JP2007220704A - 半導体装置 - Google Patents

半導体装置 Download PDF

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Publication number
JP2007220704A
JP2007220704A JP2006036104A JP2006036104A JP2007220704A JP 2007220704 A JP2007220704 A JP 2007220704A JP 2006036104 A JP2006036104 A JP 2006036104A JP 2006036104 A JP2006036104 A JP 2006036104A JP 2007220704 A JP2007220704 A JP 2007220704A
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Japan
Prior art keywords
metal ribbon
semiconductor device
electrode
ribbon
bonding
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JP2006036104A
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English (en)
Inventor
Yasushi Nakajima
泰 中島
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2006036104A priority Critical patent/JP2007220704A/ja
Priority to US11/549,224 priority patent/US7560809B2/en
Publication of JP2007220704A publication Critical patent/JP2007220704A/ja
Pending legal-status Critical Current

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Abstract

【課題】 リボンボンディングを用いた半導体装置において、金属リボンの変形量を抑えつつ接合強度を大きくした半導体装置を提供する。
【解決手段】 半導体素子５の表面に設けられた電極８に金属リボン７が接合された半導体装置１００で、金属リボン７が電極８との接合面に凹部を有し、凹部内に向けて金属リボン７が変形した状態で金属リボン７が電極に接合される。金属リボン７の上面は、電極側の先端部において、中央部が両端部より外方に突出した形状であっても良い。
【選択図】図１

