JP2007158360A - 可変インダクタを備える物品 - Google Patents
可変インダクタを備える物品 Download PDFInfo
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- JP2007158360A JP2007158360A JP2006353600A JP2006353600A JP2007158360A JP 2007158360 A JP2007158360 A JP 2007158360A JP 2006353600 A JP2006353600 A JP 2006353600A JP 2006353600 A JP2006353600 A JP 2006353600A JP 2007158360 A JP2007158360 A JP 2007158360A
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- 230000008878 coupling Effects 0.000 claims abstract description 8
- 238000010168 coupling process Methods 0.000 claims abstract description 8
- 238000005859 coupling reaction Methods 0.000 claims abstract description 8
- 229910052751 metal Inorganic materials 0.000 claims description 18
- 239000002184 metal Substances 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 10
- 239000003990 capacitor Substances 0.000 claims description 3
- 230000005291 magnetic effect Effects 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 67
- 238000000034 method Methods 0.000 description 26
- 238000004519 manufacturing process Methods 0.000 description 17
- 230000008569 process Effects 0.000 description 16
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 11
- 229920005591 polysilicon Polymers 0.000 description 11
- 230000008859 change Effects 0.000 description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
- 229910052737 gold Inorganic materials 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 238000005459 micromachining Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical group [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 239000012790 adhesive layer Substances 0.000 description 3
- 230000003321 amplification Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000001939 inductive effect Effects 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- 208000005647 Mumps Diseases 0.000 description 1
- 241000321453 Paranthias colonus Species 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- -1 for example Chemical class 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 208000010805 mumps infectious disease Diseases 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000000638 stimulation Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F21/00—Variable inductances or transformers of the signal type
- H01F21/02—Variable inductances or transformers of the signal type continuously variable, e.g. variometers
- H01F21/04—Variable inductances or transformers of the signal type continuously variable, e.g. variometers by relative movement of turns or parts of windings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F21/00—Variable inductances or transformers of the signal type
- H01F21/02—Variable inductances or transformers of the signal type continuously variable, e.g. variometers
- H01F21/06—Variable inductances or transformers of the signal type continuously variable, e.g. variometers by movement of core or part of core relative to the windings as a whole
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Integrated Circuits (AREA)
- Inductance-Capacitance Distribution Constants And Capacitance-Resistance Oscillators (AREA)
- Coils Or Transformers For Communication (AREA)
Abstract
【解決手段】本発明のインダクタは、空間電磁継手を支持することができる少なくとも二つの素子と、その幾何学的関係を変化させるための手段とを備える。上記素子の間の幾何学的関係を変化させると、インダクタのインダクタンスが変化する。ある実施形態の場合には、変化する幾何学的関係は、二つの素子の間の空間である。上記空間は、上記素子の間の差動運動により変化する。他の実施形態の場合には、本発明は、上記可変インダクタを内蔵する共振回路を含み、オッシレータは、上記共振回路を含む。
【選択図】図1
Description
本出願は、米国特許出願第09/152,185号および第09/152,189号(両方とも1998年9月12日出願)に関連する。
インダクタおよび可変インダクタは有用なものであり、および/または種々の重要な用途および製品で必要な回路素子である。例えば、インダクタおよび可変インダクタは、多くの高周波無線製品にとって必要な素子である。特に、インダクタおよび可変インダクタは、低雑音アンプ、電力アンプおよびミキサを整合させ、負荷を掛けるために使用され、また、上記高周波無線製品の可変周波数オッシレータに周波数選択共振回路を供給するために使用される。
[1] LRF=LSELF+M
[1] LRF=LSELF+M
Claims (21)
- 同調可能なインダクタを備える物品であって、
同調可能なインダクタが、空間電磁結合を可能にする第一の材料を含む第一の平らなループと、
