JP2007142187A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2007142187A JP2007142187A JP2005334420A JP2005334420A JP2007142187A JP 2007142187 A JP2007142187 A JP 2007142187A JP 2005334420 A JP2005334420 A JP 2005334420A JP 2005334420 A JP2005334420 A JP 2005334420A JP 2007142187 A JP2007142187 A JP 2007142187A
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Abstract
【解決手段】 フリップチップ実装される半導体チップ10は、半導体集積回路が形成された主面12に金スタッドバンプ16を含み、該金スタッドバンプ16は、銀(Ag)を含有する。好ましくは、銀の含有率は、17%±2%である。金スタッドバンプ16は、基板20のCu電極22にはんだバンプ24を介して接続される。金スタッドバンプ16に銀を含有させることで、金スタッドバンプ16とCu電極22の接合において、ボイドやクラックの発生を抑制することができる。
【選択図】 図1
Description
12:主面 14:電極パッド
16:金スタッドバンプ 20:基板
22:Cu電極 24:はんだバンプ
26:内部配線 28:外部電極
30:アンダーフィル用樹脂 32:はんだボール
Claims (10)
- フリップチップ実装される半導体チップであって、
半導体集積回路が形成された主面に複数の金スタッドバンプを有し、当該金スタッドバンプが銀(Ag)を含有する、半導体チップ。 - 銀の含有量は、金に対して17%±2%の割合である、請求項1に記載の半導体チップ。
- 金スタッドバンプは、半導体チップの主面に形成された電極パッド上に形成される、請求項1または2に記載の半導体チップ。
- 請求項1ないし3いずれか1つに記載の半導体チップと、半導体チップをフリップチップ実装する基板とを含む半導体装置。
- 半導体チップ上の複数の金スタッドバンプは、基板の対応する複数の導電性領域にはんだにより接続される、請求項4に記載の半導体装置。
- 前記はんだは、鉛フリーである、請求項5に記載の半導体装置。
- 前記はんだは、銀を含む錫合金である、請求項4または5に記載の半導体装置。
- 前記複数の導電性領域は、銅または銅合金のパターンである、請求項5に記載の半導体装置。
- 基板の第1の面に前記複数の導電性領域が形成され、第1の面と対向する第2の面に前記複数の導電性領域と電気的に接続された複数の外部電極が形成されている、請求項4ないし8いずれか1つに記載の半導体装置。
- 半導体チップの主面と基板の第1の面との間にアンダーフィル用樹脂が充填される、請求項4ないし9いずれか1つに記載の半導体装置。
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JP2005334420A JP2007142187A (ja) | 2005-11-18 | 2005-11-18 | 半導体装置 |
US11/559,995 US20070117265A1 (en) | 2005-11-18 | 2006-11-15 | Semiconductor Device with Improved Stud Bump |
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JP2005334420A JP2007142187A (ja) | 2005-11-18 | 2005-11-18 | 半導体装置 |
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JP2011218682A (ja) * | 2010-04-09 | 2011-11-04 | Konica Minolta Holdings Inc | インクジェットヘッド、インクジェットヘッドの製造方法及びインクジェット描画装置 |
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TW200924087A (en) * | 2007-11-19 | 2009-06-01 | Advanced Semiconductor Eng | Chip structure, substrate structure, chip package structure and process thereof |
JP6387522B2 (ja) * | 2014-12-03 | 2018-09-12 | パナソニックIpマネジメント株式会社 | 実装構造体 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10326803A (ja) * | 1997-05-23 | 1998-12-08 | Nippon Steel Corp | 半導体素子用金銀合金細線 |
JP2001274195A (ja) * | 2000-03-28 | 2001-10-05 | Toshiba Corp | 半導体装置及びその製造方法 |
Family Cites Families (2)
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US6376352B1 (en) * | 1998-11-05 | 2002-04-23 | Texas Instruments Incorporated | Stud-cone bump for probe tips used in known good die carriers |
JP2001068621A (ja) * | 1999-06-21 | 2001-03-16 | Shinko Electric Ind Co Ltd | 半導体装置及びその製造方法 |
-
2005
- 2005-11-18 JP JP2005334420A patent/JP2007142187A/ja active Pending
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JPH10326803A (ja) * | 1997-05-23 | 1998-12-08 | Nippon Steel Corp | 半導体素子用金銀合金細線 |
JP2001274195A (ja) * | 2000-03-28 | 2001-10-05 | Toshiba Corp | 半導体装置及びその製造方法 |
Cited By (1)
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JP2011218682A (ja) * | 2010-04-09 | 2011-11-04 | Konica Minolta Holdings Inc | インクジェットヘッド、インクジェットヘッドの製造方法及びインクジェット描画装置 |
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