Description

本発明は、リボンボンディングを用いた半導体装置に関し、特に、リボンボンディングを用いた電力用の半導体装置に関する。
インバータ等の電力用半導体装置では、例えば数１０から数１００Ａの大電流を電極間に流す。このため、電極間の接続には断面積の大きなリボンボンディングが用いられる。
図７は、全体が５００で表される、リボンボンディングを用いて作製した従来の電力用半導体装置の側面図である。電力用半導体装置５００は、ベース板１を含む。ベース板１の上には、両面に金属パターン３が形成された絶縁基板２が、半田層４により固定されている。金属パターン３の上には、半導体素子５が固定されている。また、ベース板１の上には、中継電極６が設けられている。半導体素子５と中継電極６とは、金属リボン５７で電気的に接続されている（例えば、特許文献１参照）。
かかるリボンボンディングは、断面形状が略矩形の金属リボン５７を、半導体素子５の表面に設けられた電極（図示せず）に超音波振動を加えながら加圧して行う。この結果、金属リボン５７が塑性流動を生じ、金属リボン５７と電極とが接合される。
特開２００４−３３６０４３号公報
しかしながら、電力用半導体装置５００で金属リボン５７に、上述のような大電流を、インバータ動作に応じて断続的に流した場合、金属リボン５７が半導体素子５の電極から剥離し、電力用半導体装置５００が故障するため、保証できる耐久寿命に限界があるという問題があった。例えばシリコンからなる半導体素子５の線膨張率は約２．３ｐｐｍ／℃であるが、これに対して、例えばアルミニウムからなる金属リボン５７の線膨張率は２３ｐｐｍ／℃であり、半導体素子５の約１０倍である。このため、例えば発熱量が数１００Ｗの電力用半導体装置５００が動作した場合、金属リボン５７と電極との接合部が百数十℃まで加熱され、線膨張率の違いにより接合部に熱応力が発生し、無通電時と通電時の温度差により接合部に熱サイクル疲労を生じ、金属リボン５７の剥離が発生したと考えられる。
これに対して、接合時に加える圧力や振動エネルギを大きくしたり、接合時間を長くして、接合強度を強くすることが提案されているが、ボンディング装置が大型化、複雑化したり、ボンディング中に半導体素子が破損する等の問題があった。
また、図８に示すように、金属リボン５７は、接合面と並行な方向に張り出すように変形する。図８において、（ａ）は電力用半導体装置５００に用いた金属リボン５７の断面図、（ｂ）は半導体素子５に接合された状態の断面図を示す。図８中、図７と同一符号は、同一又は相当箇所を示す。
図８（ｂ）に記載したように、リボンボンディング時に金属リボン５７は矢印９の方向に変形し、張出し部１０を形成する。張出し部１０は、接合時に加える圧力や振動エネルギを大きくするほど変形量が大きくなる。このため、接合時の圧力等を大きくして接合力を強化した場合には、電力用半導体装置５００の小型化が図れないという問題もあった。
そこで、本発明は、リボンボンディングを用いた半導体装置において、金属リボンの変形量を抑えつつ接合強度を大きくした半導体装置の提供を目的とする。
本発明は、半導体素子の表面に設けられた電極に金属リボンが接合された半導体装置であって、金属リボンが電極との接合面に凹部を有し、凹部内に向けて金属リボンが変形した状態で金属リボンが電極に接合されたことを特徴とする半導体装置である。
以上のように、本発明にかかる半導体装置では、金属リボンの変形量を抑えつつ接合強度を大きくでき、小型でかつ信頼性の高い半導体装置の提供が可能となる。
実施の形態１．
図１は、全体が１００で表される本発明の実施の形態１にかかる半導体装置の上面図である。図１中、図７と同一符号は、同一又は相当箇所を示す。また、半導体装置１００の側面図は、図７に示す半導体装置５００と、ほぼ同じ構造となっている。
電力用半導体装置１００は、例えば銅からなるベース板を含み、ベース板の上には、両面に金属パターン３が形成された絶縁基板が半田層により固定されている（図１では、金属パターン３より上部についてのみ示す）。
金属パターン３の上には、ＩＧＢＴ等の半導体素子５が、例えば半田材により固定されている。半導体素子５は、表面に、金等の金属からなる電極８を有する。また、ベース板１の上には、中継電極６が設けられている。半導体素子５の電極８と中継電極６とは、例えばアルミニウムからなる金属リボン７により電気的に接続されている。
図２は、図１の電力用半導体装置１００を、図１のＩ−Ｉ方向に見た場合の部分断面図であり、（ａ）は金属リボン７の断面図であり、（ｂ）は電極８の上に接合した部分の断面図である。