前記第一の平らなループの内側であって前記第一の平らなループと同一平面内に位置するように運動可能な第二の素子であって、前記第二の素子が空間電磁結合を可能にする第二の材料を含み、少なくとも前記第二の素子の一部がその第二の素子の固定端部に対して運動可能であり、第二の素子は前記第一のループから間隔を置いて設置され、
前記第一のループと前記第二の素子との間の空間を変化させることができるアクチュエータとを持つ物品。 - 請求項1に記載の物品において、前記第二の素子が、グラウンド・プレーンである物品。
- 請求項2に記載の物品において、前記アクチュエータが、前記グラウンド・プレーンと前記ループとの間の空間内で差動運動を発生し、その結果、前記空間を変化させる物品。
- 請求項2に記載の物品において、前記グラウンド・プレーンが、磁気を帯びている物品。
- 請求項1に記載の物品において、前記アクチュエータが、前記第一のループを運動させることができる物品。
- 請求項5に記載の物品において、前記第二の素子が、第二の平らなループである物品。
- 請求項6に記載の物品において、前記アクチュエータが、第一および第二の位置の間で、前記第一のループを運動させることができ、前記第一の位置において、前記第一および第二のループが同一平面上に位置し、前記第二の位置において、前記第一および第二のループが同一平面上に位置しない物品。
- 請求項7に記載の物品において、前記第二のループが固定されている物品。
- 請求項6に記載の物品において、前記第一のループ内を電流が流れる方向が、前記第二ループ内を電流が流れる方向と同じである物品。
- 請求項6に記載の物品において、前記第一のループ内を電流が流れる方向が、前記第二ループ内を電流が流れる方向と反対である物品。
- 請求項7に記載の物品に置いて、前記第一のループが、第一の厚さを持つ第一の金属を備え、前記第二のループが、第二の厚さを持つ第二の金属を備える物品。
- 請求項11に記載の物品において、前記第一の厚さと第二の厚さとが異なる物品。
- 請求項11に記載の物品において、前記第一の金属と第二の金属とが異なる物品。
- 請求項7に記載の物品において、前記第一のループが波状になっている物品。
- 請求項1に記載の物品において、前記アクチュエータが、前記第一のループに、DCバイアスを掛けるための手段を備える物品。
- 請求項1に記載の物品において、前記アクチュエータが、DC静電制御を備える物品。
- 請求項1に記載の物品において、前記アクチュエータが、機械的リンケージを備える物品。
- 請求項17に記載の物品において、前記アクチュエータが、さらに、前記機械的リンケージにより、前記第一のループに動作できるように接続している電気機械デバイスを備える物品。
- 請求項1に記載の物品において、前記物品が、前記同調可能なインダクタに電気的に接続している信号ゼネレータおよびコンデンサを持つLC回路を備える物品。
- 請求項19に記載の物品において、前記物品が、可変周波数オッシレータを備え、前記可変周波数オッシレータが、前記LC回路を備える共振構造体に電気的に接続している負抵抗デバイスを含む物品。
- 請求項1に記載の物品であって、該物品が更に、
支持体と、
該支持体へ接続された前記第一の平らなループの少なくとも一つの端部とを含むものであって、前記第二の素子の固定端部が前記支持体へ接続される物品。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/354711 | 1999-07-16 | ||
US09/354,711 US6184755B1 (en) | 1999-07-16 | 1999-07-16 | Article comprising a variable inductor |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000213586A Division JP2001076935A (ja) | 1999-07-16 | 2000-07-14 | 可変インダクタを備える物品 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007158360A true JP2007158360A (ja) | 2007-06-21 |
JP4797199B2 JP4797199B2 (ja) | 2011-10-19 |
Family
ID=23394597
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000213586A Pending JP2001076935A (ja) | 1999-07-16 | 2000-07-14 | 可変インダクタを備える物品 |
JP2006353600A Expired - Lifetime JP4797199B2 (ja) | 1999-07-16 | 2006-12-28 | 可変インダクタを備える物品 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000213586A Pending JP2001076935A (ja) | 1999-07-16 | 2000-07-14 | 可変インダクタを備える物品 |
Country Status (4)
Country | Link |
---|---|
US (1) | US6184755B1 (ja) |
EP (1) | EP1069576B1 (ja) |
JP (2) | JP2001076935A (ja) |
DE (1) | DE60042804D1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014160702A (ja) * | 2013-02-19 | 2014-09-04 | Yazaki Corp | 電磁誘導コイル |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3508620B2 (ja) * | 1998-11-26 | 2004-03-22 | 三菱電機株式会社 | 位相補償回路、周波数変換装置およびアクティブフェーズドアレーアンテナ |
US6396677B1 (en) * | 2000-05-17 | 2002-05-28 | Xerox Corporation | Photolithographically-patterned variable capacitor structures and method of making |
US6421607B1 (en) * | 2000-09-22 | 2002-07-16 | Motorola, Inc. | System and method for distributed navigation service |
CA2445464C (en) * | 2001-05-23 | 2008-08-05 | The Board Of Trustees Of The University Of Illinois | Raised on-chip inductor and method of manufacturing same |
US7037298B2 (en) * | 2001-12-20 | 2006-05-02 | The Procter & Gamble Company | Disposable absorbent article having a raised circumferential bank |
US6617947B1 (en) * | 2002-02-27 | 2003-09-09 | Adc Telecommunications, Inc. | Tuning circuit |
JP3754406B2 (ja) * | 2002-09-13 | 2006-03-15 | 富士通株式会社 | 可変インダクタおよびそのインダクタンス調整方法 |
US6831542B2 (en) * | 2003-02-26 | 2004-12-14 | International Business Machines Corporation | Micro-electromechanical inductive switch |
JP2005057270A (ja) * | 2003-08-01 | 2005-03-03 | Stmicroelectronics Sa | 切換え可能なインダクタンス |
US7158767B2 (en) | 2003-10-24 | 2007-01-02 | Cts Corporation | Tuneable frequency translator |
US7417511B2 (en) * | 2004-12-13 | 2008-08-26 | Lexmark International, Inc. | Modulation circuit with integrated microelectro-mechanical system (MEMS) components |
