JP2007088819A5 - - Google Patents

Download PDF

Info

Publication number
JP2007088819A5
JP2007088819A5 JP2005275190A JP2005275190A JP2007088819A5 JP 2007088819 A5 JP2007088819 A5 JP 2007088819A5 JP 2005275190 A JP2005275190 A JP 2005275190A JP 2005275190 A JP2005275190 A JP 2005275190A JP 2007088819 A5 JP2007088819 A5 JP 2007088819A5
Authority
JP
Japan
Prior art keywords
electrode
film
thin film
piezoelectric
piezoelectric thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2005275190A
Other languages
Japanese (ja)
Other versions
JP2007088819A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2005275190A priority Critical patent/JP2007088819A/en
Priority claimed from JP2005275190A external-priority patent/JP2007088819A/en
Publication of JP2007088819A publication Critical patent/JP2007088819A/en
Publication of JP2007088819A5 publication Critical patent/JP2007088819A5/ja
Withdrawn legal-status Critical Current

Links

Claims (5)

第１の電極と、
前記第１の電極上に圧電体層と、
前記圧電体層上に第２の電極と、が積層され、
前記第１の電極と前記第２の電極のうちの少なくとも一方の電極が導電性ダイヤモンドで構成されていることを特徴とする圧電薄膜振動子。 A first electrode;
A piezoelectric layer on the first electrode;
A second electrode is laminated on the piezoelectric layer;
A piezoelectric thin film vibrator , wherein at least one of the first electrode and the second electrode is made of conductive diamond . 第１の電極と、
前記第１の電極上に圧電体層と、
前記圧電体層上に第２の電極と、が積層され、
前記第１の電極と前記第２の電極のうちの少なくとも一方の電極がダイヤモンド膜と金属膜の積層体で構成されていることを特徴とする圧電薄膜振動子。 A first electrode;
A piezoelectric layer on the first electrode;
A second electrode is laminated on the piezoelectric layer;
A piezoelectric thin film vibrator , wherein at least one of the first electrode and the second electrode is formed of a laminate of a diamond film and a metal film . 前記ダイヤモンド膜と金属膜の積層体において、ダイヤモンド膜の膜厚と金属膜の膜厚の比が両者中の音響振動の伝播速度の比の２．５倍以上であることを特徴とする請求項２に記載の圧電薄膜振動子。 The laminate of the diamond film and the metal film is characterized in that the ratio of the film thickness of the diamond film to the film thickness of the metal film is 2.5 times or more the ratio of the propagation speed of acoustic vibrations in both. 2. The piezoelectric thin film vibrator according to 2. 前記積層構造中に酸化シリコン層が含まれることを特徴とする請求項１乃至３のいずれ
か一項に記載の圧電薄膜振動子。 4. The piezoelectric thin film vibrator according to claim 1, wherein a silicon oxide layer is included in the laminated structure. 5. 請求項１乃至４のいずれか一項に記載の圧電薄膜振動子を備えることを特徴とするフィルタ。   A filter comprising the piezoelectric thin film vibrator according to any one of claims 1 to 4.
JP2005275190A 2005-09-22 2005-09-22 Piezoelectric thin film resonator Withdrawn JP2007088819A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005275190A JP2007088819A (en) 2005-09-22 2005-09-22 Piezoelectric thin film resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005275190A JP2007088819A (en) 2005-09-22 2005-09-22 Piezoelectric thin film resonator

Publications (2)

Publication Number Publication Date
JP2007088819A JP2007088819A (en) 2007-04-05
JP2007088819A5 true JP2007088819A5 (en) 2008-10-16

Family

ID=37975359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005275190A Withdrawn JP2007088819A (en) 2005-09-22 2005-09-22 Piezoelectric thin film resonator

Country Status (1)

Country Link
JP (1) JP2007088819A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7982363B2 (en) * 2007-05-14 2011-07-19 Cree, Inc. Bulk acoustic device and method for fabricating
JP5790226B2 (en) * 2011-07-15 2015-10-07 株式会社村田製作所 Method for manufacturing piezoelectric thin film element
US20200021270A1 (en) * 2018-07-11 2020-01-16 Gregory Walker Johnson Diamond nano resonator semi conductor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10209794A (en) * 1997-01-21 1998-08-07 Mitsubishi Materials Corp Piezoelectric thin-film resonator
JP2001102902A (en) * 1999-09-29 2001-04-13 Kyocera Corp Piezoelectric resonator
JP3860698B2 (en) * 1999-12-27 2006-12-20 京セラ株式会社 Piezoelectric resonator
JP4513169B2 (en) * 2000-05-17 2010-07-28 株式会社村田製作所 Piezoelectric filter, communication device, and method of manufacturing piezoelectric filter
JP3953921B2 (en) * 2002-09-10 2007-08-08 日本プレーテック株式会社 Diamond QCM manufacturing method and diamond QCM
KR20060009811A (en) * 2003-05-26 2006-02-01 스미토모덴키고교가부시키가이샤 Diamond-coated electrode and method for producing same

Similar Documents

Publication Publication Date Title
JP6481687B2 (en) Elastic wave device
JP2003125494A5 (en)
JP2010502458A5 (en)
DE60336617D1 (en) Piezoelectric resonator, piezoelectric filter and communication device
WO2009011148A1 (en) Piezoelectric thin film resonant element and circuit component using the same
JP2005518127A5 (en)
JP2010087573A5 (en)
WO2006089640A3 (en) Microphone membrane and microphone comprising the same
JP2005530893A5 (en)
JP2008098974A5 (en)
EP1667322A3 (en) Surface acoustic wave element and manufacturing method thereof
JP2009060479A5 (en)
KR20070111938A (en) Piezoelectric vibrator for regenerating sound, and piezoelectric panel speaker and piezoelectric earphone having the same
EP1689080A3 (en) Film bulk acoustic resonator and a method for manufacturing the same
JP2007088819A5 (en)
JP2009005024A5 (en)
JP2008205888A5 (en)
JP2009005023A5 (en)
JP2006148612A5 (en)
ATE387014T1 (en) PIEZOELECTRIC CERAMIC ELEMENT AND COMPONENTS THEREOF
JP2006121259A5 (en)
JP2007067485A5 (en)
EP1158669A3 (en) Surface acoustic wave device
ATE537604T1 (en) SURFACE WAVE COMPONENT
JP2006024703A5 (en)