図２（ａ）に示すように、電力用半導体装置１００に使用する金属リボン７には、金属リボン７の長手方向（紙面に垂直な方向）に沿って複数の溝部１７が設けられている。溝部１７の断面は、略矩形である。溝部１７は、かかる断面形状の孔を有する金型を用いて金属線を引き抜き加工することにより得られる。
例えば、一辺が５ｍｍから２０ｍｍの長方形又は正方形の半導体素子５を用いた場合、金属リボンの幅は０．５ｍｍ〜５ｍｍ程度、厚さは数百μｍ程度が好ましい。溝部の深さは例えば０．１ｍｍ程度であれば良い。なお、金属リボン７の材質として、アルミニウムの他にスズ等を用いてもかまわない。
ここで、金属リボン７と半導体素子５の電極８との接合を良好に行うためには、金属リボン７と電極８とが擦れて、酸化膜等のない新生面同士が接触する必要がある。新生面の生成メカニズムとしては、金属リボン７の塑性変形時に、結晶面に沿って金属原子のすべりが生じることが大きな要因として挙げられる。多くのすべりを生じさせるには金属リボン７の塑性変形を大きくすることが必要である。
図８（ｂ）に示すように、従来の金属リボン５７を用いた場合、接合界面の両端部では、張出し部１０ができる程度に大きな組成変形が生じ、金属リボン５７の新生面が接合界面に形成される。しかしながら、接合界面の中央部では、金属リボン５７が十分に塑性変形するための空間がなく、非常に大きな振動エネルギ等を与えなければ新生面を形成できない。このため、接合界面の中央部でも良好な接合を得るためには大きな振動エネルギ等を加える必要があったが、この場合、数十ｐｐｍから数百ｐｐｍの割合で半導体素子の破損が発生していた。
これに対して、本実施の形態１にかかる電力用半導体装置１００では、溝部１７を有する金属リボン７を用いる。このため、図２（ｂ）に矢印９で示すように、接合界面の中央部でも溝部１７に向かって塑性変形が生じ、小さな振動エネルギ等を加えるだけで新生面が形成されて良好な接合が得られる。
即ち、半導体素子５の破損を防止しながら、金属リボン７と電極８との界面で良好な接合が得られる。この結果、電力用半導体装置１００の動作中における金属リボン７の剥離が防止でき、信頼性の高い電力用半導体装置１００を提供できる。
なお、ここでは、溝部１７の断面形状を矩形としたが、三角形や半円等の形状を用いても同様の効果が得られる。このような溝部１７の断面形状は、引き抜き加工に用いる金型の形状により制御できる。
実施の形態２．
図３は、他の金属リボン７を用いた電力用半導体装置１００を、図１のＩ−Ｉ方向に見た場合の部分断面図であり、（ａ）は金属リボン７の断面図であり、（ｂ）は電極８の上に接合した部分の断面図である。
本実施の形態２にかかる金属リボン７は、金属リボン７の長手方向（紙面に垂直な方向）に沿って並置された複数の円柱が接合された形状からなる。
図３（ａ）に示すように、断面形状は、複数の円が接続されその間に凹部２７を有する形状からなる。円の半径は、好適には０．５ｍｍ程度であり、少なくとも２つの円を含む構造であれば良い。
凹部２７を有する金属リボン７は、かかる断面形状の孔を有する金型を用いて金属線を引き抜き加工することにより得られる。
本実施の形態２にかかる金属リボン７を用いた場合、上述の実施の形態１の場合と同様に、図３（ｂ）に矢印９で示すように、接合界面の中央部でも溝部２７に向かって塑性変形が生じる。そして、金属リボン７が電極８に押し付けられるに従って、金属リボン７が電極８と擦れることにより形成される新生面が、横方向（矢印９方向）に広がり、金属リボン７と電極８との間に良好な接合界面が形成される。
特に、金属リボン７の断面を、図３（ａ）のような複数の円を並置した形状とすることにより、初期において、金属リボン７と電極８との接触は、円弧部の頂点に沿った線接触（断面では点接触）となり、接触部の面積は小さくなる。このため、リボンボンディング時に接合部に与えるエネルギが、実施の形態１の場合や従来の場合より小さくても十分な塑性変形が生じる。これにより、半導体素子５の破損を防止しながら、金属リボン７と電極８との界面で良好な接合が得られ、信頼性の高い電力用半導体装置１００の提供が可能となる。
実施の形態３．
図４は、全体が２００で表される、本発明の実施の形態３にかかる電力用半導体装置の上面図である。図４中、図１と同一符号は、同一又は相当箇所を示す。図４に示すように、電力用半導体装置２００では、半導体素子５の電極８に接続される部分において、金属リボン７の隅部が鈍角（あるいはＲ形状）となっている。
リボンボンディングを行う場合、理想的には、図４（ａ）のように、図面の上下方向に沿って金属リボン７が形成されるが、実施には、図４（ｂ）のように、上下方向から傾いて形成される場合もある。
