JP2007218717A - 慣性力センサ - Google Patents

慣性力センサ Download PDF

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Publication number
JP2007218717A
JP2007218717A JP2006039002A JP2006039002A JP2007218717A JP 2007218717 A JP2007218717 A JP 2007218717A JP 2006039002 A JP2006039002 A JP 2006039002A JP 2006039002 A JP2006039002 A JP 2006039002A JP 2007218717 A JP2007218717 A JP 2007218717A
Authority
JP
Japan
Prior art keywords
vibrator
voltage
circuit
inertial force
force sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006039002A
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English (en)
Japanese (ja)
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JP2007218717A5 (https=
Inventor
Takeshi Uemura
猛 植村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2006039002A priority Critical patent/JP2007218717A/ja
Publication of JP2007218717A publication Critical patent/JP2007218717A/ja
Publication of JP2007218717A5 publication Critical patent/JP2007218717A5/ja
Pending legal-status Critical Current

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JP2006039002A 2006-02-16 2006-02-16 慣性力センサ Pending JP2007218717A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006039002A JP2007218717A (ja) 2006-02-16 2006-02-16 慣性力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006039002A JP2007218717A (ja) 2006-02-16 2006-02-16 慣性力センサ

Publications (2)

Publication Number Publication Date
JP2007218717A true JP2007218717A (ja) 2007-08-30
JP2007218717A5 JP2007218717A5 (https=) 2009-04-02

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ID=38496187

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006039002A Pending JP2007218717A (ja) 2006-02-16 2006-02-16 慣性力センサ

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JP (1) JP2007218717A (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7891245B2 (en) 2006-11-22 2011-02-22 Panasonic Corporation Inertial force sensor including a sense element, a drive circuit, a sigma-delta modulator and a signal processing circuit
US9392171B2 (en) 2012-04-12 2016-07-12 Panasonic Intellectual Property Management Co., Ltd. Angular velocity sensor, and electronic apparatus using same
CN106052665A (zh) * 2015-04-10 2016-10-26 株式会社东芝 陀螺仪传感器的角速度的取得方法及取得装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09289416A (ja) * 1996-04-23 1997-11-04 Nec Shizuoka Ltd 水晶発振回路
JP2002174520A (ja) * 2000-12-08 2002-06-21 Kinseki Ltd 発振回路及びこれを用いた角速度センサ
JP2002350139A (ja) * 2001-05-30 2002-12-04 Ngk Insulators Ltd 振動子を用いた検出方法および検出装置
JP2003240556A (ja) * 2002-02-14 2003-08-27 Ngk Insulators Ltd 物理量の測定装置および振動子の駆動装置
JP2004153433A (ja) * 2002-10-29 2004-05-27 Niigata Seimitsu Kk 水晶発振器および半導体装置
JP2004267402A (ja) * 2003-03-07 2004-09-30 Hitachi Medical Corp マルチスライスｘ線ｃｔ装置
JP2005227234A (ja) * 2004-02-16 2005-08-25 Jaitoronikusu:Kk 角速度センサ

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09289416A (ja) * 1996-04-23 1997-11-04 Nec Shizuoka Ltd 水晶発振回路
JP2002174520A (ja) * 2000-12-08 2002-06-21 Kinseki Ltd 発振回路及びこれを用いた角速度センサ
JP2002350139A (ja) * 2001-05-30 2002-12-04 Ngk Insulators Ltd 振動子を用いた検出方法および検出装置
JP2003240556A (ja) * 2002-02-14 2003-08-27 Ngk Insulators Ltd 物理量の測定装置および振動子の駆動装置
JP2004153433A (ja) * 2002-10-29 2004-05-27 Niigata Seimitsu Kk 水晶発振器および半導体装置
JP2004267402A (ja) * 2003-03-07 2004-09-30 Hitachi Medical Corp マルチスライスｘ線ｃｔ装置
JP2005227234A (ja) * 2004-02-16 2005-08-25 Jaitoronikusu:Kk 角速度センサ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7891245B2 (en) 2006-11-22 2011-02-22 Panasonic Corporation Inertial force sensor including a sense element, a drive circuit, a sigma-delta modulator and a signal processing circuit
US9392171B2 (en) 2012-04-12 2016-07-12 Panasonic Intellectual Property Management Co., Ltd. Angular velocity sensor, and electronic apparatus using same
CN106052665A (zh) * 2015-04-10 2016-10-26 株式会社东芝 陀螺仪传感器的角速度的取得方法及取得装置
CN106052665B (zh) * 2015-04-10 2019-09-20 株式会社东芝 陀螺仪传感器的角速度的取得方法及取得装置

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