JP2007165860A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2007165860A5 JP2007165860A5 JP2006298961A JP2006298961A JP2007165860A5 JP 2007165860 A5 JP2007165860 A5 JP 2007165860A5 JP 2006298961 A JP2006298961 A JP 2006298961A JP 2006298961 A JP2006298961 A JP 2006298961A JP 2007165860 A5 JP2007165860 A5 JP 2007165860A5
- Authority
- JP
- Japan
- Prior art keywords
- barrier film
- film
- resist
- conductive
- display device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000010408 film Substances 0.000 claims 40
- 230000004888 barrier function Effects 0.000 claims 29
- 239000004020 conductor Substances 0.000 claims 8
- 238000004519 manufacturing process Methods 0.000 claims 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 4
- 229910052782 aluminium Inorganic materials 0.000 claims 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 4
- 229910052802 copper Inorganic materials 0.000 claims 4
- 239000010949 copper Substances 0.000 claims 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 4
- 229910052737 gold Inorganic materials 0.000 claims 4
- 239000010931 gold Substances 0.000 claims 4
- 238000000034 method Methods 0.000 claims 4
- 229910052709 silver Inorganic materials 0.000 claims 4
- 239000004332 silver Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 2
- 229910045601 alloy Inorganic materials 0.000 claims 2
- 239000000956 alloy Substances 0.000 claims 2
- 229910052804 chromium Inorganic materials 0.000 claims 2
- 239000011651 chromium Substances 0.000 claims 2
- 229910052750 molybdenum Inorganic materials 0.000 claims 2
- 239000011733 molybdenum Substances 0.000 claims 2
- 150000004767 nitrides Chemical class 0.000 claims 2
- 229910052715 tantalum Inorganic materials 0.000 claims 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 2
- 229910052719 titanium Inorganic materials 0.000 claims 2
- 239000010936 titanium Substances 0.000 claims 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 2
- 229910052721 tungsten Inorganic materials 0.000 claims 2
- 239000010937 tungsten Substances 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006298961A JP2007165860A (ja) | 2005-11-17 | 2006-11-02 | 表示装置及びその作製方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005333207 | 2005-11-17 | ||
| JP2006298961A JP2007165860A (ja) | 2005-11-17 | 2006-11-02 | 表示装置及びその作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007165860A JP2007165860A (ja) | 2007-06-28 |
| JP2007165860A5 true JP2007165860A5 (enrdf_load_html_response) | 2009-10-08 |
Family
ID=38248346
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006298961A Withdrawn JP2007165860A (ja) | 2005-11-17 | 2006-11-02 | 表示装置及びその作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2007165860A (enrdf_load_html_response) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5427390B2 (ja) * | 2007-10-23 | 2014-02-26 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP2009251101A (ja) * | 2008-04-02 | 2009-10-29 | Dainippon Printing Co Ltd | 表示装置用電極フィルムおよび表示装置用電極フィルムの製造方法 |
| US8465795B2 (en) * | 2008-05-20 | 2013-06-18 | Palo Alto Research Center Incorporated | Annealing a buffer layer for fabricating electronic devices on compliant substrates |
| US8114720B2 (en) | 2008-12-25 | 2012-02-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
| CN102576736B (zh) * | 2009-10-09 | 2015-05-13 | 株式会社半导体能源研究所 | 半导体器件及其制造方法 |
| WO2011043194A1 (en) | 2009-10-09 | 2011-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
| KR101802406B1 (ko) | 2009-11-27 | 2017-11-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치의 제작방법 |
| TWI622494B (zh) * | 2013-08-19 | 2018-05-01 | 樂金顯示科技股份有限公司 | 包括有機材料遮罩的層壓板及使用其之有機發光裝置的製備方法 |
| JP2016095990A (ja) * | 2014-11-13 | 2016-05-26 | パイオニア株式会社 | 発光装置 |
| JP2016095991A (ja) * | 2014-11-13 | 2016-05-26 | パイオニア株式会社 | 発光装置 |
| JP2018137084A (ja) * | 2017-02-21 | 2018-08-30 | 株式会社東海理化電機製作所 | 有機ｅｌ表示装置及びその製造方法 |
| CN107342375B (zh) * | 2017-08-21 | 2019-05-31 | 深圳市华星光电半导体显示技术有限公司 | 柔性显示面板的制作方法及柔性显示面板 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6373645A (ja) * | 1986-09-17 | 1988-04-04 | Fujitsu Ltd | 半導体装置 |
| JPH0427125A (ja) * | 1990-05-22 | 1992-01-30 | Hitachi Ltd | 配線部材の製造方法 |
| JPH0566421A (ja) * | 1991-09-09 | 1993-03-19 | Sanyo Electric Co Ltd | 多層配線の形成方法 |
| JPH0682820A (ja) * | 1992-09-01 | 1994-03-25 | Fujitsu Ltd | 薄膜トランジスタマトリックスの製造方法 |
| JPH08146463A (ja) * | 1994-11-25 | 1996-06-07 | Sharp Corp | スイッチング素子アレイおよびそれを用いた表示装置 |
| JP3406417B2 (ja) * | 1995-04-25 | 2003-05-12 | 株式会社日立製作所 | フリップチップ方式の液晶表示素子及び液晶表示モジュール |
| JP3856304B2 (ja) * | 2002-03-25 | 2006-12-13 | 株式会社リコー | Ｃｓｐにおける抵抗素子およびｃｓｐを備えた半導体装置 |
| JP2004103605A (ja) * | 2002-09-04 | 2004-04-02 | Murata Mfg Co Ltd | 微細配線形成方法 |
-
2006
- 2006-11-02 JP JP2006298961A patent/JP2007165860A/ja not_active Withdrawn