JP2007088819A5 - - Google Patents

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Publication number
JP2007088819A5
JP2007088819A5 JP2005275190A JP2005275190A JP2007088819A5 JP 2007088819 A5 JP2007088819 A5 JP 2007088819A5 JP 2005275190 A JP2005275190 A JP 2005275190A JP 2005275190 A JP2005275190 A JP 2005275190A JP 2007088819 A5 JP2007088819 A5 JP 2007088819A5
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JP
Japan
Prior art keywords
electrode
film
thin film
piezoelectric
piezoelectric thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2005275190A
Other languages
English (en)
Japanese (ja)
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JP2007088819A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005275190A priority Critical patent/JP2007088819A/ja
Priority claimed from JP2005275190A external-priority patent/JP2007088819A/ja
Publication of JP2007088819A publication Critical patent/JP2007088819A/ja
Publication of JP2007088819A5 publication Critical patent/JP2007088819A5/ja
Withdrawn legal-status Critical Current

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JP2005275190A 2005-09-22 2005-09-22 圧電薄膜振動子 Withdrawn JP2007088819A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005275190A JP2007088819A (ja) 2005-09-22 2005-09-22 圧電薄膜振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005275190A JP2007088819A (ja) 2005-09-22 2005-09-22 圧電薄膜振動子

Publications (2)

Publication Number Publication Date
JP2007088819A JP2007088819A (ja) 2007-04-05
JP2007088819A5 true JP2007088819A5 (https=) 2008-10-16

Family

ID=37975359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005275190A Withdrawn JP2007088819A (ja) 2005-09-22 2005-09-22 圧電薄膜振動子

Country Status (1)

Country Link
JP (1) JP2007088819A (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7982363B2 (en) * 2007-05-14 2011-07-19 Cree, Inc. Bulk acoustic device and method for fabricating
JP5790226B2 (ja) * 2011-07-15 2015-10-07 株式会社村田製作所 圧電薄膜素子の製造方法
US20200021270A1 (en) * 2018-07-11 2020-01-16 Gregory Walker Johnson Diamond nano resonator semi conductor
JP7600973B2 (ja) 2021-12-08 2024-12-17 株式会社Sumco 積層ウェーハ及びその製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10209794A (ja) * 1997-01-21 1998-08-07 Mitsubishi Materials Corp 圧電薄膜共振子
JP2001102902A (ja) * 1999-09-29 2001-04-13 Kyocera Corp 圧電共振子
JP3860698B2 (ja) * 1999-12-27 2006-12-20 京セラ株式会社 圧電共振子
JP4513169B2 (ja) * 2000-05-17 2010-07-28 株式会社村田製作所 圧電フィルタ、通信装置および圧電フィルタの製造方法
JP3953921B2 (ja) * 2002-09-10 2007-08-08 日本プレーテック株式会社 ダイヤモンドｑｃｍの作製方法及びそのダイヤモンドｑｃｍ
JP4581998B2 (ja) * 2003-05-26 2010-11-17 住友電気工業株式会社 ダイヤモンド被覆電極及びその製造方法

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