CN101194421B (zh) * | 2005-04-08 | 2010-05-19 | Nxp股份有限公司 | 低电压mems振荡器 |
US7486002B2 (en) * | 2006-03-20 | 2009-02-03 | The United States Of America As Represented By The Secretary Of The Army | Lateral piezoelectric driven highly tunable micro-electromechanical system (MEMS) inductor |
JP4893112B2 (ja) * | 2006-06-03 | 2012-03-07 | 株式会社ニコン | 高周波回路コンポーネント |
US7498802B2 (en) * | 2006-07-10 | 2009-03-03 | 3M Innovative Properties Company | Flexible inductive sensor |
US7948380B2 (en) * | 2006-09-06 | 2011-05-24 | 3M Innovative Properties Company | Spatially distributed remote sensor |
FR2905793B1 (fr) * | 2006-09-12 | 2008-10-17 | Commissariat Energie Atomique | Dispositif magnetique integre controle piezoelectriquement |
US7710232B1 (en) | 2007-05-09 | 2010-05-04 | Sandia Corporation | Microelectromechanical tunable inductor |
TW200909335A (en) * | 2007-08-22 | 2009-03-01 | Sunonwealth Electr Mach Ind Co | Micro actuator |
WO2009072042A2 (en) * | 2007-12-06 | 2009-06-11 | Koninklijke Philips Electronics N.V. | Angular sensor, angle measurement system, base station, garment and band aid or plaster comprising an angular sensor |
US20130270925A1 (en) * | 2010-12-21 | 2013-10-17 | Yazaki Corporation | Power feed system |
US8986125B2 (en) | 2013-03-14 | 2015-03-24 | Valve Corporation | Wearable input device |
US20140327508A1 (en) * | 2013-05-06 | 2014-11-06 | Qualcomm Incorporated | Inductor tunable by a variable magnetic flux density component |
US9583250B2 (en) | 2013-09-03 | 2017-02-28 | The United States Of America As Represented By The Secretary Of The Army | MEMS tunable inductor |
JP2016225577A (ja) * | 2015-06-03 | 2016-12-28 | 船井電機株式会社 | 給電装置および受電装置 |
JP6447405B2 (ja) * | 2015-08-04 | 2019-01-09 | 株式会社村田製作所 | 可変インダクタ |
EP3382678B1 (en) * | 2017-03-27 | 2019-07-31 | Ecole Polytechnique Federale De Lausanne (Epfl) | An electromagnetic actuator |
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-
1999
- 1999-07-16 US US09/354,711 patent/US6184755B1/en not_active Expired - Lifetime
-
2000
- 2000-07-03 DE DE60042804T patent/DE60042804D1/de not_active Expired - Lifetime
- 2000-07-03 EP EP00305571A patent/EP1069576B1/en not_active Expired - Lifetime
- 2000-07-14 JP JP2000213586A patent/JP2001076935A/ja active Pending
-
2006
- 2006-12-28 JP JP2006353600A patent/JP4797199B2/ja not_active Expired - Lifetime
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5225501A (en) * | 1975-08-22 | 1977-02-25 | Nippon Technical Co Ltd | Mu-tuner |
JPS52113348U (ja) * | 1976-02-26 | 1977-08-29 | ||
JPS58147107A (ja) * | 1982-02-26 | 1983-09-01 | Nec Corp | 可変インダクタンス |
JPS61264704A (ja) * | 1985-05-17 | 1986-11-22 | Mitsubishi Electric Corp | 磁気回路と可変インダクタンス素子 |
JPS62120318U (ja) * | 1986-01-22 | 1987-07-30 | ||
JPH02111002A (ja) * | 1988-10-20 | 1990-04-24 | Matsushita Electric Ind Co Ltd | 可変インダクター装置 |
JPH0313U (ja) * | 1989-05-19 | 1991-01-07 | ||
JPH04373108A (ja) * | 1991-06-24 | 1992-12-25 | Nippon Telegr & Teleph Corp <Ntt> | 可変インダクタ |
JPH05159938A (ja) * | 1991-12-02 | 1993-06-25 | Murata Mfg Co Ltd | インダクタンス可変コイル |
JPH06335268A (ja) * | 1993-05-18 | 1994-12-02 | Nippondenso Co Ltd | バイメタル式アクチュエータ及び移動装置 |
JPH0865044A (ja) * | 1994-05-23 | 1996-03-08 | Takeshi Ikeda | 発振器 |
JPH07320942A (ja) * | 1994-05-30 | 1995-12-08 | Nec Corp | 可変インダクタンスコイル装置 |
JPH08204139A (ja) * | 1995-01-21 | 1996-08-09 | Murata Mfg Co Ltd | 可変インダクタンス素子 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014160702A (ja) * | 2013-02-19 | 2014-09-04 | Yazaki Corp | 電磁誘導コイル |
US9978494B2 (en) | 2013-02-19 | 2018-05-22 | Yazaki Corporation | Electromagnetic induction coil |
Also Published As
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JP4797199B2 (ja) | 2011-10-19 |
JP2001076935A (ja) | 2001-03-23 |
EP1069576A1 (en) | 2001-01-17 |
US6184755B1 (en) | 2001-02-06 |
EP1069576B1 (en) | 2009-08-26 |
DE60042804D1 (de) | 2009-10-08 |
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