B2 (ja) | 2006-02-17 | 2006-02-17 | 基板処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007221000A JP2007221000A (ja) | 2007-08-30 |
| JP2007221000A5 true JP2007221000A5 (enExample) | 2009-03-19 |
| JP4895634B2 JP4895634B2 (ja) | 2012-03-14 |
Family
ID=38497923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006041424A Expired - Lifetime JP4895634B2 (ja) | 2006-02-17 | 2006-02-17 | 基板処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4895634B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5545055B2 (ja) * | 2010-06-15 | 2014-07-09 | 東京エレクトロン株式会社 | 支持体構造及び処理装置 |
| JP6458547B2 (ja) * | 2015-02-24 | 2019-01-30 | 株式会社デンソー | シャワーヘッド、シャワーヘッドシステム、及び成膜装置 |
| CN108695138A (zh) * | 2017-03-29 | 2018-10-23 | 株式会社日立国际电气 | 衬底支承件、衬底处理装置及半导体器件的制造方法 |
| TWI806261B (zh) * | 2020-12-24 | 2023-06-21 | 日商國際電氣股份有限公司 | 基板處理方法、半導體裝置之製造方法、基板處理裝置及程式 |
| KR20260037195A (ko) * | 2024-09-10 | 2026-03-17 | 주식회사 유진테크 | 배치식 기판 처리 장치 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02102524A (ja) * | 1988-10-11 | 1990-04-16 | Nec Corp | ウェハーボート |
| JP3023977B2 (ja) * | 1990-11-01 | 2000-03-21 | 東京エレクトロン株式会社 | 縦型熱処理装置 |
| JPH0737814A (ja) * | 1993-07-23 | 1995-02-07 | Sony Corp | 薄膜形成装置 |
-
2006
- 2006-02-17 JP JP2006041424A patent/JP4895634B2/ja not_active Expired - Lifetime
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