図５は、上述の実施の形態１にかかる電力用半導体装置１００の上面図であり、（ａ）は理想的なボンディング状態、（ｂ）はボンディングの方向が上下方向からずれた場合を示す。
図５（ｂ）に示すように、隅部が略直角である金属リボン７を用いた場合、ボンディング方向がずれると、金属リボン７の隅部と電極８の縁との距離が小さくなる。この結果、
リボンボンディング時における金属リボン７の塑性変形の程度によっては、隣接する他の電極にまで金属リボン７が接続され、半導体素子５が動作しなくなる。
これに対し、図４に示すような隅部が鈍角（あるいはＲ形状）の金属リボン７を用いた場合、ボンディング方向がずれても、金属リボン７の隅部と電極８の縁との距離が極端に小さくなることはない。この結果、リボンボンディング時に金属リボン７が塑性変形しても、他の電極と接続されることはない。
このように、本実施の形態３にかかる電力用半導体装置２００では、ボンディング方向がずれた場合でも、金属リボン７の隅部と電極８の縁との間の距離を十分にとることができる。従って、図５に示す電力用半導体装置１００に比較して、ボンディング時に与えるエネルギを大きくして金属リボン７の変形量を大きくできるため、良好な接合を得ることができる。
また、逆に言えば、本実施の形態３にかかる電力用半導体装置２００では、半導体素子５の隣接する電極同士の間隔を小さくしたり、電極の面積や幅を小さくすることもできる。この結果、半導体素子５を小型化でき、更には電力用半導体装置２００の小型化も可能でとなる。
このような隅部が鈍角（あるいはＲ形状）の金属リボン７を作製するには、リボン状の金属を、例えばギロチンカッターを用いて切断すれば良い。図６は、金属リボン７の切断形状２０を示したものである。切断形状２０は、隅部が鈍角（あるいはＲ形状）になるのであれば、例えば（ａ）〜（ｄ）に示すような形状としても構わない。
なお、リボン状の金属を、図６に示すような形状に切断して金属リボン７を作製した場合、隅部が鈍角（あるいはＲ形状）とした端部と反対側の端部では、隅部が鋭角となる。
しかしながら、図４に示すように、半導体素子５の電極８に比較して中継電極６の面積は通常大きいため、特に問題は発生しない。
また、半導体素子５を小型化することが、電力用半導体装置２００の低コスト化を図る上で最も重要であり、中継電極６の面積は少々大きくしても、電力用半導体装置２００の低コスト化に対する影響は小さい。
本発明の実施の形態１にかかる電力用半導体装置の上面図である。 本発明の実施の形態１にかかる電力用半導体装置の部分断面図である。 本発明の実施の形態２にかかる電力用半導体装置の部分断面図である。 本発明の実施の形態３にかかる電力用半導体装置の上面図である。 本発明の実施の形態１にかかる電力用半導体装置の上面図である。 本発明の実施の形態３にかかる電力用半導体装置に使用する金属リボンの上面図である。 従来の電力用半導体装置の側面図である。 従来の電力用半導体装置の部分断面図である。
符号の説明
１ ベース板、２ 絶縁基板、３ 金属パターン、４ 半田層、５ 半導体素子、６ 中継電極、７ 金属リボン、８ 電極、１００ 電力用半導体装置。

Claims (6)

  1. 半導体素子の表面に設けられた電極に金属リボンが接合された半導体装置であって、
    該金属リボンが該電極との接合面に凹部を有し、該凹部内に向けて該金属リボンが変形した状態で該金属リボンが該電極に接合されたことを特徴とする半導体装置。
  2. 上記金属リボンの長手方向に垂直な方向の、上記凹部の断面が、矩形形状であることを特徴とする請求項１に記載の半導体装置。
  3. 上記金属リボンの長手方向に垂直な方向の、該金属リボンの断面が、一部で接続された複数の円からなり、隣接する該円の円弧に挟まれた領域を上記凹部としたことを特徴とする請求項１に記載の半導体装置。
  4. 上記凹部が、上記金属リボンの長手方向に延びた溝からなることを特徴とする請求項１〜３のいずれかに記載の半導体装置。
  5. 上記金属リボンの上面が、上記電極側の先端部において、中央部が両端部より外方に突出した形状であることを特徴とする請求項１に記載の半導体装置。
  6. 上記金属リボンの上面の、上記両端部における内角が鈍角であることを特徴とする請求項５に記載の半導体装置。

JP2006036104A 2006-02-14 2006-02-14 半導体装置 Pending JP2007220704A (ja)

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