JP2007199084A5 - - Google Patents
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- Publication number
- JP2007199084A5 JP2007199084A5 JP2007105963A JP2007105963A JP2007199084A5 JP 2007199084 A5 JP2007199084 A5 JP 2007199084A5 JP 2007105963 A JP2007105963 A JP 2007105963A JP 2007105963 A JP2007105963 A JP 2007105963A JP 2007199084 A5 JP2007199084 A5 JP 2007199084A5
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- JP
- Japan
- Prior art keywords
- layer
- wavelength
- light
- optical
- value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000003287 optical effect Effects 0.000 claims 18
- 239000010408 film Substances 0.000 claims 13
- 238000002834 transmittance Methods 0.000 claims 13
- 230000015572 biosynthetic process Effects 0.000 claims 8
- 239000012788 optical film Substances 0.000 claims 8
- 238000005259 measurement Methods 0.000 claims 7
- 239000010409 thin film Substances 0.000 claims 6
- 230000005540 biological transmission Effects 0.000 claims 4
- 238000006243 chemical reaction Methods 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 4
- 238000004088 simulation Methods 0.000 claims 4
- 230000003595 spectral effect Effects 0.000 claims 4
- 238000000151 deposition Methods 0.000 claims 3
- 230000001678 irradiating effect Effects 0.000 claims 3
- 230000008878 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 230000007704 transition Effects 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007105963A JP4547489B2 (ja) | 2003-05-01 | 2007-04-13 | 膜厚計測装置搭載の光学薄膜形成用装置及び光学薄膜の成膜方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003126404 | 2003-05-01 | ||
| JP2007105963A JP4547489B2 (ja) | 2003-05-01 | 2007-04-13 | 膜厚計測装置搭載の光学薄膜形成用装置及び光学薄膜の成膜方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004129868A Division JP2004354372A (ja) | 2003-05-01 | 2004-04-26 | 膜厚計測装置搭載の光学薄膜形成用装置及び光学薄膜の成膜方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007199084A JP2007199084A (ja) | 2007-08-09 |
| JP2007199084A5 true JP2007199084A5 (enrdf_load_stackoverflow) | 2008-01-24 |
| JP4547489B2 JP4547489B2 (ja) | 2010-09-22 |
Family
ID=38453798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007105963A Expired - Fee Related JP4547489B2 (ja) | 2003-05-01 | 2007-04-13 | 膜厚計測装置搭載の光学薄膜形成用装置及び光学薄膜の成膜方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4547489B2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4878632B2 (ja) * | 2009-07-03 | 2012-02-15 | 株式会社シンクロン | 光学式膜厚計及び光学式膜厚計を備えた薄膜形成装置 |
| TW201250301A (en) * | 2011-06-03 | 2012-12-16 | Asia Optical Co Inc | Optical filter apparatus |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3084862B2 (ja) * | 1991-12-11 | 2000-09-04 | 松下電器産業株式会社 | 光学式膜厚モニター |
| JPH06137948A (ja) * | 1992-10-28 | 1994-05-20 | Shimadzu Corp | 測光装置 |
| JP3892525B2 (ja) * | 1997-03-25 | 2007-03-14 | ペンタックス株式会社 | 膜厚モニタ装置ならびに真空蒸着方法および真空蒸着装置 |
| JP3625736B2 (ja) * | 2000-04-27 | 2005-03-02 | 古河電気工業株式会社 | 光学フィルタの製造方法 |
| DE60233931D1 (de) * | 2001-02-07 | 2009-11-19 | Asahi Glass Co Ltd | Verfahren zur herstellung eines sputterfilms |
| JP2003014423A (ja) * | 2001-06-27 | 2003-01-15 | Kyocera Corp | 多重薄膜形成装置 |
| JP3737407B2 (ja) * | 2001-10-15 | 2006-01-18 | 日本電信電話株式会社 | 膜厚モニタリング装置および方法 |
| JP3737409B2 (ja) * | 2001-10-15 | 2006-01-18 | 日本電信電話株式会社 | 膜厚モニタリング装置および方法 |
-
2007
- 2007-04-13 JP JP2007105963A patent/JP4547489B2/ja not_active Expired - Fee Related
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