JP2007171203A5 - - Google Patents

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Publication number
JP2007171203A5
JP2007171203A5 JP2006345902A JP2006345902A JP2007171203A5 JP 2007171203 A5 JP2007171203 A5 JP 2007171203A5 JP 2006345902 A JP2006345902 A JP 2006345902A JP 2006345902 A JP2006345902 A JP 2006345902A JP 2007171203 A5 JP2007171203 A5 JP 2007171203A5
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JP
Japan
Prior art keywords
circuit
detector
drive
adjustment circuit
excitation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006345902A
Other languages
English (en)
Japanese (ja)
Other versions
JP5219364B2 (ja
JP2007171203A (ja
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Publication date
Priority claimed from US11/317,383 external-priority patent/US7368923B2/en
Application filed filed Critical
Publication of JP2007171203A publication Critical patent/JP2007171203A/ja
Publication of JP2007171203A5 publication Critical patent/JP2007171203A5/ja
Application granted granted Critical
Publication of JP5219364B2 publication Critical patent/JP5219364B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2006345902A 2005-12-22 2006-12-22 時間間隔調整型の差動容量センサ装置 Expired - Fee Related JP5219364B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/317,383 US7368923B2 (en) 2005-12-22 2005-12-22 Time interval trimmed differential capacitance sensor
US11/317,383 2005-12-22

Publications (3)

Publication Number Publication Date
JP2007171203A JP2007171203A (ja) 2007-07-05
JP2007171203A5 true JP2007171203A5 (enExample) 2009-09-17
JP5219364B2 JP5219364B2 (ja) 2013-06-26

Family

ID=38192881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006345902A Expired - Fee Related JP5219364B2 (ja) 2005-12-22 2006-12-22 時間間隔調整型の差動容量センサ装置

Country Status (3)

Country Link
US (1) US7368923B2 (enExample)
EP (1) EP1855096A3 (enExample)
JP (1) JP5219364B2 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE602007011031D1 (de) * 2007-02-15 2011-01-20 St Microelectronics Srl Volldifferentieller Demodulator mit variabler Verstärkung und Demodulationsverfahren eines Signals
DE102007048402A1 (de) * 2007-10-09 2009-04-16 Gerd Reime Bedieneinheit und Verfahren zur Auslösung einer Funktion
DE102009000950A1 (de) 2009-02-02 2010-08-05 Robert Bosch Gmbh Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zum Betreiben eines solchen Mikrofonbauelements
KR20120073264A (ko) 2009-09-03 2012-07-04 코닌클리케 필립스 일렉트로닉스 엔.브이. 터치 감지 출력 장치
JP2011193978A (ja) * 2010-03-18 2011-10-06 Canon Inc 静電容量型電気機械変換装置の駆動装置及び駆動方法
WO2011154468A1 (en) 2010-06-08 2011-12-15 Iee International Electronics & Engineering S.A. Robust capacitive measurement system
US9551738B2 (en) * 2010-06-08 2017-01-24 Iee International Electronics & Engineering S.A. Robust capacitive measurement system
DE102012210004B4 (de) 2012-06-14 2014-11-06 Robert Bosch Gmbh Balkendetektor mit Regelschaltung
US20150268268A1 (en) * 2013-06-17 2015-09-24 Freescale Semiconductor, Inc. Inertial sensor with trim capacitance and method of trimming offset
JP6201774B2 (ja) * 2014-01-16 2017-09-27 セイコーエプソン株式会社 物理量検出回路、物理量検出装置、電子機器および移動体
US10006930B2 (en) * 2014-06-03 2018-06-26 Northrop Grumman Systems Corporation Performance optimization of a differential capacitance based motion sensor
JP6357090B2 (ja) * 2014-12-02 2018-07-11 株式会社堀場エステック 静電容量型センサ
EP3495826B1 (fr) * 2017-12-07 2020-11-25 EM Microelectronic-Marin SA Dispositif électronique de mesure d'un paramètre physique

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US4890598A (en) 1988-07-29 1990-01-02 Nu-Tech Industries, Inc. High efficiency blower
US4896100A (en) * 1988-08-30 1990-01-23 Hitec Products, Inc. Signal conditioner for capacitive transducer
US4987779A (en) * 1989-02-28 1991-01-29 United Technologies Corporation Pulse-driven accelerometer arrangement
FR2656698B1 (fr) * 1989-12-29 1992-05-07 Vectavib Dispositif de mesure des variations de la capacite d'un condensateur formant, notamment, un capteur.
JPH05322921A (ja) * 1992-05-19 1993-12-07 Hitachi Ltd 加速度センサ及びこれを用いたエアバッグシステム
US5367217A (en) 1992-11-18 1994-11-22 Alliedsignal Inc. Four bar resonating force transducer
US5450762A (en) 1992-12-17 1995-09-19 Alliedsignal Inc. Reactionless single beam vibrating force sensor
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JP3322067B2 (ja) * 1995-04-24 2002-09-09 株式会社デンソー 物理量検出装置
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JP3435979B2 (ja) * 1996-04-26 2003-08-11 株式会社デンソー 物理量検出装置
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JP3588276B2 (ja) * 1999-07-26 2004-11-10 株式会社山武 センサ信号処理回路
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JP2004361388A (ja) * 2003-05-15 2004-12-24 Mitsubishi Electric Corp 容量型慣性力検出装置
JP2004364366A (ja) * 2003-06-02 2004-12-24 Seiko Epson Corp Ｐｗｍ制御システム
EP1548409A1 (en) * 2003-12-23 2005-06-29 Dialog Semiconductor GmbH Differential capacitance measurement

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