JP2008205888A5 - - Google Patents
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- Publication number
- JP2008205888A5 JP2008205888A5 JP2007040432A JP2007040432A JP2008205888A5 JP 2008205888 A5 JP2008205888 A5 JP 2008205888A5 JP 2007040432 A JP2007040432 A JP 2007040432A JP 2007040432 A JP2007040432 A JP 2007040432A JP 2008205888 A5 JP2008205888 A5 JP 2008205888A5
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- substrate
- etching
- vibrating piece
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims 18
- 238000005530 etching Methods 0.000 claims 14
- 238000004519 manufacturing process Methods 0.000 claims 7
- 238000005498 polishing Methods 0.000 claims 3
- 239000010409 thin film Substances 0.000 claims 3
Claims (7)
前記貼合工程の後に前記圧電基板を研磨する研磨工程と、
前記貼合工程の後に前記ベース基板をエッチングするベースエッチング工程と、
前記研磨工程の後に前記圧電基板をエッチングする圧電エッチング工程と、
を含むことを特徴とする圧電振動片の製造方法。 A bonding step of bonding a piezoelectric substrate and a base substrate having a different etching rate from the piezoelectric substrate;
A polishing step of polishing the piezoelectric substrate after the bonding step,
A base etching step of etching the base substrate after the bonding step ;
A piezoelectric etching step of etching the piezoelectric substrate after the polishing step ;
A method for manufacturing a piezoelectric vibrating piece, comprising:
前記圧電エッチング工程は、前記ベース基板の前記一部が前記圧電基板に貼り合わされた状態で、前記圧電基板をエッチングする工程を含む The piezoelectric etching step includes a step of etching the piezoelectric substrate in a state where the part of the base substrate is bonded to the piezoelectric substrate.
ことを特徴とする請求項２に記載の圧電振動片の製造方法。 The method of manufacturing a piezoelectric vibrating piece according to claim 2.
該圧電振動片の振動腕の表面の両側縁にそれぞれ形成され、互いに異極となるようにされた第１の電極と、
該第１の電極の表面に形成した圧電薄膜と、該圧電薄膜を挟んで前記第１の電極と対となるように前記圧電薄膜の表面に形成された第２の電極と、
を有することを特徴とする圧電振動素子。 A piezoelectric vibrating piece manufactured by the method of manufacturing a piezoelectric vibrating piece according to any one of claims 1 to 5 ,
A first electrode formed on each side edge of the surface of the vibrating arm of the piezoelectric vibrating piece and having a different polarity from each other;
A piezoelectric thin film formed on the surface of the first electrode, and a second electrode formed on the surface of the piezoelectric thin film so as to be paired with the first electrode across the piezoelectric thin film;
A piezoelectric vibration element comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007040432A JP5023734B2 (en) | 2007-02-21 | 2007-02-21 | Method for manufacturing piezoelectric vibrating piece and piezoelectric vibrating element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007040432A JP5023734B2 (en) | 2007-02-21 | 2007-02-21 | Method for manufacturing piezoelectric vibrating piece and piezoelectric vibrating element |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008205888A JP2008205888A (en) | 2008-09-04 |
| JP2008205888A5 true JP2008205888A5 (en) | 2010-04-02 |
| JP5023734B2 JP5023734B2 (en) | 2012-09-12 |
Family
ID=39782880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007040432A Expired - Fee Related JP5023734B2 (en) | 2007-02-21 | 2007-02-21 | Method for manufacturing piezoelectric vibrating piece and piezoelectric vibrating element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5023734B2 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010187195A (en) * | 2009-02-12 | 2010-08-26 | Epson Toyocom Corp | Vibrating piece, method for manufacturing the same, and vibrator |
| JP5347546B2 (en) * | 2009-02-12 | 2013-11-20 | セイコーエプソン株式会社 | Vibrating piece, vibrating piece manufacturing method, and vibrator |
| JP5786393B2 (en) * | 2011-03-18 | 2015-09-30 | 株式会社村田製作所 | Quartz device manufacturing method |
| JP6110663B2 (en) * | 2012-12-28 | 2017-04-05 | 京セラクリスタルデバイス株式会社 | Manufacturing method of crystal unit |
| JP6004957B2 (en) * | 2013-01-31 | 2016-10-12 | 京セラクリスタルデバイス株式会社 | Quartz crystal resonator and manufacturing method thereof |
| KR102256902B1 (en) * | 2013-07-25 | 2021-05-28 | 엔지케이 인슐레이터 엘티디 | Composite board and method for making same |
| JP6528878B2 (en) * | 2018-03-22 | 2019-06-12 | セイコーエプソン株式会社 | Electronic device, electronic device and mobile |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5866410A (en) * | 1981-10-16 | 1983-04-20 | Seiko Instr & Electronics Ltd | Tuning fork type flexion crystal oscillator |
| JPH06196963A (en) * | 1992-10-20 | 1994-07-15 | Matsushita Electric Ind Co Ltd | Piezo-electric filter and its production |
| JPH0746072A (en) * | 1993-08-03 | 1995-02-14 | Matsushita Electric Ind Co Ltd | Manufacture of crystal resonator |
| JPH0750438A (en) * | 1993-08-04 | 1995-02-21 | Matsushita Electric Ind Co Ltd | Manufacture of thin plate material |
| JPH10308640A (en) * | 1997-05-07 | 1998-11-17 | Matsushita Electric Ind Co Ltd | Manufacture of piezoelectric device |
| JP3972790B2 (en) * | 2001-11-27 | 2007-09-05 | 松下電器産業株式会社 | Thin film micromechanical resonator and thin film micromechanical resonator gyro |
| JP4316903B2 (en) * | 2003-03-11 | 2009-08-19 | リバーエレテック株式会社 | Flexural vibrator |
| JP4515180B2 (en) * | 2004-07-20 | 2010-07-28 | Ｎｅｃトーキン株式会社 | Tuning fork type piezoelectric vibration gyro device |
| US20060255691A1 (en) * | 2005-03-30 | 2006-11-16 | Takahiro Kuroda | Piezoelectric resonator and manufacturing method thereof |
-
2007
- 2007-02-21 JP JP2007040432A patent/JP5023734B2/en not_active Expired - Fee Related
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